Double-chuck silicon rod transplanting mechanical arm

Abstract

The utility model relates to the technical field of silicon rod transplanting, in particular to a double-chuck silicon rod transplanting mechanical arm which comprises a double-chuck mounting plate, two fixing blocks and two sliding rails are fixedly connected to one side of the double-chuck mounting plate, the fixing blocks are located at the positions of the upper end direction of the double-chuck mounting plate, and the sliding rails are located at the two ends of the double-chuck mounting plate. The sliding rails are located in the lower end direction of the double-chuck mounting plate, and the two fixing blocks and the two sliding rails are symmetrically arranged. The output end of the telescopic air cylinder extends out to drive the connecting protruding block, the finger air cylinders and the like to move downwards, the two finger air cylinders are staggered, the output ends of the finger air cylinders clamp and drive the two corresponding clamps to clamp the silicon rods, the other clamp can clamp the silicon rods in the same mode, the transplanting capacity is improved, and the transplanting efficiency is improved. By means of the mechanical arm feeding device, frequent reciprocating movement is reduced, abrasion of the mechanical arm is reduced, then the failure rate of the mechanical arm is reduced, after machined silicon rods are taken out of a machining station, feeding can be conducted immediately, and the machining efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon rod transplanting, in particular to a robotic arm for transplanting silicon rods with double chucks. Background Art

[0002] A silicon rod is a rod-shaped object made of silicon material. Silicon rods are usually used in the fields of semiconductors and photovoltaics. The production of silicon rods usually adopts processes such as the Czochralski method or the zone melting method. During the production process of silicon rods, it is often necessary to transplant the silicon rods, moving the silicon rods from one position to another. Silicon rod transplanting is an important link in the production process of silicon rods. During the transplanting process, the silicon rods need to be kept stable to avoid collision and vibration.

[0003] When transplanting silicon rods, a robotic arm is generally used to transplant the silicon rods, moving the silicon rods from the loading station to the processing station. After processing, it is then moved from the processing station to the inspection station. After inspection, the qualified silicon rods are moved to the unloading station. Existing robotic arms all have a single chuck and can only transplant one silicon rod at a time. The ability to transplant silicon rods is low, resulting in the robotic arm being unable to supply silicon rods to the processing station in a timely manner, reducing the processing efficiency of silicon rods. In addition, the robotic arm needs to reciprocate more frequently, increasing the wear of the robotic arm and increasing the failure rate of the robotic arm.

[0004] Therefore, it is urgent to improve the robotic arm for transplanting silicon rods with double chucks to solve the above existing problems. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a robotic arm for transplanting silicon rods with double chucks. When the output end of the telescopic cylinder extends, it drives the connecting convex block to move downward. The connecting convex block drives the cylinder fixing plate and the slider to move on the slide rail. The slide rail has a guiding function for the movement of the cylinder fixing plate, increasing the stability of the movement of the cylinder fixing plate. The cylinder fixing plate drives the finger cylinder to move downward, causing the two finger cylinders to be misaligned. The output end of the finger cylinder clamps to drive the corresponding two clamps to clamp, clamping the silicon rod. When the output end of the telescopic cylinder retracts, it drives the finger cylinder and the silicon rod clamped by the clamp to move upward. Using the same method, another set of clamps can clamp a silicon rod, which can increase the number of silicon rod transplants, improve the transplanting ability, reduce the frequent reciprocating movement, reduce the wear of the robotic arm, and thus reduce the failure rate of the robotic arm. After the processed silicon rods are taken out from the processing station, the robotic arm can immediately feed the processing station, improving the processing efficiency.

