Quartz boat overturning and positioning mechanism
By using the first and second compression components to position the quartz boat before and after the quartz boat is flipped, the problem of inaccurate positioning of the silicon wafer during the flip is solved, the card rate and fragmentation rate of the silicon wafer are reduced, and the safety of the silicon wafer is ensured.
Patent Information
- Application Number
- CN202422063258.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-26
- Publication Date
- 2025-07-01
- Estimated Expiration
- 2034-08-26
AI Technical Summary
In the prior art, the silicon wafer is prone to be uneven during the flip process of the quartz boat, resulting in inaccurate positioning, which increases the card rate and fragmentation rate of the silicon wafer.
The quartz boat flip positioning mechanism including a base, a flip drive assembly, a flip frame, a pushing assembly, a lifting assembly, a first compression assembly and a second compression assembly are adopted. The quartz boat is pressed before the flip through the first compression assembly, and further positioned by the second compression assembly after the flip to ensure the accurate positioning of the quartz boat in different positions.
It effectively reduces the card rate and fragmentation rate of the silicon wafer, ensures that the suction cup can accurately absorb the silicon wafer, and avoids damage to the silicon wafer in subsequent processes.
Smart Images
Figure CN223052127U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of silicon wafer manufacturing, and particularly relates to a quartz boat flipping and positioning mechanism. Background Art
[0002] The quartz boat is commonly used in the silicon wafer processing technology of photovoltaic Topcon. It is necessary to take out the silicon wafers from the storage container used in the previous process and fill them into the quartz boat one by one according to the set pitch. Or, take out the silicon wafers from the quartz boat and fill them into the storage container one by one according to the set pitch. When the silicon wafers are placed in the quartz boat, they are neatly arranged at a certain angle and spaced apart. Generally, before the quartz boat and the silicon wafers are flipped and loaded, the silicon wafers in the quartz boat form an angle of 2° with the vertical direction. After the quartz boat is flipped by a certain angle, it is easy to cause the silicon wafers to be uneven, resulting in inaccurate positioning of the quartz boat at the wafer inserting station. When the silicon wafers are subsequently sucked by a suction cup, there may be a situation where the suction cup breaks the silicon wafers, increasing the carding rate and fragmentation rate of the silicon wafers. Content of the Utility Model
[0003] In view of this, in order to overcome the defects of the prior art, the purpose of the utility model is to provide a quartz boat flipping and positioning mechanism, which can ensure accurate positioning of the quartz boat at the wafer inserting station after flipping, thereby effectively reducing the carding rate and fragmentation rate of the silicon wafers when sucking the silicon wafers.
[0004] To achieve the above purpose, the utility model adopts the following technical solutions:
[0005] A quartz boat flipping and positioning mechanism includes a base, a flipping drive assembly, a flipping frame, a pushing component and a jacking component. The flipping drive assembly is fixedly arranged on the base, and the flipping frame is connected with the flipping drive assembly. The flipping drive assembly is used to drive the flipping frame to flip. The pushing component and the jacking component are both arranged on the flipping frame. The quartz boat positioning mechanism further includes a first pressing component and a second pressing component. The first pressing component is arranged on the flipping frame and is used to press and position the quartz boat on the flipping frame before the quartz boat flips. A part of the second pressing component is arranged on the flipping frame, and another part of the second pressing component is arranged on the base. The second pressing component is used to press and position the quartz boat on the flipping frame after the quartz boat flips.
[0006] According to some preferred embodiments of the utility model, the flipping frame has a first state and a second state. The quartz boat is located on the flipping frame. The flipping frame includes a first fixing plate and a second fixing plate, and the first fixing plate is perpendicular to the second fixing plate.
[0007] According to some preferred implementation aspects of the present utility model, first support bars are fixedly arranged at both ends of the first fixing plate. Two mutually parallel insertion plate are fixedly arranged between the two first support bars. First cushion blocks are fixedly arranged at both ends of each first support bar. In some embodiments of the present utility model, comb teeth for placing silicon wafers are arranged on the top surface of each insertion plate.
