Test disc and detection device

Abstract

The utility model relates to a test disc and a detection device. The test disc comprises: a base; the carrying disc is stacked on the base and is used for carrying a to-be-tested piece; the self-adaptive adjusting mechanisms are located between the base and the carrying disc, each self-adaptive adjusting mechanism comprises a first connecting piece and a second connecting piece which are connected in a sliding mode, the first connecting pieces are connected to the base, the sliding direction of the second connecting pieces and the first connecting pieces extends from the middle area of the carrying disc to the edge area of the carrying disc, and the second connecting pieces are connected to the carrying disc; the multiple self-adaptive adjusting mechanisms are sequentially arranged in the circumferential direction of the carrying disc at intervals, and the self-adaptive adjusting mechanisms are used for releasing relative deformation of the base and the carrying disc in the sliding direction of the second connecting piece and the first connecting piece. The test disc can avoid stress deformation caused by temperature difference.

Description

Technical Field

[0001] The present disclosure relates to the technical field of tooling fixtures, and particularly to a test plate and a detection device. Background Art

[0002] The usage environment of chip products is variable. To ensure the performance of chip products, they will be tested before leaving the factory. The test content can include normal temperature test, high temperature test, low temperature test, etc.

[0003] Generally, it is desired that a single machine can complete multiple tests, such as low temperature test to high temperature test. The operating temperature of chip products can range from -55°C to 150°C. Such a large temperature change makes the thermal expansion and contraction of the machine not to be ignored.

[0004] During the test, it is desired that the flatness of the working surface of the test plate of the machine can be maintained within, for example, 15 μm. However, thermal stress can cause the test plate to deform or even crack and be damaged. Summary of the Utility Model

[0005] Based on this, in view of the problem that the working surface of the test plate is uneven during multi-temperature tests, it is necessary to provide a test plate and a detection device.

[0006] An embodiment of the present disclosure provides a test plate, which includes: a base; a carrier plate stacked on the base for carrying a to-be-tested piece; and a plurality of adaptive adjustment mechanisms located between the base and the carrier plate. The adaptive adjustment mechanism includes a first connecting member and a second connecting member that are slidably connected. The first connecting member is connected to the base, and the sliding direction of the second connecting member relative to the first connecting member extends from the middle area of the carrier plate to the edge area. The second connecting member is connected to the carrier plate; the plurality of adaptive adjustment mechanisms are arranged at intervals in sequence along the circumferential direction of the carrier plate, and the adaptive adjustment mechanism is used to release the relative deformation between the base and the carrier plate along the sliding direction of the second connecting member and the first connecting member.

[0007] For the test plate provided by the embodiment of the present disclosure, by connecting the base and the carrier plate through a plurality of adaptive adjustment mechanisms, when the base and the carrier plate expand and contract relative to each other due to temperature difference, the internal stress is large, deformation or even cracking caused by the relative dimensional change between the base and the carrier plate is avoided. The plurality of adaptive adjustment mechanisms can adapt to the relative change between the base and the carrier plate at any time, absorb the dimensional difference caused by thermal expansion and contraction through the sliding of the first connecting member and the second connecting member, and maintain the support for the carrier plate. In addition, it is beneficial to ensure the relative position and attitude stability of the base and the carrier plate in space.

[0008] In some embodiments, the sliding direction defined by the adaptive adjustment mechanism is arranged along the radial direction of the carrier plate.

[0009] With such a setting, the laminated structure of the test plate is relatively simple, and the adaptive adjustment mechanism is sensitive in operation.

[0010] In some embodiments, the first connecting member includes a sliding rod, and the second connecting member includes a sliding block. The sliding block is slidably connected to the sliding rod and sleeved on the sliding rod.

[0011] With such an arrangement, the first connecting member and the second connecting member can slide relative to each other, and the support is firm.

[0012] In some embodiments, the adaptive adjustment mechanism further includes a linear bearing. The linear bearing is sleeved on the sliding rod, and the sliding block is sleeved on the linear bearing.

