Two-dimensional electromagnetic galvanometer system

Abstract

The utility model relates to a two-dimensional electromagnetic galvanometer system, which comprises a reflector, a universal joint frame, a mechanical driving unit, a PCB and a base, and is characterized in that the reflector is arranged in the universal joint frame, the mechanical driving unit is fixed on the PCB, the PCB is fixed on the base, and the universal joint frame is fixedly connected with the base; under the action of the mechanical driving unit, the reflecting mirror can rotate around a first axis and / or a second axis which are arranged in a crossed mode in the universal joint frame, the driving unit comprises a plurality of coils and a plurality of magnets which are correspondingly arranged, the coils are arranged on the PCB, and the magnets are evenly distributed on the surface of the side, facing the base, of the reflecting mirror in a dispersed mode; the PCB is also provided with a lens angle detection unit used for detecting the rotation angle of the reflector. The two-dimensional electromagnetic galvanometer system provided by the embodiment of the utility model is small and light in internal structure, has a large reflector and a wide light beam angle, realizes mechanical inclination adjustment, expands an optical scanning range, and further improves the sensitivity and accuracy of the reflector.

Description

Technical Field

[0001] This application relates to the field of galvanometer scanning technology, and particularly to a two-dimensional electromagnetic galvanometer system. Background Art

[0002] An electromagnetic galvanometer system is a device that controls the propagation direction of a light beam between a light source and a receiving end. Due to its advantages such as high response bandwidth, high positioning accuracy, and high angular resolution, it is widely used in fields such as free-space optical communication, lidar, machine vision, and laser processing.

[0003] In the prior art, there is a type of galvanometer mirror. Its structural characteristics usually have a long cylindrical shape. The mirror is at the end of the moving magnetic axis. Through a two-dimensional control system composed of two galvanometer mirrors, the control direction of the light beam is achieved. This type of galvanometer limits its application in scenarios with small space size requirements and large light beam apertures. There is also another type of fast steering mirror, which is a component that works between a light source or a receiver and a target and is used to adjust and stabilize the optical axis or the light beam pointing of an optical system. By using a voice coil motor to precisely control the deflection direction of the mirror, the deflection angle of the light beam is precisely controlled, and the rapid adjustment of the "deflection - tilt" azimuth angle of the mirror is achieved. However, traditional two-dimensional fast steering mirrors usually include four voice coil motors. Every two voice coil motors form a push-pull pair to form a rotation axis, providing smooth and uniform torque for the mirror. Due to the use of the classic linear motion cylindrical voice coil motor structure, the gap between the coil and the magnet is small, and usually the deflection angle of the mirror is less than ±2°.

[0004] Based on the improvement of the above two existing galvanometers, there are also electromagnetic galvanometer systems that achieve two rotational degrees of freedom of the mirror surface by means of mechanical motion. However, the core components for realizing the flipping of the mirror in the prior art often need to be centrally arranged in the exact center of the back of the mirror, which not only results in low reaction sensitivity of the external mirror after being stressed, but also is large and heavy in volume. Summary of the Utility Model

[0005] Aiming at the technical problems existing in the prior art, this application proposes a two-dimensional electromagnetic galvanometer system. By dispersedly arranging a plurality of magnets on one side surface of the mirror facing the base, when the magnets are subjected to the Ampere force generated by the relatively arranged coils, the mirror can be quickly driven to rotate, improving the reaction sensitivity of the mirror.

[0006] An embodiment of the present application provides a two-dimensional electromagnetic mirror system, which includes a mirror, a gimbal frame, a mechanical drive unit, a PCB board, and a base. The mirror is disposed in the gimbal frame. The mechanical drive unit is fixed on the PCB board, and the PCB board is fixed on the base. The gimbal frame is fixedly connected to the base. Under the action of the mechanical drive unit, the mirror can rotate around a first axis and / or a second axis that are cross-set in the gimbal frame. The drive unit includes a plurality of corresponding coils and a plurality of magnets. The plurality of coils are disposed on the PCB board, and the plurality of magnets are dispersedly and evenly distributed on one side surface of the mirror facing the base. The PCB board is further provided with a lens angle detection unit for detecting the rotation angle of the mirror.

[0007] Optionally, the first axis and the second axis are perpendicular to each other.

[0008] Optionally, the mirror is rotatably connected to the gimbal frame through a lens support frame. The lens support frame is disposed on one side surface of the mirror facing the base, and the magnet is disposed on one side surface of the lens support frame facing the base.

