Clamping jaw probe mechanism for first workpiece detection

Abstract

The utility model belongs to the technical field of semiconductor detection, and particularly discloses a clamping jaw probe mechanism for first workpiece detection, which comprises a servo electric jaw, an enclasping frame is arranged on the outer surface of the servo electric jaw, a clamping jaw frame is detachably mounted at the bottom of the servo electric jaw, a first positioning pin is arranged at the top of the clamping jaw frame, and a second positioning pin is arranged at the bottom of the clamping jaw frame. A tungsten steel needle is arranged on the inner side of the clamping jaw frame through a lifting mechanism, a mounting frame is fixedly connected to the outer surface of the clamping jaw frame, and a pressure sensor is arranged at the bottom of the mounting frame. According to the clamping jaw probe mechanism for first workpiece detection, the pressure sensor is used for accurately monitoring the downward pressing force of the tungsten steel needle on the circuit board, so that the test result deviation caused by too large or too small downward pressing force of the tungsten steel needle can be eliminated, the test accuracy and reliability are improved, the force is ensured to be proper in the test process, and the test efficiency is improved. Effective contact can be guaranteed, excessive pressure is avoided, and damage to components or a circuit board is avoided.

Description

Technical Field

[0001] The present application relates to the field of semiconductor detection technology, and in particular to a clamping probe mechanism for first-article detection. Background Art

[0002] First article inspection refers to an important step in the semiconductor production process, which is used to verify the quality and reliability of the first batch of semiconductor products produced. It is usually carried out before mass production to ensure that the products meet the specifications and have consistent performance.

[0003] At present, in the process of testing components on circuit boards, the inductance, capacitance, resistance and impedance of the components are tested by using probes under the action of a bridge. However, the force of the probe pressing down on the circuit board during the testing process is difficult to control. Too much or too little pressure from the probe will lead to deviations in the test results, and may even cause mechanical pressure on the components, solder joints or circuits on the circuit board and damage them. Utility Model Content

[0004] In view of this, the purpose of the present invention is to solve the shortcomings existing in the background technology and to propose a clamping probe mechanism for first-piece inspection to solve the problems existing in the prior art.

[0005] To achieve the above objectives, the utility model provides a clamping probe mechanism for first-piece inspection, comprising a servo electric claw, a clamping frame is provided on the outer surface of the servo electric claw, a clamping frame is detachably installed on the bottom of the servo electric claw, a first positioning pin is provided on the top of the clamping frame, a tungsten steel needle is provided on the inner side of the clamping frame through a lifting mechanism, a mounting frame is fixedly connected to the outer surface of the clamping frame, a pressure sensor is provided on the bottom of the mounting frame, the clamping frame can be stably connected to the bottom of the servo electric claw through the first positioning pin, and can be flexibly disassembled according to needs.

[0006] Preferably, the lifting mechanism includes a lifting rail fixedly mounted on the inner side of the clamping jaw frame, and a pad is slidably connected to the outer surface of the lifting rail. The tungsten steel needle can be moved by the lifting mechanism so that it rests on the circuit board under the action of the compression spring to detect components.

[0007] Preferably, a fixing seat is fixedly connected to the top of the cushion block, and a mounting plate is detachably mounted on the outer surface of the cushion block.

[0008] Preferably, a guide shaft is fixedly connected to the top of the inner wall of the clamping jaw frame, and a compression spring is movablely sleeved on the outer surface of the guide shaft.

[0009] Preferably, a second positioning pin is provided on the cushion block, and the second positioning pin passes through the mounting plate and is connected to the cushion block. The second positioning pin can stably mount the mounting plate on the cushion block and can be flexibly disassembled according to needs.

[0010] Preferably, a tungsten steel needle is provided on the mounting plate, and an anti-collision block is fixedly connected to the outer surface of the mounting plate.

[0011] Compared with the prior art, the utility model has the following beneficial effects:

[0012] 1. The clamping probe mechanism used for first-article inspection uses a pressure sensor to accurately monitor the pressure of the tungsten steel needle on the circuit board, which can eliminate the test result deviation caused by too much or too little pressure of the tungsten steel needle, improve the accuracy and reliability of the test, and ensure that the force is just right during the test, which can ensure effective contact without excessive pressure to avoid damage to components or circuit boards.

[0013] 2. The gripper probe mechanism used for first-article inspection, when the tungsten steel needle is against the circuit board during the first-article inspection, the compression deformation of the spring can ensure that the downward pressure of the tungsten steel needle gradually increases during the contact with the components on the circuit board, avoiding the risk of damage caused by sudden application of excessive pressure and increasing the safety and stability of operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the overall structure of this application;

[0015] Figure 2 This is a schematic diagram of the surface structure of the clamping frame of this application;

[0016] Figure 3 This is a schematic structural diagram of another viewing angle of the surface of the clamping jaw frame of this application;

[0017] Figure 4 This is a schematic diagram of the surface structure of the pad block in this application.

[0018] Among them: 1. Servo electric claw; 2. Clamping frame; 3. Clamping claw frame; 4. First positioning pin; 5. Lifting rail; 6. Pad; 7. Fixed seat; 8. Guide shaft; 9. Compression spring; 10. Mounting plate; 11. Second positioning pin; 12. Tungsten steel needle; 13. Anti-collision block; 14. Mounting frame; 15. Pressure sensor. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0020] See also Figure 1-4A clamping probe mechanism for first-piece inspection includes a servo electric claw 1, a clamping frame 2 is arranged on the outer surface of the servo electric claw 1, a clamping frame 3 is detachably mounted on the bottom of the servo electric claw 1, a first positioning pin 4 is arranged on the top of the clamping frame 3, a tungsten steel needle 12 is arranged on the inner side of the clamping frame 3 through a lifting mechanism, a mounting frame 14 is fixedly connected to the outer surface of the clamping frame 3, and a pressure sensor 15 is arranged on the bottom of the mounting frame 14.