[0013] With such an arrangement, the sliding between the first connecting member and the second connecting member is smooth, and the performance of the adaptive adjustment mechanism is good.

[0014] In some embodiments, the first connecting member includes two mounting seats relatively located at both ends of the sliding rod, and the two mounting seats are connected to the base; the second connecting member includes a connecting seat fixed to the sliding block, and the connecting seat is connected to the carrier plate.

[0015] With such an arrangement, it can ensure good connection between the adaptive adjustment mechanism and the base and the carrier plate, and make the test plate easy to assemble and debug.

[0016] In some embodiments, the mounting seats are located on the side of the sliding rod facing away from the carrier plate along the stacking direction, and the connecting seats are located on the side of the sliding block facing away from the base along the stacking direction; the mounting seats are connected to the base by first bolts, and the connecting seats are connected to the carrier plate by second bolts.

[0017] With such an arrangement, the base and the carrier plate are supported by the adaptive adjustment mechanism, and the adaptive adjustment mechanism itself is less affected by thermal stress.

[0018] In some embodiments, the adaptive adjustment mechanism further includes an elastic member. The elastic member is connected between the first connecting member and the second connecting member, and the elastic member is used to provide an elastic force for restoring the second connecting member to the initial position.

[0019] With such an arrangement, when the temperature recovers, the adaptive adjustment mechanism can better reset.

[0020] In some embodiments, the elastic member includes a first spring and a second spring. The first spring and the second spring are respectively arranged on both sides of the second connecting member along the sliding direction, and are respectively used to provide elastic forces opposite to each other along the sliding direction.

[0021] With such an arrangement, whether the test plate recovers from high temperature or low temperature, it can ensure good reset of the adaptive adjustment mechanism.

[0022] In some embodiments, the base is provided with a plurality of strip-shaped grooves extending along the sliding direction, and at least a part of the adaptive adjustment mechanism is arranged in the corresponding strip-shaped grooves.

[0023] With such a setting, it is beneficial to reduce the distance between the carrier plate and the base. Exemplarily, the strip-shaped groove can limit the first connecting member and / or the second connecting member from both sides, making the adaptive adjustment mechanism operate stably.

[0024] In some embodiments, the base is a heat-insulating plate, and the carrier plate has a working surface and a flow channel for controlling the temperature of the working surface.

[0025] With such a setting, multi-temperature tests can be carried out using the test plate to ensure the flatness of the working surface, and the heat-insulating plate can be used to prevent external equipment such as the machine platform from being affected by the working temperature of the carrier plate.

[0026] The embodiments of the present disclosure also provide a detection device, which includes a detection module and the test plate described in any one of the above. The detection module is used to detect the component to be tested on the test plate.

[0027] The detection device according to the embodiments of the present disclosure can perform detection safely and reliably; the detection effect is good. Description of the Drawings

[0028] Figure 1 It is a schematic structural diagram of the test plate according to the embodiments of the present disclosure;

[0029] Figure 2 It is a front view schematic diagram of the test plate according to the embodiments of the present disclosure;

[0030] Figure 3 It is a schematic exploded view of the test plate according to the embodiments of the present disclosure;

[0031] Figure 4 It is a structural schematic diagram of the adaptive adjustment mechanism in the embodiments of the present disclosure;

[0032] Figure 5 It is a schematic front view of the adaptive adjustment mechanism in the embodiments of the present disclosure;

[0033] Figure 6 It is a schematic left view of the adaptive adjustment mechanism in the embodiments of the present disclosure;

[0034] Figure 7 It is a schematic structural diagram of the detection device according to the embodiments of the present disclosure.

