Waste gas discharging and filtering device for high-temperature vacuum furnace

Abstract

The utility model discloses a high-temperature vacuum furnace waste gas discharging and filtering device which comprises a process pump and a filtering assembly, and the process pump comprises a first-stage roots pump, a second-stage roots pump and a slide valve pump; the filtering assembly comprises a primary fine filter and a secondary coarse filter; an exhaust port of the second-stage coarse filter is connected with an air inlet of a second-stage roots pump through a second-stage coarse filter exhaust pipeline, an exhaust port of the second-stage roots pump is connected with an air inlet of a first-stage roots pump through a connecting pipe, and an exhaust port of the first-stage roots pump is connected with an air inlet of a first-stage fine filter through a roots pump exhaust pipe; and an exhaust port of the first-stage fine filter is connected with the slide valve pump through a first-stage fine filter exhaust pipeline. According to the utility model, the secondary coarse filter is additionally arranged in the exhaust pipeline of the high-temperature vacuum furnace and forms a two-stage filtering measure with the primary fine filter, so that volatile matters are effectively intercepted in a grading manner, the pressure of the primary fine filter is reduced, the qualified rate of product quality is ensured, the risk of blockage of a slide valve pump is avoided, and the production link is smoother and more stable.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum furnaces, in particular to an exhaust gas emission filtering device for a high-temperature vacuum furnace. Background Technique

[0002] During the product firing process of a high-temperature vacuum furnace, a Roots pump and a sliding vane pump are used in series to evacuate the air throughout the process. The extracted gas is discharged from the exhaust hole of the sliding vane pump. Volatiles are generated during the product firing process, and the volatiles are discharged from the exhaust port of the sliding vane pump along with the gas. Therefore, the discharged gas will contain dust-like particulate impurities, which will cause environmental pollution. Currently, most of them use a method of setting a fine filter at the inlet end of the sliding vane pump of the high-temperature vacuum furnace for filtering volatiles. The fine filter can effectively treat the volatiles of a single product and ensure the process requirements of the product.

[0003] However, due to market demand, the process products of high-temperature vacuum furnaces need to process multiple material products in the same furnace. In this case, when the volatiles generated during the firing of multiple material products are treated by a fine filter, it is easy to have an ineffective treatment effect, resulting in unqualified surface quality of the product and blockage of the process pump by volatiles, indirectly affecting the production process and progress, and at the same time increasing the subsequent processing cost of the product and the equipment maintenance cost. Summary of the Utility Model

[0004] The purpose of the utility model is to provide an exhaust gas emission filtering device for a high-temperature vacuum furnace to solve the problems that the existing fine filter has an ineffective treatment effect on the volatiles generated during the firing of multiple material products, resulting in unqualified surface quality of the product and blockage of the process pump by volatiles.

[0005] To achieve the above purpose, the utility model provides the following technical solutions:

[0006] An exhaust gas emission filtering device for a high-temperature vacuum furnace includes a process pump and a filtering component. The process pump includes a primary Roots pump, a secondary Roots pump, and a sliding vane pump; the filtering component includes a primary fine filter and a secondary coarse filter; the exhaust port of the secondary coarse filter is connected to the intake port of the secondary Roots pump through a secondary coarse filter exhaust pipeline, the exhaust port of the secondary Roots pump is connected to the intake port of the primary Roots pump through a connecting pipe, the discharge gas port of the primary Roots pump is connected to the intake port of the primary fine filter through a Roots pump exhaust pipeline, and the exhaust port of the primary fine filter is connected to the sliding vane pump through a primary fine filter exhaust pipeline.

[0007] Preferably, the filtering accuracy of the primary fine filter element is 2μm.

[0008] Preferably, the secondary coarse filter is detachably installed in the exhaust pipeline of the high-temperature carbonization furnace.

[0009] Preferably, a base is installed in the exhaust pipeline of the high-temperature carbonization furnace, and the secondary coarse filter is detachably installed on the base.

[0010] Preferably, the base includes a circular ring and a connecting sleeve. The connecting sleeve is a cylindrical structure with a variable outer diameter, and the connecting sleeve is installed inside the circular ring.

[0011] Preferably, the secondary coarse filter includes a sintered mesh filter element. One end of the sintered mesh filter element is provided with a first end cap, the other end of the sintered mesh filter element is provided with a second end cap, and a communication hole is provided in the middle of the second end cap. A sleeve is installed in the communication hole.

[0012] Preferably, the connecting sleeve is a cylindrical structure with a variable outer diameter. An internal thread is provided inside the variable diameter end of the connecting sleeve. The sleeve is a cylindrical structure with a variable outer diameter, and an external thread is provided on the outside of the variable diameter end of the sleeve. The sleeve is installed inside the connecting sleeve through the cooperation of the external thread and the internal thread.

[0013] Preferably, the sintered mesh filter element is a stainless steel 316L sintered mesh filter element, and the filtration accuracy of the sintered mesh filter element is 100 μm.

