Silicon wafer transfer water cart capable of preventing water from overflowing

Abstract

The utility model discloses a silicon wafer transfer water cart capable of preventing water from overflowing, which relates to the technical field of silicon wafer transfer, and comprises a movable frame and a silicon wafer body, a plurality of water inlet holes are symmetrically arranged in the movable frame, the water inlet holes are used for preventing pure water from spilling, a flowing groove is arranged in the movable frame, and the water inlet holes are communicated with the flowing groove. And an attaching base is arranged at the bottom end of the movable frame, and a water storage frame is fixedly connected to the bottom end of the attaching base. The silicon wafer transfer water cart has the main advantages that the problem that pure water is splashed in the pushing process of the silicon wafer transfer water cart is solved through the movable frame, the water storage frame, the water inlet hole and the flowing groove, and due to the fact that the manufacturing cost of high-purity water is high, splashing is reduced, and resources can be saved. And pure water splashing is avoided, so that the production environment can be kept clean, and the pollution risk is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer transportation, in particular to a silicon wafer transportation water cart for preventing water overflow. Background Art

[0002] A silicon wafer transportation water cart is a special equipment specifically used in the semiconductor manufacturing industry. It is mainly used to safely and efficiently transport silicon wafers in a clean room environment. It is used to transport silicon wafers immersed in ultrapure water to maintain their cleanliness and prevent contamination. The water cart is usually made of anti-corrosion materials and is equipped with a special water tank and a pushing device.

[0003] During the process of transporting silicon wafers by the existing silicon wafer transportation water cart, since the internal pure water will shake during the process of the user pushing the cart, it may cause the pure water to splash out. The splashing of pure water may cause the clean room environment to be polluted, thereby increasing the humidity in the air and causing the growth of microorganisms. Moreover, the splashing of pure water will also make the ground slippery, increasing the risk of staff slipping. If the pure water splashes onto electrical equipment, it will also cause short circuits or other failures.

[0004] Regarding the problem that the internal pure water will shake and spill out during the process of pushing the cart in the above solution, a number of water inlet holes are opened on the inner wall of the movable frame, so that when shaking, the pure water will flow into the water storage frame through the flow groove and the holes at the bottom of the movable frame, thus solving the problem that the internal pure water will not spill out during the process of the user pushing the cart.

[0005] However, during the use of the silicon wafer transportation water cart, during the movement of the cart, due to the inability to be well-positioned and fixed, the placement frame will move inside the movable frame during the movement of the cart, which may cause damage to the silicon wafers due to collision. Summary of the Utility Model

[0006] The purpose of the utility model is to solve the deficiencies existing in the prior art, and to propose a silicon wafer transportation water cart for preventing water overflow, and the technical problem it solves is to prevent the pure water from splashing out during the process of pushing the cart.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A silicon wafer transportation water cart for preventing water overflow includes a movable frame and a silicon wafer body. A number of water inlet holes are symmetrically opened inside the movable frame, and the water inlet holes are used to prevent the pure water from spilling out. A flow groove is opened inside the movable frame, and a fitting base is arranged at the bottom end of the movable frame. A water storage frame is fixedly connected to the bottom end of the fitting base. Thus, it can be ensured that the pure water located inside the movable frame will not spill out.

[0009] As a further improvement of the present utility model, a support bar is fixedly connected to the side of the fitting base. Four support columns are symmetrically and fixedly connected to the bottom ends of the fitting base and the support bar. A handle is fixedly connected to the top end of the support bar. The bottom ends of the support columns are all fixedly connected with fixed universal wheels, so as to effectively facilitate the movement of the movable frame.

[0010] As a further improvement of the present utility model, a water outlet pipe is fixedly connected to the bottom end of the water storage frame. A sealing plug is movably connected to the opening at the end of the water outlet pipe away from the water storage frame. Four sliding bars I are symmetrically and fixedly connected to one side of the inner wall of the movable frame. Four sliding grooves I are correspondingly opened on the side of the inner wall of the movable frame symmetric to the sliding bars I, so as to achieve the effect of fixing and limiting the placement frame.

[0011] As a further improvement of the present utility model, a placement frame is arranged at the bottom ends of a plurality of silicon wafer bodies. Lifting grooves are correspondingly opened on both sides of the placement frame. Two sliding grooves II are symmetrically opened on one side of the placement frame located at the center of the silicon wafer body. Two sliding bars II are symmetrically and fixedly connected to the side of the placement frame away from the sliding grooves II. Grips are fixedly connected to the top ends of the placement frames, so that the placement frames can be slidably connected to each other in pairs.

[0012] As a further improvement of the present utility model, the sliding bar II can be slidably connected to the sliding groove II, the sliding groove II can be slidably connected to the sliding bar I, and the sliding bar II can be slidably connected to the sliding groove I, so as to sequentially fix and limit the placement frame.

