Crystal ingot turnover device
By designing V-shaped grooves and circular grooves in the lining of the turnover box, the problem of different requirements for turnover boxes of ingots of different specifications is solved, and the specifications of turnover boxes are unified, which reduces management difficulty and improves the stability and storage efficiency of the ingots.
Patent Information
- Application Number
- CN202422303230.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-09-20
AI Technical Summary
In the wafer manufacturing process of the semiconductor industry, different specifications of ingots have different requirements for turnover boxes, resulting in complex specifications of turnover boxes in the factory, difficult management, and affecting the introduction of automation equipment.
A crystal ingot turnover device is designed, adopting an inner lining design. One side of the inner lining is evenly opened with V-shaped grooves for the reversal of the higher height crystal ingots, and the other side is open with circular grooves for the vertical storage of the lower height crystal ingots. Combined with EPP materials to prevent slip and shock absorption, the unity of the specifications of the turnover box is achieved.
By unifying the specifications of the turnover box, the difficulty of managing the turnover box of the turnover box of the turnover box of the turnover box is reduced, the stability and storage efficiency of the ingot is improved, and the application of automation equipment is facilitated.
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Figure CN222988739U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a crystal ingot turnover device, belonging to the field of turnover boxes. Background Art
[0002] In the semiconductor industry, turnover boxes are needed to transfer crystal ingots during the wafer manufacturing process. In the same factory, the production process of crystal rods and crystal ingots will produce crystal ingots of different diameters (6 inches, 8 inches, 12 inches) and heights (50mm-450mm). It is necessary to ensure the stability of the crystal ingot during the transfer process. Due to the different specifications of the ingots, the requirements for turnover boxes for ingots of different specifications are different. Therefore, turnover boxes of different specifications are needed to store ingots of different specifications, which leads to complicated specifications of turnover boxes in the factory, difficult management, and also affects the introduction of automated equipment. Utility Model Content
[0003] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a crystal ingot turnover device to solve the problems raised in the above-mentioned background technology. The present invention unifies the specifications of turnover boxes used to store crystal ingots of different specifications, thereby reducing the difficulty of managing the turnover boxes for storing crystal ingots.
[0004] In order to achieve the above-mentioned purpose, the utility model is realized through the following technical scheme: a crystal ingot turnover device, including a turnover box, a liner is inserted in the turnover box, one side of the liner is evenly provided with a plurality of V-shaped grooves for storing crystal ingots, and the side of the liner facing away from the V-shaped groove is evenly provided with a plurality of circular grooves for storing crystal ingots, and a first ventilation groove is provided at the middle position of two parallel side surfaces of the liner, and a second ventilation groove is provided on two side surfaces of the liner adjacent to the first ventilation groove, a slot is provided at the middle position of one side surface in the first ventilation groove, an insert plate is inserted in the slot, a circular hole is provided at the middle position of the upper surface of the insert plate, a column rod is installed in the circular hole, two vertical grooves are symmetrically provided on the upper surface of the liner, the vertical grooves are connected with the first ventilation groove and the slot, the column rod is inserted in the vertical groove, both ends of the column rod are provided with threaded blind holes, a connecting rod is threadedly connected to the threaded blind hole, and a cross rod is connected and fixed to the end of the connecting rod away from the column rod.
[0005] Furthermore, the outer surface of one end of the connecting rod away from the cross bar is processed with an external thread, and the end of the connecting rod with the external thread is threadedly connected in the threaded blind hole. The end of the connecting rod away from the cross bar is provided with a limiting ring connected and fixed to the connecting rod, and the limiting ring is arranged on the side of the external thread facing the cross bar.
[0006] Furthermore, a spring is installed in the threaded blind hole, and the spring is arranged along the length direction of the threaded blind hole. A column head for sealing the open end of the threaded blind hole is installed at one end of the spring, and the column head is slidably installed in the threaded blind hole.
[0007] Further, a connecting piece is fixedly connected to the end of the spring away from the stigma, and the connecting piece is adhered to the innermost side in the threaded blind hole by glue.
