Rotary temperature measurement platform device for crystal growth

Abstract

The utility model provides a crystal growth rotary temperature measurement platform device which comprises a support frame, a motor is connected to the lower end of the support frame, a bowl piece is arranged at the upper end of the support frame, a motor shaft of the motor is in driving connection with the bowl piece, and the bowl piece is driven by the motor to rotate. A conductive slip ring is arranged between the bowl piece and the supporting frame, a thermocouple arranged on the bowl piece is electrically connected with the conductive slip ring, and the conductive slip ring transmits signals generated by the thermocouple. The bowl piece is arranged in a crystal growing furnace, and the bowl piece is rotated, so that a thermal field in a crystal growing environment is more uniform, melt convection is promoted, solute distribution is improved, and crystal growth is promoted. The device can monitor the temperature condition in the crystal growth process in real time in the crystal rotating state so as to adjust parameters, optimize the crystal growth conditions and improve the crystal quality.

Description

Technical Field

[0001] The utility model belongs to the technical field of crystal growth, and particularly relates to a crystal growth rotary temperature measurement platform device. Background Art

[0002] Temperature is the most critical parameter in crystal growth, directly affecting the crystal growth process and determining the performance and quality of the crystal. In particular, the actual measured temperature close to the crucible can most directly reflect the actual crystal growth situation, which is an important means to monitor the crystal growth process. Therefore, it is necessary to measure the actual temperature of the relevant positions of the crucible during the crystal growth process, and then precisely control the temperature to obtain high-quality crystals. At the same time, during the crystal growth process, in order to make the components mix evenly, it is necessary to rotate the crucible, introduce repetitive and controllable forced convection in the liquid phase by rotating the crucible, reduce the thickness of the solute boundary layer at the growth interface front, reduce the depression depth of the interface, and enable the crystal to grow more stably. Rotating the crucible can also reduce the influence on the crystal caused by the non-strict symmetry of the temperature field of the furnace body itself to a certain extent.

[0003] When measuring temperature, a thermocouple is usually used to monitor the temperature. However, if the crucible rotates, the wires of the thermocouple will be wound during rotation, resulting in the inability to measure temperature during rotation and causing equipment failure.

[0004] Therefore, the above problems need to be solved urgently. Content of the Utility Model

[0005] Purpose of the utility model: In order to overcome the above deficiencies, the utility model provides a crystal growth rotary temperature measurement platform device, which can avoid the winding of the connecting wires of the thermocouple during rotation under the condition of ensuring rotational centering, and realize the function of measuring temperature while rotating.

[0006] Technical solution: To achieve the above object, the present utility model provides a crystal growth rotary temperature measurement platform device, which includes a support frame. A motor is connected to the lower end of the support frame, and a bowl member is provided at the upper end of the support frame. The motor shaft of the motor is drivingly connected to the bowl member, and the bowl member rotates under the drive of the motor. A conductive slip ring is provided between the bowl member and the support frame. A thermocouple provided on the bowl member is electrically connected to the conductive slip ring, and the conductive slip ring transmits the signal generated by the thermocouple. When growing a crystal, a crucible needs to be placed on the bottom support for crystal growth, and the thermocouple is attached to the bottom support. The thermocouple wire passes through the groove in the middle of the bowl member, and then the bottom support is placed at the center of the bottom of the bowl member and fixed to ensure that the crucible with the crystal and the base are always at the center of the bowl member. Then, the present utility model needs to be placed in a crystal growth furnace, and the horizontal position of the support frame is adjusted to ensure that the device is at the center of the crystal growth furnace, ensuring that the crystal is at the center of the furnace where the thermal field is the most stable, avoiding crystal defects, and improving the crystal quality. When the crystal grows in the growth furnace, the motor is started to drive the bowl member to rotate, making the thermal field in the crystal growth environment more uniform, promoting melt convection, improving solute distribution, promoting crystal growth, and improving the crystal quality. During the rotation process, the thermocouple provided on the bowl member continuously monitors the heat, and real-time monitors the temperature condition during the crystal growth process to adjust the parameters to optimize the crystal growth conditions. The application of the conductive slip ring avoids the entanglement of the wire connected to the thermocouple during the rotation process. The whole of the present utility model is arranged in axial symmetry, which is easy to adjust the position to make it at the center of the furnace body, ensuring the symmetry of the temperature field, ensuring the rotational centering, promoting crystal growth, and ensuring the crystal quality.

[0007] Further, in the above crystal growth rotary temperature measurement platform device, the conductive slip ring includes a stator and a rotor. The stator is provided outside the rotor. The rotor is connected to the bowl member, and the stator is connected to the support frame. The rotor rotates around the axis of the stator. The rotor is provided with an input wire, and the stator is provided with an output wire. The stator and the rotor form a circuit, and the input wire and the output wire are electrically connected. The stator and the rotor are arbitrarily provided with a metal ring and a brush. During the rotation of the rotor relative to the stator, the brush and the metal ring are always in contact, ensuring that the thermocouple can always transmit the signal to the thermometer during the rotation process, avoiding the entanglement of the thermocouple wire, and realizing the transmission of temperature signals during the rotation process.

