Vertical graphite boat
By setting rectangular grooves and silicon wafer clamping points on the vertical graphite boat, the silicon wafer is in an inclined state, and multiple boat sheets are connected in series through connecting rods, the problem of silicon wafer sliding out during the movement of the graphite boat is solved, and the positioning stability of the silicon wafer and the number of slides of the graphite boat are improved.
Patent Information
- Application Number
- CN202421929357.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-09
- Publication Date
- 2025-06-17
- Estimated Expiration
- 2034-08-09
AI Technical Summary
The existing vertical graphite boats easily slide out or slide from the side during movement, affecting the coating process effect.
A vertical graphite boat is designed. By setting vertically arranged rectangular grooves and silicon wafer clamping points on the boat sheet, the silicon wafer is in an inclined state when inserted, increasing the positioning stability of the silicon wafer, and connecting multiple boat sheets in series to increase the number of slides through connecting rods.
It effectively prevents the silicon wafer from sliding out or slipping during the movement of the graphite boat, improves the position stability of the silicon wafer, and increases the number of slides of the graphite boat.
Smart Images
Figure CN222990208U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of PECVD coating, and specifically relates to a vertical graphite boat. Background Art
[0002] PECVD (Plasma Enhanced Chemical Vapor Deposition) equipment mainly uses plasma polymerization method to deposit a silicon nitride antireflection film on a solar cell to improve the photoelectric conversion efficiency of the solar cell. The equipment uses an electric heating furnace body to keep the temperature in the quartz tube reaction chamber at about 500 degrees, and then uses high-frequency glow discharge to generate plasma to promote the decomposition, combination and ionization of gas molecules. After the reaction is completed, it is deposited on the solar cell.
[0003] The graphite boat is a carrier used when the solar cell is coated by PECVD. It is composed of several graphite boat plates. The wafer loading capacity of the graphite boat directly determines the production capacity of the equipment. At present, the traditional method is to adopt a horizontal layout, that is, the quartz tube is placed horizontally, the graphite boat is placed on the support mechanism in the quartz tube, and the silicon wafer is placed at the silicon wafer clamping point of the graphite boat and fits with the boat plate. The wafer loading capacity of a single tube mainly depends on the number of grooves of the graphite boat along the length direction of the quartz tube and the number of boat plates of the graphite boat along the radial direction of the quartz tube.
[0004] For the existing vertical graphite boat, the silicon wafers are inserted from the side and are limited in the other three directions through the silicon wafer clamping points. If the vertical graphite boat shakes, the silicon wafers are likely to slide out or slip from the side, resulting in affecting the processing. Content of the Utility Model
[0005] The utility model aims to solve the above technical problems in the prior art and proposes a vertical graphite boat.
[0006] The technical solution adopted by the utility model is as follows:
[0007] The utility model proposes a vertical graphite boat, including: multiple boat plates, rectangular grooves are arranged vertically on the boat plates, each rectangular groove corresponds to a silicon wafer insertion area, and the multiple boat plates are spaced parallel and connected in series through connecting rods. Silicon wafer clamping points are arranged on other sides of the periphery of the silicon wafer insertion area except the silicon wafer insertion side. At least two silicon wafer clamping points are located below the silicon wafer insertion area, and the connection line between the two silicon wafer clamping points forms an angle with the horizontal line, so that the silicon wafer inserted between the silicon wafer clamping points is inclined.
[0008] Furthermore, the silicon wafer clamping point specifically includes: at least two silicon wafer clamping points are arranged on the other side of the silicon wafer insertion area opposite to the insertion side, and the connection line between the two silicon wafer clamping points forms an angle with the vertical line.
[0009] Preferably, the angle is 3°.
[0010] Preferably, the range of the angle of the included angle is from 2° to 6°.
[0011] Specifically, two vertical rows of rectangular grooves are provided on the boat piece, and both sides of the boat piece are the insertion sides for the silicon wafers.
[0012] Specifically, the number of rectangular grooves in one vertical row on the boat piece is 6.
[0013] Specifically, the connecting rod with a square area is formed around each rectangular groove, and the silicon wafer clamping point is located within this square area.