[0009] Optionally, the number of the magnets and the coils is four respectively. Among them, the magnets include two first magnets and two second magnets. The first magnets and the second magnets are respectively disposed in the directions of the first axis and the second axis and are located at the opposite edges of the lens support frame. The setting positions of the coils on the PCB board correspond to the setting positions of the first magnets and the second magnets on the lens support frame.

[0010] Optionally, the lens support frame includes a concentric inner ring and an outer ring. The outer ring is convexly provided with rib plates facing the inner side of the outer ring. The rib plates include a first rib plate and a second rib plate. The outer edge of the first rib plate is rotatably connected to the outer ring through a first bearing pin. The position of the second rib plate corresponding to the outer ring is rotatably connected to the gimbal frame through a second bearing pin.

[0011] Optionally, the lens angle detection unit includes a light source disposed on the same plane and a plurality of light detection elements surrounding the light source. The light emitted by the light source is reflected by one side surface of the mirror facing the base and then detected by the light detection elements, and the angle deflection amount data of the mirror is output to an external control unit. The control unit closes the loop to control the mechanical drive unit to drive the mirror to deflect to the commanded angle according to the angle deflection amount data.

[0012] Optionally, one side surface of the mirror facing the base includes a diffused reflection surface of a grating, and the light emitted by the light source is received by the light detection element in a diffused reflection manner.

[0013] Optionally, the light source is an LED component, and the light detection element is a photovoltaic cell component.

[0014] Optionally, the photovoltaic cell component includes at least four photovoltaic cells, and the setting position of each photovoltaic cell is within the fan-shaped area formed by two adjacent coils and the light source.

[0015] Optionally, a light shield for reducing the interference of external light on the light detection element is further provided around the light detection element. The light shield is a conical structure with both ends open. Among them, along the direction from the base to the mirror, the height of the light shield is greater than the height of the light detection element.

[0016] Optionally, the base includes a receiving groove, the PCB board is fixed on the edge of the receiving groove, and the coil on the PCB board is built in the receiving groove.

[0017] Optionally, a washer is further included. The washer is arranged between the gimbal frame and the PCB board. Mounting holes are provided on the gimbal frame, the washer, the PCB board and the base, and fasteners pass through the mounting holes to sequentially fix the gimbal frame, the washer and the PCB board on the base.

[0018] Optionally, the gimbal frame is a square structure, and a circular through hole is provided at the central position. The lens support frame is arranged in the through hole, and the second bearing pin is arranged on the outer ring of the lens support frame and the inner wall of the through hole.

[0019] Optionally, the shapes of the washer, the PCB board and the gimbal frame are correspondingly arranged with each other.

[0020] In the two-dimensional electromagnetic mirror system proposed in the embodiment of the present application, by dispersing the magnets on one side surface of the mirror facing the base, when the magnets are subjected to the Ampere force generated by the relatively arranged coils, the mirror can be quickly driven to rotate, thereby improving the reaction sensitivity of the mirror in the two-dimensional electromagnetic mirror system of the present application; at the same time, the internal structure of the two-dimensional electromagnetic mirror system provided in the present application is small and light, and has a large mirror and a wide beam angle, realizing mechanical tilt adjustment and expanding the optical scanning range, thereby improving the sensitivity and accuracy of the mirror. Description of the Drawings

[0021] Next, the preferred embodiments of the present application will be further described in detail with reference to the drawings, where:

[0022] Figure 1 It is a schematic three-dimensional structure diagram of a two-dimensional electromagnetic mirror system according to an embodiment of the present application;

[0023] Figure 2 is Figure 1 an exploded view of the structure shown;

[0024] Figure 3 is Figure 1 a schematic structure diagram of the mirror part in the structure shown;

[0025] Figure 4 is Figure 1 a cross-sectional view of the structure shown along C-C;

[0026] Figure 5 is Figure 3 a view in the direction of E of the structure shown;

[0027] Figure 6 is Figure 1 a view in the direction of D of the structure shown;

[0028] Figure 7 is Figure 6 a cross-sectional view of the structure shown along B-B;

[0029] Figure 8 shows a schematic diagram of the angle detection principle of the two-dimensional electromagnetic mirror system according to an embodiment of the present application.

