Device for preparing microrod through plasma-electrolytic coupling

Abstract

The utility model provides a device for preparing a microrod through plasma-electrolysis coupling. The device comprises a clamping part, an electrolysis part, a power supply part and a first driving part, the clamping part is suitable for clamping a workpiece. The electrolysis part comprises a cathode plate and an electrolytic tank, the cathode plate is provided with a first hole, the workpiece is suitable for penetrating through the first hole, and the electrolytic tank is suitable for containing electrolyte. The power supply part comprises a positive electrode and a negative electrode, the positive electrode is connected with the clamping part, the negative electrode is connected with the negative plate, and the workpiece and the negative plate can be at least partially located in the electrolytic tank so that an electric field can be generated on the orifice edge of the first hole. The first driving part is configured to drive the clamping part to rotate, and the rotating axis of the clamping part is parallel to the axis of the first open hole. According to the scheme, the machining influence caused by centering errors of the clamping center of the clamping part and the first open hole and instability of an electric field can be reduced through rotation movement of the workpiece. Therefore, the machining precision can be improved, and the requirement for the workpiece clamping precision is lowered.

Description

Technical Field

[0001] The utility model relates to the field of plasma-electrolytic coupling processing, and particularly relates to a device for preparing micro-rods by plasma-electrolytic coupling. Background Art

[0002] The precision electronics industry has witnessed rapid development in the 21st century. Among them, the market demand for probe products is strong. The basic structure of a probe is a micro-rod. Precision micro-rods have extremely important applications in the engineering field, enabling micro-scale machining and high-precision transmission, and playing a key role in fields such as micro-electromechanical systems, precision manufacturing, biomedical engineering, and electron microscope equipment.

[0003] In related technologies, the processing methods of micro-rods mainly include precision mechanical grinding, wire electrode electrical discharge grinding, wire electrode electrolytic grinding, micro electrical discharge machining, micro electrolytic machining, electrochemical etching, and plasma-assisted electrochemical etching. Among them, in electrochemical etching, two electrodes are arranged opposite to each other, and the cathode is actually a counter electrode without motion control, so this method has relatively low requirements for the processing platform. Further, the method of plasma-assisted electrochemical etching can use the plasma discharge induced by electrochemistry to increase the temperature of the electrolyte, realizing thermal-electrochemical etching, and the fluid impact brought by the plasma discharge can disperse the mucus layer on the surface of the micro-rod, thus eliminating the processing inhibition caused by concentration polarization. However, due to the error in clamping the workpiece by the fixture and the instability of the electric field formed around the fixture in this method, the processing accuracy of the micro-rod is poor. Summary of the Utility Model

[0004] The main purpose of the utility model is to propose a device for preparing micro-rods by plasma-electrolytic coupling, which improves the processing accuracy and reduces the requirement for the clamping accuracy of the workpiece.

[0005] To achieve the above object, the embodiments of the utility model adopt the following technical solutions:

[0006] A device for preparing micro-rods by plasma-electrolytic coupling, used for processing a workpiece into a micro-rod, the device for preparing micro-rods by plasma-electrolytic coupling includes:

[0007] A clamping part adapted to clamp the workpiece;

[0008] An electrolytic part including a cathode plate and an electrolytic cell. The cathode plate has a first opening, and the workpiece is adapted to pass through the first opening. The electrolytic cell is adapted to accommodate an electrolyte;

[0009] A power supply part including a positive electrode and a negative electrode. The positive electrode is connected to the clamping part, and the negative electrode is connected to the cathode plate. At least part of the workpiece and the cathode plate can be located in the electrolytic cell so as to generate an electric field at the edge of the opening of the first opening;

[0010] The first driving part is configured to drive the clamping part to rotate, and the rotation axis of the clamping part is parallel to the axis of the first opening.

[0011] In some embodiments, the number of the clamping parts and the first openings are both multiple. The clamping parts are adapted to clamp a plurality of workpieces in one-to-one correspondence, and each workpiece is adapted to pass through each first opening in one-to-one correspondence. The first driving part is configured to drive each clamping part to rotate.

[0012] In some embodiments, the first driving part includes a first motor, a plurality of driving wheels and a belt. The first motor is drivingly connected to one of the driving wheels, each driving wheel is connected to each clamping part in one-to-one correspondence, and the belt is drivingly connected to each driving wheel.