[0014] Preferably, a silica gel sealing ring is sleeved on the second sleeve.

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] 1. By installing a secondary coarse filter in the exhaust pipeline of the high-temperature vacuum furnace, the present utility model forms a two-stage filtration measure with the primary fine filter, effectively intercepts and processes the volatiles in stages, reduces the pressure on the primary fine filter, ensures the qualified rate of product quality, and eliminates the risk of blockage of the sliding vane pump, making the production process smoother and more stable.

[0017] 2. The primary fine filter of the present utility model is arranged at the exhaust port end of the primary vacuum roots pump at the lower end of the secondary coarse filter. The coarse filter intercepts large-particle volatiles (above 100 microns) discharged from the high-temperature carbonization furnace, accounting for 80% of the total volatiles. The fine particles pass through the secondary coarse filter and are all intercepted by the primary fine filter (above 20 microns), thus ensuring the normal production process of the high-temperature carbonization furnace and at the same time ensuring that the sliding vane pump operates to meet the requirements.

[0018] 3. The investment cost of the sintered mesh filter element of the secondary coarse filter of the present utility model is one-time; the secondary coarse filter is installed in the exhaust pipeline through the cooperation of its external thread and the internal thread on the base, which is convenient for disassembly. At the same time, the sintered mesh filter element is made of stainless steel 316L material, which is convenient for cleaning and repeated use. Description of the Drawings

[0019] To more clearly illustrate the technical solutions of the embodiments of the present utility model, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 is a structural schematic diagram of the present utility model;

[0021] Figure 2 is a structural schematic diagram of the secondary coarse filter.

[0022] Reference numerals:

[0023] 1, primary Roots pump; 2, secondary Roots pump; 3, primary fine filter; 4, secondary coarse filter; 401, sintered mesh filter element; 402, first end cover; 403, second end cover; 404, communication hole; 405, sleeve; 4051, first sleeve; 4052, second sleeve; 5, sliding vane pump; 6, secondary coarse filter exhaust pipe; 7, connecting pipe; 8, Roots pump exhaust pipe; 9, primary fine filter exhaust pipe; 10, base; 1001, ring; 1002, connecting sleeve; 10021, first connecting sleeve; 10022, second connecting sleeve. Specific embodiments

[0024] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model. All other embodiments obtained by those of ordinary skill in the art without creative efforts based on the embodiments of the present utility model belong to the scope of protection of the present utility model.

[0025] As Figure 1 - Figure 2 shown, a high-temperature vacuum furnace exhaust gas emission filtration device includes a primary Roots pump 1, a secondary Roots pump 2, a primary fine filter 3, a secondary coarse filter 4, and a sliding vane pump 5. The exhaust port of the secondary coarse filter 4 is connected to the intake port of the secondary Roots pump 2 through a secondary coarse filter exhaust pipe 6. The exhaust port of the secondary Roots pump 2 is connected to the intake port of the primary Roots pump 1 through a connecting pipe 7. The discharge port of the primary Roots pump 1 is connected to the intake port of the primary fine filter 3 through a Roots pump exhaust pipe 8. The exhaust port of the primary fine filter 3 is connected to the sliding vane pump 5 through a primary fine filter exhaust pipe 9.

[0026] The filtration accuracy of the filter element of the primary fine filter 3 is 2 μm.

[0027] The secondary coarse filter 4 is detachably installed in the exhaust pipeline of the high-temperature vacuum furnace.

[0028] A base 10 is installed in the exhaust pipeline of the high-temperature vacuum furnace, and the secondary coarse filter 4 is detachably installed on the base 10.

[0029] The base 10 includes a ring 1001 and a connecting sleeve 1002. The connecting sleeve 1002 is a cylindrical body structure with a variable diameter on the outside. The ring 1001 is installed in the exhaust pipeline of the high-temperature vacuum furnace, and the connecting sleeve 1002 is installed in the ring 1001.

[0030] The connecting sleeve 1002 is composed of a first connecting sleeve 10021 and a second connecting sleeve 10022. The first connecting sleeve 10021 and the second connecting sleeve 10022 are of an integral structure. The inner diameters of the first connecting sleeve 10021 and the second connecting sleeve 10022 are the same, and the outer diameter of the first connecting sleeve 10021 is smaller than the outer diameter of the second connecting sleeve 10022.

[0031] The first connecting sleeve 10021 is installed in the ring 1001.

[0032] Internal threads are provided in the second connecting sleeve 10022.

[0033] The secondary coarse filter 4 includes a sintered mesh filter element 401. A first end cap 402 is provided at one end of the sintered mesh filter element 401, a second end cap 403 is provided at the other end of the sintered mesh filter element 401, a communication hole 404 is provided in the middle of the second end cap 403, and a sleeve 405 is installed in the communication hole 404. The sleeve 405 is a cylindrical body structure with a variable diameter on the outside.