[0030] Explanation of reference numerals:

[0031] 100, two-dimensional electromagnetic mirror system; 101, mirror; 102, gimbal frame; 103, PCB board; 104, base; 105, coil; 106, magnet; 107, light source; 108, light detection element; 301, lens support frame; 3011, inner ring; 3012, outer ring; 302, rib plate; 1021, through hole; 1022, first bearing pin; 1023, second bearing pin; 1061, first magnet; 1062, second magnet; 201, light shield; 1041, receiving groove; 202, washer; 203, mounting hole; 204, fastener; 3021, first rib plate; 3022, second rib plate; 1051, first coil; 1052, second coil; 112, flexible circuit board; 113, terminal. Detailed implementation manners

[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, rather than all of them. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of this application without creative efforts belong to the scope of protection of this application.

[0033] In the following detailed description, reference can be made to the various specification drawings that form part of this application and illustrate specific embodiments of this application. In the drawings, like reference numerals generally describe substantially similar components in different figures. The various specific embodiments of this application are described in sufficient detail below to enable those of ordinary skill in the art with relevant knowledge and technology to implement the technical solutions of this application. It should be understood that other embodiments can also be used, or structural, logical, or electrical changes can be made to the embodiments of this application.

[0034] Figure 1 It is a schematic three-dimensional structure diagram of a two-dimensional electromagnetic galvanometer system according to an embodiment of this application. Figure 2 is Figure 1 an exploded view of the shown structure. Figure 3 is Figure 1 a schematic structure diagram of the mirror part in the shown structure. Combining Figures 1-3 as shown, the two-dimensional electromagnetic galvanometer system 100 includes a mirror 101, a gimbal frame 102, a mechanical drive unit, a PCB board 103, and a base 104. The mirror 101 is rotatably arranged in the gimbal frame 102. The mechanical drive unit is fixed on the PCB board 103, the PCB board 103 is fixed on the base 104, and the gimbal frame 102 is fixedly connected to the base 104. Under the action of the mechanical drive unit, the mirror 101 can rotate around a first axis and / or a second axis that are cross-set with each other in the gimbal frame 102. In Figures 1 to 3 the shown embodiment, the first axis and the second axis are perpendicular to each other. Among them, the drive unit includes a plurality of coils 105 and a plurality of magnets 106 that are oppositely arranged. The plurality of coils 105 are arranged on the PCB board 103, and the plurality of magnets 106 are dispersedly and evenly distributed on one side surface of the mirror 101 facing the base 104. The PCB board 103 is also provided with a lens angle detection unit for detecting the rotation angle of the mirror 101.

[0035] The two-dimensional electromagnetic mirror galvanometer system according to the embodiments of the present application has a large mirror (when the mirror is circular, its diameter > 15 mm) and a wide beam angle, and can achieve mechanical tilt adjustment of ±25° and an optical scanning range of ±50°. In addition, by dispersedly arranging the magnets 106 on one side surface of the mirror 101 facing the base 104, when the magnets 106 are subjected to the Ampere force generated by the relatively arranged coils 105, the mirror 101 can be quickly driven to rotate, thereby improving the response sensitivity of the mirror in the two-dimensional electromagnetic mirror galvanometer system of the present application.

[0036] Figure 4 Yes Figure 1 A cross-sectional view along C-C of the shown structure. Combining Figure 2 And Figure 4 As shown, the lens angle detection unit includes a light source 107 arranged on the same plane and a plurality of light detection elements 108 surrounding the light source 107. The light emitted by the light source 107 is reflected by the mirror 101 on the side surface facing the base 104 and then detected by the light detection elements 108, and the angle deflection amount data of the mirror 101 is output to an external control unit (not shown in the figure). The control unit closes the loop to control the mechanical drive unit to drive the mirror to deflect to the command angle according to the angle deflection amount data. Among them, the control unit is arranged outside the PCB board. The PCB board is wired through a long strip-shaped flexible circuit board 112 and is connected to the control unit through a terminal block 113. In some embodiments of the present application, optionally, the light source 107 is an LED component, and the light detection element 108 is a photovoltaic cell component. Among them, optionally, the photovoltaic cell component includes at least four photovoltaic cells, and the position of each photovoltaic cell is set within the fan-shaped area formed by two adjacent coils 105 and the light source 107. In some embodiments of the present application, the number of photovoltaic cells in the photovoltaic cell component is four, and they are arranged around the LED with the LED as the center.