[0008] According to some preferred implementation aspects of the present utility model, the pushing component includes a pushing air cylinder, a fixing block, a sliding plate, first slide rails fixedly arranged at both ends of the second fixing plate, and two first sliders slidably connected to each first slide rail. Each first slider is fixedly connected to one side of the sliding plate close to the second fixing plate. The fixing block is fixedly connected to one end of the pushing air cylinder and one side of the fixing block is fixedly connected to one side of the sliding plate close to the second fixing plate. The length direction of the first slide rail is perpendicular to the width direction of the second fixing plate. The pushing component is used to make the silicon wafers in the quartz boat enter the comb teeth on the insertion plate, but not completely to the bottom of the teeth, leaving a distance of about 1 mm from the bottom of the comb teeth.
[0009] According to some preferred implementation aspects of the present utility model, second support bars are fixedly arranged at both ends of the sliding plate. The second support bars are located on the side of the sliding plate close to the quartz boat. Second cushion blocks are fixedly arranged at both ends of each second support bar. Support platforms are also fixedly arranged at both ends of the side of the sliding plate close to the first fixing plate. The support platforms are arranged corresponding to the second support bars one by one. Third cushion blocks are fixedly arranged on each support platform.
[0010] According to some preferred implementation aspects of the present utility model, the first pressing component includes a first pressing air cylinder, a second pressing air cylinder, a first pressing plate fixedly connected to one end of the first pressing air cylinder, and a second pressing plate fixedly connected to one end of the second pressing air cylinder. When the flipping frame is in the first state, the first pressing component is used to press and position the quartz boat on the flipping frame. The first pressing plate is located outside one end of the quartz boat, and the second pressing plate is located above the top of the quartz boat.
[0011] According to some preferred implementation aspects of the present utility model, a stop block is fixedly arranged at one end of the sliding plate away from the first pressing plate. The stop block is located outside one of the adjacent second support bars. Fourth cushion blocks are fixedly arranged at both ends of the side of the stop block and the first pressing plate close to the quartz boat. An extension part perpendicular to the stop block is also arranged at the bottom of the stop block. The extension part extends outward from the side of the stop block away from the sliding plate. Fourth cushion blocks are also fixedly arranged at one end of the extension part away from the fixing plate. Fifth cushion blocks are fixedly arranged at both ends of the side of the second pressing plate close to the quartz boat.
[0012] According to some preferred implementation aspects of the present utility model, the second pressing assembly includes a third pressing cylinder, a fourth pressing cylinder, a third pressing plate fixedly connected to one end of the third pressing cylinder, a fourth pressing plate fixedly connected to one end of the fourth pressing cylinder, a fixing bar fixedly connected to the top of the fourth pressing plate, a connecting bar fixedly connected to one end of the fixing bar, pressing rods fixedly arranged at both ends of the top surface of the connecting bar, second sliders fixedly arranged at both ends of the bottom surface of the connecting bar, and second sliding rails slidably connected to each of the second sliders. The third pressing cylinder is fixedly connected to the first fixing plate, and the fourth pressing cylinder is fixedly connected to the base.
[0013] According to some preferred implementation aspects of the present utility model, when the flipping frame is in the second state, the second pressing assembly is used to press and position the quartz boat on the flipping frame. The third pressing plate is located outside one end of the quartz boat, and the pressing rods are located above the top of the quartz boat; both the third pressing plate and the first pressing plate are located outside the same end of the quartz boat; the pressing rods are perpendicular to the base, and a sixth cushion block is fixedly arranged on one side of each pressing rod close to the quartz boat.
[0014] According to some preferred implementation aspects of the present utility model, the jacking assembly includes a jacking cylinder, a first jacking block fixedly connected to one end of the jacking cylinder, a second jacking block fixedly connected to the first jacking block, and a top plate fixedly connected to one end of the second jacking block. The top plate is located on the side of the sliding plate close to the quartz boat. A through groove is formed in the sliding plate in the thickness direction thereof. One side of the second jacking block passes through the through groove, and the length of the top plate is greater than the length of the through groove. In some embodiments of the present utility model, during the flipping process of the quartz boat, the silicon wafers will shake inside the quartz boat. Since the silicon wafers are relatively fragile, they will rub against the supporting groove rods of the quartz boat and cause damage to the silicon wafers. Therefore, before flipping, the jacking assembly is used to hold up the silicon wafers to reduce the shaking of the silicon wafers.