[0013] In some embodiments, the first driving part further includes a tensioning wheel. The tensioning wheel is located between two adjacent driving wheels and abuts against the belt.

[0014] In some embodiments, the device for preparing micro-rods by plasma-electrolysis coupling further includes a rotating shaft. The rotating shaft is drivingly connected to the first driving part and is threadedly connected to the clamping part;

[0015] and / or,

[0016] The device for preparing micro-rods by plasma-electrolysis coupling further includes a support plate and a rotating shaft. The support plate has a second opening. The rotating shaft has a shaft shoulder. The rotating shaft passes through the second opening and is connected to the clamping part. Along the direction perpendicular to the axis of the second opening, the side of the support plate away from the clamping part is connected to the first driving part, and the side close to the clamping part abuts against the shaft shoulder.

[0017] In some embodiments, the device for preparing micro-rods by plasma-electrolysis coupling further includes a second driving part. The second driving part is configured to drive the cathode plate and the workpiece to move relative to each other along the direction parallel to the axis of the first opening.

[0018] In some embodiments, the second driving part includes a second motor and a screw rod. The screw rod is connected to the electrolytic cell. The cathode plate includes a ball nut. The ball nut has a threaded hole. The screw rod is in mating connection with the threaded hole. The second motor is configured to drive the screw rod to rotate and drive the cathode plate to perform a translational movement along the direction parallel to the axis of the first opening;

[0019] Or,

[0020] The second driving part includes a third motor. The third motor is connected to the clamping part and is configured to drive the clamping part to perform a translational movement along the direction parallel to the axis of the first opening.

[0021] In some embodiments, the second driving part is configured to drive the cathode plate to move in a direction parallel to the axis of the first opening. The second driving part further includes a guiding rod, the guiding rod is connected to the electrolytic cell, the cathode plate includes a guiding nut, the guiding nut has a third opening, the guiding rod passes through the third opening and is in rolling connection with the guiding nut, and in a direction perpendicular to the axis of the first opening, the driving end of the second driving part is arranged opposite to the guiding rod.

[0022] In some embodiments, the clamping part has elasticity to be suitable for clamping the workpiece;

[0023] and / or,

[0024] The diameter D1 of the workpiece suitable for being clamped by the clamping part satisfies: 0.1 mm ≤ D1 ≤ 1 mm.

[0025] In some embodiments, the diameter D2 of the first opening satisfies: 10 mm ≤ D2 ≤ 50 mm;

[0026] and / or,

[0027] In a direction parallel to the axis of the first opening, the dimension T of the cathode plate satisfies: 0.1 mm ≤ T ≤ 1 mm.

[0028] Compared with the prior art, the beneficial effects of the present utility model are:

[0029] The device for plasma-electrolytic coupling preparation of micro-rods of the present utility model includes a clamping part, an electrolytic part, a power supply part and a first driving part. The clamping part is suitable for clamping the workpiece. The electrolytic part includes a cathode plate and an electrolytic cell. The cathode plate has a first opening, the workpiece is suitable for passing through the first opening, and the electrolytic cell is suitable for accommodating the electrolyte. The power supply part includes a positive electrode and a negative electrode. The positive electrode is connected to the clamping part, and the negative electrode is connected to the cathode plate. During the processing of the workpiece, both the cathode plate and the workpiece are immersed in the electrolyte, so as to form an electrochemical etching environment under the action of an electric field, and an electric field is generated at the edge of the orifice of the first opening, and a spark discharge plasma breakdown is formed around the workpiece, and the surface material of the workpiece is removed thereby. And during this process, the workpiece rotates in the first opening, and the rotation axis of the workpiece is located in the first opening. Compared with the plasma-electrolytic coupling processing device in the related art, the solution of the present utility model can reduce the processing influence brought by the centering error between the clamping center of the clamping part and the first opening and the instability of the electric field through the rotational movement of the workpiece. Therefore, the device for plasma-electrolytic coupling preparation of micro-rods of the present utility model can improve the processing accuracy and reduce the requirement for the clamping accuracy of the workpiece. Description of the Drawings