[0008] Further, a plurality of ventilation holes penetrating the inner liner are provided on the upper surface of the inner liner. One end of the insertion plate is attached to the inner wall of the turnover box, and a plurality of semi-circular holes are evenly provided on the side of the insertion plate close to the inner wall of the turnover box.
[0009] Further, notches are provided at the upper positions of the two parallel side surfaces in the V-shaped groove (3), and a plurality of convex portions for supporting the ingot are evenly fixed on the inner wall of the circular groove.
[0010] Advantages of the utility model:
[0011] 1. Insert the inner liner into the turnover box. The inner liner is designed with two sides. The V-shaped groove processed on one side of the inner liner is used for the inverted placement of the ingot with a higher height, effectively preventing the ingot from rolling. The circular groove on the other side of the inner liner is used for the vertical storage of the ingot with a shorter height, which can prevent the left and right displacement of the vertically stored ingot. The inner liner is made of EPP material, which has certain anti-slip and shock-absorbing buffering properties. Finally, the specifications of the turnover boxes used for storing ingots of different specifications are unified, reducing the management difficulty of the turnover boxes for storing ingots.
[0012] 2. Process the first ventilation groove, the second ventilation groove, and the ventilation holes on the inner liner, which is convenient for air to flow into the turnover box when the inner liner is taken out, reducing the resistance to taking out the inner liner. At the same time, process notches in the V-shaped groove and install convex portions in the circular groove, which is convenient for taking out the ingot from the V-shaped groove and the circular groove.
[0013] 3. Insert the insertion plate into the slot until the column rod is in the vertical groove, completing the assembly of the structure formed by the insertion plate and the column rod and the inner liner. The insertion plate increases the contact area between the column rod and the inner liner. Screw the end of the connecting rod with an external thread into the threaded blind hole on the column rod, which is convenient for taking out the ingot in the V-shaped groove or the circular groove after taking out the inner liner from the turnover box by using the structure formed by the connecting rod and the cross bar, that is, it is convenient to take out the ingot in the large space outside the turnover box, which is more convenient than taking out the ingot in the narrow space inside the turnover box.
[0014] 4. When the connecting rod is screwed into the threaded blind hole, the connecting rod squeezes the stigma, and the stigma squeezes the spring, causing the spring to retract into the threaded blind hole. After the connecting rod disengages from the threaded blind hole, under the action of the spring's resilience, the stigma moves to the opening end of the threaded blind hole, realizing the real-time blocking of the threaded blind hole, preventing small debris from randomly entering the threaded blind hole and affecting the assembly of the connecting rod. Description of the drawings
[0015] By reading the detailed description of the non-restrictive embodiments with reference to the following drawings, other features, purposes, and advantages of the utility model will become more obvious:
[0016] Figure 1 This is a schematic structural diagram of an ingot turnover device of the present utility model;
[0017] Figure 2 This is an assembly schematic diagram of an insertion plate, a column rod and a lining in an ingot turnover device of the present utility model;
[0018] Figure 3 This is a three-dimensional view of a lining in an ingot turnover device of the present utility model;
[0019] Figure 4 This is an assembly schematic diagram of a column head, a column rod and an insertion plate in an ingot turnover device of the present utility model;
[0020] Figure 5 This is an assembly schematic diagram of a column head, a spring and a column rod in an ingot turnover device of the present utility model;
[0021] Figure 6 This is an assembly schematic diagram of a connecting piece, a spring and a column head in an ingot turnover device of the present utility model;
[0022] Figure 7 This is an assembly schematic diagram of a limiting ring, a connecting rod and a cross bar in an ingot turnover device of the present utility model;
[0023] In the figure: 1 - turnover box, 2 - lining, 3 - V-shaped groove, 4 - notch, 5 - cross bar, 6 - connecting rod, 7 - first ventilation groove, 8 - insertion plate, 9 - vertical groove, 10 - column rod, 11 - second ventilation groove, 12 - ventilation hole, 13 - slot, 14 - round groove, 15 - convex part, 16 - column head, 17 - semi-circular hole, 18 - spring, 19 - connecting piece, 20 - threaded blind hole, 21 - limiting ring. Specific embodiments
[0024] In order to make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further described below in conjunction with specific embodiments.
