Flange type ring felt heat preservation device for producing single crystal through Czochralski method

Abstract

The utility model discloses a flange type ring felt heat preservation device for producing single crystals by a czochralski method, and particularly relates to the technical field of single crystal production heat preservation, the flange type ring felt heat preservation device mainly comprises a flange ring, a guide cylinder and a rectangular frame, the guide cylinder is positioned on the inner wall of the flange ring and is fixedly connected with the flange ring, the rectangular frame is welded at the bottom end of the inner wall of the guide cylinder, and a separation component is mounted on the inner wall of the rectangular frame; and the separation assembly comprises a screw rotationally mounted on the inner wall of the rectangular frame, a sleeve block slidably connected with the rectangular frame is arranged on the outer wall of the screw, a linkage plate is fixedly connected to one side of the sleeve block, and a linkage ring is fixedly mounted at the top end of the linkage plate. According to the utility model, the separation assembly is adopted, when the thermal insulation ring felt needs to be replaced, the screw rod carries the sleeve block to move upwards under the action of thread transmission force, the extrusion column carries the pressing ring to slide upwards along the outer wall of the guide cylinder and the outer walls of the two guide columns in a guiding manner, and only the damaged single-layer thermal insulation ring felt needs to be replaced in the multiple layers of thermal insulation ring felts; and the replacement and use cost of the ring felt is greatly reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal production and heat preservation, and more specifically, to a flange type ring felt heat preservation device for producing single crystal by Czochralski method. Background Art

[0002] When producing single crystal silicon by the Czochralski method, the flange-type ring felt insulation device has high efficiency in heat preservation. The main function of the insulation device is to reduce heat loss. During the production process of single crystal silicon, it is necessary to maintain a high temperature environment in the furnace to promote the melting of silicon raw materials and the formation of single crystals. The flange-type ring felt insulation device can effectively reduce the transfer of heat to the outside world due to its good heat preservation performance, thereby maintaining the stability of the temperature in the furnace and ensuring the production quality of single crystal silicon.

[0003] In the existing public documents, the patent publication number CN202610393U discloses a sapphire crystal growth furnace insulation device, which is installed on the electrode protection sleeve to cover the gap between the graphite open ring and the lower insulation layer. The insulation device is installed between the thermal field open ring and the lower insulation layer or at the edge of the joint, which can reduce the energy loss caused by thermal radiation, improve the intrinsic quality of the sapphire crystal, and improve the material basis for the production of larger sapphire crystals. However, the insulation device has the following defects:

[0004] When the Czochralski method is used to produce single crystals, the ring felt insulation device is integrated. If a single part is damaged, the entire ring felt insulation device needs to be replaced, which greatly increases the replacement and use cost of the ring felt. Therefore, a flange-type ring felt insulation device is needed for producing single crystals by the Czochralski method. Utility Model Content

[0005] In order to overcome the above-mentioned defects of the prior art, the utility model provides a flange-type ring felt insulation device for producing single crystals by the Czochralski method.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a flange-type ring felt insulation device for producing single crystals by a Czochralski method, comprising a flange ring, a guide cylinder and a rectangular frame, wherein the guide cylinder is located on the inner wall of the flange ring and is fixedly connected, the rectangular frame is welded to the bottom end of the inner wall of the guide cylinder, and a separation component is installed on the inner wall of the rectangular frame;

[0007] The separation component includes a screw rotatably mounted on the inner wall of the rectangular frame, and the outer wall of the screw is provided with a sleeve block slidably connected to the rectangular frame, one side of the sleeve block is fixedly connected to a linkage plate, and a linkage ring is fixedly mounted on the top of the linkage plate; a plurality of extrusion columns are installed at the bottom end of the linkage ring and on one side of the linkage plate, and the plurality of extrusion columns are arranged equidistantly in a circular ring, and a pressure ring is connected to the bottom end of the extrusion column, the rectangular frame is rotatably connected to the screw, the outer wall of the sleeve block and the inner wall of the rectangular frame are polished, and the bottom ends of the plurality of extrusion columns are fixed to the pressure ring The flange ring is connected, and the cross-sectional shape of the pressure ring is a circular ring. A plurality of insulation ring felts are stacked in sequence from bottom to top on the flange ring. The inner walls of the plurality of insulation ring felts are slidably connected to the outer wall of the guide cylinder. The inner wall of the flange ring is fixedly installed with two guide columns on one side of the guide cylinder. The two guide columns are arranged equidistantly in a circular arc. An inner ring is fixedly installed on the inner wall of the flange ring near the center point of the circle. The cross-sectional shape of the inner ring is a circular ring, and the inner wall of the inner ring is polished and ground. A rotating cap fixedly connected to the top end of the screw is provided above the rectangular frame.