[0035] Description of the Reference Numerals: 1, first connecting member; 11, sliding rod; 12, mounting seat; 13, first baffle; 14, second baffle; 2, second connecting member; 21, slider; 22, connecting seat; 3, linear bearing; 4, elastic member; 41, first spring; 42, second spring;

[0036] 100, Test plate; 110, Base; 111, Strip groove; 120, Adaptive adjustment mechanism; 121, First adaptive adjustment mechanism; 122, Second adaptive adjustment mechanism; 130, Carrier plate; 131, Temperature control plate; 132, Suction cup; 140, Working surface; 151, First bolt; 152, Second bolt;

[0037] 200, Detection module; 300, Detection device. Specific implementation manner

[0038] To make the above objects, features, and advantages of the embodiments of the present disclosure more obvious and understandable, the following will describe the specific implementation manners of the embodiments of the present disclosure in detail with reference to the accompanying drawings. Many specific details are set forth in the following description to facilitate a thorough understanding of the embodiments of the present disclosure. However, the embodiments of the present disclosure can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the spirit and scope of the embodiments of the present disclosure. Therefore, the embodiments of the present disclosure are not limited by the specific examples disclosed below.

[0039] In the description of the embodiments of the present disclosure, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "perpendicular", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These are only for the convenience of describing the embodiments of the present disclosure and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation on the embodiments of the present disclosure.

[0040] In the embodiments of the present disclosure, unless otherwise clearly defined and limited, the first feature being "on" or "under" the second feature may be that the first and second features are in direct contact, or the first and second features are indirectly in contact through an intermediate medium. Moreover, the first feature being "above", "over", and "on" the second feature may be that the first feature is directly above or obliquely above the second feature, or merely indicates that the first feature has a higher horizontal height than the second feature. The first feature being "under", "beneath", and "under" the second feature may be that the first feature is directly below or obliquely below the second feature, or merely indicates that the first feature has a lower horizontal height than the second feature.

[0041] In addition, terms such as "first", "second", "third", etc. are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include at least one such feature. Exemplarily, the first adaptive adjustment mechanism may also be referred to as the second adaptive adjustment mechanism, and the second adaptive adjustment mechanism may also be referred to as the first adaptive adjustment mechanism. In the description of the embodiments of the present disclosure, the meaning of "a plurality" is at least two, such as two, three, etc., unless otherwise specifically and clearly defined.

[0042] In the embodiments of the present disclosure, unless otherwise clearly specified and defined, terms such as "connected" and "coupled" should be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or integrated; it may be a flexible connection, or a rigid connection along at least one direction; it may be a mechanical connection, or an electrical connection; it may be directly connected, or indirectly connected through an intermediate medium, or there may be an intermediate medium while being directly connected, and it may also be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. Terms such as "installed", "set", and "fixed" can be understood in a broad sense as connection. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present disclosure can be understood according to specific circumstances.

[0043] As used herein, the terms "layer" and "region" refer to a portion of a material that includes a region having a certain thickness. The layer can extend horizontally, vertically, and / or along a conical surface. The layer can be a region of a uniform or non-uniform continuous structure, and the thickness perpendicular to the extension direction may not be greater than the thickness of the continuous structure. The layer can include multiple layers. The shapes of various regions and layers in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may actually deviate due to manufacturing tolerances or technical limitations, and can be adjusted according to actual requirements.

[0044] Referring Figure 1 , Figure 1 FIG. shows a test disk according to an embodiment of the present disclosure. In an exemplary embodiment, the test disk 100 includes a base 110, an adaptive adjustment mechanism 120, and a carrier disk 130.

[0045] Combined Figure 2 As shown, the base 110 and the carrier disk 130 can be stacked in the Z-axis direction. The extension plane of the base 110 can be perpendicular to the Z-axis direction. The extension plane of the carrier disk 130 can be perpendicular to the Z-axis direction. The carrier disk 130 can be stacked on the base 110, and the stacking direction is parallel to the Z-axis direction. The carrier disk 130 is used to carry the device under test.

[0046] The test disk 100 may include a plurality of adaptive adjustment mechanisms 120. These adaptive adjustment mechanisms 120 are located between the base 110 and the carrier disk 130. Exemplarily, each adaptive adjustment mechanism 120 is connected between the base 110 and the carrier disk 130 and can be used to support the carrier disk 130.