[0037] In the prior art, a magnetic column for driving the reflection lens to rotate is provided at the exact center of the back surface of the reflection lens, and an internal mirror is provided on the end surface of the magnetic column facing the light source for reflecting the light emitted by the light source in the lens angle detection unit. However, this will result in a relatively short distance between the internal mirror and the light source, and further cause a large deviation between the calculated rotation angle of the lens and the actual rotation angle of the lens. In the embodiments of the present application, by dispersedly arranging the magnets, the surface of the reflection lens facing the PCB board can be provided with a mirror surface to reflect the light emitted by the light source in the lens angle detection unit. In this way, the distance from the light source to the mirror surface is increased, the coincidence degree between the true value and the calculated value of the mirror surface angle is improved, and the measurement accuracy of the rotation of the reflection lens is improved.

[0038] Figure 5 Yes Figure 3 An E-direction view of the shown structure. Combining Figure 3 And Figure 5As shown, the mirror 101 is rotatably connected through the lens support frame 301 and the gimbal frame 102. The lens support frame 301 is arranged on one side surface of the mirror 101 facing the base 104, and the magnet 106 is arranged on one side surface of the lens support frame 301 facing the base 104. Among them, the lens support frame 301 includes a concentric inner ring 3011 and an outer ring 3012. A rib plate 302 protruding outward from the outer side of the inner ring 3011 toward the inner side of the outer ring is provided. The rib plate 302 includes a first rib plate 3021 and a second rib plate 3022. The outer edge of the first rib plate 3021 and the outer ring 3012 of the lens support frame are rotatably connected through a first bearing pin 1022, so that the rib plate 302 and the inner ring of the lens support frame can drive the mirror 101 to rotate around the first bearing pin 1022; the position between the outer ring of the lens support frame 301 corresponding to the second rib plate 3022 and the gimbal frame 102 is rotatably connected through a second bearing pin 1023, so that the entire lens support frame 301 can drive the mirror to rotate around the second bearing pin 1023; the magnet 106 is arranged on one side surface of the rib plate 302 facing the base 104. In some embodiments of the present application, optionally, the gimbal frame 102 is of a square structure, and a circular through hole 1021 is provided at the central position. The lens support frame 301 is arranged in the through hole 1021, and the second bearing pin 1023 is arranged on the outer ring of the lens support frame and the inner wall of the through hole 1021.

[0039] Continue to refer to Figure 3 and Figure 4 As shown, the number of magnets 106 and coils 105 is four respectively. Among them, the magnet 106 includes two first magnets 1061 and two second magnets 1062. The first magnets 1061 and the second magnets 1062 are respectively arranged in the first axis and the second axis directions and are located at the opposite edges of the lens support frame 301. The first axis direction is represented by a straight line X', and the second axis direction is represented by a straight line Y'. The two axis directions are perpendicular to each other. The arrangement positions of the coils 105 on the PCB board 103 correspond to the arrangement positions of the first magnets 1061 and the second magnets 1062 on the lens support frame 301. For example, the first magnet 1061 and the first coil 1051 are correspondingly arranged, and the second magnet 1062 and the second coil 1052 are correspondingly arranged.

[0040] In the embodiments of the present application, the directions of the first axis and the second axis are set according to a preset combined running trajectory of two axes (for example, a sine-cosine waveform trajectory). Preferably, the first axis direction and the second axis direction in the present application are perpendicularly arranged. This setting method is relatively simple, easy to control, and the scanning accuracy of the reflected light by the mirror is relatively high.

[0041] In some embodiments of the present application, optionally, the surface of the mirror 101 facing the base 104 includes a diffused reflection surface of a grating, and the light emitted by the light source 107 is received by the light detection element 108 in a diffused reflection manner. In some embodiments of the present application, on the surface of the side of the mirror 101 facing the base 104, not only a smooth mirror surface can be provided so that the light source returns the light to the light detection element in a specular reflection manner, but also a diffused reflection surface of a grating can be provided so that the light source returns to the light detection element 108 in a diffused reflection manner.

[0042] Figure 6 is Figure 1 the D-direction view of the structure shown. Figure 7 is Figure 6 the sectional view of the structure shown along B-B. Combining Figure 2 , Figure 6 and Figure 7 as shown, a light-shielding cover 201 for reducing the interference of external light on the light detection element 108 is also provided around the light detection element 108. The light-shielding cover 201 is a conical structure with both ends open. Among them, along the direction from the base 104 to the mirror 101, the height of the light-shielding cover 201 is greater than the height of the light detection element 108. In addition, the top height of the light-shielding cover 201 is closely adjacent to the internal mirror (the surface of the mirror 101 facing the PCB board 103). When the mirror 101 swings to the maximum angle, the light detection element 108 can always be illuminated (or covered by the light spot) without blocking the light irradiation. Further, the light-shielding cover 201 is conical and is used as a mechanical limiting device for the mirror 101.