[0008] When the technical solution is used, multiple insulation ring felts are wrapped around the outer wall of the inner ring at the same time, and the outer wall of the inner ring is wrapped and insulated. When the insulation ring felt needs to be replaced, the rotating cap is rotated, and the screw carries the sleeve block to move upward under the action of the thread transmission force. The linkage plate drives the linkage ring to move the three extrusion columns upward synchronously, and the extrusion column carries the pressure ring to slide upward along the outer wall of the guide tube and the outer walls of the two guide columns, pulling up the insulation ring felt, and the insulation ring felt is pulled upward and removed from the guide tube and the outer walls of the two guide columns. The insulation ring felt is replaced in layers, and only the damaged single layer of insulation ring felt needs to be replaced among the multiple layers of insulation ring felt.

[0009] Preferably, both sides of the outer wall of the flange ring are fixedly connected with a positioning bottom block, and a guide assembly is installed on the top of the positioning bottom block; the guide assembly includes a positioning bar installed on the top of the positioning bottom block; the guide assembly also includes a first guide bar, a second guide bar and a positioning top block, the first guide bar is located on one side of the positioning bar and is fixedly connected to the top of the positioning bottom block, the second guide bar is located on the other side of the positioning bar and is fixedly connected to the top of the positioning bottom block, the positioning top block is fixedly installed on the top of the positioning bar, and the second guide bar and the top of the first guide bar are both fixedly connected to the bottom end of the positioning top block.

[0010] When the technical solution is used, the old insulation ring felt can be moved vertically along one side of the positioning bottom block, and the old insulation ring felt can also be moved vertically upward along the positioning top block. The installed new insulation ring felt can be positioned between the two positioning top blocks, and the new insulation ring felt is positioned and moved downward along the positioning top block, and the new insulation ring felt is positioned and moved downward along the positioning strip, the first guide strip and the second guide strip, thereby performing a vertical positioning operation on the new insulation ring felt.

[0011] Technical effects and advantages of the utility model:

[0012] 1. The utility model adopts a separation component. When the insulation ring felt needs to be replaced, the screw carries the sleeve block to move upward under the action of the thread transmission force, the sleeve block carries the linkage plate to move upward synchronously, the extrusion column carries the pressure ring to slide upward along the outer wall of the guide cylinder and the outer walls of the two guide columns, and the insulation ring felt is pulled upward from the guide cylinder and the outer walls of the two guide columns to be removed. Only the damaged single-layer insulation ring felt needs to be replaced among the multi-layer insulation ring felts, which greatly reduces the replacement and use cost of the ring felts;

[0013] 2. The utility model adopts a guide component to enable the old insulation ring felt to be moved vertically along one side of the positioning bottom block, and can realize vertical guided upward movement of multiple old insulation ring felts. The new insulation ring felt can be positioned between the two positioning top blocks, and the new insulation ring felt is positioned and moved downward along the positioning top block. The insulation ring felt is positioned and moved downward along the positioning strip, the first guide strip and the second guide strip, and the positioning of the insulation ring felt is faster. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 The utility model is a schematic diagram of the main structure of a flange-type ring felt insulation device for producing single crystals by the Czochralski method.

[0015] Figure 2 The utility model is a bottom view structural schematic diagram of a flange type ring felt insulation device for producing single crystals by the Czochralski method.

[0016] Figure 3 The utility model is a schematic diagram of the vertical cross-section structure of a flange-type ring felt insulation device for producing single crystals by the Czochralski method.

[0017] Figure 4 It is a schematic diagram of the local structure of the vertical section of the sleeve block and the rectangular frame of the utility model.

[0018] Figure 5 It is a schematic diagram of the local structure of the connection between the extrusion column and the pressure ring of the utility model.

[0019] Figure 6 It is a schematic diagram of the partial structure of the connection between the positioning bottom block and the positioning strip of the utility model.