[0030] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0031] Figure 1 It is a three-dimensional schematic diagram of a device for preparing micro-rods by plasma-electrolysis coupling provided in an embodiment of the present invention; wherein, along the direction parallel to the axis of the first opening, the cathode plate and the workpiece are in the first relative position, and only the connection between the positive electrode and one of the clamping parts is shown;

[0032] Figure 2 It is a three-dimensional schematic diagram of a device for preparing micro-rods by plasma-electrolysis coupling provided in an embodiment of the present invention; wherein, along the direction parallel to the axis of the first opening, the cathode plate and the workpiece are in the second relative position, and only the connection between the positive electrode and one of the clamping parts is shown;

[0033] Figure 3 It is a front view schematic diagram of a device for preparing micro-rods by plasma-electrolysis coupling provided in an embodiment of the present invention; wherein the power supply part and part of the electrolytic cell are removed.

[0034] Explanation of the reference numerals in the drawings:

[0035] 100 - Device for preparing micro-rods by plasma-electrolysis coupling;

[0036] 110 - Clamping part;

[0037] 120 - Electrolysis part; 121 - Cathode plate; 1211 - First opening; 1212 - Ball nut; 12121 - Threaded hole; 1213 - Guide nut; 12131 - Third opening; 122 - Electrolytic cell;

[0038] 130 - Power supply part;

[0039] 140 - First driving part; 141 - First motor; 142 - Driving wheel; 143 - Belt body; 144 - Tensioning wheel;

[0040] 150 - Rotating shaft; 151 - Axle shoulder;

[0041] 160 - Support plate; 161 - Second opening;

[0042] 170 - Second driving part; 171 - Second motor; 172 - Screw; 173 - Guide rod;

[0043] 200 - Workpiece.

[0044] The realization, functional features and advantages of the purpose of the present utility model will be further described with reference to the accompanying drawings in combination with the embodiments. Specific embodiments

[0045] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described with reference to the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0046] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) involved in the embodiments of the present utility model, the directional indications are only used to explain the relative position relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0047] In addition, if there are descriptions involving "first", "second", etc. in the embodiments of the present utility model, the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one such feature. In addition, if "and / or", "and / or" or "and / or" appear throughout the text, their meanings include three parallel solutions. Taking "A and / or B" as an example, it includes solution A, solution B, or a solution that satisfies both A and B at the same time. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the protection scope required by the present utility model.

[0048] In the related art, the processing methods of micro-rods mainly include precision mechanical grinding, wire electrode electrical discharge grinding, wire electrode electrolytic grinding, micro electrical discharge machining, micro electrolytic machining, electrochemical etching, and plasma-assisted electrochemical etching. Among them, electrochemical etching of micro-rods has the advantages of simple processing equipment, no contact between the tool electrode and the workpiece, no cutting force, no stress deformation, and good machining surface quality. It is an ideal technology for high-quality precision manufacturing of tungsten and its alloy micro-rods. However, due to the large distance between the two electrodes in this technology and the low current density used to achieve micro-removal of materials, the processing time of a single micro-rod is long and the processing efficiency is low. The electrochemical etching processing technology based on a bipolar power supply can promote the mass transfer efficiency on the workpiece surface and eliminate the passivation film, thereby improving the processing efficiency. However, in order to avoid excessive electrode loss during polarity reversal, the negative voltage is usually set relatively low, so the effect of promoting mass transfer is limited. In addition, due to the error in clamping the workpiece by the fixture and the instability of the electric field formed around the fixture in this method, the machining accuracy of the micro-rod is poor.

[0049] In view of this, referring to Figures 1-3 , in the embodiment of the present invention, a plasma-electrolysis coupling device 100 for preparing micro-rods is provided, which is used to process a workpiece 200 into a micro-rod. The plasma-electrolysis coupling device 100 for preparing micro-rods includes a clamping part 110, an electrolysis part 120, a power supply part 130, and a first driving part 140.

[0050] Specifically, referring to Figures 1-3 , the clamping part 110 is suitable for clamping the workpiece 200. According to different requirements, the workpiece 200 can have any suitable size and shape. For example, the workpiece 200 can be in the shape of a cylinder. In order to achieve electrical machining, the workpiece 200 can be a conductive metal, such as tungsten. Correspondingly, the clamping part 110 can clamp the workpiece 200 in different ways, and the clamping part 110 can have an adjustment structure to adapt to workpieces 200 of different sizes. For the specific setting of the clamping part 110, please refer to the following text.