[0006] To achieve the above object, the main technical solution adopted by the present utility model includes: a double chuck mounting plate, on one side of which are fixedly connected two fixing blocks and two slide rails. The fixing blocks are located at the upper position of the double chuck mounting plate, and the slide rails are located at the lower position of the double chuck mounting plate. The two fixing blocks and the two slide rails are symmetrically placed. A slider is slidably connected to the slide rail, and on the other side of the slider is fixedly connected a cylinder fixing plate. On the other side of the cylinder fixing plate are fixedly connected a connecting convex block and a finger cylinder. The connecting convex block is located at the upper position of the cylinder fixing plate, and the finger cylinder is located at the lower position of the cylinder fixing plate. On one side of the fixing block is fixedly connected a telescopic cylinder, and the output end of the telescopic cylinder penetrates through one side of the fixing block and is fixedly connected to the corresponding connecting convex block. On each of the two output ends of the finger cylinder is fixedly connected a fixture.

[0007] Preferably, on the side of the double chuck mounting plate away from the slide rail are fixedly connected two sensor mounting plates, and at the lower end of the sensor mounting plate is fixedly installed a photoelectric sensor. The photoelectric sensor is located between the corresponding two fixtures, and the lower surface of the photoelectric sensor is higher than the fixtures.

[0008] Preferably, on the side of the double chuck mounting plate away from the fixing block is fixedly connected a first connecting member, and on the other side of the first connecting member is connected a vertical transplanting assembly.

[0009] Preferably, the vertical transplanting assembly includes a vertical moving member, a vertical slideway and a first motor. The first motor is connected to the upper end of the vertical slideway and is used to provide driving force for the vertical slideway. The vertical moving member is slidably connected to one side of the vertical slideway, and the vertical slideway is used for vertically transplanting the vertical moving member. The other side of the vertical moving member is fixedly connected to the other side of the first connecting member.

[0010] Preferably, on the other side of the vertical slideway is fixedly connected a second connecting member, and on the other side of the second connecting member is connected a horizontal transplanting assembly.

[0011] Preferably, the horizontal transplanting assembly includes a horizontal moving member, a horizontal slideway and a second motor. The horizontal moving member is slidably connected to one side of the horizontal slideway, and the horizontal moving member is fixedly connected to the second connecting member. The second motor is connected to one end of the horizontal slideway and is used to provide driving force for the horizontal slideway. The horizontal slideway is used for horizontally transplanting the horizontal moving member.

[0012] Preferably, one end of each of the vertical slideway and the horizontal slideway is fixedly installed with a first limit position sensor, and the other end of each of the vertical slideway and the horizontal slideway is fixedly installed with a second limit position sensor and a home position sensor, and the home position sensor is located between the first limit position sensor and the second limit position sensor.

[0013] The utility model has at least the following beneficial effects:

[0014] 1. When the output end of the telescopic cylinder extends, it drives the connecting lug to move downward. The connecting lug drives the cylinder fixing plate and the slider to move on the slide rail. The slide rail has a guiding function for the movement of the cylinder fixing plate, increasing the stability of the movement of the cylinder fixing plate. The cylinder fixing plate drives the finger cylinder to move downward, causing the two finger cylinders to be misaligned. The finger cylinder clamps through the output end to drive the corresponding two clamps to clamp, and the silicon rod is clamped. When the output end of the telescopic cylinder retracts, it drives the finger cylinder and the silicon rod clamped by the clamp to move upward. Using the same method, another set of clamps can clamp a silicon rod, which can increase the number of silicon rod transplants, improve the transplanting ability, reduce frequent reciprocating movements, reduce the wear of the robotic arm, and thus reduce the failure rate of the robotic arm. After the processed silicon rod is taken out from the processing station, the processing can be immediately loaded, improving the processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The drawings described herein are used to provide a further understanding of the present application, and constitute a part of the present application. The illustrative embodiments and descriptions thereof of the present application are used to explain the present application, and do not constitute an improper limitation of the present application. In the drawings:

[0016] Figure 1 is a three-dimensional schematic diagram provided by the present utility model;

[0017] Figure 2 is provided by the present utility model Figure 1 is an enlarged schematic diagram at A in

[0018] Figure 3 is a partial structural schematic diagram provided by the present utility model;

[0019] Figure 4 is a schematic diagram of the vertical transplanting assembly provided by the present utility model;

[0020] Figure 5 is a schematic diagram of the horizontal transplanting assembly provided by the present utility model.