[0015] Due to the adoption of the above technical solutions, compared with the prior art, a quartz boat flipping and positioning mechanism of the present utility model, by setting the first pressing assembly and the second pressing assembly, and using the first pressing assembly to press and position the quartz boat before flipping, and using the second pressing assembly to press and position the quartz boat after the flipping drive assembly drives the quartz boat on the flipping frame to flip, can ensure that the quartz boat is pressed firmly at different positions respectively and is accurately positioned, which is beneficial for the suction cup in the subsequent process to accurately suck the silicon wafers, avoiding the silicon wafers being stuck or broken due to the deviation of the placement position of the quartz boat, and can effectively reduce the card rate and fragmentation rate of the silicon wafers in the next process. Description of the Drawings
[0016] To more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the attached drawings required for the description of the embodiments. Obviously, the attached drawings in the following description are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other attached drawings can also be obtained based on these drawings.
[0017] Figure 1 It is a schematic three-dimensional structure diagram of a quartz boat installed in a quartz boat flipping and positioning mechanism in a preferred embodiment of the present utility model;
[0018] Figure 2 It is a schematic three-dimensional structure diagram of the quartz boat flipping and positioning mechanism in a preferred embodiment of the present utility model after hiding the top plate and the flipping drive assembly;
[0019] Figure 3 It is a schematic three-dimensional structure diagram of the quartz boat flipping and positioning mechanism in a preferred embodiment of the present utility model;
[0020] Figure 4 It is a schematic three-dimensional structure diagram of the quartz boat flipping and positioning mechanism in a preferred embodiment of the present utility model after hiding the slide plate;
[0021] Among them, the reference numerals are:
[0022] Base - 1, flipping drive assembly - 2, flipping drive motor - 21, rotating shaft - 22, first fixing seat - 23, flipping frame - 3, first fixing plate - 31, second fixing plate - 32, first support bar - 33, inserting plate - 34, comb teeth - 341, first cushion block - 35, pushing component - 4, pushing cylinder - 41, fixing block - 42, slide plate - 43, through groove - 431, first slide rail - 44, first slider - 45, second support bar - 46, support platform - 47, second cushion block - 481, third cushion block - 482, jacking component - 5, jacking cylinder - 51, first jacking block - 52, second jacking block - 53, top plate - 54, second fixing seat - 55, first pressing component - 6, first pressing cylinder - 61, second pressing cylinder - 62, first pressing plate - 63, second pressing plate - 64, stop block - 65, extension part - 66, fourth cushion block - 671, fifth cushion block - 672, third fixing seat - 68, fourth fixing seat - 69, second pressing component - 7, third pressing cylinder - 711, fourth pressing cylinder - 712, third pressing plate - 721, fourth pressing plate - 722, fifth fixing seat - 73, fixing bar - 74, connecting bar - 75, pressing rod - 76, second slider - 77, second slide rail - 78, sixth cushion block - 79, quartz boat - 8, silicon wafer - 9. Specific embodiments
[0023] To enable those skilled in the art to better understand the solution of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.
[0024] Referring to Figures 1 to 4 , a quartz boat flipping and positioning mechanism for this embodiment includes a base 1, a flipping drive assembly 2, a flipping frame 3, a pushing assembly 4, a jacking assembly 5, a first pressing assembly 6, and a second pressing assembly 7. The quartz boat 8 is located on the flipping frame 3. The flipping drive assembly 2 is fixedly arranged on the base 1, and the flipping frame 3 is connected to the flipping drive assembly 2. The flipping drive assembly 2 is used to drive the flipping frame 3 to flip. Both the pushing assembly 4 and the jacking assembly 5 are arranged on the flipping frame 3. The pushing assembly 4 is used to push the silicon wafers 9 in the quartz boat 8 so that they enter the corresponding positions, and the jacking assembly 5 is used to hold up the silicon wafers 9 in the quartz boat 8 before the flipping frame 3 flips to reduce the shaking of the silicon wafers 9.
