Sample clamp for circular epoxy encapsulation sample preparation

Abstract

The utility model provides a circular epoxy potting sampling sample clamp which comprises a clamp body, and two grooves used for placing epoxy potting sampling samples are formed in the top of the clamp body. The bottom of the clamp body is connected with an objective table on scanning electron microscope equipment in a clamping manner; according to the utility model, the problem of fixation of the epoxy potting sample during scanning electron microscope analysis is solved, the use of conductive adhesive is saved, and two samples can be placed in one test at the same time, so that the time and the cost are saved; and meanwhile, the groove is in contact with the epoxy potting sampling sample, so that the conductive area of the epoxy potting sampling sample is increased, and the imaging stability and clarity of the scanning electron microscope equipment are improved.

Description

Technical Field

[0001] The present application relates to the field of fixtures, and in particular to a circular epoxy potting sample preparation fixture. Background Art

[0002] Many samples need to be ground and polished after epoxy encapsulation, and their cross-sections need to be analyzed by scanning electron microscopy. Epoxy resin materials are not conductive. When clamped with the universal clamp that comes with the scanning electron microscope, a large amount of carbon conductive tape is required to fix and establish a conductive channel, resulting in complex processes and high costs. In addition, the clamp that comes with the scanning electron microscope is small in size and can only hold one circular epoxy encapsulation sample at a time, resulting in low work efficiency. Summary of the invention

[0003] The utility model aims to provide a circular epoxy potting sample preparation clamp, which solves the above-mentioned shortcomings of the existing scanning electron microscope when clamping the epoxy potting sample preparation sample.

[0004] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0005] The utility model provides a circular epoxy potting sample preparation clamp, comprising a clamp body, wherein the top of the clamp body is provided with two grooves for placing epoxy potting sample preparation samples; the bottom of the clamp body is connected with the stage on the scanning electron microscope device by clamping.

[0006] Preferably, a dovetail through groove is provided at the bottom of the fixture body, and the dovetail through groove is used for clamping and connecting with the stage on the scanning electron microscope equipment.

[0007] Preferably, two threaded through holes are provided on the side wall of the upper end of the clamp body, and the two threaded through holes correspond to the two grooves respectively and are connected to the two grooves; each threaded through hole is equipped with a screw for limiting and fixing the epoxy potting sample.

[0008] Preferably, three threaded holes are provided on the side wall at the lower end of the clamp body, and bolts are installed in the threaded holes for connection with the guide rails on the scanning electron microscope equipment.

[0009] Preferably, the upper end of the clamp body is further provided with two symmetrically arranged notches, and the side wall of one of the notches is provided with two threaded through holes, in which screws are fitted.

[0010] Preferably, a cut surface is opened from the bottom surface of another notch toward the lower end of the fixture body, and three threaded holes are opened on the cut surface. Bolts are installed in the threaded holes, and the bolts are used to cooperate with the guide rails on the scanning electron microscope equipment.

[0011] Preferably, a copper connector is provided at the bottom of the lower end of the fixture body, and a dovetail through groove is radially formed on the end surface of the copper connector along its radial direction.

[0012] Preferably, three threaded holes are provided on the side wall of the large end of the fixture body.

[0013] Preferably, a dovetail through groove is provided at the bottom of the fixture body, and the dovetail through groove is used for clamping connection with the stage on the scanning electron microscope equipment;

[0014] Two threaded through holes are provided on the side wall of the upper end of the fixture body. The two threaded through holes correspond to the two grooves respectively and are communicated with the two grooves; A screw is fitted in each threaded through hole for limiting and fixing the epoxy resin encapsulated sample.

[0015] Preferably, a dovetail through groove is provided at the bottom of the fixture body, and the dovetail through groove is used for clamping connection with the stage on the scanning electron microscope equipment;

[0016] Two threaded through holes are provided on the side wall of the upper end of the fixture body. The two threaded through holes correspond to the two grooves respectively and are communicated with the two grooves; A screw is fitted in each threaded through hole for limiting and fixing the epoxy resin encapsulated sample;

[0017] Three threaded holes are provided on the side wall of the lower end of the fixture body, and bolts are fitted in the threaded holes for mating connection with the guide rail on the scanning electron microscope equipment.

[0018] Preferably, the groove is of a circular structure.

[0019] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0020] A circular epoxy resin encapsulated sample fixture provided by the present utility model specializes the fixture for scanning electron microscope analysis of circular epoxy resin encapsulated samples. The epoxy resin encapsulated sample is placed in the groove and fixed by screws, solving the fixation problem of the epoxy resin encapsulated sample during scanning electron microscope analysis, saving the use of conductive adhesive, and two samples can be placed simultaneously in one test, saving time and cost; At the same time, the contact between the groove and the epoxy resin encapsulated sample increases the conductive area of the epoxy resin encapsulated sample, improving the stability and clarity of the imaging of the scanning electron microscope equipment. Description of the Drawings

[0021] Figure 1 is the front view of this fixture;

[0022] Figure 2 is the side view of this fixture;

[0023] Figure 3 is the three-dimensional view of this fixture;

[0024] Figure 4 is a perspective three-dimensional view of another angle of this fixture;

[0025] Wherein, 1. fixture body; 2. circular groove; 3. dovetail through groove; 4. threaded through hole; 5. threaded hole. Specific embodiments

[0026] In the following description, for the purpose of illustration rather than limitation, specific details such as specific system architectures, technologies, etc. are set forth in order to provide a thorough understanding of the embodiments of the present application. However, those skilled in the art should clearly understand that the present application can also be implemented in other embodiments without these specific details. In other cases, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to impede the description of the present application with unnecessary details.

