Cleaning device, exhaust system and photovoltaic material processing equipment
By designing a cleaning device for photovoltaic material processing equipment, using steam or water mist to dissolve and take away boron oxide pollutants in the diaphragm pump, the problem of difficulty in cleaning the diaphragm pump is solved, and efficient pollutant cleaning and protection of the diaphragm pump are achieved.
Patent Information
- Application Number
- CN202422005138.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-16
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2034-08-16
AI Technical Summary
During the boron diffusion of photovoltaic materials, the diaphragm of the diaphragm pump is prone to adhere to pollutants such as boron oxide, which makes it difficult to clean.
A cleaning device is designed, including cleaning media supply components, providing cleaning media to the diaphragm pump with a steam or water mist generator, dissolving and removing contaminants. The device also includes an absorbing assembly for absorbing discharged contaminants and improving the dissolution efficiency of the contaminants by heating and gas-liquid mixing assembly.
Effectively clean the pollutants in the diaphragm pump, improve the cleaning efficiency of the diaphragm pump, reduce the risk of damage to the diaphragm pump components, and avoid secondary pollution.
Smart Images
Figure CN222910210U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of photovoltaic manufacturing equipment, and particularly to a cleaning device, an exhaust system, and a photovoltaic material processing equipment. Background Art
[0002] During the boron diffusion process of photovoltaic materials, a diaphragm pump is generally used as a vacuum pump to extract the tail gas in the reaction furnace. Therefore, a layer of pollutants such as boron oxide will adhere to the diaphragm of the diaphragm pump, resulting in the problem of difficult cleaning of the diaphragm pump. Summary of the Utility Model
[0003] In view of this, the present application provides a cleaning device for cleaning the diaphragm pump.
[0004] The present application provides a cleaning device, including: a cleaning medium supply component. The cleaning medium supply component includes an output end, and the output end is communicated with the suction end of the diaphragm pump. Among them, the cleaning medium supply component includes a steam generator or a water mist generator. The steam generator is configured to provide steam to the diaphragm pump, and the water mist generator is configured to provide water mist to the diaphragm pump. The steam or water mist is used to dissolve the pollutants in the diaphragm pump.
[0005] In the above embodiment, when the diaphragm pump works, it sucks and discharges the steam provided by the steam generator or sucks and discharges the water mist provided by the water mist generator, so that the steam or water mist dissolves and takes away the boron oxide in the diaphragm pump, thereby achieving the effect of cleaning the diaphragm pump.
[0006] In some embodiments, it further includes an absorption component. The absorption component is used to communicate with the discharge end of the diaphragm pump and absorb the pollutants in the steam or water mist discharged by the diaphragm pump.
[0007] In some embodiments, the absorption component includes a water tank. The water tank is communicated with the discharge end of the diaphragm pump and is used to dissolve the pollutants in the steam or water mist discharged by the diaphragm pump. The water tank is provided with an air inlet, and the air inlet is used to communicate with the discharge end of the diaphragm pump. The height of the air inlet is lower than the liquid level height in the water tank.
[0008] In some embodiments, the absorption component further includes a heating unit. The heating unit is arranged on the water tank and is used to heat the water in the water tank.
[0009] In some embodiments, the cleaning device further includes a gas-liquid mixing component. The gas-liquid mixing component is arranged below the liquid level of the water tank. The steam or water mist sequentially passes through the air inlet and the gas-liquid mixing component and enters the water tank. The gas-liquid mixing component is used to increase the contact area between the steam and the water in the water tank, or to increase the contact area between the water mist and the water in the water tank.
[0010] In some embodiments, the absorption component further includes a detection component. The detection component is arranged on the water tank and is used to detect the water level in the water tank.
[0011] In some embodiments, the cleaning device further includes a nozzle, and the nozzle is communicated with the output end of the steam generator. When the steam generator starts to work but does not generate steam, the steam generator is configured to output hot water to the nozzle, and the nozzle is configured to spray hot water into the first exhaust pipe communicated with the discharge end of the diaphragm pump.
[0012] In some embodiments, the water mist generator has two input ends, one input end is used to connect with an external tap water pipe or a water storage tank, and the other input end is used to connect with an external high-pressure gas source.
[0013] An exhaust system includes a diaphragm pump, a first exhaust pipe and the above-mentioned cleaning device. The suction end of the diaphragm pump is configured to be detachably connected to the steam generator of the cleaning device, the water mist generator of the cleaning device or an external reaction furnace. The first exhaust pipe is configured to be communicated with the discharge end of at least one diaphragm pump.