[0014] Compared with the prior art, in the present utility model, the silicon wafers inserted into the graphite boat are in an inclined state, so that the silicon wafers are not easily slid out from their insertion sides during the movement of the vertical graphite boat, and the positions of the silicon wafers are stable. Moreover, by setting a double - joined vertical graphite boat, the wafer loading capacity of the graphite boat is increased. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for use in the embodiments or the description of the prior art. Obviously, the following - described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.
[0016] Figure 1 It is a schematic three - dimensional structure diagram of the double - joined boat in the embodiment of the present utility model;
[0017] Figure 2 It is a schematic front - view structure diagram of the double - joined boat in the embodiment of the present utility model;
[0018] Figure 3 It is a schematic structure diagram of the double - joined boat inserting silicon wafers in the embodiment of the present utility model;
[0019] Figure 4 For Figure 3 partial schematic diagram;
[0020] Figure 5 It is a schematic front - view structure diagram of the vertical single boat in the embodiment of the present utility model;
[0021] 1. Boat piece; 11. Rectangular groove; 2. Silicon wafer clamping point; 3. Connecting rod; 4. Silicon wafer. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0022] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.
[0023] The principle and structure of the present utility model will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0024] For the existing vertical graphite boats, the silicon wafers are inserted from the side, and are limited in the other three directions through the silicon wafer clamping points. The vertical graphite boats are hung in the vertical furnace for heating reaction. Some vertical furnaces need to drive the graphite boat to rotate in the vertical furnace to adjust the position and angle to make the heating uniform. During the movement of the graphite boat, the silicon wafers are likely to slide out or slip from the side, resulting in affecting the process effect of the silicon wafers.
[0025] In response to this, as Figures 1 to 5 shown, the present utility model proposes a vertical graphite boat, which specifically includes: multiple boat plates 1 and connecting rods 3. The boat plates 1 are in the shape of rectangular sheets, and multiple rectangular grooves 11 are arranged along the vertical direction (length direction) of the boat plates 1. Each rectangular groove 11 of each boat plate corresponds to a silicon wafer insertion area (the rectangular groove 11 is located within the silicon wafer insertion area), and a silicon wafer 4 is inserted at the corresponding position; the multiple boat plates 1 are spaced and parallel, and are connected in series by multiple connecting rods 3; wherein, silicon wafer clamping points 2 are provided on the outer periphery of the silicon wafer insertion area, so that the silicon wafers can be inserted into the silicon wafer insertion area. Specifically, the silicon wafer clamping points 2 are provided on three sides, and the remaining one side is the insertion side or the extraction side; when the silicon wafer 4 is inserted from the insertion side, the silicon wafer is limited by the silicon wafer clamping points on its three sides, so that it fits and covers the rectangular groove 11; and there are at least two silicon wafer clamping points 2 located below the silicon wafer insertion area, and the connection line between these two silicon wafer clamping points has an angle a with the horizontal line, so that the inserted silicon wafer is inclined, and when the silicon wafer is taken out from the insertion side, it needs to be taken out along the obliquely upward direction.
[0026] By making the silicon wafers inserted into the graphite boat in an inclined state, the silicon wafers are not likely to slide out from the insertion side during the movement of the vertical graphite boat, so that the position of the silicon wafers is stable.
[0027] In a specific embodiment, at least two silicon wafer clamping points 2 are also provided on the other side of the silicon wafer insertion area opposite to the insertion side. Specifically, there may be two, and the connection line between the two silicon wafer clamping points has an angle a with respect to the vertical line, and this angle is the same as the angle between the connection line of the silicon wafer clamping points located below the rectangular groove and the horizontal line.
[0028] In a specific embodiment, the value range of the angle a is 2° to 6°.
[0029] In a preferred embodiment, the angle of the angle a is specifically 3°.
[0030] By increasing the inclination at a small angle, it will neither increase the difficulty of inserting the silicon wafer nor reduce the positioning effect after the silicon wafer is placed.
[0031] As Figure 5 shown, in the first embodiment, each boat blade is provided with a vertical rectangular groove, and one side of the boat blade is the insertion side of the silicon wafer.
