Large-view-field white light interference detection equipment

Abstract

The utility model discloses large-view-field white light interference detection equipment which comprises a damping table and a test assembly located on the damping table, and the test assembly comprises a gantry structure marble platform, an X-axis movement module, a sample table, a Y-axis movement module, a Z-axis movement module, a test lens group, a white light LED light source and a green light LED light source. The test lens group adopts a vertical scanning interference measurement mode, meanwhile, the test lens group combines white light and green light LED double light sources, interference fringes are generated on the surface of a tested sample through white light to detect the morphology characteristics of the surface of the sample, so that defect detection is carried out, collected morphology pictures do not need to be additionally processed, and the test lens group has the advantages of being large in measurement range and high in accuracy. The resolution ratio is high; and the cost is low.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical detection, and particularly relates to a large-field white light interference detection device. Background Technique

[0002] With the development of optoelectronic industry, microelectronic industry, optical processing industry, semiconductor material industry and machining industry, the requirements for the surface topography and surface roughness of processing are getting higher and higher, and there is an urgent need for precise measurement and inspection with an optical interference microscope. The characteristic of an optical interference microscope is to perform the interference of light waves on the surface to be inspected and the reference surface to form interference fringes for precise measurement and inspection of its errors, and its distinct characteristic is precision and accuracy.

[0003] The existing interference microscopes have the following disadvantages: it is relatively difficult to obtain satisfactory interference fringes on surfaces with high reflectivity (for example, reflectivity higher than 70%), it is very time-consuming to debug the interference fringes, the interference fringes are black-and-white grayscale images instead of distinct white light fringes, and further processing is required. Content of the Utility Model

[0004] The utility model provides a large-field white light interference detection device, which generates interference fringes on the surface of a sample to be measured through white light, detects the topographic features of the sample surface, thereby performs defect detection, and does not require additional processing of the collected topographic pictures.

[0005] To solve the above problems, the technical solutions provided by the utility model are as follows:

[0006] An embodiment of the utility model provides a large-field white light interference detection device, which includes a shock-absorbing table (1) and a test assembly located above the shock-absorbing table (1). The test assembly includes a gantry structure marble platform (3), an X-axis movement module (4), a sample stage (5), a Y-axis movement module (6), a Z-axis movement module (7), a test lens group (8), and a white light and green light LED dual light source (10);

[0007] The gantry structure marble platform (3) is fixed on the surface of the shock-absorbing table (1). The X-axis motion module (4) and the Y-axis moving module (6) are fixed on the gantry structure marble platform (3). The sample stage (5) is arranged on the X-axis motion module (4), and the sample stage (5) can slide along the guide rail surface of the X-axis motion module (4). The Z-axis moving module (7) is arranged on the Y-axis moving module (6), and the Z-axis moving module (7) can slide along the guide rail surface of the Y-axis moving module (6). The test lens group (8) is fixed on the Z-axis moving module (7). The white light and green light LED dual light source (10) is connected to the side of the test lens group (8). The test lens group (8) is provided with a plurality of interference optical lenses (9) facing the sample stage (5).

[0008] According to an optional embodiment of the present invention, a plurality of foot pads (2) are arranged at the bottom of the shock-absorbing table (1).

[0009] According to an optional embodiment of the present invention, a computer device (12) is further included. The computer device (12) is connected to the shock-absorbing table (1) through a bracket (11). The computer device (12) is installed with test and analysis integrated software. After the test lens group (8) detects the morphological characteristics of the sample surface, data analysis and data storage can be automatically performed.

[0010] According to an optional embodiment of the present invention, the sample stage (5) is a large-size ceramic platform of 650×550mm.

[0011] Beneficial effects: The embodiment of the present invention provides a large-field-of-view white light interference detection device, including a shock-absorbing table and a test component located above the shock-absorbing table. The test component includes a gantry structure marble platform, an X-axis motion module, a sample stage, a Y-axis moving module, a Z-axis moving module, a test lens group, and a white light and green light LED dual light source. The test lens group adopts a vertical scanning interference measurement mode. At the same time, the test lens group combines a white light and a green light LED dual light source. Interference fringes are generated on the surface of the measured sample by the white light to detect the morphological characteristics of the sample surface, so as to perform defect detection. The collected morphological pictures do not require additional processing, and have the characteristics of a large measurement range, high resolution, and low cost. Description of the Drawings

[0012] In order to more clearly illustrate the technical solutions in the embodiments or the prior art, the following will briefly introduce the drawings required to be used in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0013] Figure 1 Schematic structural diagram of a large-field white-light interference detection device provided by an embodiment of the present application.

[0014] Figure 2 Front view of a large-field white-light interference detection device provided by an embodiment of the present application. Specific embodiments

[0015] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of protection of the present application.

[0016] As Figure 1 and Figure 2 shown, an embodiment of the present utility model provides a large-field white-light interference detection device, including a shock-absorbing table 1 and a test assembly located above the shock-absorbing table 1. A plurality of foot pads 2 are provided at the bottom of the shock-absorbing table 1.