[0013] As a further improvement of the present utility model, equal-flow holes are formed through the bottom end of the baffle in the middle of the movable frame, so as to ensure that the volumes of pure water on both sides inside the movable frame are the same.

[0014] As a further improvement of the present utility model, corresponding round holes are formed at the centers of the movable frame, the fitting base and the water storage frame, so that the splashes generated by shaking can be uniformly stored in the water storage frame.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0016] 1. Through the movable frame, water storage frame, water inlet hole and flow groove, when the user pushes the cart to make the pure water shake, when the shaken pure water contacts the water inlet hole, the pure water will fall into the water storage frame through the flow groove, the movable frame, the round holes of the fitting base and the water storage frame, thus solving the problem that the pure water will spill during the process of pushing the water cart for silicon wafer transfer. Since the cost of manufacturing high-purity water is relatively high, reducing spillage can save resources. Moreover, avoiding the spillage of pure water can keep the production environment clean, thus reducing the pollution risk. During the production process, the spillage of pure water may cause the production line to stop or require additional cleaning work, thus affecting the production efficiency. By effectively preventing the spillage of pure water, the production efficiency can be improved and unnecessary downtime can be reduced.

[0017] 2. Through the slider one, sliding groove one, sliding groove two and slider two, the slider one can be slidably connected to the sliding groove two, the sliding groove one can be slidably connected to the slider two, and the sliding groove two and the slider two of different placement frames can be slidably connected. And the distance between the slider one and the corresponding sliding groove one is set to be the width of three placement frames, so that the placement frame can be fixed and limited, achieving the prevention of the placement frame from moving during the movement. Since the silicon wafer is a very fragile and easily damaged material, if the silicon wafer is unstable or moves in the placement frame, it may cause collisions, scratches or other damages. Therefore, preventing the placement frame from moving during the cart pushing process can effectively protect the quality of the silicon wafer and ensure its integrity. Moreover, if the placement frame moves or tilts during the cart pushing, it may be necessary to stop and make adjustments or rearrange the silicon wafer body, which will waste time and affect the production efficiency. By preventing the placement frame from moving, this unnecessary pause can be avoided, thus improving the operation efficiency of the production line. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic structural diagram of the present utility model.

[0019] Figure 2 It is a schematic structural diagram of the placement frame, sliding groove two, slider two and silicon wafer body in the present utility model.

[0020] Figure 3 It is a schematic structural diagram of the movable frame, equal-flow hole and water inlet hole in the present utility model.

[0021] Figure 4 It is a schematic front sectional structural diagram of the movable frame, fitting base and water storage frame in the present utility model.

[0022] In the figure: 101, movable frame; 102, fitting base; 103, water storage frame; 104, support bar; 105, handle; 106, support column; 107, fixable universal wheel; 108, water outlet pipe; 109, sealing plug; 110, sliding bar one; 111, sliding groove one; 112, equal flow hole; 113, water inlet hole; 114, flow groove; 201, placement frame; 202, lifting groove; 203, sliding groove two; 204, sliding bar two; 205, grip; 300, silicon wafer body. Detailed implementation manner

[0023] To make the above objects, features, and advantages of the present utility model more obvious and understandable, the following detailed description of the specific implementation manners of the present utility model will be given in conjunction with the accompanying drawings. Many specific details are set forth in the following description to facilitate a thorough understanding of the present utility model. However, the present utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without departing from the connotation of the present utility model. Therefore, the present utility model is not limited by the specific implementations disclosed below.

[0024] It should be noted that when an element is referred to as "fixed to" another element, it can be directly on the other element or there may also be an intermediate element. When an element is considered to be "connected" to another element, it can be directly connected to the other element or there may be an intermediate element at the same time. The terms "vertical", "horizontal", "left", "right", and similar expressions used herein are for illustrative purposes only and do not represent the only implementation manner.

[0025] As shown in the figure, a silicon wafer transfer water trolley for preventing water overflow includes a movable frame 101, a fitting base 102, a water storage frame 103, an equal flow hole 112, a water inlet hole 113, and a flow groove 114.

[0026] First, a number of silicon wafer bodies 300 are sequentially placed at the top of the placement frame 201 according to the grooves at its top. When the top of the placement frame 201 is filled with the silicon wafer bodies 300, the user holds the grips 205 at both top ends and slides the second sliding bar 204 fixedly connected to the side of the placement frame 201 down to align with the first sliding groove 111. Then, the user sequentially controls the three placement frames 201 through the slidable connection relationship between the second sliding groove 203, the second sliding bar 204, the first sliding bar 110, and the first sliding groove 111. And the distance between the first sliding bar 110 and the corresponding first sliding groove 111 is set to be the width of the three placement frames 201, so as to fix and limit the placement frame 201, preventing the placement frame 201 from moving during the movement. Since the silicon wafer is a very fragile and easily damaged material, if the silicon wafer is unstable or moves in the placement frame 201, it may cause collisions, scratches, or other damages. Therefore, preventing the placement frame 201 from moving during the cart pushing process can effectively protect the quality of the silicon wafer and ensure its integrity.