[0021] Through the above technical solution, during use, the device can use the lifting mechanism to make the tungsten steel needle 12 press against the circuit board under the action of the compression spring 9 during the downward movement of the tungsten steel needle 12. In this process, the extrusion force between the pressure sensor 15 and the anti-collision block 13 can be used to accurately control the detection downward pressure of the tungsten steel needle 12.

[0022] Specifically, the lifting mechanism includes a lifting rail 5 fixedly installed on the inner side of the clamping claw frame 3, and a cushion block 6 is slidably connected to the outer surface of the lifting rail 5.

[0023] Through the above technical solution, the lifting rail 5 can drive the cushion block 6 to move up and down, and the tungsten steel needle 12 below can move synchronously therewith.

[0024] Specifically, the top of the cushion block 6 is fixedly connected with a fixing seat 7 , and the outer surface of the cushion block 6 is detachably mounted with a mounting plate 10 .

[0025] Through the above technical solution, the mounting plate 10 can be disassembled and assembled through the second positioning pin 11, and the tungsten steel needle 12 can be replaced together.

[0026] Specifically, a guide shaft 8 is fixedly connected to the top of the inner wall of the clamping jaw frame 3 , and a compression spring 9 is movably sleeved on the outer surface of the guide shaft 8 .

[0027] Through the above technical solution, when the fixing seat 7 moves upward, it will squeeze the compression spring 9, and at the same time, the guide shaft 8 will further penetrate into the fixing seat 7.

[0028] Specifically, a second positioning pin 11 is provided on the cushion block 6 , and the second positioning pin 11 passes through the mounting plate 10 and is connected to the cushion block 6 .

[0029] Through the above technical solution, the second positioning pin 11 is inserted into the cushion block 6 after passing through the mounting plate 10, so that the mounting plate 10 can be quickly installed.

[0030] Specifically, a tungsten steel needle 12 is provided on the mounting plate 10 , and an anti-collision block 13 is fixedly connected to the outer surface of the mounting plate 10 .

[0031] Through the above technical solution, when the tungsten steel needle 12 moves up and down synchronously with the mounting plate 10 , the anti-collision block 13 will also move up and down synchronously. During this process, the anti-collision block 13 can be against the pressure sensor 15 .

[0032] Working principle: During the detection of components on the circuit board, the device connects the servo electric claw 1 to the corresponding position through the clamping frame 2, and detects the inductance, capacitance, resistance and impedance of the components through the probe (i.e. tungsten steel needle 12) under the action of the bridge. During this process, the servo electric claw 1 opens, closes and rotates itself to drive the tungsten steel needle 12 (hereinafter referred to as the probe) below to move, that is, the two groups of probes can rotate in a circle along the bottom of the servo electric claw 1, and the two groups of probes can move away from or close to each other. During the first piece detection, when the probe moves down to contact the components on the circuit board, the pad 6 will move along the lifting rail 5. The surface moves up, thereby linking the fixing seat 7 to move up synchronously, and gradually squeezing the compression spring 9, so that the guide shaft 8 further penetrates into the fixing seat 7. During this process, the anti-collision block 13 will press against the pressure sensor 15 with different forces, so that the force of the probe pressing against the circuit board can be accurately controlled by the pressure sensor 15. The pressure sensor 15 is used to accurately monitor the downward pressure of the probe on the circuit board to ensure that the force is just right during the test process. The downward pressure of the probe is controlled, avoiding the risk of component damage caused by excessive pressure, extending the service life of components, and reducing the cost of maintenance and replacement.

[0033] Although the embodiments of the present application have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present application, and that the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A gripper probe mechanism for first-article inspection, comprising a servo electric gripper (1), characterized in that: The outer surface of the servo electric gripper (1) is provided with a clamping frame (2), the bottom of the servo electric gripper (1) is detachably provided with a clamping frame (3), the top of the clamping frame (3) is provided with a first positioning pin (4), the inner side of the clamping frame (3) is provided with a tungsten steel needle (12) through a lifting mechanism, the outer surface of the clamping frame (3) is fixedly connected with a mounting frame (14), and the bottom of the mounting frame (14) is provided with a pressure sensor (15).

2. A gripper probe mechanism for first-article inspection according to claim 1, characterized in that: The lifting mechanism comprises a lifting rail (5) fixedly mounted on the inner side of the clamping claw frame (3), and a cushion block (6) is slidably connected to the outer surface of the lifting rail (5).

3. A gripper probe mechanism for first-article inspection according to claim 2, characterized in that: The top of the cushion block (6) is fixedly connected to a fixing seat (7), and the outer surface of the cushion block (6) is detachably mounted with a mounting plate (10).

4. A gripper probe mechanism for first-article inspection according to claim 1, characterized in that: A guide shaft (8) is fixedly connected to the top of the inner wall of the clamping jaw frame (3), and a compression spring (9) is movably sleeved on the outer surface of the guide shaft (8).

5. A gripper probe mechanism for first-article inspection according to claim 3, characterized in that: The cushion block (6) is provided with a second positioning pin (11), and the second positioning pin (11) passes through the mounting plate (10) and is connected to the cushion block (6).

6. A gripper probe mechanism for first-article inspection according to claim 3, characterized in that: A tungsten steel needle (12) is provided on the mounting plate (10), and an anti-collision block (13) is fixedly connected to the outer surface of the mounting plate (10).

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