[0014] A photovoltaic material processing device includes a reaction chamber and the above-mentioned exhaust system, and each reaction chamber is connected to at least one diaphragm pump. Description of the Drawings
[0015] Figure 1 It is a schematic diagram of a photovoltaic material processing device provided by an embodiment of the present application.
[0016] Figure 2 It is Figure 1 a schematic diagram of the exhaust system including a steam generator in a cleaning state.
[0017] Figure 3 It is Figure 2 an exploded schematic diagram of the first exhaust pipe, the nozzle and the water tank in
[0018] Figure 4 It is Figure 1 a schematic diagram of the exhaust system including a water mist generator in a cleaning state.
[0019] Description of the Main Component Symbols
[0020] Photovoltaic material processing device 100
[0021] Exhaust system 10
[0022] Cleaning device 11
[0023] Steam generator 111
[0024] Absorption component 112
[0025] Water tank 1121
[0026] Air inlet 11211
[0027] Drain outlet 11212
[0028] Gas outlet 11213
[0029] Second exhaust pipe 11214
[0030] Detection component 11215
[0031] Gas-liquid mixing component 113
[0032] Nozzle 114
[0033] Heating unit 115
[0034] Electrode 1151
[0035] Water mist generator 116
[0036] Water source 1161
[0037] High-pressure gas source 1162
[0038] Diaphragm pump 12
[0039] First exhaust pipe 13
[0040] Connection port 131
[0041] First end 132
[0042] Second end 133
[0043] Reaction chamber 20 Specific implementation manner
[0044] Next, the technical solutions in the embodiments of the present application will be described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.
[0045] It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be an intermediate component at the same time. When a component is considered to be "provided on" another component, it can be directly provided on the other component or there may be an intermediate component at the same time. The terms "top", "upper", "lower", "front", "rear" and similar expressions used herein are only for the purpose of illustration.
[0046] The terms "first", "second", etc. are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity, specific order or primary-secondary relationship of the indicated technical features.
[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0048] Some embodiments of this application will be described below in conjunction with the accompanying drawings. In the case of no conflict, the following embodiments and the features in the embodiments can be combined with each other.
[0049] In some embodiments, please refer to Figure 1 and Figure 2 , this application discloses a photovoltaic material processing device 100, which includes: a reaction chamber 20 and an exhaust system 10. The exhaust system 10 includes a diaphragm pump 12 and a first exhaust pipe 13. The number of reaction chambers 20 is one or more than one. Each reaction chamber 20 is connected to the suction end (not marked) of at least one diaphragm pump 12. A plurality of connection ports 131 are provided in the middle of the first exhaust pipe 13, and one connection port 131 is connected to the discharge end (not marked) of one diaphragm pump 12. During operation, a photovoltaic material (not shown) is placed in the reaction chamber 20, and the reaction chamber 20 processes the photovoltaic material and generates tail gas at the same time. The diaphragm pump 12 sucks the tail gas in the reaction chamber 20 and discharges it to the first exhaust pipe 13, so as to discharge the tail gas to an external tail gas treatment device (not shown) through the first exhaust pipe 13, so that the reaction chamber 20 can continuously process the photovoltaic material.
[0050] In some embodiments, the sheet material is a photovoltaic material such as a silicon wafer or a solar cell.
[0051] In some embodiments, the reaction chamber 20 is a reaction furnace or a heating furnace.
[0052] In this embodiment, taking the reaction chamber 20 as a boron diffusion reaction furnace as an example, the pollutant is boron oxide at this time. During the boron diffusion reaction process, tail gas containing boron oxide will be generated in the reaction chamber 20. After the diaphragm pump 12 exhausts the reaction chamber 20 for a long time, a layer of boron oxide will adhere to the diaphragm pump 12. At the same time, boron oxide is also likely to block the connection between the first exhaust pipe 13 and the diaphragm pump 12. Therefore, it is necessary to clean the diaphragm pump 12 and the first exhaust pipe 13 regularly.
[0053] In some embodiments, please refer to Figure 2 and Figure 3, the exhaust system 10 further includes a cleaning device 11, and the cleaning device 11 includes a cleaning medium supply component (not labeled). The suction end of the diaphragm pump 12 is detachably connected to the reaction chamber 20. When the diaphragm pump 12 needs to be cleaned, the suction end of the diaphragm pump 12 is connected to the output end of the cleaning medium supply component, and the cleaning medium supply component provides the cleaning medium to the diaphragm pump 12, so as to clean the diaphragm pump 12.