[0027] When the placement in the six placement frames 201 on both sides is completed and the sliding connection between the second sliding groove 203, the second sliding bar 204, the first sliding bar 110, and the first sliding groove 111 is fixed, pure water is injected into the movable frame 101 so that the pure water completely submerges the silicon wafer body 300. Since the two sides are grooved and penetrated by equal flow holes 112, the pure water submerging the silicon wafer body 300 on both sides always remains level. Then, the user first releases the fixation of the fixed universal wheels 107 on the overall cart, and then moves the movable frame 101 by pushing the handle 105. During the movement, due to the fluidity of the pure water, when the pure water moves to the water inlet hole 113, it will flow into the flow groove 114 inside the movable frame 101 through the water inlet hole 113. The round holes opened at the bottom of the movable frame 101, the center of the fitting base 102, and the top of the water storage frame 103 enable the possibly overflowed pure water to flow into the water storage frame 103 for storage, thus preventing the pure water from splashing and overflowing due to shaking. Since the cost of manufacturing high-purity water is relatively high, reducing splashing can save resources. Moreover, avoiding the splashing of pure water can keep the production environment clean, thereby reducing the pollution risk.

[0028] Furthermore, when the pure water in the water storage frame 103 accumulates to a certain extent, by detaching the sealing plug 109 from the water outlet pipe 108, the water outlet pipe 108 fixedly connected to the bottom of the water storage frame 103 can then discharge the pure water accumulated inside the water storage frame 103, thereby achieving the transfer of the pure water and facilitating secondary utilization.

[0029] The advantages of the present utility model are as follows: 1) It solves the problem that pure water will be spilled during the process of pushing the water trolley for transporting silicon wafers. Reducing the spillage can save resources and avoid the spillage of pure water to keep the production environment clean, thereby reducing the pollution risk. 2) It prevents the placement frame 201 from moving during the process of pushing the trolley, thereby effectively protecting the quality of the silicon wafers and ensuring their integrity.

[0030] The above are only the preferred specific embodiments of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, according to the technical solution of the present utility model and its inventive concept, makes equivalent substitutions or changes, and all should be covered within the protection scope of the present utility model.

Claims

1. A silicon wafer transport cart for preventing water from overflowing, comprising a movable frame (101) and a silicon wafer body (300), characterized in that: A plurality of water inlet holes (113) are symmetrically provided inside the movable frame (101), and the water inlet holes (113) are used to prevent pure water from spilling out. A flow groove (114) is provided inside the movable frame (101). A fitting base (102) is provided at the bottom end of the movable frame (101), and a water storage frame (103) is fixedly connected to the bottom end of the fitting base (102).

2. A silicon wafer transport cart for preventing water overflow according to claim 1, characterized in that: A support bar (104) is fixedly connected to the side of the fitting base (102), four support columns (106) are symmetrically fixedly connected to the bottom ends of the fitting base (102) and the support bar (104), a handle (105) is fixedly connected to the top end of the support bar (104), and the bottom ends of the support columns (106) are all fixedly connected to fixable universal wheels (107).

3. The silicon wafer transport cart for preventing water overflow according to claim 1, characterized in that: The bottom end of the water storage frame (103) is fixedly connected to a water outlet pipe (108), and an opening of the water outlet pipe (108) at one end away from the water storage frame (103) is movably connected to a sealing plug (109); one side of the inner wall of the movable frame (101) is symmetrically fixedly connected to four sliding bars (110); and the inner wall of the movable frame (101) is provided with four sliding grooves (111) corresponding to the sliding bar (110) on a side symmetrical to the sliding bar (110).

4. A silicon wafer transport cart for preventing water overflow according to claim 3, characterized in that: A placing frame (201) is provided at the bottom end of a plurality of the silicon wafer bodies (300), and lifting grooves (202) are correspondingly provided on both sides of the placing frame (201). The placing frame (201) is symmetrically provided with two second sliding grooves (203) on one side of the center of the silicon wafer body (300), and two second sliding bars (204) are symmetrically fixedly connected to the side of the placing frame (201) away from the second sliding groove (203), and a handle (205) is fixedly connected to the top of each of the placing frames (201).

5. A silicon wafer transport cart for preventing water overflow according to claim 4, characterized in that: The second sliding bar (204) can be slidably connected to the second sliding groove (203), the second sliding groove (203) can be slidably connected to the first sliding bar (110), and the second sliding bar (204) can be slidably connected to the first sliding groove (111).

6. The silicon wafer transport cart for preventing water overflow according to claim 1, characterized in that: An equal flow hole (112) is provided through the bottom end of the baffle in the middle of the movable frame (101).

7. The silicon wafer transport cart for preventing water overflow according to claim 1, characterized in that: The movable frame (101), the fitting base (102) and the water storage frame (103) are all provided with corresponding circular holes at their centres.

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