Frequency crack trimming equipment for hemispherical harmonic oscillator

Abstract

The utility model discloses a hemispherical harmonic oscillator frequency crack trimming device, which comprises a driving module, a clamp and a frequency trimming module, the frequency trimming module comprises a corrosion tank and a cleaning tank, and a swing driving mechanism of the driving module is used for driving a rotation driving mechanism to rotate in a vertical plane relative to a two-dimensional linear driving mechanism. The rotation driving mechanism is used for driving the clamp to rotate around the central axis of the hemispherical harmonic oscillator until the lip of the hemispherical harmonic oscillator faces downwards along the position corresponding to the low-frequency axis of the hemispherical harmonic oscillator, and the two-dimensional linear driving mechanism is used for driving the swing driving mechanism to be close to the corrosion tank or the cleaning tank. The semi-spherical harmonic oscillator lip is immersed into the corrosive liquid of the corrosion tank along the to-be-corroded part, or the semi-spherical harmonic oscillator lip is immersed into the cleaning liquid of the cleaning tank along the to-be-cleaned part. According to the utility model, the automation and rapid operation of the chemical leveling process of the hemispherical harmonic oscillator can be realized.

Description

Technical Field

[0001] The utility model relates to the technical field of hemispherical resonator gyro preparation, and particularly relates to a frequency splitting trimming device for a hemispherical resonator. Background Technique

[0002] The hemispherical resonator gyro is a high-precision inertial sensor. Compared with current ring laser gyros and fiber optic gyros, it has fewer components, a longer continuous working time, better stability, and excellent anti-radiation ability. It is one of the most promising devices in the next-generation inertial navigation equipment. However, due to errors in the actual manufacturing process, uneven mass distribution in the circumferential direction of the hemispherical resonator will cause the resonator to form two inherent rigid axes, and the vibration frequencies under the two inherent axis systems will diverge. The difference between the two vibration frequencies is called frequency splitting. The existence of frequency splitting is one of the important factors affecting the accuracy of the hemispherical resonator gyro. To reduce the frequency splitting of the hemispherical resonator and thus improve the gyro accuracy, relevant mass and frequency splitting trimming means have been gradually applied to the processed resonator. Currently, the trimming methods used in the industry are chemical leveling, laser leveling, and ion beam leveling. Among them, laser leveling has higher accuracy, but the thermal effect generated during the laser ablation process will damage the surface of the resonator, and the femtosecond laser device with a short pulse time has too high a cost; ion beam trimming has high accuracy and less damage to the surface of the resonator, but the ion beam removal efficiency is low. Chemical leveling has high efficiency, does not introduce additional damage to the surface of the resonator, and currently some patents have disclosed the chemical leveling method of the hemispherical resonator. However, in the face of the requirements of future industrial production of hemispherical resonator gyros, there is still no relevant automated and fast chemical leveling device. Content of the Utility Model

[0003] Aiming at the problems in the background technique, the utility model proposes a frequency splitting trimming device for a hemispherical resonator that can achieve chemical leveling automatically and quickly.

[0004] The utility model adopts the following technical solutions:

[0005] A frequency splitting trimming device for a hemispherical resonator, comprising a driving module, a fixture, and a frequency trimming module. The frequency trimming module is arranged on one side of the driving module.

[0006] The driving module includes a two-dimensional linear driving mechanism, a swing driving mechanism and a rotation driving mechanism. The frequency adjustment module includes a corrosion tank and a cleaning tank. The clamp is used to clamp the hemispherical resonator and is connected to the rotation driving mechanism. The swing driving mechanism is rotationally connected to the two-dimensional linear driving mechanism and is connected to the rotation driving mechanism. It is used to drive the rotation driving mechanism to rotate in a vertical plane relative to the two-dimensional linear driving mechanism so that the central axis of the hemispherical resonator forms a set angle with the liquid surface of the corrosion tank or the cleaning tank. The rotation driving mechanism is used to drive the clamp to rotate around the central axis of the hemispherical resonator until the lip of the hemispherical resonator is at a position corresponding to its low-frequency axis facing downward. The two-dimensional linear driving mechanism is used to drive the swing driving mechanism to approach the corrosion tank or the cleaning tank until the part of the lip of the hemispherical resonator to be corroded is immersed in the corrosion liquid of the corrosion tank, or until the part of the lip of the hemispherical resonator to be cleaned is immersed in the cleaning liquid of the cleaning tank.