[0025] The flipping frame 3 has a first state and a second state, and the flipping frame 3 includes a first fixing plate 31 and a second fixing plate 32. The first fixing plate 31 is perpendicular to the second fixing plate 32. When the flipping frame 3 is in the first state, the first pressing assembly 6 is used to press and position the quartz boat 8 on the flipping frame 3. Under the driving action of the flipping drive assembly 2, the flipping frame 3 will flip from the first state to the second state. At this time, the second pressing assembly 7 is used to press and position the quartz boat 8 on the flipping frame 3. The flipping angle of the flipping frame 3 from the first state to the second state is 89° - 90°. The flipping drive assembly 2 includes a flipping drive motor 21, a rotating shaft 22 rotatably connected to the flipping drive motor 21, and a first fixing seat 23 fixedly connected to the flipping drive motor 21. The first fixing seat 23 is also fixedly connected to the first fixing plate 31, and the rotating shaft 22 is fixedly connected to the second fixing plate 32. By rotating the flipping drive motor 21 to drive the rotating shaft 22 to rotate, the flipping frame 3 is driven to rotate to flip and switch between the first state and the second state.
[0026] Further, both ends of the first fixed plate 31 of the flipping frame 3 are fixedly provided with first support bars 33, and both ends of each first support bar 33 are fixedly provided with first cushion blocks 35; two mutually parallel insertion plates 34 are fixedly arranged between the two first support bars 33, and comb teeth 341 are arranged on the top surface of each insertion plate 34, and the comb teeth 341 are used for inserting the silicon wafer 9. When the flipping frame 3 is in the first state, the bottom surface of the quartz boat 8 fits with the first cushion blocks 35 at the corresponding positions of the first cushion blocks 35, and the arrangement of the first cushion blocks 35 can ensure that the quartz boat 8 is better fixed on the flipping frame 3.
[0027] Further, the pushing component 4 includes a pushing cylinder 41, a fixed block 42, a sliding plate 43, first slide rails 44 fixedly arranged at both ends of the second fixed plate 32, and two first slider blocks 45 slidably connected to each first slide rail 44. The pushing cylinder 41 is fixedly connected to the second fixed plate 32, each first slider block 45 is fixedly connected to one side of the sliding plate 43 close to the second fixed plate 32, the fixed block 42 is fixedly connected to one end of the pushing cylinder 41 and one side of the fixed block 42 is fixedly connected to one side of the sliding plate 43 close to the second fixed plate 32; the length direction of the first slide rail 44 is perpendicular to the width direction of the second fixed plate 32. By the telescopic movement of the pushing cylinder 41, the fixed block 42 is driven to move, and then the sliding plate 43 is driven to move back and forth along the first slide rail 44 through the first slider blocks 45.
[0028] In addition, both ends of the side of the sliding plate 43 close to the quartz boat 8 are fixedly provided with second support bars 46, and both ends of the side of the sliding plate 43 close to the first fixed plate 31 are also fixedly provided with support platforms 47. Both ends of each of the second support bars 46 are fixedly provided with second cushion blocks 481, the support platforms 47 are arranged in one-to-one correspondence with the second support bars 46, and each support platform 47 is fixedly provided with a third cushion block 482. The second cushion blocks 481 and the third cushion blocks 482 are both used for being in close contact with the quartz boat 8 to ensure the fixation of the quartz boat 8. A through groove 431 is also formed in the sliding plate 43 through its thickness direction, and the formation of the through groove 431 facilitates the arrangement and installation of the jacking component 5.
[0029] Further, the jacking component 5 includes a jacking cylinder 51, a second fixed seat 55 fixedly connected to the jacking cylinder 51, a first jacking block 52 fixedly connected to one end of the jacking cylinder 51, a second jacking block 53 fixedly connected to the first jacking block 52, and a top plate 54 fixedly connected to one end of the second jacking block 53. One side of the second jacking block 53 passes through the through groove 431; the second fixed seat 55 is fixedly connected to the sliding plate 43, so that the jacking cylinder 51 is fixedly connected to the sliding plate 43. The top plate 54 is located on the side of the sliding plate 43 close to the quartz boat 8, the length of the top plate 54 is greater than the length of the through groove 431, and the top plate 54 fits with the quartz boat 8. By driving the first jacking block 52, the second jacking block 53 and the top plate 54 to move through the jacking cylinder 51, the quartz boat 8 is thus jacked up.