[0047] As shown in combination with Figures 3 to 5 the adaptive adjustment mechanism 120 includes a first connecting member 1 and a second connecting member 2. The first connecting member 1 is slidably connected to the second connecting member 2. Exemplarily, the sliding direction of the second connecting member 2 relative to the first connecting member 1 extends from the middle area to the edge area of the carrier disk 130. Exemplarily, the first connecting member 1 is connected to the base 110, and the second connecting member 2 is connected to the carrier disk 130.

[0048] Referring to Figures 1 to 3 , a plurality of adaptive adjustment mechanisms 120 are arranged at intervals in sequence along the circumference of the carrier disk 130, and the adaptive adjustment mechanism 120 is used to release the relative deformation between the base 110 and the carrier disk 130 along the sliding direction of the second connecting member 2 relative to the first connecting member 1.

[0049] Exemplarily, the plurality of adaptive adjustment mechanisms 120 include a first adaptive adjustment mechanism 121 and a second adaptive adjustment mechanism 122. The sliding direction defined by the first adaptive adjustment mechanism 121 may be parallel to the X-axis direction; the sliding direction defined by the second adaptive adjustment mechanism 122 intersects the X-axis direction. Referring to Figure 3 , when the carrier disk 130 heats up and expands, the second connecting member 2 of the first adaptive adjustment mechanism 121 can move relative to the first connecting member 1 of the first adaptive adjustment mechanism 121 to the right or the outside; when the carrier disk 130 cools down and contracts, the second connecting member 2 can move relative to the first connecting member 1 to the left or the inside. The other adaptive adjustment mechanisms 120 can cooperate with the first adaptive adjustment mechanism 121 to also realize the sliding of the first connecting member 1 and the second connecting member 2 respectively. Accordingly, while absorbing the relative deformation between the base 110 and the carrier disk 130, it is ensured that the position of the carrier disk 130 in the XY plane remains basically unchanged, and the overall carrier disk 130 can still remain flat.

[0050] In the test disk 100 of the present disclosure embodiment, the base 110 and the carrier disk 130 are connected by a plurality of adaptive adjustment mechanisms 120, avoiding the large internal stress, deformation or even cracking caused by the relative dimensional changes of the base 110 and the carrier disk 130 when they expand and contract relative to each other due to temperature differences. The plurality of adaptive adjustment mechanisms 120 can adapt to the relative changes between the base 110 and the carrier disk 130 at any time, absorb the dimensional differences caused by thermal expansion and contraction through the sliding of the first connecting member 1 and the second connecting member 2, and maintain the support for the carrier disk 130. The relative spatial position and attitude of the carrier disk 130 relative to the base 110 are stable.

[0051] Exemplarily, the sliding direction defined by the adaptive adjustment mechanism 120 is arranged along the radial direction of the carrier 130. The stacking structure of the test disk 100 is relatively simple, and the adaptive adjustment mechanism 120 is sensitive in operation. In some other embodiments, the sliding axes of the respective adaptive adjustment mechanisms 120 are eccentric with respect to the carrier 130 or with respect to the base 110. The sliding direction defined by the adaptive adjustment mechanism 120 may be perpendicular to the Z-axis direction, that is, along the XY plane. Exemplarily, the angles of the respective adaptive adjustment mechanisms 120 with respect to the XY plane are the same.

[0052] Reference Figures 4 to 6 , in some embodiments, the first connecting member 1 includes a sliding rod 11; the second connecting member 2 includes a sliding block 21. The sliding block 21 is slidably connected to and sleeved on the sliding rod 11. The first connecting member 1 and the second connecting member 2 can slide relative to each other and are firmly supported.

[0053] In some other embodiments, the first connecting member includes a sliding hole while the second connecting member includes a sliding rod slidably connected to the sliding hole. In some other embodiments, the first connecting member 1 includes a sliding groove.