[0020] The accompanying drawings are marked as follows: 1. flange ring; 2. guide cylinder; 3. rectangular frame; 4. screw; 5. sleeve block; 6. linkage plate; 7. linkage ring; 8. extrusion column; 9. pressure ring; 10. insulation ring felt; 11. guide column; 12. inner ring; 13. rotating cap; 14. positioning bottom block; 15. positioning strip; 16. first guide strip; 17. second guide strip; 18. positioning top block. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0022] As attached Figure 1-6 A flanged ring felt insulation device for producing single crystals by the Czochralski method is shown. The flanged ring felt insulation device for producing single crystals by the Czochralski method is provided with a separation component. The setting of the separation component can replace only the damaged single-layer insulation ring felt 10 in the multi-layer insulation ring felt 10, thereby greatly reducing the replacement and use cost of the ring felt. The specific structure of the separation component is set as follows:

[0023] In this technical solution, as shown in the attached Figure 1-4 As shown, the separation assembly includes a screw rod 4 rotatably mounted on the inner wall of the rectangular frame 3, and the outer wall of the screw rod 4 is provided with a sleeve block 5 slidably connected to the rectangular frame 3, one side of the sleeve block 5 is fixedly connected to a linkage plate 6, and a linkage ring 7 is fixedly installed on the top of the linkage plate 6; a plurality of extrusion columns 8 are installed at the bottom end of the linkage ring 7 and located on one side of the linkage plate 6, and the plurality of extrusion columns 8 are equidistantly distributed in a circular ring, and a pressure ring 9 is connected to the bottom end of the extrusion column 8;

[0024] The method for using the flange type ring felt insulation device for producing single crystal by the CZ method in the technical solution is that multiple insulation ring felts 10 are located at the top of the flange ring 1, and multiple insulation ring felts 10 are wrapped on the outer wall of the inner ring 12 at the same time, so that the outer wall of the inner ring 12 is subjected to wrapped insulation treatment. When the insulation ring felt 10 needs to be replaced, the rotating cap 13 is rotated, and the rotating cap 13 carries the screw 4 to rotate inside the rectangular frame 3. The screw 4 carries the sleeve block 5 to move upward under the action of the thread transmission force, and the sleeve block 5 carries the linkage plate 6 to move upward synchronously, and the linkage plate 6 drives the linkage ring 7 to make the three The extrusion columns 8 move up synchronously, and the extrusion columns 8 carry the pressure ring 9 to slide up along the outer wall of the guide cylinder 2 and the outer wall of the two guide columns 11. When the sleeve block 5 moves up to the top position of the inner wall of the rectangular frame 3, the insulation ring felt 10 is pulled up and removed from the outer walls of the guide cylinder 2 and the two guide columns 11. The damaged or aged insulation ring felt 10 is replaced, and the insulation ring felt 10 is replaced in layers. Only the damaged single-layer insulation ring felt 10 needs to be replaced among the multi-layer insulation ring felts 10. In this way, the ring-type design only needs to replace a single layer, which is more cost-effective.

[0025] In this technical solution, as shown in the attached Figure 1-4As shown, a plurality of heat-insulating ring felts 10 are sequentially stacked from bottom to top on the flange ring 1, and the inner walls of the plurality of heat-insulating ring felts 10 are slidably connected to the outer wall of the guide cylinder 2, so that the plurality of heat-insulating ring felts 10 are simultaneously wrapped on the outer wall of the inner ring 12, and can perform heat-insulating operation on the outer wall of the inner ring 12. The inner wall of the flange ring 1 and one side of the guide cylinder 2 are fixedly installed with two guide posts 11, and the two guide posts 11 are arranged in an arc with equal distance, so that the guide posts 11 can heat the plurality of heat-insulating ring felts 10. It plays a vertical guiding role and increases the stability of the thermal insulation ring felt 10 during installation. An inner ring 12 is fixedly installed on the inner wall of the flange ring 1 and close to its center point. The cross-sectional shape of the inner ring 12 is circular, and the inner wall of the inner ring 12 is polished and ground. A rotating cap 13 fixedly connected to the top of the screw 4 is provided above the rectangular frame 3, so that multiple thermal insulation ring felts 10 can be wrapped around the outer wall of the inner ring 12 at the same time, and the outer wall of the inner ring 12 can be wrapped and insulated to increase the thermal insulation function of the outer wall of the inner ring 12.

[0026] In this technical solution, as shown in the attached Figure 1-6 As shown, both sides of the outer wall of the flange ring 1 are fixedly connected with a positioning bottom block 14, and a guide assembly is installed on the top of the positioning bottom block 14; the guide assembly includes a positioning bar 15 installed on the top of the positioning bottom block 14; the guide assembly also includes a first guide bar 16, a second guide bar 17 and a positioning top block 18, the first guide bar 16 is located on one side of the positioning bar 15 and is fixedly connected to the top of the positioning bottom block 14, the second guide bar 17 is located on the other side of the positioning bar 15 and is fixedly connected to the top of the positioning bottom block 14, the positioning top block 18 is fixedly installed on the top of the positioning bar 15, and the tops of the second guide bar 17 and the first guide bar 16 are fixedly connected to the bottom end of the positioning top block 18;