[0027] It should be understood that when used in the specification of the present application and the appended claims, the term "comprising" indicates the presence of the described features, wholes, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components, and / or their combinations.

[0028] It should also be understood that the term "and / or" as used in the specification of the present application and the appended claims refers to any combination and all possible combinations of one or more of the associated listed items, and includes these combinations.

[0029] As used in the specification of the present application and the appended claims, the term "if" can be interpreted as "when", "once", "in response to determining", or "in response to detecting" according to the context. Similarly, the phrase "if determined" or "if [the described condition or event] is detected" can be interpreted as meaning "once determined", "in response to determining", "once [the described condition or event] is detected", or "in response to detecting [the described condition or event]" according to the context.

[0030] In addition, in the description of the specification of the present application and the appended claims, the terms "first", "second", "third", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0031] References to "one embodiment" or "some embodiments" or the like described in the specification of this application mean that a particular feature, structure, or characteristic described in connection with that embodiment is included in one or more embodiments of this application. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments", etc. that appear in different places in this specification do not necessarily all refer to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in another way. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized in another way.

[0032] Embodiment 1

[0033] As Figures 1 to 4 shown, a circular epoxy encapsulation sample fixture provided in this embodiment specializes the fixture for scanning electron microscope analysis of circular epoxy encapsulation samples, meeting the requirements for scanning electron microscope analysis of circular epoxy encapsulation samples.

[0034] Specifically, the fixture includes a fixture body 1. According to the load-bearing capacity and operational simplicity of the stage of the scanning electron microscope equipment, two circular grooves 2 for placing circular epoxy encapsulation samples are provided at the top of the fixture body.

[0035] The bottom of the fixture body is clamped and connected to the stage on the scanning electron microscope equipment.

[0036] This embodiment adopts an extended embedded universal fixture. By placing the circular epoxy encapsulation samples in the circular grooves, the fixation problem of circular epoxy encapsulation samples during scanning electron microscope analysis is solved, the use of conductive adhesive is saved, and two samples can be placed simultaneously in one test, saving time and cost. At the same time, the circular grooves are in contact with the circular epoxy encapsulation samples, increasing the conductive area of the circular epoxy encapsulation samples and improving the stability and clarity of the imaging of the scanning electron microscope equipment.

[0037] Embodiment 2

[0038] A circular epoxy encapsulation sample fixture provided in this embodiment includes a fixture body 1. According to the load-bearing capacity and operational simplicity of the stage of the scanning electron microscope equipment, two circular grooves 2 for placing circular epoxy encapsulation samples are provided at the top of the fixture body.

[0039] A dovetail through groove 3 is provided at the bottom of the fixture body, and the dovetail through groove is used for clamping and connecting to the stage on the scanning electron microscope equipment.

[0040] Embodiment 3

[0041] A circular epoxy potting sample fixture provided in this embodiment includes a fixture body 1. According to the load-bearing capacity and operational simplicity of the stage of the scanning electron microscope equipment, two circular grooves 2 for placing epoxy potting samples are provided at the top of the fixture body.

[0042] Two threaded through holes 4 are provided on the side wall of the upper end of the fixture body. The two threaded through holes 4 correspond to and communicate with the two circular grooves 2 respectively.

[0043] A screw is fitted in each threaded through hole 4 for limiting and fixing the epoxy potting sample.

[0044] Example 4

[0045] A circular epoxy potting sample fixture provided in this embodiment includes a fixture body 1. According to the load-bearing capacity and operational simplicity of the stage of the scanning electron microscope equipment, two circular grooves 2 for placing epoxy potting samples are provided at the top of the fixture body. A dovetail through groove 3 is provided at the bottom of the fixture body, and the dovetail through groove is used for clamping connection with the stage on the scanning electron microscope equipment.

[0046] Two threaded through holes 4 are provided on the side wall of the upper end of the fixture body. The two threaded through holes 4 correspond to and communicate with the two circular grooves 2 respectively.

[0047] A screw is fitted in each threaded through hole 4 for limiting and fixing the epoxy potting sample.

[0048] Three threaded holes 5 are provided on the side wall of the lower end of the fixture body. Bolts are fitted in the threaded holes 5, and the bolts are used for mating connection with the guide rail on the scanning electron microscope equipment.

