Furnace bottom cooling device of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, and discloses a single crystal furnace bottom cooling device which comprises a furnace chassis, an exhaust pipe is communicated with the bottom end of the furnace chassis, a cooling sleeve is movably sleeved on the outer wall of the exhaust pipe, and a dismounting mechanism is arranged between the cooling sleeve and the furnace chassis; the dismounting and mounting mechanism comprises a first connecting plate, a U-shaped clamping plate and a second connecting plate, the first connecting plate and the second connecting plate are fixedly installed on the outer wall of the cooling sleeve and close to the top end, by arranging the dismounting and mounting mechanism, personnel can dismount, mount and replace the cooling sleeve conveniently, and it is avoided that a large amount of water scale is generated in the cooling sleeve after the cooling sleeve is used for a long time; the problem that the cooling effect is affected due to the fact that the exhaust pipe, the outer pipe outside the electrode and the sleeve in a comparison file are fixedly installed outside the electrode and cannot be detached, a large amount of water scale is generated inside the electrode after the electrode is used for a long time, and therefore the cooling effect is affected is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a bottom cooling device for a single crystal furnace. Background Technique

[0002] The Czochralski single crystal furnace is a key device for producing solar wafers. During the operation of the device, the internal temperature is as high as over 1420 degrees Celsius. To ensure the safety of the device, flowing water is usually used as a cooling medium at the bottom of the Czochralski single crystal furnace to cool the exhaust pipe and the electrode. The cooling water channels for cooling the exhaust pipe and the electrode in the traditional single crystal furnace bottom plate are usually arranged in series. After the cooling water passes through the first exhaust pipe or electrode, its temperature will increase due to the high temperature in the furnace. Therefore, after flowing through the remaining exhaust pipes or electrodes in sequence, its temperature rises significantly, resulting in inconsistent temperatures of the front and rear exhaust pipes and electrodes through which the cooling water flows, thereby causing oxides generated in the device to accumulate and block the pipes, resulting in abnormal production.

[0003] According to the Chinese patent, a bottom cooling device for a single crystal furnace and a single crystal furnace are disclosed, and its publication number is: CN213417069U. In this patent, both ends of each exhaust pipe are respectively connected to different water inlet branch pipes and different water outlet branch pipes, and both ends of each electrode are respectively connected to different water inlet branch pipes and different water outlet branch pipes. Therefore, multiple independent water channels for cooling the exhaust pipe and water channels for cooling the electrode are formed in the bottom cooling device of the single crystal furnace. When cooling any one of the exhaust pipes or electrodes, it is only necessary to control the cooling water to first enter the main water inlet pipe connected to the exhaust pipe or electrode, and then control the cooling water to enter the water inlet branch pipe connected to it. When the cooling water flows through the surface of the exhaust pipe or electrode to cool the exhaust pipe or electrode, it flows out from the water outlet branch pipe connected to the other end of the exhaust pipe or electrode, and finally flows into the main water outlet pipe, thereby realizing the cooling of any one of the exhaust pipes or electrodes. Therefore, this device can evenly cool the exhaust pipes and electrodes at the bottom of the single crystal furnace, which can not only ensure the safety of the device but also avoid the accumulation of oxides blocking the pipes, thus effectively ensuring the smooth progress of production.

[0004] However, the outer pipes and sleeves outside the exhaust pipes and electrodes in this patent are fixedly installed on the outside, and they cannot be disassembled, resulting in a large amount of scale generated inside after long-term use, thereby affecting the cooling effect. For this reason, we propose a bottom cooling device for a single crystal furnace. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a bottom cooling device for a single crystal furnace, which solves the problems in the background technique.

[0006] To achieve the above object, the present utility model provides the following technical solution: A bottom cooling device for a single crystal furnace, including a furnace bottom plate, an exhaust pipe is connected and arranged at the bottom end of the furnace bottom plate, a cooling sleeve is movably sleeved on the outer wall of the exhaust pipe, and a disassembly and assembly mechanism is arranged between the cooling sleeve and the furnace bottom plate;

[0007] The disassembly and assembly mechanism includes a connecting plate one, a U-shaped clamping plate, and a connecting plate two. The connecting plate one and the connecting plate two are respectively fixedly installed on the outer wall of the cooling sleeve near the top. A limiting post one and a limiting post two are fixedly installed at the bottom end of the furnace bottom plate. Column holes are opened on both the connecting plate one and the connecting plate two. The limiting post one and the limiting post two respectively pass through the connecting plate one and the connecting plate two movably through the column holes. Card slots are opened on the outer walls of the limiting post one and the limiting post two. The U-shaped clamping plates are respectively clamped in the card slots opened on the outer walls of the limiting post one and the limiting post two. A groove pad is fixedly installed on the inner wall of the card slot, and the groove pad is in close contact with the outer wall surface of the U-shaped clamping plate.