[0021] In the figure, 101 is a double chuck mounting plate; 102 is a fixing block; 103 is a slide rail; 104 is a slider; 105 is a cylinder fixing plate; 106 is a connecting lug; 107 is a telescopic cylinder; 108 is a finger cylinder; 109 is a fixture; 201 is a sensor mounting plate; 202 is a photoelectric sensor; 3 is a vertical transplanting assembly; 301 is a first connecting member; 302 is a vertical moving member; 303 is a vertical slideway; 304 is a first motor; 4 is a horizontal transplanting assembly; 401 is a second connecting member; 402 is a horizontal moving member; 403 is a horizontal slideway; 404 is a second motor; 501 is a first limit position sensor; 502 is a second limit position sensor; 503 is a home position sensor. Detailed implementation manners

[0022] The following will, in conjunction with the accompanying drawings and embodiments, elaborate in detail on the implementation manners of the present application, so as to fully understand the implementation process of how the present application uses technical means to solve technical problems and achieve technical effects and implement accordingly.

[0023] As Figures 1-5As shown in the figure, the double-chuck transplanting silicon rod manipulator provided in this embodiment includes a double-chuck mounting plate 101. On one side of the double-chuck mounting plate 101, two fixing blocks 102 and two slide rails 103 are fixedly connected. The fixing blocks 102 are located at the upper end position of the double-chuck mounting plate 101, and the slide rails 103 are located at the lower end position of the double-chuck mounting plate 101. The two fixing blocks 102 and the two slide rails 103 are symmetrically placed. A slider 104 is slidably connected to the slide rail 103. On the other side of the slider 104, a cylinder fixing plate 105 is fixedly connected. On the other side of the cylinder fixing plate 105, a connecting lug 106 and a finger cylinder 108 are fixedly connected. The connecting lug 106 is located at the upper end position of the cylinder fixing plate 105, and the finger cylinder 108 is located at the lower end position of the cylinder fixing plate 105. On one side of the fixing block 102, a telescopic cylinder 107 is fixedly connected. The output end of the telescopic cylinder 107 penetrates through one side of the fixing block 102 and is fixedly connected to the corresponding connecting lug 106. On both output ends of the finger cylinder 108, a clamp 109 is fixedly connected. By the output end of the telescopic cylinder 107 extending out, it drives the connecting lug 106 to move downward. The connecting lug 106 drives the cylinder fixing plate 105 and the slider 104 to move on the slide rail 103. The slide rail 103 has a guiding function for the movement of the cylinder fixing plate 105, increasing the stability of the movement of the cylinder fixing plate 105. The cylinder fixing plate 105 drives the finger cylinder 108 to move downward, causing the two finger cylinders 108 to be misaligned. By the output ends of the finger cylinders 108 clamping, the corresponding two clamps 109 are driven to clamp, and the silicon rod is clamped and taken. By the output end of the telescopic cylinder 107 retracting, it drives the finger cylinder 108 and the silicon rod clamped by the clamp 109 to move upward. Using the same method, another set of clamps 109 can clamp a silicon rod, which can increase the number of silicon rod transplants and improve the transplanting ability.

[0024] Secondly, as Figure 2 and Figure 3 shown, on the side of the double-chuck mounting plate 101 away from the slide rail 103, two sensor mounting plates 201 are fixedly connected. At the lower end of the sensor mounting plate 201, a photoelectric sensor 202 is fixedly installed. The photoelectric sensor 202 is located between the corresponding two clamps 109, and the lower surface of the photoelectric sensor 202 is higher than the clamp 109. The photoelectric sensor 202 provided on the sensor mounting plate 201 is used to detect whether there is a silicon rod at the feeding station, and is used to feedback the presence or absence of the rod at the feeding station.