[0030] Furthermore, the first pressing assembly 6 includes a first pressing cylinder 61, a second pressing cylinder 62, a third fixed seat 68 fixedly connected to the first pressing cylinder 61, a fourth fixed seat 69 fixedly connected to the second pressing cylinder 62, a first pressing plate 63 fixedly connected to one end of the first pressing cylinder 61, and a second pressing plate 64 fixedly connected to one end of the second pressing cylinder 62. Both the third fixed seat 68 and the fourth fixed seat 69 are fixedly connected to the slide plate 43, respectively enabling the first pressing cylinder 61 and the second pressing cylinder 62 to be fixedly connected to the slide plate 43; one side of the second pressing plate 64 close to the quartz boat 8 extends into the interface where the quartz boat 8 is located to ensure that the quartz boat 8 can be pressed tightly. In this embodiment, as Figure 1 shown, when the flipping frame 3 is in the first state, the first pressing plate 63 is located outside one end of the quartz boat 8, and the second pressing plate 64 is located above the top of the quartz boat 8.
[0031] In addition, the first pressing assembly 6 further includes a stop block 65 and an extension 66 fixedly connected to the bottom of the stop block 65. The stop block 65 is located at one end of the slide plate 43 away from the first pressing plate 63 and the stop block 65 is located outside an adjacent second support bar 46; the extension 66 is perpendicular to the stop block 65, and the extension 66 extends outward from the side of the stop block 65 away from the slide plate 43. The stop block 65 and the first pressing plate 63 are arranged correspondingly and are located at both ends of the quartz boat 8 respectively. Fourth cushion blocks 671 are fixedly arranged at both ends of the side of the stop block 65 and the first pressing plate 63 close to the quartz boat 8, and fourth cushion blocks 671 are also fixedly arranged at the end of the extension 66 away from the fixed plate; fifth cushion blocks 672 are fixedly arranged at both ends of the side of the second pressing plate 64 close to the quartz boat 8. In this embodiment, under the action of the first pressing cylinder 61, the first pressing plate 63 is driven to gradually approach one end of the quartz boat 8 and push the quartz boat 8 to be in close contact and tight against the fourth cushion blocks 671 on the first pressing plate 63, the stop block 65 and the extension 66, and at the same time ensure that the quartz boat 8 is pushed to be in close contact with the first cushion block 35 on the first support bar 33 of the first fixing plate 31. Under the action of the second pressing cylinder 62, the second pressing plate 64 is driven to gradually approach the top surface of the quartz boat 8 and ensure that the fifth cushion blocks 672 are in close contact with the top surface of the quartz boat 8.
[0032] Further, the second pressing assembly 7 includes a third pressing cylinder 711, a fourth pressing cylinder 712, a fifth fixing seat 73 fixedly connected to the third pressing cylinder 711, a third pressing plate 721 fixedly connected to one end of the third pressing cylinder 711, a fourth pressing plate 722 fixedly connected to one end of the fourth pressing cylinder 712, a fixing bar 74 fixedly connected to the top of the fourth pressing plate 722, a connecting bar 75 fixedly connected to one end of the fixing bar 74, pressing rods 76 fixedly arranged at both ends of the top surface of the connecting bar 75, second sliders 77 fixedly arranged at both ends of the bottom surface of the connecting bar 75, and second slide rails 78 slidably connected to each second slider 77; a sixth cushion block 79 is fixedly arranged on one side of each pressing rod 76 close to the quartz boat 8. The fifth fixing seat 73 is also fixedly connected to the first fixing plate 31 so that the third pressing cylinder 711 is fixedly connected to the first fixing plate 31; the fourth pressing cylinder 712 is fixedly connected to the base 1. In this embodiment, when the flipping frame 3 is in the second state, the third pressing plate 721 is located outside one end of the quartz boat 8, and the pressing rods 76 are located above the top of the quartz boat 8; wherein, both the third pressing plate 721 and the first pressing plate 63 are located outside the same end of the quartz boat 8. The pressing rods 76 are perpendicular to the base 1 and the top of the pressing rods 76 is located between the top surface and the bottom surface of the quartz boat 8, and the two pressing rods 76 correspond to both ends of the quartz boat 8 respectively so as to facilitate the pressing rods 76 to press the quartz boat 8 and position it at the pressed position to prevent deviation; the setting of the sixth cushion block 79 is also to ensure that the quartz boat 8 and the pressing rods 76 fit more closely to achieve effective pressing.
