Low-temperature radio frequency needle arm heat sink structure

By designing a low-temperature RF needle arm heat sink structure made of pure copper, the problems of poor heat sink effect and general thermal conductivity of RF needle arm in the prior art are solved, and higher testing accuracy and stability are achieved.

CN222996905UActive Publication Date: 2025-06-17XINBO MICRO SEMICON EQUIP (SHANGHAI) CO LTD
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Patent Information

Application Number
CN202421641200.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-07-11
Publication Date
2025-06-17
Estimated Expiration
2034-07-11

AI Technical Summary

Technical Problem

The current low-temperature probe table has poor heat sink effect and average thermal conductivity, which affects the accuracy and stability of the test results.

Method used

A low-temperature RF needle arm heat sink structure is designed, including needle arm, heat sink copper tape fixing block, radio frequency probe fixing block, ultra-pure oxygen-free copper tape and terminals. Except for the needle arm, all are made of pure copper, and the thermal conductivity is improved through a specific structural design.

Benefits of technology

By improving thermal conductivity, the temperature of the RF probe is brought close to the temperature of the sample holder, thereby improving the accuracy and stability of the test.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to a low-temperature radio frequency needle arm heat sink structure which comprises a needle arm, a heat sink copper strip fixing block, a radio frequency probe fixing block, an ultra-pure oxygen-free copper strip and a terminal. The heat sink copper strip fixing block is arranged at the front end of the needle arm; the radio frequency probe fixing block is arranged at the front end of the heat sink copper strip fixing block; the ultrapure oxygen-free copper strip is arranged at the lower end of the heat sink copper strip fixing block; and the terminal is arranged at the bottom of the ultra-pure oxygen-free copper strip. A jackscrew hole is formed above the copper strip via hole, the ultra-pure oxygen-free copper strip penetrates through the copper strip via hole to be connected with the heat sink copper strip fixing block, through the design, after the angle of the ultra-pure oxygen-free copper strip is adjusted, the ultra-pure oxygen-free copper strip can be fixed by placing a jackscrew in the jackscrew hole, meanwhile, except for the needle arm, the needle arm can be fixed through the jackscrew hole, and the heat sink copper strip can be fixed through the jackscrew hole. Other structures are made of pure copper, and the heat conduction performance is good, so that the temperature of the radio frequency probe is close to the temperature of the sample seat, and the accuracy and the stability of the test are improved.
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Description

Technical Field

[0001] The utility model belongs to the field of probe testing, and particularly relates to a cryogenic radio frequency needle arm heat sink structure. Background Technique

[0002] The market of the probe station industry in China has been developing since the 1990s and has now reached a certain scale. According to the survey data, the market scale of probe stations in China reached 3 billion yuan in 2024. However, compared with the advanced foreign level, there is still a certain gap in the core technology, product performance, etc. of the probe station industry in China.

[0003] At present, China's instrument manufacturers are mainly concentrated in some large scientific research institutions and universities, with relatively small enterprise scales, and the technology development ability and market development ability need to be improved.

[0004] In terms of market demand, with the development of fields such as materials science and nanoscience, the demand for probe stations is gradually increasing. This provides new market opportunities for the application of probe stations.

[0005] However, the existing cryogenic probe station radio frequency needle arm has poor heat sink effect and general thermal conductivity, etc. These affect the accuracy and stability of the test results. Therefore, it is necessary to design a heat sink structure with stable structure and strong heat conduction ability. Content of the Utility Model

[0006] In order to solve the disadvantages of poor heat sink effect and poor thermal conductivity of the existing probe station radio frequency needle arm, this application designs a cryogenic radio frequency needle arm heat sink structure to achieve the function of enhancing the heat sink effect of the cryogenic radio frequency needle arm.