[0008] Further, in the above crystal growth rotary temperature measurement platform device, the stator is provided with a compensating wire, and the compensating wire is connected to the thermometer. The compensating wire can improve the accuracy of the thermocouple temperature measurement and improve the reliability of the temperature measurement system.

[0009] Furthermore, in the above-described crystal growth rotation temperature measurement platform device, a bearing is provided on the upper side of the support frame. A drive shaft is inserted through the bearing, and the drive shaft rotates within the bearing. The drive shaft is key-connected to the conductive slip ring shaft. The lower end of the drive shaft is drivingly connected to the motor through a coupling, and the upper end of the drive shaft is connected to the bowl-shaped member. The drive shaft drives the conductive slip ring and the bowl-shaped member to rotate. The rotation of the drive shaft within the bearing improves the stability of the drive shaft rotation, ensures rotational centering, provides a stable growth environment for crystal growth, and improves crystal quality.

[0010] Furthermore, in the above-described crystal growth rotation temperature measurement platform device, the bowl-shaped member is circular, the upper end of the bowl-shaped member is open, and the drive shaft is coaxially connected to the bowl-shaped member.

[0011] Furthermore, in the above-described crystal growth rotation temperature measurement platform device, a groove is provided on the bottom surface of the bowl-shaped member, and a through hole is provided on the bottom surface of the groove. The thermocouple is installed in the groove, and the thermocouple wire passes through the through hole.

[0012] Furthermore, in the above-described crystal growth rotation temperature measurement platform device, the motor is a servo motor. The servo motor can accurately adjust the speed according to needs, optimize the rotation parameters, control the growth rate and shape of the crystal, improve the crystal quality and growth kinetics.

[0013] From the above technical solutions, it can be seen that the present utility model has the following beneficial effects: The crystal growth rotation temperature measurement platform device of the present utility model enables the crystal to be in a rotating state during growth in the growth furnace, making the thermal field in the crystal growth environment more uniform, promoting melt convection, improving solute distribution, promoting crystal growth, and improving crystal quality. During the rotation process, the thermocouple provided on the bowl-shaped member continuously monitors the heat, and real-time monitors the temperature condition during the crystal growth process to adjust the parameters and optimize the crystal growth conditions. The application of the conductive slip ring avoids the entanglement of the wires connected to the thermocouple during the rotation process. The overall structure of the present utility model is axially symmetrically arranged, which is easy to adjust the position, placed at the center of the furnace body, ensuring the symmetry of the temperature field, ensuring rotational centering, promoting crystal growth, and guaranteeing crystal quality. Description of the Drawings

[0014] Figure 1 is the front view of the crystal growth rotation temperature measurement platform device of the present utility model;

[0015] Figure 2 is the top view of the crystal growth rotation temperature measurement platform device of the present utility model;

[0016] Figure 3 is the structural schematic diagram of the crystal growth rotation temperature measurement platform device of the present utility model without the bowl-shaped member.

[0017] In the figure: 1. Support frame, 11. Bearing, 12. Drive shaft, 2. Motor, 3. Bowl part, 31. Groove, 4. Conductive slip ring, 41. Stator, 42. Rotor, 421. Input wire, 422. Compensation wire. Detailed implementation mode

[0018] Embodiment 1

[0019] As Figure 1 A crystal growth rotating temperature measurement platform device as shown, comprising a support frame 1, a motor 2 is connected to the lower end of the support frame 1, a bowl part 3 is arranged at the upper end of the support frame 1, the motor shaft of the motor 2 is drivingly connected to the bowl part 3, and the bowl part 3 rotates under the drive of the motor 2. A conductive slip ring 4 is arranged between the bowl part 3 and the support frame 1, a thermocouple arranged on the bowl part 3 is electrically connected to the conductive slip ring 4, and the conductive slip ring 4 transmits the signal generated by the thermocouple. The motor 2 is a servo motor.

[0020] During crystal growth, the crystal needs to be placed on the bottom tray for crystal growth, the bottom tray is placed at the center of the bottom of the bowl part 3, and the bottom tray is fixed to ensure that the base with the crystal placed thereon is always at the center of the bowl part 3. Then, the present utility model needs to be placed in the crystal growth furnace, and the horizontal position of the support frame 1 is adjusted to ensure that the device is at the center of the crystal growth furnace and the crystal is at the center of the furnace with the most stable thermal field. When the crystal grows in the growth furnace, the motor 2 is started to drive the bowl part 3 to rotate. During the rotation process, the thermocouple arranged on the bowl part 3 continuously monitors the heat, and the temperature condition during the crystal growth process is monitored in real time to adjust the parameters to optimize the crystal growth conditions.