[0051] Referring to Figures 1-2 , the electrolysis part 120 includes a cathode plate 121 and an electrolytic cell 122. The cathode plate 121 has a first opening 1211, and the workpiece 200 is suitable for passing through the first opening 1211. That is to say, under the clamping action of the clamping part 110, the workpiece 200 can pass through the first opening 1211. The electrolytic cell 122 is suitable for accommodating the electrolyte, and this electrolyte can provide an electrolytic environment for the processing of the workpiece 200. According to the processing requirements, the electrolyte can be of any suitable type. For example, the electrolyte can be an alkaline electrolyte, specifically, it can be an NaOH or KOH solution.

[0052] Referring to Figures 1-2, the power supply unit 130 includes a positive electrode and a negative electrode. The positive electrode is connected to the clamping part 110, and the negative electrode is connected to the cathode plate 121. At least part of the workpiece 200 and the cathode plate 121 can be located in the electrolytic cell 122 to generate an electric field at the orifice edge of the first opening 1211. Thus, the clamping part 110, the cathode plate 121, and the workpiece 200 should all be made of conductive materials. For example, the clamping part 110 or the cathode plate 121 can be made of any one of graphite, copper, stainless steel, tungsten steel, and platinum, and the clamping part 110 and / or the cathode plate 121 can be indirectly connected to the corresponding positive or negative electrode through other conductive structures (for example, the positive electrode can be connected to a conductive rotating shaft 150, and the rotating shaft 150 is further connected to the clamping part 110); the power supply unit 130 can be a bipolar power supply for electrolytic machining, and wires can be used to electrically connect the clamping part 110 and the cathode plate 121 respectively. When at least part of the clamping part 110 and the cathode plate 121 are immersed in the electrolyte and the power supply unit 130 provides a certain voltage, a discharge can be formed around the first opening 1211 and used to machine the workpiece 200. For the above machining effect, more specifically, in some embodiments, when actually machining, both the cathode plate 121 and the workpiece 200 are immersed in the electrolyte, and an electrochemical etching environment is formed under the action of the electric field. Moreover, the area of the workpiece 200 immersed in the electrolyte is smaller than that of the cathode plate. Therefore, the current is concentrated on the surface of the workpiece 200. Under the action of the electric field, the surface of the workpiece 200 is surrounded by hydrogen bubbles, causing the resistance on the surface of the workpiece 200 to rise rapidly, thereby generating a large amount of Joule heat. Further, a water vapor film is formed around the workpiece 200 to block the current flow. When the electric field strength between the two electrodes reaches 10 6 V·cm -1 or more, a spark discharge plasma breakdown is formed, and the surface material of the workpiece 200 is removed thereby, realizing the machining of the workpiece 200. The corrosion rate of the alkaline electrolyte at room temperature on the workpiece 200 is extremely low. By inducing the generation of plasma on the surface of the workpiece 200 as a metal electrode, the heat energy generated by its discharge makes the temperature in the machining area relatively high, thereby effectively promoting the electrochemical etching speed and making the machining efficiency higher.

[0053] During the machining process, the reaction equation occurring on the surface of the workpiece 200 can be (taking the workpiece 200 as tungsten metal as an example):

[0054]

[0055] 4OH – –4e – →2H 2 O+O 2 ↑

[0056] During the machining process, the reaction equation occurring on the surface of the cathode plate can be:

[0057] 2H 2O + 2e – → H 2 ↑ + 2OH –

[0058] Specifically, based on the above electro - machining process, refer to Figures 1-3 , the first driving part 140 is configured to drive the clamping part 110 to rotate around the axis of the first opening 1211, and the rotation axis of the clamping part 110 is parallel to the axis of the first opening 1211. This setting enables the workpiece 200 to also perform a rotational motion within the first opening 1211 during the machining process of the workpiece 200, and the rotation axis 150 of the workpiece 200 is located within the first opening 1211. Thus, the rotational motion of the workpiece 200 can reduce the machining influence caused by the misalignment error between the clamping center of the clamping part 110 and the centering of the first opening 1211 and the instability of the electric field, making the machining of the outer peripheral surface of the workpiece 200 more uniform, that is, increasing the machining accuracy and reducing the requirement for the clamping accuracy of the workpiece 200, making the operation more convenient. In actual operation, clamping errors are inevitable, resulting in one side of the workpiece 200 being closer to the pore wall of the first opening 1211 and the other side being farther from the pore wall of the first opening 1211. However, under the rotational condition of the workpiece 200, each point of the workpiece 200 can experience the near - zone and far - zone of machining, thus making the overall machining uniform.