[0007] A cryogenic radio frequency needle arm heat sink structure includes a needle arm, a heat sink copper strip fixing block, a radio frequency probe fixing block, an ultra-pure oxygen-free copper strip, and a terminal;

[0008] The heat sink copper strip fixing block is arranged at the front end of the needle arm;

[0009] The radio frequency probe fixing block is arranged at the front end of the heat sink copper strip fixing block;

[0010] The ultra-pure oxygen-free copper strip is arranged at the lower end of the heat sink copper strip fixing block;

[0011] The terminal is arranged at the bottom of the ultra-pure oxygen-free copper strip.

[0012] Preferably, the terminal is fixed at the bottom of the ultra-pure oxygen-free copper strip by a hydraulic crimper;

[0013] A screw through hole is arranged at the bottom of the terminal for connecting with a cold plate device.

[0014] Preferably, an arc-shaped groove is provided at the front end of the radio frequency probe fixing block, and a bolt hole is provided at the bottom of the groove.

[0015] Preferably, a left lateral protrusion is provided at the tail end of the heat sink copper strip fixing block;

[0016] A right lateral protrusion is provided at the front end of the needle arm;

[0017] The left lateral protrusion and the right lateral protrusion are fixedly connected by bolts.

[0018] Preferably, a lower lateral protrusion is provided at the front end of the heat sink copper strip fixing block;

[0019] An upper lateral protrusion is provided at the tail end of the radio frequency probe fixing block;

[0020] The lower lateral protrusion and the upper lateral protrusion are fixedly connected by bolts.

[0021] Preferably, a copper strip through hole is provided in the middle of the heat sink copper strip fixing block, a set screw hole is provided above the copper strip through hole, and the ultra-pure oxygen-free copper strip passes through the copper strip through hole and is connected to the heat sink copper strip fixing block, and is fixed by a set screw in the set screw hole.

[0022] Preferably, the heat sink copper strip fixing block, the radio frequency probe fixing block, the ultra-pure oxygen-free copper strip and the terminal are all made of pure copper structural parts.

[0023] The advantages and effects of the present application are as follows:

[0024] 1. A low-temperature radio frequency needle arm heat sink structure designed in the present application includes a needle arm, a heat sink copper strip fixing block, a radio frequency probe fixing block, an ultra-pure oxygen-free copper strip and a terminal; except for the needle arm, all are made of pure copper, with good thermal conductivity, so that the temperature of the radio frequency probe is close to the temperature of the sample holder, thereby improving the accuracy and stability of the test.

[0025] 2. A low-temperature radio frequency needle arm heat sink structure designed in the present application, a copper strip through hole is provided in the middle of the heat sink copper strip fixing block, a set screw hole is provided above the copper strip through hole, the ultra-pure oxygen-free copper strip passes through the copper strip through hole and is connected to the heat sink copper strip fixing block. Through the above design, the present application can adjust the angle of the ultra-pure oxygen-free copper strip and then fix the ultra-pure oxygen-free copper strip by putting a set screw in the set screw hole.

[0026] The above description is only an overview of the technical solution of the present application. In order to be able to understand the technical means of the present application more clearly, it can be implemented according to the content of the specification. And in order to make the above and other purposes, features and advantages of the present application more obvious and understandable, the following takes the preferred embodiments of the present application and combines with the drawings to describe in detail as follows.

[0027] Those skilled in the art will better understand the above and other objects, advantages, and features of the present application from the following detailed description of specific embodiments of the present application in conjunction with the accompanying drawings. Brief Description of the Drawings

[0028] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings. In all the drawings, similar elements or parts are generally denoted by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to actual scale.

[0029] Figure 1 Structural diagram of a low-temperature radio frequency needle arm heat sink structure designed for the present application;

[0030] Figure 2 Structural diagram of the heat sink copper strip fixing block designed for the present application;

[0031] Reference Numerals:

[0032] 1. Needle arm; 2. Heat sink copper strip fixing block; 3. Radio frequency probe fixing block; 4. Ultra-pure oxygen-free copper strip; 5. Terminal; 6. Copper strip through hole; 7. Set screw hole. Detailed Embodiments

[0033] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. In the following description, specific details such as specific configurations and components are provided only to assist in a comprehensive understanding of the embodiments of the present application. Therefore, those skilled in the art should clearly understand that various changes and modifications can be made to the embodiments described here without departing from the scope and spirit of the present application. In addition, descriptions of known functions and structures are omitted for clarity and conciseness.