[0008] Preferably, the limiting post one and the limiting post two are respectively adapted to the column holes on the connecting plate one and the connecting plate two. The material of the groove pad is wear-resistant rubber. By setting the groove pad, the connection tightness between the U-shaped clamping plate and the card slot can be increased, thereby improving the clamping stability of the U-shaped clamping plate.

[0009] Preferably, magnetic blocks are fixedly installed at both ends of the U-shaped clamping plate, a magnetic plate is fixedly installed at the bottom end of the furnace bottom plate, the number of the magnetic plates is two, and the magnetic blocks are magnetically connected to the magnetic plates.

[0010] Preferably, the magnetic poles of the opposite surfaces of the magnetic plate and the magnetic block are opposite.

[0011] Preferably, a water inlet main pipe and a water outlet main pipe are respectively arranged on both sides of the furnace bottom plate. A water injection pipe is connected and arranged near the top on one side of the cooling sleeve, and a drain pipe is connected and arranged near the bottom on the other side of the cooling sleeve. A water inlet branch hose is connected and arranged on one side of the water inlet main pipe. The water inlet branch hose is fixedly connected to the water injection pipe through a connecting flange one. A water outlet branch hose is connected and arranged on one side of the water outlet main pipe. The water outlet branch hose is fixedly connected to the drain pipe through a connecting flange two. By setting the water outlet branch hose and the water inlet branch hose, it is convenient for personnel to disassemble the cooling sleeve and facilitates personnel operation.

[0012] Preferably, both the water inlet main pipe and the water outlet main pipe are connected to a water storage pool for storing cooling water, and a water pump for providing pressure is further arranged in the water storage pool.

[0013] Preferably, a refrigeration device is arranged in the water storage pool.

[0014] The present utility model provides a bottom cooling device for a single crystal furnace. The bottom cooling device for a single crystal furnace has the following beneficial effects:

[0015] (1) The bottom cooling device of the single crystal furnace is provided with a disassembly and assembly mechanism, which facilitates the disassembly and replacement of the cooling sleeve by personnel, avoiding a large amount of scale generated inside the cooling sleeve after long-term use, thus affecting the cooling effect of the cooling sleeve on the exhaust pipe. It solves the problem that in the comparative document, the exhaust pipe and the outer pipe and the sleeve outside the electrode are fixedly installed on the outside and cannot be disassembled, resulting in a large amount of scale generated inside after long-term use, thus affecting the cooling effect.

[0016] (2) The bottom cooling device of the single crystal furnace is provided with a magnetic plate and a magnetic block, which can make the U-shaped clamping plate attract each other through the magnetic block and the magnetic plate, thereby improving the stability of the U-shaped clamping plate during clamping, and further improving the stability of the cooling sleeve during installation. The structure is simple and the practicability is strong. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the overall partial structure of the present utility model;

[0018] Figure 2 is a schematic diagram of the partial structure of the back cross-section of the present utility model;

[0019] Figure 3 is the present utility model Figure 1 is a schematic diagram of the enlarged structure of part A in the present utility model;

[0020] Figure 4 is the present utility model Figure 2 is a schematic diagram of the enlarged structure of part B in the present utility model.

[0021] In the figure: 1. furnace bottom plate; 2. main water inlet pipe; 3. main water outlet pipe; 4. cooling sleeve; 5. disassembly and assembly mechanism; 6. exhaust pipe; 7. branch water inlet hose; 8. branch water outlet hose; 9. water injection pipe; 10. drain pipe; 11. magnetic plate; 12. magnetic block; 501. connecting plate one; 502. limiting column one; 503. column hole; 504. U-shaped clamping plate; 505. clamping groove; 506. groove pad; 507. limiting column two; 508. connecting plate two. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] In order to have a clearer understanding of the technical features, objectives, and effects of the present utility model, the specific embodiments of the present utility model will now be described with reference to the accompanying drawings.