[0049] In this embodiment, the bolts in the threaded holes 5 are used for mating connection with the guide rail on the scanning electron microscope equipment. The fixture body is transported to the stage of the scanning electron microscope equipment through the guide rail. At this time, the dovetail through groove at the bottom of the fixture body is clamped and connected with the stage, realizing the fixed installation of the fixture body.

[0050] The epoxy potting sample is placed in the circular groove and fixed by screws, solving the fixing problem of the epoxy potting sample during scanning electron microscope analysis, saving the use of conductive glue, and two samples can be placed at the same time in one test, saving time and cost; at the same time, the circular groove is in contact with the epoxy potting sample, increasing the conductive area of the epoxy potting sample and improving the stability and clarity of the imaging of the scanning electron microscope equipment.

[0051] Example 5

[0052] A circular epoxy potting sample fixture provided in this embodiment includes a fixture body 1, and two circular grooves 2 for placing epoxy potting samples are formed at the upper end of the fixture body.

[0053] Two symmetrically arranged notches 11 are further formed at the upper end of the fixture body. Two threaded through holes 4 are formed on the side wall 111 of one of the notches 11, and screws are fitted in the threaded through holes for limiting and fixing the epoxy potting samples.

[0054] A section plane 12 is formed from the bottom surface of the other notch towards the lower end of the fixture body. Three threaded holes 5 are formed on the section plane 12, and bolts are fitted in the threaded holes 5. The bolts are used for mating connection with the guide rail on the scanning electron microscope equipment.

[0055] A copper connector is installed at the bottom of the lower end of the fixture body. A dovetail through groove 3 is formed on the surface of the copper connector along its radial direction. The dovetail through groove 3 is used for clamping connection with the stage on the scanning electron microscope equipment.

[0056] Tests prove that this fixture is safe and reliable in use and can be applied to the scanning electron microscope analysis of circular epoxy potting samples.

[0057] The above-described embodiments are only used to illustrate the technical solutions of the present application and are not intended to limit them. Although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments or perform equivalent replacements for some of the technical features. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A circular epoxy encapsulation sample preparation fixture, characterized in that: The invention comprises a fixture body, the top of which is provided with two grooves for placing epoxy encapsulation sample preparation samples; the bottom of the fixture body is connected with the stage on the scanning electron microscope equipment by clamping.

2. A circular epoxy encapsulation sample preparation fixture according to claim 1, characterized in that: A dovetail through slot is provided at the bottom of the fixture body, and the dovetail through slot is used for clamping and connecting with the stage on the scanning electron microscope equipment.

3. A circular epoxy potting sample preparation fixture according to claim 1, characterized in that: Two threaded through holes are arranged on the side wall of the upper end of the clamp body, and the two threaded through holes correspond to the two grooves respectively and are connected to the two grooves; each threaded through hole is equipped with a screw for limiting and fixing the epoxy potting sample.

4. A circular epoxy potting sample preparation fixture according to claim 1, characterized in that: Three threaded holes are provided on the side wall at the lower end of the clamp body, and bolts are installed in the threaded holes for connection with the guide rails on the scanning electron microscope equipment.

5. A circular epoxy potting sample preparation fixture according to claim 1, characterized in that: The upper end of the clamp body is also provided with two symmetrically arranged notches, and the side wall of one of the notches is provided with two threaded through holes, in which screws are fitted.

6. A circular epoxy potting sample preparation fixture according to claim 5, characterized in that: A cut surface is opened from the bottom surface of another notch toward the lower end of the fixture body, and three threaded holes are opened on the cut surface. Bolts are installed in the threaded holes, and the bolts are used to cooperate with the guide rails on the scanning electron microscope equipment.

7. A circular epoxy encapsulation sample preparation fixture according to claim 1, characterized in that: A copper connector is arranged at the bottom of the lower end of the clamp body, and a dovetail through groove is opened on the end surface of the copper connector along its radial direction.

8. A circular epoxy encapsulation sample preparation fixture according to claim 1, characterized in that: A dovetail groove is provided at the bottom of the fixture body, and the dovetail groove is used for clamping and connecting with the stage on the scanning electron microscope device; Two threaded through holes are arranged on the side wall of the upper end of the clamp body, and the two threaded through holes correspond to the two grooves respectively and are connected to the two grooves; each threaded through hole is equipped with a screw for limiting and fixing the epoxy potting sample.

9. A circular epoxy potting sample preparation fixture according to claim 1, characterized in that: A dovetail groove is provided at the bottom of the fixture body, and the dovetail groove is used for clamping and connecting with the stage on the scanning electron microscope device; The upper side wall of the fixture body is provided with two threaded through holes, which correspond to the two grooves respectively and are connected to the two grooves; each threaded through hole is equipped with a screw for limiting and fixing the epoxy potting sample; Three threaded holes are provided on the side wall at the lower end of the clamp body, and bolts are installed in the threaded holes for connection with the guide rails on the scanning electron microscope equipment.

10. A circular epoxy encapsulation sample preparation fixture according to claim 1, characterized in that: The groove is a circular structure.

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