[0017] The test assembly includes a gantry-structured marble platform 3, an X-axis motion module 4, a sample stage 5, a Y-axis moving module 6, a Z-axis moving module 7, a test lens group 8, and a white-light and green-light LED dual light source 10. The gantry-structured marble platform 3 is fixed on the surface of the shock-absorbing table 1. The X-axis motion module 4 and the Y-axis moving module 6 are fixed on the gantry-structured marble platform 3. The sample stage 5 is arranged on the X-axis motion module 4, and the sample stage 5 can slide along the guide rail surface of the X-axis motion module 4. The Z-axis moving module 7 is arranged on the Y-axis moving module 6, and the Z-axis moving module 7 can slide along the guide rail surface of the Y-axis moving module 6. The test lens group 8 is fixed on the Z-axis moving module 7. The white-light and green-light LED dual light source 10 is connected to the side of the test lens group 8. The test lens group 8 is provided with a plurality of interference optical lenses 9 facing the sample stage 5. The sample stage 5 is preferably a large-size ceramic platform of 650×550 mm. The plurality of interference optical lenses 9 include an eyepiece and an objective lens.

[0018] The large-field white-light interference detection device further includes a computer device 12. The computer device 12 is connected to the shock-absorbing table 1 through a bracket 11. A test and analysis integrated software is installed on the computer device 12. After the test lens group 8 detects the morphological features of the sample surface, data analysis and data storage can be automatically performed. The lens group of the large-field white-light interference detection device includes optical lenses with different magnifications. Interference fringes are generated on the surface of the measured sample by white light to detect the morphological features of the sample surface, so as to perform defect detection. The collected morphological pictures do not require additional processing, and have the characteristics of a large measurement range, high resolution, and low cost.

[0019] The basic parameters of the large field-of-view white light interference detection device for detecting samples are as follows:

[0020] 1. The detection device uses the principle of white light interference imaging and is equipped with dual light sources of white light and green light LEDs.

[0021] 2. Working modes: vertical scanning interference measurement mode, phase-shift interference measurement mode, high-resolution mode.

[0022] 3. Single measurement range in the vertical direction: ≥7m, full-range closed-loop control, seamless splicing.

[0023] 4. Step height error: ≤0.75%, using an 8um standard step.

[0024] 5. Repeatability of step height test: ≤0.1% 1sigma.

[0025] 6. Scanning speed: ≥37μm / sec.

[0026] 7. CCD camera: 5 million pixels, 1200×1000 data array.

[0027] 8. Automatic eyepiece turret, including eyepieces: 0.55X, 1X, 2X.

[0028] 9. 5-hole objective automatic switching turret, including: 5X interference objective: 6.71mm working distance, combined with 0.55X eyepiece, field of view range ≥3×2.5mm; 10X interference objective: 7.4mm working distance, combined with 0.55X eyepiece, field of view range ≥1.5×12mm; 20X interference objective: 4.7mm working distance, combined with 0.55X eyepiece, field of view range ≥0.7×0.6mm; 50X interference objective: 3.4mm working distance, combined with 0.55X eyepiece, field of view range ≥0.3×0.25mm: highest lateral optical resolution: 0.5um.

[0029] In summary, although the present utility model has been disclosed above with preferred embodiments, the above preferred embodiments are not intended to limit the present utility model. Those of ordinary skill in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the scope defined by the claims.

Claims

1. A large-field-of-view white-light interferometry detection device, characterized in that: The invention comprises a vibration-damping platform (1) and a test assembly located on the vibration-damping platform (1), wherein the test assembly comprises a gantry structure marble platform (3), an X-axis motion module (4), a sample platform (5), a Y-axis moving module (6), a Z-axis moving module (7), a test lens group (8), and a white light and green light LED dual light source (10); The gantry structure marble platform (3) is fixed on the surface of the vibration-absorbing platform (1); the X-axis motion module (4) and the Y-axis moving module (6) are fixed on the gantry structure marble platform (3); the sample platform (5) is arranged on the X-axis motion module (4), and the sample platform (5) can slide along the guide surface of the X-axis motion module (4); the Z-axis moving module (7) is arranged on the Y-axis moving module (6), and the Z-axis moving module (7) can slide along the guide surface of the Y-axis moving module (6); the test lens group (8) is fixed on the Z-axis moving module (7); the white light and green light LED dual light sources (10) are connected to the side of the test lens group (8); and the test lens group (8) is provided with a plurality of interference optical lenses (9) facing the sample platform (5).

2. A large field of view white light interference detection device according to claim 1, characterized in that: A plurality of foot pads (2) are arranged at the bottom of the shock absorbing platform (1).

3. The large-field-of-view white-light interferometry detection device according to claim 1, characterized in that: The invention also comprises a computer device (12), wherein the computer device (12) is connected to the vibration-damping platform (1) via a bracket (11); the computer device (12) is installed with integrated testing and analysis software, and after the testing lens group (8) detects the morphological features of the sample surface, data analysis can be automatically performed and data can be saved.

4. The large-field-of-view white-light interferometry detection device according to claim 1, characterized in that: The sample platform (5) is a large-sized ceramic platform of 650×550 mm.

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