[0023] Embodiment 1:

[0024] The preferred embodiment of the bottom cooling device of the single crystal furnace provided by the present utility model is as Figures 1 to 4 shown: A bottom cooling device of a single crystal furnace includes a furnace bottom plate 1, an exhaust pipe 6 is communicated at the bottom end of the furnace bottom plate 1, a cooling sleeve 4 is movably sleeved on the outer wall of the exhaust pipe 6, and a disassembly and assembly mechanism 5 is arranged between the cooling sleeve 4 and the furnace bottom plate 1;

[0025] The disassembly and assembly mechanism 5 includes a first connecting plate 501, a U-shaped clamping plate 504, and a second connecting plate 508. The first connecting plate 501 and the second connecting plate 508 are respectively fixedly installed on the outer wall of the cooling sleeve 4 near the top. A first limiting post 502 and a second limiting post 507 are fixedly installed at the bottom end of the furnace chassis 1. Column holes 503 are formed on both the first connecting plate 501 and the second connecting plate 508. The first limiting post 502 and the second limiting post 507 respectively pass through the first connecting plate 501 and the second connecting plate 508 movably through the column holes 503. Card slots 505 are formed on the outer walls of the first limiting post 502 and the second limiting post 507. The U-shaped clamping plate 504 is respectively clamped in the card slots 505 formed on the outer walls of the first limiting post 502 and the second limiting post 507. A groove pad 506 is fixedly installed on the inner wall of the card slot 505, and the groove pad 506 is in close contact with the outer wall surface of the U-shaped clamping plate 504.

[0026] Specifically, in the above technical solution, pull the U-shaped clamping plate 504 outwards to make the U-shaped clamping plate 504 disengage from the card slot 505, so that the U-shaped clamping plate 504 no longer limits the first connecting plate 501 and the second connecting plate 508. At this time, pull the cooling sleeve 4 downwards to make the cooling sleeve 4 drive the first connecting plate 501 and the second connecting plate 508 to disengage from the first limiting post 502 and the second limiting post 507, and make the cooling sleeve 4 disengage from the exhaust pipe 6, thereby completing the disassembly of the cooling sleeve 4. Through this mechanism, it is convenient for personnel to disassemble and replace the cooling sleeve 4, avoiding a large amount of scale generated inside the cooling sleeve 4 after long-term use, which affects the cooling effect of the cooling sleeve 4 on the exhaust pipe 6, and solves the problem that the exhaust pipe 6 and the outer pipe and sleeve outside the electrode in the comparative document are fixedly installed outside and cannot be disassembled, resulting in a large amount of scale generated inside after long-term use, which affects the cooling effect.

[0027] Further, the first limiting post 502 and the second limiting post 507 respectively match the column holes 503 on the first connecting plate 501 and the second connecting plate 508, and the material of the groove pad 506 is wear-resistant rubber;

[0028] Among them, by setting the groove pad 506, the connection tightness between the U-shaped clamping plate 504 and the card slot 505 can be increased, thereby improving the clamping stability of the U-shaped clamping plate 504.

[0029] Further, a main water inlet pipe 2 and a main water outlet pipe 3 are respectively arranged on both sides of the furnace chassis 1. A water injection pipe 9 is communicated and arranged on one side of the cooling sleeve 4 near the top, and a drain pipe 10 is communicated and arranged on the other side of the cooling sleeve 4 near the bottom. A water inlet branch hose 7 is communicated and arranged on one side of the main water inlet pipe 2, and the water inlet branch hose 7 is fixedly connected to the water injection pipe 9 through a first connecting flange. A water outlet branch hose 8 is communicated and arranged on one side of the main water outlet pipe 3, and the water outlet branch hose 8 is fixedly connected to the drain pipe 10 through a second connecting flange;

[0030] Among them, by providing the water branch hose 8 and the water inlet branch hose 7, it is convenient for personnel to disassemble the cooling sleeve 4, facilitating operation by personnel.

[0031] Furthermore, both the water inlet main pipe 2 and the water outlet main pipe 3 are connected to a water storage tank for containing cooling water, and a water pump for providing pressure is also provided in the water storage tank.

[0032] Even further, a refrigeration device is provided in the water storage tank.