[0059] According to the combination of the above - mentioned embodiments, it can be seen that the plasma - electrolytic coupling device 100 for preparing micro - rods of the present invention includes a clamping part 110, an electrolytic part 120, a power supply part 130, and a first driving part 140. The clamping part 110 is adapted to clamp the workpiece 200. The electrolytic part 120 includes a cathode plate 121 and an electrolytic cell 122. The cathode plate 121 has a first opening 1211, and the workpiece 200 is adapted to pass through the first opening 1211. The electrolytic cell 122 is adapted to accommodate the electrolyte. The power supply part 130 includes a positive electrode and a negative electrode. The positive electrode is connected to the clamping part 110, and the negative electrode is connected to the cathode plate 121. During the machining process of the workpiece 200, both the cathode plate 121 and the workpiece 200 are immersed in the electrolyte, thereby forming an electrochemical etching environment under the action of the electric field, and generating an electric field at the edge of the pore mouth of the first opening 1211. A spark - discharge plasma breakdown is formed around the workpiece 200, and the surface material of the workpiece 200 is removed accordingly. And during this process, the workpiece 200 performs a rotational motion within the first opening 1211, and the rotation axis 150 of the workpiece 200 is located within the first opening 1211. Compared with the plasma - electrolytic coupling machining device in the related art, the solution of the present invention can reduce the machining influence caused by the misalignment error between the clamping center of the clamping part 110 and the centering of the first opening 1211 and the instability of the electric field through the rotational motion of the workpiece 200. Therefore, the plasma - electrolytic coupling device 100 for preparing micro - rods of the present invention can improve the machining accuracy and reduce the requirement for the clamping accuracy of the workpiece 200.

[0060] In some embodiments, the clamping portion 110 is elastic to be suitable for clamping the workpiece 200. Thus, the clamping portion 110 may specifically be a collet chuck, which has good centering property and can make the clamping position of the workpiece 200 more accurate and stable.

[0061] In addition, to further improve the machining accuracy, refer to Figures 1-3 , in some embodiments, the number of the clamping portions 110 and the first openings 1211 are both multiple. The clamping portions 110 are suitable for clamping a plurality of workpieces 200 one by one, each workpiece 200 is suitable for passing through each first opening 1211 one by one, and the first driving portion 140 is configured to drive each clamping portion 110 to rotate. The above arrangement can enable the plurality of clamping portions 110 to clamp a plurality of workpieces 200 respectively and be processed together in the electrolytic environment, thereby making the machining efficiency higher. At this time, the rotation axis of the first driving portion 140 configured to drive each clamping portion 110 to rotate may coincide with the axis of the first opening 1211, so that the machining uniformity of the workpiece 200 is higher. In other embodiments, one clamping portion 110 can clamp a plurality of workpieces 200 at the same time, and can also improve the machining efficiency. And according to requirements, the shapes and sizes between the first openings 1211 and the structures and sizes of the workpieces 200 suitable for being clamped between the clamping portions 110 can be the same or different.

[0062] Based on the arrangement of the plurality of clamping portions 110 and the first openings 1211, refer to Figures 1-3 , in some embodiments, the first driving portion 140 includes a first motor 141, a plurality of driving wheels 142 and a belt body 143. The first motor 141 is drivingly connected to one of the driving wheels 142, each driving wheel 142 is connected to each clamping portion 110 one by one, and the belt body 143 is drivingly connected to the driving wheels 142. This arrangement can enable the first motor 141 to synchronously drive each clamping portion 110 to rotate, thereby making the machining efficiency higher and the machining consistency between the workpieces 200 higher. The above driving wheel 142 may specifically be a timing pulley, and the belt body 143 may specifically be a timing belt. The timing belt and the timing pulley can form a tooth-shaped fit. When the timing pulley rotates, it transmits motion and power to the timing belt through the engagement of teeth and tooth grooves, thereby avoiding slipping during the transmission process and ensuring the accuracy and stability of the transmission. Further, in some embodiments, the first driving portion 140 further includes a tensioning pulley 144. The tensioning pulley 144 is located between two adjacent driving wheels 142 and abuts against the belt body 143. This arrangement enables the tensioning pulley 144 to press the belt body 143 to provide a normal pressure and avoid slipping. In other embodiments, the transmission form between the driving wheel 142 and the belt body 143 may also be replaced by other flexible transmission forms or transmitted in the way of gear meshing.