[0034] The sleeve 405 is composed of a first sleeve 4051 and a second sleeve 4052. The first sleeve 4051 and the second sleeve 4052 are of an integral structure. The inner diameters of the first sleeve 4051 and the second sleeve 4052 are the same, and the outer diameter of the first sleeve 4051 is smaller than the outer diameter of the second sleeve 4052.

[0035] The first sleeve 4051 is installed in the communication hole 404.

[0036] External threads are provided on the outside of the second sleeve 4052.

[0037] The external threads are in threaded fit with the internal threads. By fitting the external threads of the second sleeve 4052 with the internal threads of the second connecting sleeve 10022, the sleeve 405 and the connecting sleeve 1002 can be connected together, and thus the secondary coarse filter 4 can be detachably installed on the base 10.

[0038] The sintered mesh filter element 401 is a stainless steel 316L sintered mesh filter element, and the filtration accuracy of the sintered mesh filter element 401 is 100μm.

[0039] A silica gel sealing ring is sleeved on the second sleeve 4052. By setting the silica gel sealing ring, a sealing effect can be achieved to prevent gas from leaking out through the gap.

[0040] During use, the waste gas discharged from the high-temperature vacuum furnace enters the exhaust pipeline. The secondary coarse filter 4 intercepts large particulate volatiles with a size of more than 100 microns in the waste gas, accounting for 80% of the total volatiles. The remaining fine particles accounting for 20% of the total volatiles sequentially pass through the secondary coarse filter exhaust pipeline 6, the secondary roots pump 2, the connecting pipe 7, and the roots pump exhaust pipe 8 to reach the primary fine filter 3. The primary fine filter 3 completely intercepts fine particles with a size of more than 2 microns. The filtered gas passes through the primary fine filter exhaust pipeline 9 to reach the slide valve pump 5 and is finally discharged through the exhaust port of the slide valve pump 5. This ensures the normal production process of the high-temperature vacuum furnace and at the same time ensures that the operation of the slide valve pump 5 meets the requirements.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or equivalently replace some of the technical features. These modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A high-temperature vacuum furnace exhaust gas emission filtering device, comprising a process pump and a filtering assembly, characterized in that: The process pump comprises a first-stage Roots pump (1), a second-stage Roots pump (2) and a slide valve pump (5); the filter assembly comprises a first-stage fine filter (3) and a second-stage coarse filter (4); the exhaust port of the second-stage coarse filter (4) is connected to the air inlet of the second-stage Roots pump (2) through a second-stage coarse filter exhaust pipeline (6); the exhaust port of the second-stage Roots pump (2) is connected to the air inlet of the first-stage Roots pump (1) through a connecting pipe (7); the exhaust port of the first-stage Roots pump (1) is connected to the air inlet of the first-stage fine filter (3) through a Roots pump exhaust pipe (8); and the exhaust port of the first-stage fine filter (3) is connected to the slide valve pump (5) through a first-stage fine filter exhaust pipeline (9).

2. The high-temperature vacuum furnace exhaust gas emission filtering device according to claim 1 is characterized in that: The filtering accuracy of the filter element of the first-level fine filter (3) is 2 μm.

3. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 1 is characterized in that: The secondary coarse filter (4) is detachably installed in the exhaust duct of the high-temperature carbonization furnace.

4. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 3 is characterized in that: A base (10) is installed in the exhaust duct of the high-temperature carbonization furnace, and a secondary coarse filter (4) is detachably installed on the base (10).

5. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 4 is characterized in that: The base (10) comprises a circular ring (1001) and a connecting sleeve (1002), wherein the connecting sleeve (1002) is installed inside the circular ring (1001).

6. The high-temperature vacuum furnace exhaust gas emission filtering device according to claim 5, characterized in that: The secondary coarse filter (4) comprises a sintered mesh filter element (401), one end of the sintered mesh filter element (401) is provided with a first end cover (402), the other end of the sintered mesh filter element (401) is provided with a second end cover (403), a connecting hole (404) is provided in the middle of the second end cover (403), a sleeve (405) is installed in the connecting hole (404), and the sleeve (405) is installed in the connecting sleeve (1002).

7. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 6, characterized in that: The connecting sleeve (1002) is a cylindrical structure with an externally variable diameter, and an internal thread is provided inside the variable diameter end of the connecting sleeve (1002). The sleeve (405) is a cylindrical structure with an externally variable diameter, and an external thread is provided outside the variable diameter end of the sleeve (405). The sleeve (405) is installed in the connecting sleeve (1002) by matching the external thread and the internal thread.

8. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 6, characterized in that: The sintered mesh filter element (401) is a stainless steel 316L sintered mesh filter element, and the filtering accuracy of the sintered mesh filter element (401) is 100 μm.

9. The high temperature vacuum furnace exhaust gas emission filtering device according to claim 6, characterized in that: The sleeve (405) is sleeved with a silicone sealing ring.

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