[0032] As Figures 1 to 4 shown, in the second embodiment, each boat blade is provided with two vertical rows of rectangular grooves, and both sides of the boat blade are the insertion sides of the silicon wafers. Two silicon wafers at the same height are inserted from both sides of the boat blade towards the vertical midline of the boat blade respectively.
[0033] In a specific embodiment, the number of a vertical row of rectangular grooves 11 on the boat blade 1 is 6. The rectangular grooves 11 effectively reduce the contact area between the graphite boat blade and the silicon wafer, making it easier for vacuum adsorption, and can also reduce abnormalities generated during the coating process, such as uneven film thickness, color difference, etc. On the other hand, by setting rectangular grooves at the silicon wafer bearing positions, the weight of the graphite boat blade can be greatly reduced, while the structural strength of the graphite boat blade will not be affected.
[0034] In a specific embodiment, connecting rods 3 are arranged around each rectangular groove 11. The connecting rods 3 enclose a square area, that is, the connecting rods 3 are located at the four corners of the square area. The silicon wafer clamping points 2, that is, the silicon wafer insertion areas, are located within this square area. That is, the setting positions of the connecting rods 3 can strengthen the structure corresponding to the placement positions of each silicon wafer, improving the overall structural strength.
[0035] In a preferred embodiment, the connecting rods can be made of non-conductive (insulating) materials such as ceramics.
[0036] In addition, both ends of multiple boat blades also have conventional structures such as conductive boat block groups and supports, which are not the focus of the present invention and will not be specifically described.
[0037] It should be noted that the terms used above are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.
[0038] Unless otherwise specifically stated, the relative arrangements, numerical expressions, and numerical values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be understood that for the sake of convenience in description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, further discussion thereof in subsequent drawings is not required.
[0039] In the description of the present utility model, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc. are generally based on the orientation or positional relationships shown in the drawings, and are only for the convenience of describing the present utility model and simplifying the description. Without contrary statements, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus cannot be construed as limiting the protection scope of the present utility model; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.
[0040] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above-mentioned", etc. can be used here to describe the spatial positional relationships of one device or feature to other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.
[0041] In addition, it should be noted that the use of words such as "first", "second", etc. to limit the components is only for the convenience of distinguishing the corresponding components. Without otherwise stating, the above words have no special meanings, and thus cannot be construed as limiting the protection scope of the present utility model.
[0042] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, various modifications and variations can be made to the present utility model. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.
Claims
1. A vertical graphite boat, comprising: A plurality of boat sheets are provided with vertically arranged rectangular grooves, each rectangular groove corresponds to a silicon wafer insertion area, and the plurality of boat sheets are spaced parallel and connected in series through connecting rods, characterized in that silicon wafer clamping points are provided on the circumference of the silicon wafer insertion area except for the silicon wafer insertion side, wherein there are at least two silicon wafer clamping points located below the silicon wafer insertion area, and an angle is formed between a line connecting the two silicon wafer clamping points and a horizontal line, so that the silicon wafer inserted between the silicon wafer clamping points is tilted.
2. The vertical graphite boat according to claim 1, characterized in that: The silicon wafer clamping points specifically include: at least two silicon wafer clamping points are arranged on the other side of the silicon wafer insertion area directly facing the insertion side, and the connecting line of the two silicon wafer clamping points forms an angle with respect to the vertical line.
3. The vertical graphite boat according to claim 1 or 2, characterized in that: The angle is 3°.
4. The vertical graphite boat according to claim 1 or 2, characterized in that: The angle ranges from 2° to 6°.
5. The vertical graphite boat according to claim 1, characterized in that: The boat is provided with two vertical rows of rectangular grooves, and two sides of the boat are the insertion sides of the silicon wafer.
6. The vertical graphite boat according to claim 1 or 5, characterized in that: The number of rectangular grooves in a vertical row on the boat is 6.
7. The vertical graphite boat according to claim 1, characterized in that: The connecting rods are arranged around each rectangular groove to form a square area, and the silicon wafer clamping point is located in the square area.