[0007] Preferably, the two-dimensional linear drive mechanism includes two vertical linear drive mechanisms and one transverse linear drive mechanism, the two vertical linear drive mechanisms are arranged side by side in the transverse direction, and the corrosion tank and the cleaning tank are also arranged side by side in the transverse direction; the two vertical linear drive mechanisms are respectively connected to the transverse linear drive mechanism for driving the transverse linear drive mechanism to move vertically up and down, and the transverse linear drive mechanism is connected to the swing drive mechanism for driving the swing drive mechanism to move horizontally left and right.

[0008] Preferably, the vertical linear drive mechanism includes a vertical drive motor and a vertical screw-nut substructure. The vertical drive motor is connected to the screw transmission of the vertical screw-nut substructure and is used to drive the screw of the vertical screw-nut substructure to rotate. The transverse linear drive mechanism is fixedly connected to the nut of the vertical screw-nut substructure.

[0009] Preferably, the vertical linear drive mechanism further comprises a vertical slide rail, and the nut of the vertical lead screw nut substructure is slidably disposed on the vertical slide rail.

[0010] Preferably, the transverse linear drive mechanism includes a transverse drive motor and a transverse screw nut substructure. The transverse drive motor is connected to the screw transmission of the transverse screw nut substructure and is used to drive the screw of the transverse screw nut substructure to rotate. The swing drive mechanism is fixedly connected to the nut of the transverse screw nut substructure.

[0011] Preferably, the transverse linear drive mechanism further comprises a transverse slide rail, and the nut of the transverse lead screw nut auxiliary structure is slidably disposed on the transverse slide rail.

[0012] Preferably, the swing drive mechanism comprises a connecting arm and a swing motor, the connecting arm is connected between the nut of the transverse screw nut substructure and the swing motor, and the swing motor is transmission-connected to the rotation drive mechanism.

[0013] Preferably, the self-rotation driving mechanism comprises a coupling assembly, a self-rotation motor and an adapter; the self-rotation motor is transmission-connected to the swing motor via the coupling assembly, and is transmission-connected to the clamp via the adapter.

[0014] Preferably, it further comprises a supporting module, the supporting module comprises a supporting frame and a supporting platform arranged on the supporting frame, and the driving module and the frequency adjustment module are arranged on the supporting platform.

[0015] Preferably, the corrosion tank and the cleaning tank are fixed on the support platform through a mounting frame.

[0016] Compared with the prior art, the advantages of the utility model are:

[0017] The utility model designs the linkage mechanism of each axis, so that the four low-frequency inherent rigid axis positions on the oscillator can be equally immersed in the chemical corrosion liquid for reaction etching, and the oscillator is cleaned after a single reaction etching, so as to achieve the purpose of accurate and equal mass removal and frequency crack adjustment, thereby realizing the automation and rapid operation of the chemical leveling process, which can quickly reduce the frequency crack of the large-frequency-crack hemispherical resonator, meet the basic needs of industrial production, and facilitate subsequent large-scale production applications. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to make the present invention more easily understood, the present invention will be described in more detail by referring to the specific embodiments shown in the accompanying drawings. These drawings only depict typical embodiments of the present invention and should not be considered as limiting the scope of protection of the present invention.

[0019] Figure 1 It is a structural schematic diagram of the frequency split adjustment device of the hemispherical resonator according to an embodiment of the utility model.

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the frequency split adjustment device of the hemispherical resonator according to an embodiment of the utility model (the supporting module is not shown).

[0021] Figure 3 This is a schematic diagram of the main structure of the frequency split adjustment device of the hemispherical resonator according to an embodiment of the utility model (the supporting module is not shown).

[0022] Figure 4 This is a side structural schematic diagram of a frequency split adjustment device for a hemispherical resonator according to an embodiment of the utility model (the supporting module is not shown).

[0023] Figure 5 for Figure 3 AA cross-section diagram.

[0024] Figure 6 This is a schematic diagram of a first application state (chemical corrosion) of the frequency crack adjustment device of a hemispherical resonator according to an embodiment of the utility model.

[0025] Figure 7 This is a schematic diagram of a second application state (cleaning) of the frequency crack adjustment device of the hemispherical resonator according to an embodiment of the utility model.