[0054] In some embodiments, the cleaning medium supply component is a steam generator 111, and at this time the cleaning medium is steam. The steam generator 111 includes an output end (not labeled) and an input end (not labeled). The output end is communicated with the suction end of the diaphragm pump 12. The steam generator 111 supplies steam to the suction end of the diaphragm pump 12 and makes the diaphragm pump 12 work, so that the steam is discharged from the suction end to the discharge end under the action of the diaphragm pump 12. Thus, the water-soluble pollutants in the diaphragm pump 12 are dissolved by the steam and discharged from the diaphragm pump 12 with the steam, and flow through the first exhaust pipe 13, achieving the effect of cleaning the diaphragm pump 12 and the first exhaust pipe 13.
[0055] In addition, compared with the way of disassembling the components of the diaphragm pump 12 one by one for cleaning, the way of using the diaphragm pump 12 to suck and discharge steam to clean the inside of the diaphragm pump 12 avoids the operation of disassembling the diaphragm pump 12, which helps to improve the cleaning efficiency of the diaphragm pump 12 and reduces the risk of damage to the components of the diaphragm pump 12 caused by disassembly.
[0056] At the same time, compared with the way of using the diaphragm pump 12 to suck and discharge water to clean the diaphragm pump 12, the way of using the diaphragm pump 12 to suck and discharge steam to clean the inside of the diaphragm pump 12 can reduce the risk of damaging the diaphragm of the diaphragm pump 12 due to excessive water pressure. And the steam with a higher temperature can also increase the solubility of boron oxide in water.
[0057] In other embodiments, please refer to Figure 4 , the cleaning medium supply component is a water mist generator 116, and at this time the cleaning medium is water mist. The output end of the water mist generator 116 is communicated with the suction end of the diaphragm pump 12. The water mist generator 116 supplies water mist to the suction end of the diaphragm pump 12 and makes the diaphragm pump 12 work, so that the water mist is discharged from the suction end to the discharge end under the action of the diaphragm pump 12. Thus, the water-soluble pollutants in the diaphragm pump 12 are dissolved by the water in the water mist and discharged from the diaphragm pump 12 with the water mist, and flow through the first exhaust pipe 13. While cleaning the diaphragm pump 12 and the first exhaust pipe 13, it can avoid the need to disassemble the components of the diaphragm pump 12 one by one, and can also reduce the risk of damage to the diaphragm of the diaphragm pump 12.
[0058] In some embodiments, the water mist generator 116 is a spray pump or a gas-liquid mixing nozzle.
[0059] In some embodiments, when the water mist generator 116 is a gas-liquid mixing nozzle, the water mist generator 116 has two input ends (not labeled). One input end is connected to the high-pressure gas source 1162, and the other input end is connected to the external water source 1161. Exemplarily, the external water source 1161 is a water pipe or a reservoir. When the water mist generator 116 is working, due to the action of the high-pressure gas, the water mist generator 116 can automatically absorb water to form water mist, so that the water mist generator 116 can also work normally without water pressure, so as to achieve the effect that the cleaning device 11 can work normally in different environments.
[0060] In some embodiments, a heating device is provided between the water mist generator 116 and the diaphragm pump 12. By heating the water mist entering the diaphragm pump 12 through the heating device, it helps to improve the solubility of boron oxide.
[0061] In other embodiments, the pollutant can also be a water-soluble compound such as phosphorus oxide. In this case, the reaction chamber 20 is a phosphorus diffusion furnace.
[0062] In some embodiments, please refer to Figure 2 and Figure 3 , the first exhaust pipe 13 has a first end 132 and a second end 133, and the tail gas flowing through the first exhaust pipe 13 is discharged outward from the second end 133.
[0063] In some embodiments, please refer to Figures 2 to 4 , the cleaning device 11 further includes an absorption component 112. When cleaning the diaphragm pump 12, the second end 133 of the first exhaust pipe 13 is communicated with the absorption component 112, so that when the steam or water mist is discharged from the second end 133 to the absorption component 112, the absorption component 112 absorbs the boron oxide in the steam or water mist discharged from the second end 133, thereby reducing the risk of secondary pollution of boron oxide. And the second end 133 is connected to the absorption component 112. Compared with discharging steam or water mist to the external tail gas treatment equipment from the second end 133, it can also reduce the adverse effects of steam or water mist on the external tail gas treatment equipment.