[0025] Furthermore, as Figure 3 and Figure 4As shown in the figure, on the side of the double chuck mounting plate 101 away from the fixed block 102, a first connecting piece 301 is fixedly connected. On the other side of the first connecting piece 301, a vertical transplanting assembly 3 is connected. The vertical transplanting assembly 3 includes a vertical moving member 302, a vertical slideway 303, and a first motor 304. The first motor 304 is connected to the upper end of the vertical slideway 303. The first motor 304 is used to provide driving force to the vertical slideway 303. The vertical moving member 302 is slidably connected to one side of the vertical slideway 303. The vertical slideway 303 is used to vertically transplant the vertical moving member 302. The other side of the vertical moving member 302 is fixedly connected to the other side of the first connecting piece 301. Through the vertical transplanting assembly 3, the components connected to the first connecting piece 301 are moved, driving the finger cylinder 108 to move in the vertical direction, and positioning the clamping and discharging of the stick in the vertical direction.

[0026] Furthermore, as Figure 4 and Figure 5 shown in the figure, on the other side of the vertical slideway 303, a second connecting piece 401 is fixedly connected. On the other side of the second connecting piece 401, a horizontal transplanting assembly 4 is connected. The horizontal transplanting assembly 4 includes a horizontal moving member 402, a horizontal slideway 403, and a second motor 404. The horizontal moving member 402 is slidably connected to one side of the horizontal slideway 403. The horizontal moving member 402 is fixedly connected to the second connecting piece 401. The second motor 404 is connected to one end of the horizontal slideway 403. The second motor 404 is used to provide driving force to the horizontal slideway 403. The horizontal slideway 403 is used to horizontally transplant the horizontal moving member 402. Through the horizontal transplanting assembly 4, the connecting components on the second connecting piece 401 are moved in the horizontal direction, driving the finger cylinder 108 to move, and positioning the clamping and discharging of the stick in the horizontal direction.

[0027] Even further, as Figure 4 and Figure 5 shown in the figure, at one end of both the vertical slideway 303 and the horizontal slideway 403, a first limit position sensor 501 is fixedly installed. At the other end of both the vertical slideway 303 and the horizontal slideway 403, a second limit position sensor 502 and a home position sensor 503 are fixedly installed. The home position sensor 503 is located between the first limit position sensor 501 and the second limit position sensor 502. The first limit position sensor 501 and the second limit position sensor 502 are used to protect the vertical transplanting assembly 3 and the horizontal transplanting assembly 4, preventing the movement of the vertical transplanting assembly 3 and the horizontal transplanting assembly 4 from exceeding the mechanical stroke.

[0028] As Figures 1-5As shown in the figure, the principle of the double chuck silicon rod transplanting robotic arm provided in this embodiment is as follows: When using the double chuck to grasp the silicon rod, the output end of the telescopic cylinder 107 extends to drive the connecting convex block 106 to move downward. The connecting convex block 106 drives the cylinder fixing plate 105 and the slider 104 to move on the slide rail 103. The slide rail 103 has a guiding function for the movement of the cylinder fixing plate 105, increasing the stability of the movement of the cylinder fixing plate 105. The cylinder fixing plate 105 drives the finger cylinder 108 to move downward, causing the two finger cylinders 108 to open in a staggered manner. The output end of the finger cylinder 108 clamps to drive the corresponding two clamps 109 to clamp, grasping the silicon rod. When the output end of the telescopic cylinder 107 retracts, it drives the finger cylinder 108 and the silicon rod grasped by the clamp 109 to move upward. Using the same method, another set of clamps 109 can grasp a silicon rod, which can increase the number of silicon rod transplants and improve the transplanting ability.

[0029] As used in the specification and claims, certain terms are used to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different terms to refer to the same component. The specification and claims do not use the difference in names as a way to distinguish components, but rather use the difference in the functions of components as the criterion for distinction. As mentioned throughout the specification and claims, the term "comprising" is an open-ended term and should be interpreted as "including but not limited to". "Substantially" means within an acceptable error range. Those skilled in the art can solve technical problems within a certain error range and basically achieve the technical effect.

[0030] It should be noted that the term "including", "comprising" or any other variant thereof is intended to cover non-exclusive inclusion, so that a commodity or system including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such a commodity or system. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of another identical element in the commodity or system including the element.