[0025] Please refer to Figures 1 - 3The utility model provides a technical solution: a crystal ingot turnover device, comprising a turnover box 1, an inner liner 2 is inserted in the turnover box 1, a plurality of V-shaped grooves 3 for storing crystal ingots are evenly opened on one side of the inner liner 2, a plurality of circular grooves 14 for storing crystal ingots are evenly opened on the side of the inner liner 2 away from the V-shaped groove 3, notches 4 are opened at the upper positions of two parallel side surfaces in the V-shaped groove 3, a plurality of protrusions 15 for lifting the crystal ingots are evenly fixed on the inner wall of the circular groove 14, the design of the notch 4 provides space for grasping the crystal ingot, under the support of the protrusion 15, a certain gap exists between the crystal ingot and the inner wall of the circular groove 14, so that air can easily enter the gap between the crystal ingot and the circular groove 14, thereby reducing the resistance of taking out the crystal ingot, the inner liner 2 adopts a double-sided design, the V-shaped groove 3 processed on one side of the inner liner 2 is used for inverting a high crystal ingot, which effectively prevents the crystal ingot from rolling, and the circular groove 14 on the other side of the inner liner 2 is used for upright storage of a short crystal ingot, which can prevent the upright stored crystal ingot from shifting left and right, and adopts EPP The inner lining 2 is made of a material having certain anti-skid and shock-absorbing properties, and finally the specifications of the turnover boxes 1 used to store crystal ingots of different specifications are unified, thereby reducing the difficulty of managing the turnover boxes 1 storing the crystal ingots.
[0026] See also Figures 1 - 3 A first ventilation groove 7 is provided in the middle of two parallel sides of the liner 2, a second ventilation groove 11 is provided on two sides of the liner 2 adjacent to the first ventilation groove 7, a plurality of ventilation holes 12 penetrating the liner 2 are provided on the upper surface of the liner 2, and the first ventilation groove 7, the second ventilation groove 11, and the ventilation holes 12 are processed on the liner 2 to facilitate the air to flow into the turnover box 1 when the liner 2 is taken out, thereby reducing the resistance to taking out the liner 2.
[0027] See also Figures 1 - 5 , Figure 7, a slot 13 is provided in the middle of one side surface inside the first ventilation groove 7. A plug board 8 is inserted into the slot 13. A round hole is provided in the middle of the upper surface of the plug board 8. A column rod 10 is installed in the round hole. Two vertical grooves 9 are symmetrically provided on the upper surface of the inner liner 2. The vertical grooves 9 communicate with the first ventilation groove 7 and the slot 13. The column rod 10 is inserted into the vertical groove 9. Threaded blind holes 20 are provided at both ends of the column rod 10. A connecting rod 6 is threadedly connected in the threaded blind holes 20. One end of the connecting rod 6 away from the column rod 10 is connected and fixed with a cross bar 5. Among them, the outer surface of one end of the connecting rod 6 away from the cross bar 5 is processed with external threads. The end of the connecting rod 6 processed with external threads is threadedly connected in the threaded blind hole 20. A limiting ring 21 connected and fixed with the connecting rod 6 is sleeved on one end of the connecting rod 6 away from the cross bar 5. The limiting ring 21 is arranged on the side of the external threads facing the cross bar 5. Under the limitation of the limiting ring 21, the length of the connecting rod 6 screwed into the threaded blind hole 20 is limited, so that the plug board 8 is inserted into the slot 13 until the column rod 10 is in the vertical groove 9, completing the assembly of the structure formed by the plug board 8 and the column rod 10 and the inner liner 2. The plug board 8 increases the contact area between the column rod 10 and the inner liner 2. The end of the connecting rod 6 processed with external threads is screwed into the threaded blind hole 20 on the column rod 10, which is convenient to use the structure formed by the connecting rod 6 and the cross bar 5 to take out the ingot in the V-shaped groove 3 or the round groove 14 after taking out the inner liner 2 from the turnover box 1, that is, it is convenient to take out the ingot in the large space outside the turnover box 1, which is more convenient than taking out the ingot in the narrow space inside the turnover box 1. One end of the plug board 8 is attached to the inner wall of the turnover box 1. A plurality of semi-circular holes 17 are evenly provided on the side of the plug board 8 close to the inner wall of the turnover box 1. The design of the semi-circular holes 17 is convenient for the flow of air.