[0033] Embodiment 2:

[0034] Based on Embodiment 1, a preferred embodiment of the single crystal furnace bottom cooling device provided by the present utility model is as Figures 1 to 4 shown: Magnets 12 are fixedly installed at both ends of the U-shaped clamping plate 504, and a magnetic plate 11 is fixedly installed at the bottom end of the furnace bottom plate 1. The number of magnetic plates 11 is two, and the magnets 12 are magnetically connected to the magnetic plates 11.

[0035] Specifically in the above technical solution, by providing the magnetic plate 11 and the magnets 12, the U-shaped clamping plate 504 can be attracted to the magnetic plate 11 through the magnets 12, thereby improving the stability of the U-shaped clamping plate 504 during clamping, and further improving the stability of the cooling sleeve 4 during installation. The structure is simple and the practicability is strong.

[0036] Furthermore, the magnetic poles of the opposite surfaces of the magnetic plate 11 and the magnets 12 are opposite.

[0037] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not expressly listed, or also includes elements inherent to such process, method, article or device.

[0038] Finally, it should be noted that: The above are only preferred embodiments of the present utility model and are not used to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A single crystal furnace bottom cooling device, comprising a furnace bottom plate (1), characterized in that: The bottom end of the furnace bottom plate (1) is connected to an exhaust pipe (6), the outer wall of the exhaust pipe (6) is movably sleeved with a cooling sleeve (4), and a disassembly mechanism (5) is provided between the cooling sleeve (4) and the furnace bottom plate (1); The disassembly and assembly mechanism (5) comprises a connecting plate 1 (501), a U-shaped clamping plate (504), and a connecting plate 2 (508). The connecting plate 1 (501) and the connecting plate 2 (508) are respectively fixedly mounted on the outer wall of the cooling sleeve (4) near the top end. A limiting column 1 (502) and a limiting column 2 (507) are fixedly mounted on the bottom end of the furnace bottom plate (1). The connecting plate 1 (501) and the connecting plate 2 (508) are both provided with column holes (503). The limiting column 1 (502) and the limiting column 2 (507) are respectively The connecting plate 1 (501) and the connecting plate 2 (508) are movably penetrated through the column hole (503), and the outer walls of the limiting column 1 (502) and the limiting column 2 (507) are both provided with a clamping groove (505). The U-shaped clamping plate (504) is respectively clamped in the clamping grooves (505) provided on the outer walls of the limiting column 1 (502) and the limiting column 2 (507). The inner walls of the clamping grooves (505) are fixedly installed with groove pads (506), and the groove pads (506) are in close contact with the outer wall surface of the U-shaped clamping plate (504).

2. The single crystal furnace bottom cooling device according to claim 1, characterized in that: The limiting column 1 (502) and the limiting column 2 (507) are respectively matched with the column holes (503) on the connecting plate 1 (501) and the connecting plate 2 (508), and the material of the groove pad (506) is wear-resistant rubber.

3. The single crystal furnace bottom cooling device according to claim 1, characterized in that: Magnetic blocks (12) are fixedly mounted on both ends of the U-shaped clamping plate (504), a magnetic plate (11) is fixedly mounted on the bottom end of the furnace bottom plate (1), the number of the magnetic plates (11) is two, and the magnetic blocks (12) are magnetically connected to the magnetic plates (11).

4. The single crystal furnace bottom cooling device according to claim 3 is characterized in that: The magnetic properties of the opposing surfaces of the magnetic plate (11) and the magnetic block (12) are opposite.

5. The single crystal furnace bottom cooling device according to claim 1, characterized in that: A water inlet pipe (2) and a water outlet pipe (3) are respectively arranged on both sides of the furnace bottom plate (1); a water injection pipe (9) is arranged near the top end of one side of the cooling sleeve (4); a water discharge pipe (10) is arranged near the bottom end of the other side of the cooling sleeve (4); a water inlet branch hose (7) is arranged on one side of the water inlet pipe (2); the water inlet branch hose (7) is fixedly connected to the water injection pipe (9) via a first connecting flange; a water outlet branch hose (8) is arranged on one side of the water outlet pipe (3); the water outlet branch hose (8) is fixedly connected to the discharge pipe (10) via a second connecting flange.

6. The single crystal furnace bottom cooling device according to claim 5, characterized in that: The water inlet pipe (2) and the water outlet pipe (3) are both connected to a water tank for storing cooling water, and a water pump for providing pressure is also provided in the water tank.

7. The single crystal furnace bottom cooling device according to claim 6, characterized in that: A refrigeration device is arranged in the water storage tank.

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