Gas source control device for gas dilution

Abstract

The utility model belongs to the field of gas conveying pipelines, and particularly relates to a gas source control device for gas dilution. Comprising a first branch and a second branch, the first branch and the second branch are connected in parallel, the first branch comprises a circulation control device, a pressure regulating device and an anti-reflux device, the second branch is provided with the circulation control device, gas input by the first branch and the second branch is discharged to a tail gas treatment device, and the circulation control device is used for switching gas circulation paths. The gas flowing into the first branch can be diluted by changing the gas pressure through the pressure regulating device, and the anti-backflow device is used for preventing residual special gas of the tail gas treatment device and the gas cylinder cabinet on the branch from flowing back to the operation end of the gas source control device. The utility model can effectively solve the problems of high gas concentration and pipeline safety.

Description

Technical Field

[0001] The utility model belongs to the field of gas transmission pipelines, and specifically relates to a gas source control device for gas dilution in an integrated circuit factory. Background Art

[0002] The specialty gas supply system usually refers to a system used to supply special gases (such as high-purity gases or toxic gases). These systems are generally designed to ensure the safe and reliable supply of special gases in industrial or laboratory environments, and to perform appropriate treatment and emission management when needed. The main components include: Gas source: The starting point of the specialty gas supply system is the gas source, usually a gas cylinder or gas storage system of high-purity gas. Gas cabinet or valve manifold box (VMB / VDB): Equipment for safely storing and distributing specialty gases. The gas cabinet is usually designed to prevent gas leakage, provide necessary safety performance, and interfaces connected to the gas supply pipeline. Gas supply pipeline: Used to transport specialty gases from the gas cabinet or valve manifold box to process equipment or workstations. Tail gas processor (Scrubber): Used to process the tail gas of specialty gases, remove harmful components therein or dilute it to a safe level to meet environmental protection and safety requirements. Emission pipeline and system: Safely discharge the treated tail gas into the environment, usually requiring compliance with local regulations and standards. In the specialty gas supply system, the specialty gas tail gas is discharged from the gas cabinet (Gas cabinet / BSGS) or valve manifold box (VMB / VDB) or some process equipment, enters the tail gas processor (Local scrubber) through the emission pipeline, and then enters the construction exhaust system after treatment. During the process of entering the tail gas processor (Local scrubber) from the gas cabinet (Gas cabinet / BSGS) or valve manifold box (VMB / VDB) or process equipment, the concentration of the specialty gas is relatively high, so the safety of emissions is very important.

[0003] In the previous specialty gas system, after the specialty gas tail gas enters the emission pipe, the relatively high-concentration specialty gas will stay in the emission pipe, posing potential safety hazards. For example, if there is a collision, leakage may occur, causing personal injury or production interruption, resulting in unnecessary losses. Summary of the Utility Model

[0004] To solve the above problems, the present application proposes a gas dilution control device. Through the parallel first branch and second branch, using devices such as manual valves, pressure regulating valves, and check valves, it ensures that the input gas is safely discharged to the tail gas treatment device after pressure regulation and dilution, and at the same time prevents the specialty gas from flowing back to the operation end, effectively solving the problems of high gas concentration and pipeline safety.

[0005] The present application mainly adopts the following technical solutions:

[0006] A gas source control device for gas dilution, comprising a first branch and a second branch, the first branch and the second branch being in parallel. The first branch includes a flow control device, a pressure regulating device, and a backflow prevention device. The second branch is provided with a flow control device. The gases input into the first branch and the second branch are discharged to a tail gas treatment device. The flow control device is used to switch the gas flow path. The gas flowing into the first branch can have its air pressure changed by the pressure regulating device for dilution. The backflow prevention device is used to prevent the residual special gas in the tail gas treatment device and the gas cylinder cabinet on the branch from flowing back to the operation end of the gas source control device.

[0007] Further, the flow control device is a manual valve, the pressure regulating device is a pressure regulating valve, and the backflow prevention device is a check valve.

[0008] Further, it also includes a numerical display device, which is used to characterize the various parameters of the first branch.

[0009] Further, the numerical display device is specifically a rotameter and a pressure gauge. The rotameter is used to measure the purge nitrogen flow rate of the first branch, and the pressure gauge is used to measure the purge nitrogen air pressure of the first branch.

[0010] Further, a first manual valve, a pressure regulating valve, a pressure gauge, a rotameter, a check valve, and a second manual valve are sequentially arranged on the first branch, and a third manual valve is arranged on the second branch.

[0011] The utility model has the following beneficial effects:

[0012] In this solution, by using the pressure regulating device and the backflow prevention device, the backflow of residual special gas to the operation end can be effectively avoided, thereby reducing the risk of operators coming into contact with dangerous gases. By switching the gas flow direction through the flow control device (such as a manual valve), regulating the air pressure through the pressure regulating device, and controlling the gas flow rate with the rotameter, operators can achieve rapid dilution and evacuation operations. This design not only improves the operation efficiency, but also reduces the labor cost and downtime, effectively saving the production cost.

[0013] In addition, the device design allows for evacuation operations during maintenance and repair without shutting down the machine, further enhancing the operation efficiency. The replacement and maintenance of each component (such as the pressure regulating valve, pressure gauge, flowmeter, check valve) can be carried out without shutting down the machine, and only need to be operated according to simple steps, such as opening or closing the manual valve and adjusting the equipment to the preset value. This design greatly reduces the production losses caused by maintenance shutdowns and improves the reliability and continuous operation ability of the device. Description of the Drawings

[0014] Figure 1 It is a schematic diagram of the system of the utility model.