[0026] Reference numerals:

[0027] 1. Horizontal linear drive mechanism; 11. Horizontal drive motor; 12. Horizontal screw nut substructure; 13. Horizontal slide rail; 2. Vertical linear drive mechanism; 21. Vertical drive motor; 22. Vertical screw nut substructure; 23. Vertical slide rail; 3. Self-rotation drive mechanism; 31. Coupling assembly; 32. Self-rotation motor; 33. Adapter; 4. Frequency adjustment module; 41. Corrosion tank; 42. Cleaning tank; 43. Mounting frame; 5. Swing drive mechanism; 51. Connecting arm; 52. Swing motor; 53. Slider; 6. Support module; 61. Support frame; 62. Support table; 7. Fixture; 8. Hemispherical resonator. DETAILED DESCRIPTION

[0028] The following describes the implementation mode of the present invention with reference to the accompanying drawings, so that those skilled in the art can better understand the present invention and implement it. However, the enumerated embodiments are not intended to limit the present invention. In the absence of conflict, the following embodiments and the technical features in the embodiments can be combined with each other, wherein the same components are represented by the same figure marks.

[0029] like Figures 1-7 As shown, the frequency splitting adjustment device of the hemispherical resonator of this embodiment includes a driving module, a fixture 7 and a frequency adjustment module 4. The frequency adjustment module 4 is arranged on one side of the driving module.

[0030] The driving module includes a two-dimensional linear driving mechanism, a swing driving mechanism 5 and a rotation driving mechanism 3. The frequency adjustment module 4 includes a corrosion groove 41 and a cleaning groove 42. The clamp 7 is used to clamp the hemispherical resonator 8 and is connected to the self-rotation driving mechanism 3. The swing driving mechanism 5 is rotationally connected to the two-dimensional linear driving mechanism and is connected to the self-rotation driving mechanism 3. It is used to drive the self-rotation driving mechanism 3 to rotate in a vertical plane relative to the two-dimensional linear driving mechanism so that the central axis of the hemispherical resonator 8 forms a set angle with the liquid surface of the corrosion groove 41 or the cleaning groove 42. The self-rotation driving mechanism 3 is used to drive the clamp 7 to rotate around the central axis of the hemispherical resonator 8 until the lip of the hemispherical resonator 8 is at a position corresponding to its low-frequency axis facing downward. The two-dimensional linear driving mechanism is used to drive the swing driving mechanism 5 to approach the corrosion groove 41 or the cleaning groove 42 until the part of the lip of the hemispherical resonator 8 to be corroded is immersed in the corrosion liquid of the corrosion groove 41, or until the part of the lip of the hemispherical resonator 8 to be cleaned is immersed in the cleaning liquid of the cleaning groove 42.

[0031] Therefore, by designing the linkage mechanism of each axis, the four low-frequency inherent rigid axis positions on the oscillator can be equally immersed in the chemical corrosion liquid for reactive etching. At the same time, the oscillator is cleaned after a single reactive etching to achieve the purpose of accurate and equal mass removal and frequency crack adjustment, thereby realizing the automation and rapid operation of the chemical leveling process, which can quickly reduce the frequency crack of the large-frequency-crack hemispherical resonator, meet the basic needs of industrial production, and facilitate subsequent large-scale production applications.

[0032] In this embodiment, the two-dimensional linear drive mechanism includes two vertical linear drive mechanisms 2 and one transverse linear drive mechanism 1. The two vertical linear drive mechanisms 2 are arranged in parallel in the transverse direction, and the corrosion groove 41 and the cleaning groove 42 are also arranged in parallel in the transverse direction; the two vertical linear drive mechanisms 2 are respectively connected to the transverse linear drive mechanism 1 for driving the transverse linear drive mechanism 1 to move vertically up and down, and the transverse linear drive mechanism 1 is connected to the swing drive mechanism 5 for driving the swing drive mechanism 5 to move horizontally left and right.

[0033] In this embodiment, Figure 2 As shown, the vertical linear drive mechanism 2 includes a vertical drive motor 21 and a vertical screw nut substructure 22. The vertical drive motor 21 is connected to the screw transmission of the vertical screw nut substructure 22 to drive the screw of the vertical screw nut substructure 22 to rotate. The transverse linear drive mechanism 1 is fixedly connected to the nut of the vertical screw nut substructure 22.

[0034] In this embodiment, the vertical linear drive mechanism 2 further includes a vertical slide rail 23 , and the nut of the vertical lead screw nut auxiliary structure 22 is slidably disposed on the vertical slide rail 23 .

[0035] In this embodiment, Figure 2 As shown, the transverse linear drive mechanism 1 includes a transverse drive motor 11 and a transverse screw nut substructure 12. The transverse drive motor 11 is connected to the screw transmission of the transverse screw nut substructure 12 and is used to drive the screw of the transverse screw nut substructure 12 to rotate. The swing drive mechanism 5 is fixedly connected to the nut of the transverse screw nut substructure 12.