[0063] For other structures connecting the clamping part 110, refer to Figures 1-3 , in some embodiments, the device 100 for preparing micro-rods by plasma-electrolysis coupling further includes a rotating shaft 150. The rotating shaft 150 is drivingly connected to the first driving part 140 and is threadedly connected to the clamping part 110. It can be understood that the rotating shaft 150 can indirectly connect the first driving part 140 to the clamping part 110, thus facilitating the structural design of the clamping part 110 more conveniently. Moreover, the above-mentioned threaded connection method is more convenient for disassembling and assembling the clamping part 110 or clamping the workpiece 200. In addition, according to requirements, the rotating shaft 150 can have any suitable structural shape, such as a cylinder or a rectangular body.

[0064] In addition, refer to Figures 1-3 , in some embodiments, the device 100 for preparing micro-rods by plasma-electrolysis coupling further includes a support plate 160 and a rotating shaft 150. Among them, the support plate 160 has a second opening 161. The setting of the rotating shaft 150 can refer to the above-mentioned embodiments. The rotating shaft 150 has a shaft shoulder 151, which is the part with a larger radial dimension of the rotating shaft 150. Thus, the rotating shaft 150 can pass through the second opening 161 and be connected to the clamping part 110 in a direction perpendicular to the axis of the second opening 161. The side of the support plate 160 away from the clamping part 110 can be connected to the first driving part 140, and the side close to the clamping part 110 can abut against the shaft shoulder 151. It can be understood that one side of the support plate 160 can be used to set the first driving part 140 (for example, it can be connected to the first motor 141 and multiple driving wheels 142 in the above-mentioned embodiments), and the other side can set the clamping part 110. At the same time, when the rotating shaft 150 passes through the second opening 161, the shaft shoulder 151 can also be used to abut against the support plate 160 on the side where the clamping part 110 is set, so that the rotating shaft 150 can be quickly positioned during the assembly process, making the assembly more reliable.

[0065] In addition, in order to be suitable for processing micro-rods with a larger aspect ratio, refer to Figures 1-3 , in some embodiments, the device 100 for preparing micro-rods by plasma-electrolysis coupling further includes a second driving part 170. The second driving part 170 is configured to drive the cathode plate 121 and the workpiece 200 to move relatively in a direction parallel to the axis of the first opening 1211. For details, refer to Figure 1 and Figure 2, an embodiment for driving the movement of the cathode plate 121 is shown, and two height positions of the cathode plate 121 relative to the workpiece 200 are respectively shown. That is to say, the second driving part 170 can drive the cathode plate 121 to move relative to the workpiece 200, or drive the workpiece 200 to move relative to the cathode plate 121. Also, since an electric field is generated at the orifice edge of the first opening 1211, the relative movement between the cathode plate 121 and the workpiece 200 can realize the relative movement of the electric field concentration area, thereby realizing the etching of the workpiece 200 with a large aspect ratio and preparing a micro-rod with a large aspect ratio.

[0066] Based on the second driving part 170 defined above, more specifically, refer to Figures 1-3 , in some embodiments, the second driving part 170 includes a second motor 171 and a screw 172. The screw 172 is connected to the electrolytic cell 122. The cathode plate 121 includes a ball nut 1212 which has a threaded hole 12121. The screw 172 is in mating connection with the threaded hole 12121. The second motor 171 is configured to drive the screw 172 to rotate and drive the cathode plate 121 to translate in a direction parallel to the axis of the first opening 1211. More specifically, when the second motor 171 rotates forward, the cathode plate 121 moves upward, and when the second motor 171 rotates in reverse, the cathode plate 121 moves downward. The form of the second motor 171 driving the cathode plate 121 can refer to the driving principle of the lead screw drive, that is, the rotational movement of the output end of the second motor 171 can be converted into the translational movement of the cathode plate 121.