[0043] In some embodiments of the present application, optionally, the base 104 includes a receiving groove 1041, the PCB board 103 is fixed on the edge of the receiving groove 1041, and the coil 105 on the PCB board 103 is built in the receiving groove 1041.

[0044] Further, the two-dimensional electromagnetic galvanometer system 100 further includes a washer 202. The washer 202 is disposed between the gimbal frame 102 and the PCB board 103. Mounting holes 203 are provided on the gimbal frame 102, the washer 202, the PCB board 103, and the base 104. Fasteners 204 pass through the mounting holes 203 to sequentially fix the gimbal frame 102, the washer 202, and the PCB board 103 on the base 104. In some embodiments of the present application, optionally, the shapes of the washer 202, the PCB board 103, and the gimbal frame 102 are correspondingly arranged with each other.

[0045] To illustrate the working principle of the lens angle detection unit in the present application, taking the back surface of the mirror as the specular reflection example, Figure 8 shows the schematic diagram of the angle detection principle of the two-dimensional electromagnetic galvanometer system according to the embodiment of the present application. As Figure 8As shown, after the light emitted by the light source 107 is reflected by the surface of the mirror facing the base side, it returns to the surface where the light detection element 108 is located. The center of the light source 107 coincides with the center of the array of the light detection elements 108 and is in a plane. The four light detection elements 108 measure the movement of the light spot in two orthogonal directions, the X-axis and the Y-axis (the X-axis and the Y-axis are the projections of the rotation axes X' and Y' of the mirror), and then measure the deflection angle of the mirror surface. The photosensitive surface of the light detection element 108 receives the light reflected by the mirror 101, and a photoelectric effect is generated inside the light detection element 108, responding with a photocurrent proportional to the received optical power. When the mirror deflects, the optical power received by the light detection element 108 changes, and then the photocurrent of the light detection element 108 changes.

[0046] Among them, the light source 107 is approximately treated as a Lambertian point source. The photosensitive surfaces of the four array light detection elements 108 are always covered by the reflected light spot.

[0047] The working process of the system is as follows: The light source 107 emits light in the 940 nm band, which is incident on the photosensitive surface of the four-element light detection element 108 after being reflected by the front mirror surface. When the mirror surface on the back of the mirror realizes two-dimensional rotation, it can be approximately regarded as rotating around the X' axis and the Y' axis. The four-element light detection element converts the received light energy into four-way photocurrents. Among them, the photocurrent carrying angle information is collected by the closed-loop servo control system, and after being processed by the normalization sum-difference ratio algorithm, it controls the mechanical drive system to drive the mirror surface to deflect to the commanded angle.

[0048] Mirror deflection angle position signal:

[0049]

[0050] In the embodiment of the present application, since the beam angle A of the light source in the present application is relatively large (up to 120°) and the light is specularly reflected after passing through the back surface of the mirror (the surface facing the base side) and returns to the surface where the light detection element is located, the range of the reflected light is relatively large, the signal intensity received by the light detection element is relatively high, and the directionality is clear, so the detection accuracy of the light detection element can be improved.

[0051] In summary, in the two-dimensional electromagnetic mirror system proposed in the embodiment of the present application, by dispersedly arranging the magnets on the surface of the mirror facing the base, when the magnets are subjected to the Ampere force generated by the relatively arranged coils, the mirror can be quickly driven to rotate, thereby improving the response sensitivity of the mirror in the two-dimensional electromagnetic mirror system of the present application.

[0052] Moreover, compared with the prior art in which a magnetic column for driving the rotation of the reflection lens is provided at the exact center of the back surface of the reflection lens, in the embodiment of the present application, by dispersedly arranging the magnets, the surface of the reflection lens facing the PCB board can be provided with a mirror surface to reflect the light emitted by the light source in the lens angle detection unit. In this way, the distance from the light source to the mirror surface is increased, the coincidence degree between the true value and the calculated value of the mirror surface angle is improved, and the measurement accuracy of the rotation of the reflection lens is improved.

[0053] In addition, the two-dimensional electromagnetic galvanometer system proposed in the embodiment of the present application has a simple and compact structure, with a small and light structure and a built-in positioning feedback system inside, and can perform high-precision positioning control.

[0054] The above embodiments are only for illustrating the present application and are not intended to limit the present application. Those of ordinary skill in the relevant technical fields can make various changes and modifications without departing from the scope of the present application. Therefore, all equivalent technical solutions should also fall within the scope of the disclosure of the present application.