[0034] It should be understood that the "one embodiment" or "the present embodiment" mentioned throughout the specification means that a specific feature, structure, or characteristic related to the embodiment is included in at least one embodiment of the present application. Therefore, the "one embodiment" or "the present embodiment" appearing throughout the specification does not necessarily refer to the same embodiment. In addition, these specific features, structures, or characteristics can be combined in one or more embodiments in any suitable manner.

[0035] In addition, the present application may repeat reference numerals and / or letters in different instances. Such repetition is for the purpose of simplicity and clarity and does not in itself indicate a relationship between the various embodiments and / or arrangements discussed.

[0036] As used herein, the term "and / or" is merely a description of the relationship between associated objects, indicating that there can be three relationships. For example, A and / or B can mean: A exists alone, B exists alone, or both A and B exist simultaneously. The term " / and" as used herein describes another relationship between associated objects, indicating that there can be two relationships. For example, A / and B can mean: A exists alone, or both A and B exist. Additionally, the character " / " as used herein generally indicates that the associated objects before and after are in an "or" relationship.

[0037] As used herein, the term "at least one" is merely a description of the relationship between associated objects, indicating that there can be three relationships. For example, at least one of A and B can mean: A exists alone, both A and B exist simultaneously, or B exists alone.

[0038] It should also be noted that, as used herein, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variation thereof are intended to cover non-exclusive inclusion.

[0039] Embodiment 1

[0040] This embodiment mainly introduces the design of a low-temperature radiofrequency needle arm heat sink structure. Please refer to Figure 1 and Figure 2 , which includes a needle arm 1, a heat sink copper strip fixing block 2, a radiofrequency probe fixing block 3, an ultra-pure oxygen-free copper strip 4, and a terminal 5;

[0041] The heat sink copper strip fixing block 2 is arranged at the front end of the needle arm 1;

[0042] The radiofrequency probe fixing block 3 is arranged at the front end of the heat sink copper strip fixing block 2;

[0043] The ultra-pure oxygen-free copper strip 4 is arranged at the lower end of the heat sink copper strip fixing block 2;

[0044] The terminal 5 is arranged at the bottom of the ultra-pure oxygen-free copper strip 4.

[0045] Furthermore, the terminal 5 is fixed at the bottom of the ultra-pure oxygen-free copper strip 4 by a hydraulic crimper;

[0046] The bottom of the terminal 5 is provided with a screw through-hole for connection to a cold plate device.

[0047] Furthermore, an arc-shaped groove is provided at the front end of the radio frequency probe fixing block 3, and a bolt hole is provided at the bottom of the groove for accommodating the probe head.

[0048] Furthermore, a left lateral protrusion is provided at the tail end of the heat sink copper belt fixing block 2;

[0049] The front end of the needle arm 1 is provided with a right lateral protrusion;

[0050] The left lateral protrusion and the right lateral protrusion are fixedly connected by bolts, so as to facilitate the stability of the heat sink copper belt fixing block relative to the needle arm.

[0051] Furthermore, the front end of the heat sink copper strip fixing block 2 is provided with a lower lateral protrusion;

[0052] The tail end of the radio frequency probe fixing block 3 is provided with an upper lateral protrusion;

[0053] The lower lateral protrusion and the upper lateral protrusion are fixedly connected by bolts; since the front end and the rear end of the heat sink copper strip fixing block 2 are fixed in different directions, the stability of the entire needle arm heat sink structure can be achieved.