[0067] Also for driving the cathode plate 121, in some other embodiments, the second driving part 170 includes a third motor. The third motor is connected to the cathode plate 121 and is configured to drive the cathode plate 121 to translate in a direction parallel to the axis of the first opening 1211. It can be understood that the difference between this type of embodiment and the previous type of embodiment is that the third motor is directly connected to and drives the cathode plate 121. Thus, the third motor can be a linear motor. To achieve a similar effect, in some other embodiments, devices suitable for linear expansion and contraction such as air cylinders, electric cylinders, and hydraulic cylinders can also be used to replace the third motor.

[0068] In still some other embodiments, the clamping part 110 can also be driven to form the relative movement between the cathode plate 121 and the workpiece 200, that is, the second driving part 170 can be connected to the clamping part 110 and is configured to drive the clamping part 110 to move in a direction parallel to the axis of the first opening 1211. When there are multiple clamping parts 110, each clamping part 110 can be driven to move synchronously or separately according to requirements, and the driving form of driving the clamping part 110 can refer to the driving form of the second motor 171 or the third motor driving the cathode plate 121 in the above embodiments, which will not be elaborated here.

[0069] Based on the second driving part 170 defined above and the embodiment in which the second driving part 170 drives the cathode plate 121 to move, in order to make the relative movement between the cathode plate 121 and the workpiece 200 more stable and reliable, refer to Figures 1-3 , in some embodiments, the second driving part 170 further includes a guide rod 173. The guide rod 173 is connected to the electrolytic cell 122. The cathode plate 121 includes a guide nut 1213. The guide nut 1213 has a third opening 12131. The guide rod 173 passes through the third opening 12131 and is in rolling connection with the guide nut 1213. Along the direction perpendicular to the axis of the first opening 1211, the driving end of the second driving part 170 is arranged opposite to the guide rod 173. It can be understood that considering the actual arrangement requirements of the cathode plate 121, the installation position of the second driving part 170 (and the transmission parts cooperating with it, such as the screw rod 172) may deviate from the center of gravity of the cathode plate 121, making the cathode plate 121 prone to unstable center of gravity, and the above problem is exacerbated when the second driving part 170 or the transmission parts cooperating with it also support the cathode plate 121. Therefore, by arranging the guide rod 173 opposite to the driving end of the second driving part 170 (when driven by a motor, it is the output shaft of the motor) and making the guide rod 173 cooperate with the third opening 12131, a mechanical support can be formed for the cathode plate 121 to assist the cathode plate 121 to move up and down. For the rolling connection and cooperation between the guide rod 173 and the guide nut 1213, the inner peripheral wall of the guide nut 1213 can be provided with balls. When the guide rod 173 extends into the third opening 12131, it contacts the balls, thereby realizing the rolling connection. This cooperation form can not only make the guide rod 173 provide a supporting force for the cathode plate 121, but also does not hinder the second driving part 170 from driving the cathode plate 121.

[0070] In addition, various parameters can also be limited. On the one hand, in some embodiments, the diameter D1 of the workpiece 200 that the clamping part 110 is configured to clamp satisfies: 0.1 mm ≤ D1 ≤ 1 mm. This setting is suitable for processing micro-rods with smaller sizes and larger length-diameter ratios. On the other hand, in some embodiments, the diameter D2 of the first opening 1211 satisfies: 10 mm ≤ D2 ≤ 50 mm. This setting can make the electro-machining effect better and can be used to process micro-rods of various sizes. On the other hand, in some embodiments, along the direction parallel to the axis of the first opening 1211, the size T of the cathode plate 121 satisfies: 0.1 mm ≤ T ≤ 1 mm. By limiting the thickness size of the cathode plate 121 as the cathode, this setting can induce a more concentrated electric field.

[0071] The above are only the preferred embodiments of the present utility model, and do not limit the patent scope of the present utility model accordingly. Any equivalent structural transformation made by using the content of the specification and drawings of the present utility model under the application concept of the present utility model, or any direct / indirect application in other related technical fields shall be included within the patent protection scope of the present utility model.