[0036] In this embodiment, the transverse linear drive mechanism 1 further includes a transverse slide rail 13 , and the nut of the transverse lead screw nut auxiliary structure 12 is slidably disposed on the transverse slide rail 13 .

[0037] In this embodiment, Figure 4 and Figure 5 As shown, the swing drive mechanism 5 includes a slider 53, a connecting arm 51 and a swing motor 52. The slider 53 is fixedly connected to the nut of the transverse screw nut auxiliary structure 12. The connecting arm 51 is connected between the slider 53 and the swing motor 52. The swing motor 52 is transmission-connected to the rotation drive mechanism 3.

[0038] In this embodiment,Figure 4 and Figure 5 As shown in Figure 5 , the rotation drive mechanism 3 includes a coupling assembly 31, a rotation motor 32, and a adapter 33. The rotation motor 32 is drivingly connected to the swing motor 52 through the coupling assembly 31, and is drivingly connected to the fixture 7 through the adapter 33. Among them, the coupling assembly 31 includes a coupling 311 drivingly connected to the swing motor 52, and a coupling plate 312 connected between the coupling 311 and the rotation motor 32.

[0039] In this embodiment, a support module 6 is further included. The support module 6 includes a support frame 61, and a support table 62, a drive module, and a frequency adjustment module 4 provided on the support table 62 are provided on the support frame 61.

[0040] In this embodiment, the corrosion tank 41 and the cleaning tank 42 are fixed to the support table 62 through a mounting bracket 43.

[0041] The frequency splitting adjustment device of this embodiment realizes the chemical leveling process of the hemispherical resonator as follows:

[0042] 1) Add a certain amount of corresponding liquid to the corrosion tank 41 and the cleaning tank 42 respectively.

[0043] 2) The horizontal linear drive mechanism 1, the vertical linear drive mechanism 2, and the swing drive mechanism 5 return to zero. At this time, the swing drive mechanism 5 is respectively at the leftmost position of the horizontal stroke and the highest position of the up and down stroke, and the swing arm is in a horizontal state. At this time, the hemispherical resonator is fixed to the fixture 7 dedicated to the hemispherical oscillator, and the angle of the rotation motor 32 is adjusted on the control module to make the low-frequency axis position of the hemispherical oscillator face downward.

[0044] 3) The swing motor 52 rotates clockwise by 45 degrees, and the swing arm correspondingly tilts to the 45° angle position. At the same time, the horizontal linear drive mechanism 1 and the vertical linear drive mechanism 2 are linked, and the timer starts timing after the hemispherical oscillator descends a fixed stroke. At this time, the lip edge of the low-frequency axis position of the oscillator dips into the corrosion liquid in the corrosion tank 41 to a certain depth, as Figure 6 shown.

[0045] 4) After reaching the preset corrosion time, the horizontal linear drive mechanism 1 and the vertical linear drive mechanism 2 are linked, and the hemispherical oscillator is transferred to the cleaning tank 42 along a preset path to clean the corrosion position of the hemispherical oscillator. The cleaning state is shown in the cleaning process schematic diagram shown in Figure 7 . After the preset cleaning time, the oscillator returns to the origin. Figure 7 shown.

[0046] 5) After the rotation motor 9 rotates 90 degrees, steps 3) and 4) are repeated to remove the mass at the second low-frequency axis position;

[0047] 6) Repeat steps 3), 4), and 5) two more times to remove mass from the third and fourth low-frequency rigid axis positions. After completion, zero each axis and return the oscillator to the origin, ending the entire process.

[0048] In this embodiment, the controller 9 controls the automatic operation process of steps 3 - 6.