[0054] In some embodiments, the adaptive adjustment mechanism 120 further includes a linear bearing 3. The linear bearing 3 is sleeved on the sliding rod 11, and the sliding block 21 is sleeved on the linear bearing 3. The sliding between the first connecting member 1 and the second connecting member 2 is smooth, and the performance of the adaptive adjustment mechanism 120 is good. The adaptive adjustment mechanism 120 realizes stable support for the carrier 130.

[0055] In some embodiments, the first connecting member 1 includes two mounting seats 12. The two mounting seats 12 are relatively located at both ends of the sliding rod 11 and can be fixedly or rotatably connected to the sliding rod 11. The two mounting seats 12 are connected to the base 110. Exemplarily, the sliding rod 11 can be supported so that the sliding rod 11 is spaced from the base 110 in the Z-axis direction, and then the first connecting member 1 is spaced from the base 110 in the Z-axis direction. The adaptive adjustment mechanism 120 can be well connected to the base 110.

[0056] Exemplarily, the second connecting member 2 includes a connecting seat 22 fixed to the sliding block 21, and the connecting seat 22 is connected to the carrier 130. The adaptive adjustment mechanism 120 can be well connected to the carrier 130. This makes the test disk 100 easy to assemble and debug, and ensures that the carrier 130 is well mounted on the base 110 through a plurality of adaptive adjustment mechanisms 120.

[0057] In some embodiments, the mounting seat 12 is located on the side of the sliding rod 11 facing away from the carrier plate 130 along the stacking direction. The connecting seat 22 is located on the side of the slider 21 facing away from the base 110 along the stacking direction. The mounting seat 12 and the connecting seat 22 are supported farther apart in the Z-axis direction. The base 110 and the carrier plate 130 are supported by the adaptive adjustment mechanism 120, and the adaptive adjustment mechanism 120 is less affected by thermal stress itself.

[0058] Exemplarily, the mounting seat 12 is connected to the base 110 by a first bolt 151. The connecting seat 22 is connected to the carrier plate 130 by a second bolt 152.

[0059] In some embodiments, the adaptive adjustment mechanism 120 further includes an elastic member 4. The elastic member 4 is connected between the first connecting member 1 and the second connecting member 2. The elastic member 4 is used to provide an elastic force for restoring the second connecting member 2 to its initial position. The initial position of the second connecting member 2 may refer to the position of the second connecting member 2 relative to the first connecting member 1 along the sliding direction when the test plate 100 is at room temperature. When the carrier plate 130 is working, it may be deformed due to temperature changes, and the adaptive adjustment mechanism 120 absorbs the deformation of the carrier plate 130 relative to the base 110; the elastic member 4 can be forced to deform, such as being compressed or stretched. When the temperature returns, the elastic member 4 can help drive the second connecting member 2 to slide, and the second connecting member 2 is reset; that is, the adaptive adjustment mechanism 120 can be better reset.

[0060] In some embodiments, the elastic member 4 includes a first spring 41 and a second spring 42. The first spring 41 and the second spring 42 are respectively arranged on both sides of the second connecting member 2 along the sliding direction, and are respectively used to provide elastic forces opposite to each other along the sliding direction. Whether the test plate 100 recovers from high temperature or low temperature, it can ensure that the adaptive adjustment mechanism 120 is well reset. The first spring 41 and the second spring 42 can both provide elastic force by compression. Exemplarily, when the second connecting member 2 is in the initial position, the elastic member 4 may not deform; in some other embodiments, the elastic member 4 is pre-compressed.

[0061] Reference Figure 4 and Figure 5 , the first connecting member 1 may include a first baffle 13 and a second baffle 14. The first baffle 13 and the second baffle 14 are located on both sides of the second connecting member 2 along the sliding direction of the second connecting member 2. The first baffle 13 and the slider 21 of the first connecting member 1 or the linear bearing 3 clamp the first spring 41. The second baffle 14 and the slider 21 of the first connecting member 1 or the linear bearing 3 clamp the second spring 42.