[0064] In some embodiments, please refer to Figure 3 , the absorption component 112 includes a water tank 1121, and the second end 133 is communicated with the water tank 1121, so that the second end 133 discharges steam or water mist into the water, so that boron oxide is dissolved in the water tank 1121, achieving the effect of dissolving boron oxide. At the same time, it can also make the relatively high-temperature steam or water mist contact with water, so that the steam or water mist is liquefied and absorbed by the water tank 1121.
[0065] In some embodiments, please refer to Figure 3, the water tank 1121 includes an air inlet 11211 which communicates with the second end 133 and is located below the liquid level of the water tank 1121, so that the second end 133 can discharge steam or water mist into the water, thereby providing a contact area between the steam or water mist and the water, which helps to improve the efficiency of the water in dissolving boron oxide in the steam or water mist.
[0066] In some embodiments, refer to Figures 2 to 4 , the first end 132 of the first exhaust pipe 13 is located above the second end 133, so that the steam or water mist condensed into droplets can flow into the water tank 1121 along the pipe wall of the first exhaust pipe 13, thereby preventing boron oxide from remaining in the first exhaust pipe 13 with the condensed steam or water mist.
[0067] Furthermore, refer to Figure 2 and Figure 4 , the cleaning device 11 further includes a gas-liquid mixing component 113 disposed in the water tank 1121. When the steam or water mist enters the water tank 1121 through the air inlet 11211 and passes through the gas-liquid mixing component 113, the gas-liquid mixing component 113 mixes the steam or water mist with the water to provide a contact area between the steam or water mist and the water.
[0068] In some embodiments, refer to Figure 2 , the gas-liquid mixing component 113 includes a bubbler communicating with the air inlet 11211 to enable the water and steam or the water and water mist in the water tank 1121 to come into full contact.
[0069] In other embodiments, the gas-liquid mixing component 113 further includes a stirrer or a porous gas dispersion plate.
[0070] In some embodiments, refer to Figure 2 and Figure 4 , the cleaning device 11 further includes a heating unit 115 disposed in the water tank 1121. Exemplarily, the heating unit 115 is an electric heater, and the heating part of the electric heater is disposed in the water tank 1121 and below the liquid level. Refer to Figure 3 , the electrode 1151 of the electric heater is disposed outside the water tank 1121. By supplying power to the electrode 1151, the heating part of the electric heater heats the water in the water tank 1121, which helps to improve the solubility and dissolution rate of boron oxide in the water tank 1121, so as to improve the efficiency of the water tank 1121 in dissolving boron oxide.
[0071] In some embodiments, after the water tank 1121 has dissolved boron oxide for a certain period of time, precipitates will be generated. A sewage outlet 11212 is provided at the bottom of the water tank 1121 to discharge the precipitates in the water tank 1121.
[0072] In some embodiments, see Figure 3 An air outlet 11213 is also provided at the top of the water tank 1121 to connect the water tank 1121 with the outside, thereby maintaining the pressure balance inside and outside the water tank 1121.
[0073] In some embodiments, see Figures 2 to 4 Since a portion of the boron oxide cannot be completely dissolved by the water tank 1121, the air outlet 11213 is connected to the air inlet 11211 of another external exhaust gas treatment device through the second exhaust pipe 11214, so that the external exhaust gas treatment device can further absorb the remaining boron oxide.
[0074] In some embodiments, see Figure 3 The water tank 1121 is also provided with a detection component 11215 to detect the highest water level and the lowest water level of the water tank 1121 to prevent the water tank 1121 from being full of water or to prevent the liquid level of the water tank 1121 from being lower than the gas-liquid mixing component 113.
[0075] In some embodiments, the detection component 11215 is a non-contact water level sensor disposed on the outside of the water tank 1121, such as an ultrasonic liquid level sensor, to reduce the risk of the detection component 11215 being corroded by water containing borides.
[0076] In some embodiments, see Figure 2 and Figure 3 Since the first end 132 is far from the second end 133, it is not easy for steam to flow through the first end 132, so that the first end 132 of the first exhaust pipe 13 cannot be cleaned. When the steam generator 111 starts working, no steam is generated and only hot water can be provided to the outside. The cleaning device 11 also includes a nozzle 114, which is connected to the output end of the steam generator 111. The nozzle 114 extends into the first end 132 of the first exhaust pipe 13. When the steam generator 111 does not generate steam, the steam generator 111 supplies hot water to the nozzle 114, so that the nozzle 114 sprays hot water into the first exhaust pipe 13, and the hot water flows from the first end 132 to the second end 133, so as to achieve the effect of cleaning the first exhaust pipe 13 as a whole, and also avoid wasting the hot water generated by the steam generator 111, which helps to improve the utilization rate of the steam generator 111.