[0049] The above-described embodiments are merely relatively preferred specific implementation manners of the present utility model. The present specification uses phrases such as "in one embodiment", "in another embodiment", "in yet another embodiment", or "in other embodiments", which may each refer to one or more of the same or different embodiments according to the present disclosure. Ordinary variations and substitutions made by those skilled in the art within the scope of the technical solution of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A frequency adjustment device for a hemispherical resonator, comprising a driving module, a fixture (7) and a frequency adjustment module (4), wherein the frequency adjustment module (4) is arranged on one side of the driving module. The driving module comprises a two-dimensional linear driving mechanism, a swing driving mechanism (5) and a rotation driving mechanism (3); the frequency adjustment module (4) comprises an etching tank (41) and a cleaning tank (42); the clamp (7) is used to clamp the hemispherical resonator (8) and is connected to the rotation driving mechanism (3); the swing driving mechanism (5) is connected to the two-dimensional linear driving mechanism for rotation and is connected to the rotation driving mechanism (3) for driving the rotation driving mechanism (3) to rotate relative to the two-dimensional linear driving mechanism in a vertical plane so that the central axis of the hemispherical resonator (8) is aligned with the etching tank. The liquid surface of the groove (41) or the cleaning groove (42) forms a set angle, the rotation drive mechanism (3) is used to drive the clamp (7) to rotate around the central axis of the hemispherical resonator (8) until the lip edge of the hemispherical resonator (8) is at a position corresponding to its low-frequency axis facing downward, and the two-dimensional linear drive mechanism is used to drive the swing drive mechanism (5) to approach the etching groove (41) or the cleaning groove (42) until the part of the lip edge of the hemispherical resonator (8) to be etched is immersed in the etching liquid of the etching groove (41), or until the part of the lip edge of the hemispherical resonator (8) to be cleaned is immersed in the cleaning liquid of the cleaning groove (42).

2. The frequency splitting adjustment device of the hemispherical resonator according to claim 1 is characterized in that: The two-dimensional linear drive mechanism comprises two vertical linear drive mechanisms (2) and a transverse linear drive mechanism (1); the two vertical linear drive mechanisms (2) are arranged in parallel in the transverse direction; the corrosion tank (41) and the cleaning tank (42) are also arranged in parallel in the transverse direction; the two vertical linear drive mechanisms (2) are respectively connected in transmission with the transverse linear drive mechanism (1) for driving the transverse linear drive mechanism (1) to move vertically up and down; the transverse linear drive mechanism (1) is connected in transmission with the swing drive mechanism (5) for driving the swing drive mechanism (5) to move horizontally left and right.

3. The frequency splitting adjustment device of the hemispherical resonator according to claim 2 is characterized in that: The vertical linear drive mechanism (2) comprises a vertical drive motor (21) and a vertical lead screw nut substructure (22); the vertical drive motor (21) is connected to the lead screw of the vertical lead screw nut substructure (22) through a transmission system and is used to drive the lead screw of the vertical lead screw nut substructure (22) to rotate; and the horizontal linear drive mechanism (1) is fixedly connected to the nut of the vertical lead screw nut substructure (22).

4. The frequency splitting adjustment device of the hemispherical resonator according to claim 3 is characterized in that: The vertical linear drive mechanism (2) also includes a vertical slide rail (23), and the nut of the vertical lead screw nut auxiliary structure (22) is slidably arranged on the vertical slide rail (23).

5. The frequency split adjustment device of the hemispherical resonator according to claim 4, characterized in that: The transverse linear drive mechanism (1) comprises a transverse drive motor (11) and a transverse lead screw nut auxiliary structure (12); the transverse drive motor (11) is connected to the lead screw of the transverse lead screw nut auxiliary structure (12) for driving the lead screw of the transverse lead screw nut auxiliary structure (12) to rotate; and the swing drive mechanism (5) is fixedly connected to the nut of the transverse lead screw nut auxiliary structure (12).

6. The frequency splitting adjustment device of the hemispherical resonator according to claim 5, characterized in that: The transverse linear drive mechanism (1) also includes a transverse slide rail (13), and the nut of the transverse lead screw nut auxiliary structure (12) is slidably arranged on the transverse slide rail (13).

7. The frequency splitting adjustment device of the hemispherical resonator according to claim 6, characterized in that: The swing drive mechanism (5) comprises a connecting arm (51) and a swing motor (52); the connecting arm (51) is connected between the nut of the transverse screw nut auxiliary structure (12) and the swing motor (52); and the swing motor (52) is transmission-connected to the rotation drive mechanism (3).

8. The frequency split adjustment device of the hemispherical resonator according to claim 7, characterized in that: The self-rotation driving mechanism (3) comprises a coupling assembly (31), a self-rotation motor (32) and an adapter (33); the self-rotation motor (32) is transmission-connected to the swing motor (52) via the coupling assembly (31), and is transmission-connected to the clamp (7) via the adapter (33).

9. The frequency split adjustment device of a hemispherical resonator according to any one of claims 1 to 8, characterized in that: It also comprises a support module (6), the support module (6) comprising a support frame (61), and a support platform (62) arranged on the support frame (61), and the driving module and the frequency adjustment module (4) are arranged on the support platform (62).

10. The frequency split adjustment device of the hemispherical resonator according to claim 9, characterized in that: The corrosion tank (41) and the cleaning tank (42) are fixed on the support platform (62) through a mounting frame (43).

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