[0062] In some cases, when the temperature of the carrier plate 130 is equal to the temperature of the base 110, the second connecting member 2 is located at the initial position relative to the first connecting member 1. Exemplarily, the adaptive adjustment mechanism 120 includes a first spring 41. The first spring 41 is configured to apply a force to drive the second connecting member 2 to the initial position before the temperature of the carrier plate 130 drops to the temperature of the base 110. The first spring 41 helps the adaptive adjustment mechanism 120 to better reset when the temperature of the carrier plate 130 drops from a higher temperature.

[0063] Exemplarily, the adaptive adjustment mechanism 120 includes a second spring 42. The second spring 42 is configured to apply a force to drive the second connecting member 2 to the initial position before the temperature of the carrier plate 130 rises to the temperature of the base 110. The second spring 42 helps the adaptive adjustment mechanism 120 to better reset when the temperature of the carrier plate rises from a lower temperature.

[0064] In some embodiments, the base 110 is provided with a plurality of strip-shaped grooves 111 extending in the sliding direction. The adaptive adjustment mechanism 120 is disposed in the corresponding strip-shaped groove 111; the adaptive adjustment mechanism 120 can be at least partially disposed in the corresponding strip-shaped groove 111, which is beneficial to reducing the distance between the carrier plate 130 and the base 110 and reducing the overall thickness of the test plate 100. Exemplarily, the strip-shaped grooves 111 can limit the first connecting member 1 and / or the second connecting member 2 from both sides, making the operation of the adaptive adjustment mechanism 120 stable. In some embodiments, the strip-shaped grooves 111 do not contact the second connecting member 2.

[0065] In some embodiments, the base 110 is a heat-insulating plate. The heat-insulating plate can be used to prevent external equipment such as the machine platform from being affected by the working temperature of the carrier plate 130.

[0066] Exemplarily, the carrier plate 130 includes a temperature control plate 131 and a suction cup 132 stacked in the Z-axis direction. The temperature control plate 131 can control the temperature of the suction cup 132. The suction cup 132 can adsorb the workpiece to be tested (not shown) by vacuum pumping. Exemplarily, the carrier plate 130 has a working surface 140 and a flow channel for controlling the temperature of the working surface 140. Exemplarily, the adsorption surface of the suction cup 132 is the working surface 140. A flow channel is provided in the temperature control plate 131, and high-temperature or low-temperature fluid can be conveyed. The test plate 100 according to the embodiments of the present disclosure can be used for multi-temperature testing, and the working surface 140 of the test plate 100 has good flatness.

[0067] In some embodiments, the number of the plurality of adaptive adjustment mechanisms 120 is six. The six adaptive adjustment mechanisms 120 can be evenly distributed in the circumferential direction.

[0068] The multiple sliding directions defined by the multiple adaptive adjustment mechanisms 120 converge at a point, for example, at the center of the base 110 or the carrier 130. The sliding directions of the adaptive adjustment mechanisms 120 are parallel to the radial direction of the carrier 130. Exemplarily, the adaptive adjustment mechanisms 120 are located at the edge position of the carrier 130 along the radial direction of the carrier 130. The test disk 100 operates stably and can reliably carry the product to be detected.

[0069] Reference Figure 7 , the embodiments of the present disclosure provide a detection device. Exemplarily, the detection device 300 includes a detection module 200 and a test disk 100. The test disk 100 can be the aforementioned test disk 100. The detection module 200 is used to detect the workpiece to be tested on the test disk 100.

[0070] In some embodiments, the workpiece to be tested is a wafer. The detection device 300 can be a probe station, a wafer defect detection device, a wafer surface morphology detection device, etc.

[0071] Since the test disk of the embodiments of the present disclosure can ensure the stable spatial relative position and attitude between the base 110 and the carrier 130, it further ensures the stability of the detection device 300 during the detection or test process, and improves the detection or test efficiency of the detection device 300.