[0077] In some embodiments, see Figure 2 Stop valves (not marked) are respectively provided between the steam generator 111 and the nozzle 114 and between the steam generator 111 and the suction end of the diaphragm pump 12 to control the flow of hot water to the nozzle 114 and to control the flow of steam to the diaphragm pump 12 .
[0078] In some embodiments, see Figure 4, stop valves are respectively arranged between the input end of the water mist generator 116 and the external water source 1161 and high-pressure gas source 1162 to control the water flow rate and gas flow rate, and a stop valve is arranged between the water mist generator 116 and the suction end of the diaphragm pump 12 to control the water mist flow direction to the diaphragm pump 12.
[0079] In other embodiments, the absorption component 112 can also be a container for containing a reaction solution, and the reaction solution includes reactants such as acids, so that boron oxide reacts with the acid in the reaction solution and dissolves in the solution to achieve the effect of absorbing boron oxide.
[0080] In other embodiments, the second end 133 of the first exhaust pipe 13 is always communicated with the external tail gas treatment device, so that when the diaphragm pump 12 is cleaned, the external tail gas treatment device can treat the steam containing boron oxide.
[0081] In addition, those of ordinary skill in the art in this technical field should recognize that the above embodiments are only used to illustrate the present application and are not used to limit the present application. As long as it is within the substantial scope of the present application, appropriate changes and variations made to the above embodiments fall within the scope disclosed in the present application.
Claims
1. A cleaning device for cleaning a diaphragm pump, characterized in that: The cleaning device comprises: a cleaning medium supply assembly, the cleaning medium supply assembly comprises an output end, the output end is communicated with the suction end of the diaphragm pump; Wherein, the cleaning medium supply assembly includes a steam generator or a water mist generator, the steam generator is configured to provide steam to the diaphragm pump, and the water mist generator is configured to provide water mist to the diaphragm pump, and the steam or the water mist is respectively used to dissolve pollutants in the diaphragm pump.
2. The cleaning device according to claim 1, characterized in that: It also includes an absorption component, which is used to communicate with the discharge end of the diaphragm pump and absorb the pollutants in the steam or the water mist discharged by the diaphragm pump.
3. The cleaning device according to claim 2, characterized in that: The absorption assembly includes a water tank, which is connected to the discharge end of the diaphragm pump and is used to dissolve the pollutants in the steam or the water mist discharged by the diaphragm pump; The water tank is provided with an air inlet, and the air inlet is used to communicate with the discharge end of the diaphragm pump. The height of the air inlet is lower than the liquid level in the water tank.
4. The cleaning device according to claim 3, characterized in that: The absorption component also includes a heating unit, which is arranged on the water tank and is used to heat the water in the water tank.
5. The cleaning device according to claim 3, characterized in that: The cleaning device also includes a gas-liquid mixing component, which is arranged in the water tank and below the liquid level of the water tank. The steam or the water mist enters the water tank through the air inlet and the gas-liquid mixing component in sequence. The gas-liquid mixing component is used to increase the contact area between the steam and the water in the water tank, or to increase the contact area between the water mist and the water in the water tank.
6. The cleaning device according to claim 3, characterized in that: The absorption component also includes a detection component, which is arranged in the water tank and is used to detect the water level in the water tank.
7. The cleaning device according to claim 3, characterized in that: The cleaning device further comprises a nozzle, the nozzle being in communication with an output end of the steam generator; When the steam generator starts to work but does not generate steam, the steam generator is configured to output hot water to the nozzle, and the nozzle is configured to spray the hot water into a first exhaust pipe connected to a discharge end of the diaphragm pump.
8. The cleaning device according to claim 3, characterized in that: The water mist generator has two input ends, one of which is used to connect to an external water pipe or a water reservoir, and the other of which is used to connect to an external high-pressure gas source.
9. An exhaust system, characterized in that: It comprises a diaphragm pump, a first exhaust pipe and a cleaning device as claimed in any one of claims 1 to 8, wherein the suction end of the diaphragm pump is configured to be detachably connected to a steam generator of the cleaning device, the water mist generator of the cleaning device or an external reaction furnace; The first exhaust pipe is configured to communicate with a discharge end of at least one of the diaphragm pumps.
10. A photovoltaic material processing device, characterized in that: The invention comprises a reaction chamber and an exhaust system as claimed in claim 9, wherein each of the reaction chambers is connected to at least one diaphragm pump.