[0021] As Figures 2 - 3The crystal growth rotation temperature measurement platform device shown, the conductive slip ring 4 includes a stator 41 and a rotor 42. The stator 41 is provided outside the rotor 42. The rotor 42 is connected to the bowl member 3. The stator 41 is connected to the support frame 1. The rotor 42 rotates around the axis of the stator 41. The rotor 42 is provided with an input wire 421. The stator 41 is provided with an output wire. The stator 41 and the rotor 42 form a path, and the input wire 421 and the output wire are electrically connected. Either the stator 41 or the rotor 42 is provided with a metal ring and a brush. During the rotation of the rotor 42 relative to the stator 41, the brush and the metal ring are always in contact, ensuring that the thermocouple can always transmit signals to the control system during rotation and avoiding the entanglement of the thermocouple wires. The stator 41 is provided with a compensating wire 422, and the compensating wire 422 is connected to the thermometer to improve the temperature measurement accuracy of the thermocouple. A bearing 11 is provided on the upper side of the support frame 1. A drive shaft 12 is inserted through the bearing 11. The drive shaft 12 rotates within the bearing 11. The drive shaft 12 is key-connected to the conductive slip ring 4. The lower end of the drive shaft 12 is drivingly connected to the motor 2 through a coupling 13. The upper end of the drive shaft 12 is connected to the bowl member 3. The drive shaft 12 drives the conductive slip ring 4 and the bowl member 3 to rotate. The bowl member 3 is circular, with an open upper end. The drive shaft 12 is coaxially connected to the bowl member 3. The bottom surface of the bowl member 3 is provided with a groove 31, and a through hole is provided on the bottom surface of the groove 31. The thermocouple is installed in the groove 31 and passes through the through hole.

[0022] The above embodiments are exemplary. Their purpose is to illustrate the technical concept and characteristics of the present invention so that those skilled in this field can understand the content of the present invention and implement it accordingly. However, the protection scope of the present invention cannot be limited thereby. All equivalent changes or modifications made according to the spirit and essence of the present invention should be covered within the protection scope of the present invention.

Claims

1. A crystal growth rotating temperature measurement platform device, characterized in that: The invention comprises a support frame (1), the lower end of the support frame (1) is connected to a motor (2), the upper end of the support frame (1) is provided with a bowl member (3), the motor shaft of the motor (2) and the bowl member (3) are drivingly connected, and the bowl member (3) rotates under the drive of the motor (2); a conductive slip ring (4) is provided between the bowl member (3) and the support frame (1), a thermocouple provided on the bowl member (3) is electrically connected to the conductive slip ring (4), and the conductive slip ring (4) transmits a signal generated by the thermocouple.

2. The crystal growth rotating temperature measuring platform device according to claim 1, characterized in that: The conductive slip ring (4) comprises a stator (41) and a rotor (42); the stator (41) is arranged outside the rotor (42); the rotor (42) is connected to a bowl member (3); the stator (41) is connected to a support frame (1); the rotor (42) rotates around an axis of the stator (41); the rotor (42) is provided with an input wire (421); the stator (41) is provided with an output wire; the stator (41) and the rotor (42) form a passage; the input wire (421) and the output wire are in conduction; and the input wire (421) and the thermocouple are electrically connected.

3. The crystal growth rotating temperature measuring platform device according to claim 2, characterized in that: The stator (41) is provided with a compensation line (422), and the compensation line (422) is connected to a temperature measuring instrument.

4. The crystal growth rotating temperature measuring platform device according to claim 1, characterized in that: A bearing (11) is provided on the upper side of the support frame (1); a drive shaft (12) is inserted into the bearing (11), and the drive shaft (12) rotates in the bearing (11); the drive shaft (12) and the conductive slip ring (4) are connected by a shaft key, the lower end of the drive shaft (12) and the motor (2) are connected by a coupling (13), and the upper end of the drive shaft (12) is connected to the bowl member (3); the drive shaft (12) drives the conductive slip ring (4) and the bowl member (3) to rotate.

5. The crystal growth rotating temperature measuring platform device according to claim 4, characterized in that: The bowl member (3) is circular, the upper end of the bowl member (3) is open, and the drive shaft (12) and the bowl member (3) are coaxially connected.

6. The crystal growth rotating temperature measurement platform device according to claim 5, characterized in that: The bottom surface of the bowl (3) is provided with a groove (31), and the bottom surface of the groove (31) is provided with a through hole.

7. The crystal growth rotating temperature measurement platform device according to claim 1, characterized in that: The motor (2) is a servo motor.

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