[0027] According to the upper structure, when the old insulation ring felt 10 is in use, when the old insulation ring felt 10 moves vertically, the old insulation ring felt 10 can realize vertical movement along one side of the positioning bottom block 14, and the old insulation ring felt 10 can move vertically along the first guide bar 16, the positioning bar 15 and the second guide bar 17, and the old insulation ring felt 10 can also realize vertical upward movement along the positioning top block 18, and multiple old insulation ring felts 10 can be vertically guided upward. When the new insulation ring felt 10 is installed, it can be positioned between the two positioning top blocks 18, the new insulation ring felt 10 is positioned and moved downward along the positioning top block 18, the new insulation ring felt 10 is positioned and moved downward along the positioning bar 15, the first guide bar 16 and the second guide bar 17, and the new insulation ring felt 10 is finally positioned to the position of the positioning bottom block 14, which can perform a vertical positioning operation on the new insulation ring felt 10.

[0028] The contents not described in detail in the specification belong to the prior art known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited, and conventional equipment can be used. In this technical solution, the electrical control components not mentioned are not shown in the figure because they belong to the prior art and will not be described here.

[0029] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A flange-type ring felt insulation device for producing single crystals by a Czochralski method, comprising a flange ring (1), a guide cylinder (2) and a rectangular frame (3), wherein the guide cylinder (2) is located on the inner wall of the flange ring (1) and is fixedly connected thereto, and the rectangular frame (3) is welded to the bottom end of the inner wall of the guide cylinder (2), characterized in that: A separation component is installed on the inner wall of the rectangular frame (3); The separation assembly comprises a screw (4) rotatably mounted on the inner wall of the rectangular frame (3), and the outer wall of the screw (4) is provided with a sleeve (5) slidably connected to the rectangular frame (3), one side of the sleeve (5) is fixedly connected to a linkage plate (6), and a linkage ring (7) is fixedly mounted on the top of the linkage plate (6); A plurality of extrusion columns (8) are installed at the bottom end of the linkage ring (7) and located on one side of the linkage plate (6). The plurality of extrusion columns (8) are arranged in a circular ring at equal intervals, and the bottom ends of the extrusion columns (8) are connected to a pressure ring (9).

2. A flange-type ring felt heat preservation device for producing single crystals by the Czochralski method according to claim 1, characterized in that: The rectangular frame (3) is rotatably connected to the screw rod (4), and the outer wall of the sleeve block (5) and the inner wall of the rectangular frame (3) are polished and ground.

3. The flange-type ring felt insulation device for producing single crystals by the Czochralski method according to claim 1 is characterized in that: The bottom ends of the plurality of extrusion columns (8) are fixedly connected to a pressure ring (9), and the cross-sectional shape of the pressure ring (9) is a circular ring.

4. The flange-type ring felt insulation device for producing single crystals by the Czochralski method according to claim 1 is characterized in that: A plurality of thermal insulation ring felts (10) are stacked in sequence from bottom to top on the flange ring (1), and the inner walls of the plurality of thermal insulation ring felts (10) are all slidably connected to the outer wall of the guide cylinder (2).

5. The flange-type ring felt heat preservation device for producing single crystals by the Czochralski method according to claim 1 is characterized in that: Two guide posts (11) are fixedly mounted on the inner wall of the flange ring (1) and located on one side of the guide cylinder (2), and the two guide posts (11) are arranged in an arc at equal distances.

6. The flange-type ring felt insulation device for producing single crystals by the Czochralski method according to claim 1 is characterized in that: An inner ring (12) is fixedly mounted on the inner wall of the flange ring (1) and close to the center point thereof, the cross-sectional shape of the inner ring (12) is circular, and the inner wall of the inner ring (12) is polished; A rotating cap (13) fixedly connected to the top end of the screw rod (4) is provided above the rectangular frame (3).

7. The flange-type ring felt heat preservation device for producing single crystals by the Czochralski method according to claim 1 is characterized in that: Both sides of the outer wall of the flange ring (1) are fixedly connected with positioning bottom blocks (14), and the top of the positioning bottom block (14) is installed with a guide component; The guide assembly comprises a positioning bar (15) mounted on the top of the positioning bottom block (14); The guide assembly further comprises a first guide bar (16), a second guide bar (17) and a positioning top block (18); the first guide bar (16) is located on one side of the positioning bar (15) and is fixedly connected to the top of the positioning bottom block (14); the second guide bar (17) is located on the other side of the positioning bar (15) and is fixedly connected to the top of the positioning bottom block (14); the positioning top block (18) is fixedly mounted on the top of the positioning bar (15); and the tops of the second guide bar (17) and the first guide bar (16) are both fixedly connected to the bottom of the positioning top block (18).

Images