Claims

1. A two-dimensional electromagnetic galvanometer system, comprising a reflector, a universal joint frame, a mechanical drive unit, a PCB board and a base, wherein the reflector is arranged in the universal joint frame, the mechanical drive unit is fixed on the PCB board, the PCB board is fixed on the base, and the universal joint frame is fixedly connected to the base; under the action of the mechanical drive unit, the reflector can rotate around a first axis and / or a second axis arranged crosswise with each other in the universal joint frame, characterized in that: The driving unit comprises a plurality of coils and a plurality of magnets which are arranged correspondingly, the plurality of coils are arranged on the PCB board, and the plurality of magnets are evenly distributed on a surface of the reflector facing the base; The PCB board is also provided with a lens angle detection unit for detecting the rotation angle of the reflector.

2. The two-dimensional electromagnetic galvanometer system according to claim 1, characterized in that: The first axis and the second axis are perpendicular to each other.

3. The two-dimensional electromagnetic galvanometer system according to claim 1, characterized in that: The reflector is rotatably connected to the universal joint frame via a lens support frame, the lens support frame is arranged on a side surface of the reflector facing the base, and the magnet is arranged on a side surface of the lens support frame facing the base.

4. The two-dimensional electromagnetic galvanometer system according to claim 3, characterized in that: The number of the magnets and the coils is four respectively, wherein the magnets include two first magnets and two second magnets, the first magnets and the second magnets are respectively arranged in the direction of the first axis and the second axis and are located at opposite side edges of the lens support frame; the setting position of the coil on the PCB board corresponds to the setting position of the first magnet and the second magnet on the lens support frame.

5. The two-dimensional electromagnetic galvanometer system according to claim 3, characterized in that: The lens support frame includes concentric inner and outer rings, the outer side of the inner ring is protruded with ribs facing the inner side of the outer ring, the ribs include first ribs and second ribs, the outer edge of the first rib and the outer ring are rotatably connected via a first bearing pin; the position of the outer ring corresponding to the second rib and the universal joint frame are rotatably connected via a second bearing pin.

6. The two-dimensional electromagnetic galvanometer system according to claim 1, characterized in that: The lens angle detection unit includes a light source arranged on the same plane and a plurality of light detection elements arranged around the light source. The light emitted by the light source is reflected by the reflector toward a side surface of the base and then detected by the light detection element, and the angle deflection data of the reflector is output to an external control unit. The control unit controls the mechanical drive unit in a closed loop according to the angle deflection data to drive the reflector to deflect to the command angle.

7. The two-dimensional electromagnetic galvanometer system according to claim 6, characterized in that: A surface of the reflector facing the base includes a diffuse reflection surface of a grating, and the light emitted by the light source is received by the light detection element in a diffuse reflection manner.

8. The two-dimensional electromagnetic galvanometer system according to claim 6, characterized in that: The light source is an LED component, and the light detection element is a photocell component.

9. The two-dimensional electromagnetic galvanometer system according to claim 8, characterized in that: The photovoltaic cell assembly comprises at least four photovoltaic cells, and each photovoltaic cell is arranged within a sector area formed by two adjacent coils and a light source.

10. The two-dimensional electromagnetic galvanometer system according to claim 6, characterized in that: The light detection element is also surrounded by a light shield for reducing interference of external light on the light detection element. The light shield is a conical structure with open ends, wherein the height of the light shield from the base to the reflector is greater than the height of the light detection element.

11. The two-dimensional electromagnetic galvanometer system according to claim 1, characterized in that: The base comprises a receiving groove, the PCB board is fixed on the edge of the receiving groove, and the coil on the PCB board is built in the receiving groove.

12. The two-dimensional electromagnetic galvanometer system according to claim 1, characterized in that: It also includes a washer, which is arranged between the universal joint frame and the PCB board. The universal joint frame, the washer, the PCB board and the base are provided with mounting holes, and fasteners pass through the mounting holes to fix the universal joint frame, the washer and the PCB board on the base in sequence.

13. The two-dimensional electromagnetic galvanometer system according to claim 5, characterized in that: The universal joint frame is a square structure with a circular through hole at the central position. The lens support frame is arranged in the through hole. The second bearing pin passes through the outer ring of the lens support frame and the inner wall of the through hole.

14. The two-dimensional electromagnetic galvanometer system according to claim 12, characterized in that: The shapes of the gasket, the PCB board and the universal joint frame are arranged to correspond to each other.

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