[0031] The above description shows and describes several preferred embodiments of the present invention. However, as mentioned above, it should be understood that the present invention is not limited to the form disclosed herein, should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be changed within the scope of the inventive concept described herein through the above teachings or the technology or knowledge in related fields. Any changes and variations made by those skilled in the art without departing from the spirit and scope of the present invention shall fall within the protection scope of the appended claims of the present invention.

Claims

1. A double-chuck silicon rod transplanting robot arm, comprising a double-chuck mounting plate (101), characterized in that: Two fixed blocks (102) and two slide rails (103) are fixedly connected to one side of the double chuck mounting plate (101); the fixed block (102) is located at the upper end of the double chuck mounting plate (101); the slide rails (103) are located at the lower end of the double chuck mounting plate (101); the two fixed blocks (102) and the two slide rails (103) are symmetrically placed; a slider (104) is slidably connected to the slide rail (103); the other side of the slider (104) is fixedly connected to a cylinder fixing plate (105); the other side of the cylinder fixing plate (105) is One side is fixedly connected with a connecting protrusion (106) and a finger cylinder (108), the connecting protrusion (106) is located at the upper end direction of the cylinder fixing plate (105), and the finger cylinder (108) is located at the lower end direction of the cylinder fixing plate (105), one side of the fixing block (102) is fixedly connected with a telescopic cylinder (107), the output end of the telescopic cylinder (107) passes through one side of the fixing block (102) and is fixedly connected to the corresponding connecting protrusion (106), and both output ends of the finger cylinder (108) are fixedly connected with a clamp (109).

2. A double-chuck silicon rod transplanting robot arm according to claim 1, characterized in that: Two sensor mounting plates (201) are fixedly connected to one side of the double-chuck mounting plate (101) away from the slide rail (103); a photoelectric sensor (202) is fixedly mounted on the lower end of the sensor mounting plate (201); the photoelectric sensor (202) is located between the corresponding two clamps (109); and the lower surface of the photoelectric sensor (202) is higher than the clamp (109).

3. A double-chuck silicon rod transplanting robot arm according to claim 2, characterized in that: A first connecting piece (301) is fixedly connected to one side of the double-chuck mounting plate (101) away from the fixing block (102), and the other side of the first connecting piece (301) is connected to a vertical transplanting assembly (3).

4. The double-chuck silicon rod transplanting robot arm according to claim 3, characterized in that: The vertical transplanting assembly (3) comprises a vertical movable member (302), a vertical slideway (303) and a first motor (304); the first motor (304) is connected to the upper end of the vertical slideway (303); the first motor (304) is used to provide a driving force for the vertical slideway (303); the vertical movable member (302) is slidably connected to one side of the vertical slideway (303); the vertical slideway (303) is used to vertically transplant the vertical movable member (302); and the other side of the vertical movable member (302) is fixedly connected to the other side of the first connecting member (301).

5. The double-chuck silicon rod transplanting robot arm according to claim 4, characterized in that: A second connecting piece (401) is fixedly connected to the other side of the vertical slideway (303), and a horizontal transplanting assembly (4) is connected to the other side of the second connecting piece (401).

6. The double-chuck silicon rod transplanting robot arm according to claim 5, characterized in that: The horizontal transplanting assembly (4) comprises a horizontal movable member (402), a horizontal slideway (403) and a second motor (404); the horizontal movable member (402) is slidably connected to one side of the horizontal slideway (403); the horizontal movable member (402) is fixedly connected to the second connecting member (401); the second motor (404) is connected to one end of the horizontal slideway (403); the second motor (404) is used to provide a driving force to the horizontal slideway (403); and the horizontal slideway (403) is used to perform horizontal transplanting of the horizontal movable member (402).

7. The double-chuck silicon rod transplanting robot arm according to claim 6, characterized in that: A first limit position sensor (501) is fixedly mounted on one end of the vertical slideway (303) and the horizontal slideway (403), and a second limit position sensor (502) and an in-situ sensor (503) are fixedly mounted on the other end of the vertical slideway (303) and the horizontal slideway (403), wherein the in-situ sensor (503) is located between the first limit position sensor (501) and the second limit position sensor (502).

Images