Claims

1. A device for preparing microrods by plasma-electrolysis coupling, used for processing a workpiece into microrods, characterized in that: The device for preparing microrods by plasma-electrolysis coupling comprises: A clamping portion, adapted to clamp the workpiece; The electrolysis part comprises a cathode plate and an electrolytic cell, wherein the cathode plate has a first opening, the workpiece is adapted to be inserted into the first opening, and the electrolytic cell is adapted to contain an electrolyte; A power supply portion, comprising a positive electrode and a negative electrode, wherein the positive electrode is connected to the clamping portion, and the negative electrode is connected to the cathode plate, wherein both the workpiece and the cathode plate are at least partially located in the electrolytic cell, so that an electric field is generated at the edge of the opening of the first opening; The first driving part is configured to drive the clamping part to rotate, and the rotation axis of the clamping part is parallel to the axis of the first opening.

2. The device for preparing microrods by plasma-electrolysis coupling according to claim 1, characterized in that: The number of the clamping parts and the first openings are both multiple, the clamping parts are suitable for clamping the multiple workpieces one by one, each workpiece is suitable for being inserted into each first opening one by one, and the first driving part is configured to drive each clamping part to rotate.

3. The device for preparing microrods by plasma-electrolysis coupling according to claim 2, characterized in that: The first driving part includes a first motor, a plurality of driving wheels and a belt body, the first motor is drivingly connected to one of the driving wheels, each of the driving wheels is connected to each of the clamping parts in a one-to-one correspondence, and the belt body is drivingly connected to each of the driving wheels.

4. The device for preparing microrods by plasma-electrolysis coupling according to claim 3, characterized in that: The first driving part further includes a tensioning wheel, which is located between two adjacent driving wheels and abuts against the belt body.

5. The device for preparing microrods by plasma-electrolysis coupling according to claim 1, characterized in that: The device for preparing microrods by plasma-electrolysis coupling further comprises a rotating shaft, which is transmission-connected to the first driving part and threadedly connected to the clamping part; and / or, The device for preparing microrods by plasma-electrolysis coupling also includes a support plate and a rotating shaft, wherein the support plate has a second opening, and the rotating shaft has a shoulder. The rotating shaft passes through the second opening and is connected to the clamping portion. Along a direction perpendicular to the axis of the second opening, the side of the support plate away from the clamping portion is connected to the first driving portion, and the side close to the clamping portion abuts against the shoulder.

6. The device for preparing microrods by plasma-electrolysis coupling according to claim 1, characterized in that: The device for preparing microrods by plasma-electrolysis coupling further includes a second driving unit, which is configured to drive the cathode plate and the workpiece to move relative to each other along a direction parallel to the axis of the first opening.

7. The device for preparing microrods by plasma-electrolysis coupling according to claim 6, characterized in that: The second driving part includes a second motor and a screw, the screw is connected to the electrolytic cell, the cathode plate includes a ball nut, the ball nut has a threaded hole, the screw is matched and connected with the threaded hole, and the second motor is configured to drive the screw to rotate and drive the cathode plate to translate along a direction parallel to the axis of the first opening; or, The second driving portion includes a third motor, which is connected to the clamping portion and is configured to drive the clamping portion to translate along a direction parallel to the axis of the first opening.

8. The device for preparing microrods by plasma-electrolysis coupling according to claim 6, characterized in that: The second driving part is configured to drive the cathode plate to move in a direction parallel to the axis of the first opening. The second driving part also includes a guide rod, which is connected to the electrolytic cell. The cathode plate includes a guide nut, which has a third opening. The guide rod is inserted into the third opening and is rollingly connected to the guide nut. Along a direction perpendicular to the axis of the first opening, the driving end of the second driving part is arranged opposite to the guide rod.

9. The device for preparing microrods by plasma-electrolysis coupling according to claim 1, characterized in that: The clamping portion is elastic so as to be suitable for clamping the workpiece; and / or, The clamping portion is configured to be suitable for clamping a workpiece whose diameter D1 satisfies: 0.1 mm≤D1≤1 mm.

10. The device for preparing microrods by plasma-electrolysis coupling according to claim 1, characterized in that: The diameter D2 of the first opening satisfies: 10 mm ≤ D2 ≤ 50 mm; and / or, Along a direction parallel to the axis of the first opening, a dimension T of the cathode plate satisfies: 0.1 mm≤T≤1 mm.

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