[0028] Refer to Figures 4 - 7 , a spring 18 is installed in the threaded blind hole 20. The spring 18 is arranged along the length direction of the threaded blind hole 20. A column head 16 for plugging the opening end of the threaded blind hole 20 is installed at one end of the spring 18. The column head 16 is slidably installed in the threaded blind hole 20. One end of the spring 18 away from the column head 16 is connected and fixed with a connecting piece 19, so that the connecting piece 19 is pasted in the innermost part of the threaded blind hole 20 by glue, realizing the restriction of one end of the spring 18 in the threaded blind hole 20. When the connecting rod 6 is screwed into the threaded blind hole 20, the connecting rod 6 presses the column head 16, and the column head 16 presses the spring 18, so that the spring 18 retracts into the threaded blind hole 20. After the connecting rod 6 is separated from the threaded blind hole 20, under the action of the resilience of the spring 18, the column head 16 moves to the opening end of the threaded blind hole 20, realizing the real-time plugging of the threaded blind hole 20, preventing small sundries from randomly entering the threaded blind hole 20 and affecting the assembly of the connecting rod 6.
[0029] Although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.
Claims
1. A crystal ingot turnover device, comprising a turnover box (1), characterized in that: An inner liner (2) is inserted in the turnover box (1), a plurality of V-shaped grooves (3) for storing crystal ingots are evenly formed on one side of the inner liner (2), a plurality of circular grooves (14) for storing crystal ingots are evenly formed on a side of the inner liner (2) away from the V-shaped grooves (3), a first ventilation groove (7) is formed in the middle of two parallel side surfaces of the inner liner (2), second ventilation grooves (11) are formed on two side surfaces of the inner liner (2) adjacent to the first ventilation groove (7), a slot (13) is formed in the middle of one side surface of the first ventilation groove (7), and the slot (13) A plug plate (8) is inserted inside, a circular hole is provided in the middle of the upper surface of the plug plate (8), a column (10) is installed in the circular hole, two vertical grooves (9) are symmetrically provided on the upper surface of the lining (2), the vertical grooves (9) are communicated with the first ventilation groove (7) and the slot (13), the column (10) is inserted in the vertical grooves (9), both ends of the column (10) are provided with threaded blind holes (20), the threaded blind holes (20) are connected to the connecting rod (6), and the end of the connecting rod (6) away from the column (10) is connected and fixed to a cross bar (5).
2. The ingot turnover device according to claim 1, characterized in that: An outer surface of one end of the connecting rod (6) away from the cross bar (5) is processed with an external thread, and the end of the connecting rod (6) processed with the external thread is threadedly connected in the threaded blind hole (20). An end of the connecting rod (6) away from the cross bar (5) is sleeved with a limiting ring (21) connected and fixed to the connecting rod (6), and the limiting ring (21) is arranged on the side of the external thread facing the cross bar (5).
3. The ingot turnover device according to claim 2, characterized in that: A spring (18) is installed in the threaded blind hole (20), and the spring (18) is arranged along the length direction of the threaded blind hole (20). A column head (16) for sealing the open end of the threaded blind hole (20) is installed at one end of the spring (18), and the column head (16) is slidably installed in the threaded blind hole (20).
4. The ingot turnover device according to claim 3, characterized in that: One end of the spring (18) away from the column head (16) is connected and fixed with a connecting piece (19), and the connecting piece (19) is glued to the innermost side of the threaded blind hole (20).
5. The ingot turnover device according to claim 1, characterized in that: The upper surface of the lining (2) is provided with a plurality of ventilation holes (12) penetrating the lining (2); one end of the plug plate (8) is in contact with the inner wall of the turnover box (1); and a plurality of semicircular holes (17) are evenly arranged on one side of the plug plate (8) close to the inner wall of the turnover box (1).
6. The ingot turnover device according to claim 1, characterized in that: Notches (4) are provided at the upper positions of two parallel side surfaces in the V-shaped groove (3), and a plurality of protrusions (15) for supporting the crystal ingot are evenly fixed on the inner wall of the circular groove (14).
Citation Information
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