[0054] Furthermore, a copper belt via hole 6 is provided in the middle of the heat sink copper belt fixing block 2, and a top screw hole 7 is provided above the copper belt via hole 6. The ultra-pure oxygen-free copper belt 4 passes through the copper belt via hole 6 to be connected to the heat sink copper belt fixing block 2, and is fixed by the top screw in the top screw hole 7.

[0055] Furthermore, the heat sink copper strip fixing block 2, the radio frequency probe fixing block 3, the ultrapure oxygen-free copper strip 4 and the terminal 5 are all pure copper structural parts.

[0056] A low-temperature radio frequency needle arm heat sink structure designed in the present application includes a needle arm, a heat sink copper strip fixing block, a radio frequency probe fixing block, an ultra-pure oxygen-free copper strip and a terminal; except for the needle arm, all parts are made of pure copper with good thermal conductivity, so that the temperature of the radio frequency probe is close to the temperature of the sample holder, thereby improving the accuracy and stability of the test.

[0057] The present application designs a low-temperature radio frequency needle arm heat sink structure, wherein a copper belt through-hole is provided in the middle of the heat sink copper belt fixing block, and a top screw hole is provided above the copper belt through-hole. The ultra-pure oxygen-free copper belt passes through the copper belt through-hole and is connected to the heat sink copper belt fixing block. Through the above design, the present application can adjust the angle of the ultra-pure oxygen-free copper belt and then fix the ultra-pure oxygen-free copper belt by placing a top screw in the top screw hole.

[0058] The above are only the preferred embodiments of the present utility model, and thus do not limit the protection scope of the present utility model. For those skilled in the art, the present utility model can have various changes and modifications. Any changes, modifications, substitutions, integrations, and parameter alterations made to these embodiments within the spirit and principle of the present utility model, by means of conventional substitutions or capable of achieving the same functions without departing from the principle and spirit of the present utility model, all fall within the protection scope of the present utility model.

Claims

1. A low-temperature radio frequency needle arm heat sink structure, characterized in that: It comprises a needle arm (1), a heat sink copper strip fixing block (2), a radio frequency probe fixing block (3), an ultrapure oxygen-free copper strip (4) and a terminal (5); The heat sink copper strip fixing block (2) is arranged at the front end of the needle arm (1); The radio frequency probe fixing block (3) is arranged at the front end of the heat sink copper strip fixing block (2); The ultrapure oxygen-free copper strip (4) is arranged at the lower end of the heat sink copper strip fixing block (2); The terminal (5) is arranged at the bottom of the ultra-pure oxygen-free copper strip (4).

2. A low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: The terminal (5) is pressed and fixed on the bottom of the ultrapure oxygen-free copper strip (4) by hydraulic clamps; The bottom of the terminal (5) is provided with a screw through hole for connecting to a cold plate device.

3. A low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: The front end of the radio frequency probe fixing block (3) is provided with an arc-shaped groove, and the bottom of the groove is provided with a bolt hole.

4. The low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: The tail end of the heat sink copper strip fixing block (2) is provided with a left lateral protrusion; The front end of the needle arm (1) is provided with a right lateral protrusion; The left lateral protrusion and the right lateral protrusion are fixedly connected by bolts.

5. The low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: The front end of the heat sink copper strip fixing block (2) is provided with a lower lateral protrusion; The tail end of the radio frequency probe fixing block (3) is provided with an upper lateral protrusion; The lower lateral protrusion and the upper lateral protrusion are fixedly connected by bolts.

6. The low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: A copper belt through hole (6) is provided in the middle of the heat sink copper belt fixing block (2), and a top screw hole (7) is provided above the copper belt through hole (6); the ultra-pure oxygen-free copper belt (4) passes through the copper belt through hole (6) to be connected to the heat sink copper belt fixing block (2), and is fixed by a top screw in the top screw hole (7).

7. The low-temperature radio frequency needle arm heat sink structure according to claim 1, characterized in that: The heat sink copper strip fixing block (2), the radio frequency probe fixing block (3), the ultrapure oxygen-free copper strip (4) and the terminal (5) are all pure copper structural parts.