[0072] The technical features of the above-disclosed embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0073] The above-disclosed embodiments only represent several implementation manners of the present utility model. The description is relatively specific and detailed, but it should not be construed as a limitation on the patent protection scope of the utility model. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present utility model, several modifications and improvements can be made, and these all belong to the patent protection scope required by the present utility model. Therefore, the patent protection scope of the present utility model should be subject to the appended claims.

Claims

1. A test disk, characterized in that: include: Base (110); A carrier plate (130) is stacked on the base (110) and is used to carry the test piece; as well as A plurality of adaptive adjustment mechanisms (120) are located between the base (110) and the carrier (130), the adaptive adjustment mechanisms (120) comprising a first connecting member (1) and a second connecting member (2) which are slidably connected, the first connecting member (1) being connected to the base (110), the sliding direction of the second connecting member (2) and the first connecting member (1) extending from the middle area of ​​the carrier to the edge area, the second connecting member (2) being connected to the carrier (130); the plurality of adaptive adjustment mechanisms (120) are arranged in sequence and spaced apart along the circumference of the carrier (130), the adaptive adjustment mechanisms (120) being used to release the relative deformation of the base (110) and the carrier (130) along the sliding direction of the second connecting member (2) and the first connecting member (1).

2. The test disc according to claim 1, characterized in that: The sliding direction defined by the adaptive adjustment mechanism (120) is arranged along the radial direction of the carrier plate (130).

3. The test disc according to claim 1, characterized in that: The first connecting member (1) comprises a sliding rod (11), and the second connecting member (2) comprises a sliding block (21). The sliding block (21) is slidably connected to the sliding rod (11) and sleeved on the sliding rod (11).

4. The test disc according to claim 3, characterized in that: The adaptive adjustment mechanism (120) further comprises a linear bearing (3), wherein the linear bearing (3) is sleeved on the sliding rod (11), and the sliding block (21) is sleeved on the linear bearing (3).

5. The test disc according to claim 3, characterized in that: The first connecting member (1) comprises two mounting seats (12) located at two ends of the sliding rod (11) opposite to each other, and the two mounting seats (12) are connected to the base (110); The second connecting member (2) comprises a connecting seat (22) fixed to the sliding block (21), and the connecting seat (22) is connected to the carrier plate (130).

6. The test disc according to claim 5, characterized in that: The mounting seat (12) is located on a side of the slide bar (11) facing away from the carrier plate (130) along the stacking direction, and the connecting seat (22) is located on a side of the slide block (21) facing away from the base (110) along the stacking direction; The mounting seat (12) is connected to the base (110) via a first bolt (151), and the connecting seat (22) is connected to the carrier (130) via a second bolt (152).

7. The test disc according to claim 1, characterized in that: The adaptive adjustment mechanism (120) further comprises an elastic member (4), wherein the elastic member (4) is connected between the first connecting member (1) and the second connecting member (2), and the elastic member (4) is used to provide an elastic force for restoring the second connecting member (2) to an initial position.

8. The test disc according to claim 7, characterized in that: The elastic member (4) comprises a first spring (41) and a second spring (42); the first spring (41) and the second spring (42) are respectively arranged on both sides of the second connecting member (2) along the sliding direction, and are respectively used to provide elastic forces opposite to each other along the sliding direction.

9. The test disc according to claim 1, characterized in that: The base (110) is provided with a plurality of strip-shaped grooves (111) extending along the sliding direction, and the adaptive adjustment mechanism (120) is at least partially arranged in the corresponding strip-shaped grooves (111).

10. The test disc according to any one of claims 1 to 9, characterized in that The base (110) is a temperature-insulating plate, and the carrier plate (130) has a working surface (140) and a flow channel for controlling the temperature of the working surface (140).

11. A detection device, characterized in that: It comprises a detection module (200) and a test disc (100) according to any one of claims 1 to 10, wherein the detection module (200) is used to detect a test piece on the test disc (100).

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