[0015] Each number in the figure: 1. First manual valve; 2. Pressure regulating valve; 3. Third manual valve; 4. Rotameter; 5. Check valve; 6. Second manual valve; 7. Pressure gauge. Specific embodiments

[0016] The following uses specific specific examples to illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification.

[0017] The present utility model can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be noted that the diagrams provided in the following embodiments only illustrate the basic concept of the present utility model in a schematic manner. Without conflict, the following embodiments and the features in the embodiments can be combined with each other.

[0018] Please refer to Figure 1 , the present utility model relates to a gas source control device for gas dilution. This device includes two branches: the first branch and the second branch, and these two branches are connected in parallel. The first branch is used for the flow control and pressure regulation of the main dilution gas, and the second branch is equipped with an independent flow control device.

[0019] In the first branch, the flow control device adopts the first manual valve 1 and the second manual valve 6 to switch the gas flow path. The pressure regulating device is the pressure regulating valve 2, and its function is to adjust the pressure of the gas entering the first branch to meet the pressure set value required for the dilution operation. At the same time, an anti-backflow device, that is, a check valve 5, is also provided on the first branch to prevent the special gas from flowing back to the operation end of the gas source control device. The rotameter 4 and the pressure gauge 6 are installed between the pressure regulating valve 2 and the check valve 5. The rotameter 4 is used to measure the purge nitrogen flow rate of the first branch, and the pressure gauge 6 is used to measure the purge nitrogen pressure of the first branch. Nitrogen (pipe diameter 1 / 2) adjusts the supply pressure through the pressure regulating valve 2, then passes through the rotameter 4, and enters the vent pipe (pipe diameter 1) through the check valve 5.

[0020] The second branch is also configured with a third manual valve 3 for switching the conveying path during pipeline maintenance. That is, when the pressure regulating valve 2, the pressure gauge 7, the rotameter 4, and the check valve 5 fail, it is not necessary to shut down the equipment behind the device. Opening the third manual valve 3 can complete the general nitrogen conveying.

[0021] In this embodiment, the first manual valve 1 is a switch valve, which performs a switching action on the gas from the general nitrogen pipeline when operating this set of devices. Under normal conditions, this valve is normally open. The second manual valve 6 is a switch valve at the connection between this set of devices and the vent pipes of the special gas supply equipment and the tail gas treatment equipment, and is used as the switch for the purge nitrogen supply during maintenance. Under normal conditions, this valve is normally open. The third manual valve 3 is a bypass switch valve, which is used to switch the purge gas inlet path of this set of devices for regular maintenance.

[0022] During operation, first ensure that the tail gas treatment device is in the open state. The operation steps include:

[0023] (1) Check that each manual valve (1, 3, 6) is in the closed state, and reset the pressure regulating valve 2 to 0 kg / cm 2 , and reset the rotameter to 0 LPM.

[0024] (2) Open the first manual valve 1 of the first branch;

[0025] (3) Adjust the pressure regulating valve 2 of the first branch to reach the preset operating pressure, refer to the set value of 3 kg / cm 2 ;

[0026] (4) Open the first manual valve 6 of the first branch;

[0027] (5) Adjust the rotameter 4 to the operating flow rate, refer to the set value of 30 LPM.

[0028] During non-stop maintenance, if it is found that the pressure regulating valve 2, pressure gauge 6, rotameter 4 or check valve 5 is faulty, the following steps can be taken for maintenance:

[0029] (1) Open the third manual valve 3;

[0030] (2) Close the second manual valve 6;

[0031] (3) Close the first manual valve 1;

[0032] (4) Repair and replace the pressure regulating valve 2, pressure gauge 6, rotameter 4, check valve 5;

[0033] (5) After replacement, reset the pressure regulating valve 2 to 0 kg / cm 2 , and reset the rotameter 4 to 0 LPM;

[0034] (6) Open the first manual valve 1

[0035] (7) Adjust the pressure regulating valve 2 to the operating pressure, refer to the set value of 3 kg / cm 2 .

[0036] (8) Open the second manual valve 6;

[0037] (9) Adjust the rotameter 4 to the flow rate in use, referring to the set value of 30 LPM.

[0038] (10) Close the third manual valve 3.

Claims

1. A gas source control device for gas dilution, characterized in that: It includes a first branch and a second branch, the first branch is connected in parallel with the second branch, the first branch includes a flow control device, a pressure regulating device and an anti-backflow device, the second branch is provided with a flow control device, the gas input from the first branch and the second branch is discharged to the exhaust gas treatment device, the flow control device is used to switch the gas flow path, the gas flowing into the first branch can be diluted by changing the gas pressure through the pressure regulating device, and the anti-backflow device is used to prevent the residual special gas in the exhaust gas treatment device and the gas cylinder cabinet on the branch from flowing back to the operating end of the gas source control device.

2. The gas dilution gas source control device according to claim 1, characterized in that: The flow control device is a manual valve, the pressure regulating device is a pressure regulating valve (2), and the backflow prevention device is a check valve (5).

3. The gas dilution gas source control device according to claim 1, characterized in that: A numerical display device is also included, which is used to characterize various parameters of the first branch.

4. The gas dilution gas source control device according to claim 3, characterized in that: The numerical display device is specifically a float flowmeter (4) and a pressure gauge (7), wherein the float flowmeter (4) is used to measure the purge nitrogen flow rate of the first branch, and the pressure gauge (7) is used to measure the purge nitrogen pressure of the first branch.

5. The gas dilution gas source control device according to claim 2 or 4, characterized in that: A first manual valve (1), a pressure regulating valve (2), a pressure gauge (7), a float flowmeter (4), a check valve (5) and a second manual valve (6) are arranged in sequence on the first branch, and a third manual valve (3) is arranged on the second branch.

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