[0033] In this embodiment, the positioning surfaces of the quartz boat 8 before and after flipping on the flipping frame 3 are changed. When the flipping frame 3 is in the first state, the positioning surface is the surface pressed by the second pressing plate 64; when the flipping frame 3 is in the second state, the positioning surface is switched to the surface pressed by the pressing rods 76. The first pressing assembly 6 and the second pressing assembly 7 are respectively arranged according to different positioning surfaces, which is convenient for respectively pressing and positioning different positioning surfaces, so that the positioning can be more accurate.
[0034] The working process of the quartz boat flipping and positioning mechanism in the present utility model is described as follows:
[0035] Manually place the quartz boat 8 on the flipping frame 3. During the initial feeding, the flipping frame 3 is in the first state. At this time, the first pressing cylinder 61 extends to clamp the quartz boat 8. Subsequently, the first pressing cylinder 61 retracts, and the second pressing cylinder 62 extends to clamp the quartz boat 8. Then, the second pressing cylinder 62 retracts. At this time, the quartz boat 8 has completed one positioning before flipping. Immediately afterwards, the first pressing cylinder 61 extends again to press the quartz boat 8, the feeding cylinder 41 retracts, the second pressing cylinder 62 extends to press the quartz boat 8, and the lifting cylinder 51 extends to make the top plate 54 press against the silicon wafer 9 in the quartz boat 8. At this time, the flipping drive motor 21 drives the rotating shaft 22 to rotate to drive the flipping frame 3 and the quartz boat 8 thereon to flip to the second state as a whole. Subsequently, both the first pressing cylinder 61 and the second pressing cylinder 62 retract, the third pressing cylinder 711 extends to clamp the quartz boat 8, and then the third pressing cylinder 711 retracts; then the fourth pressing cylinder 712 extends to clamp the quartz boat 8 and then the fourth pressing cylinder 712 retracts. Finally, the third pressing cylinder 711 extends to clamp the quartz boat 8, the fourth pressing cylinder 712 extends to clamp the quartz boat 8, and the second pressing cylinder 62 extends to clamp the quartz boat 8, completing the positioning after the flipping of the quartz boat 8 and waiting for the next process to proceed.
[0036] The above embodiments are only used to illustrate the technical concept and features of the present invention. The purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and it cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.
Claims
1. A quartz boat flip positioning mechanism, comprising a base, a flip drive assembly, a flip frame, a push assembly and a lift assembly, wherein the flip drive assembly is fixedly arranged on the base, the flip frame is connected to the flip drive assembly, and the flip drive assembly is used to drive the flip frame to flip; the push assembly and the lift assembly are both arranged on the flip frame, characterized in that: The quartz boat positioning mechanism also includes a first clamping assembly and a second clamping assembly. The first clamping assembly is arranged on the flip frame, and the first clamping assembly is used to clamp the quartz boat and position it on the flip frame before the quartz boat is flipped; a part of the second clamping assembly is arranged on the flip frame, and the other part of the second clamping assembly is arranged on the base, and the second clamping assembly is used to clamp the quartz boat and position it on the flip frame after the quartz boat is flipped.
2. The quartz boat flipping and positioning mechanism according to claim 1, characterized in that: The flip frame has a first state and a second state. The quartz boat is located on the flip frame. The flip frame includes a first fixing plate and a second fixing plate. The first fixing plate is perpendicular to the second fixing plate.
3. The quartz boat flipping and positioning mechanism according to claim 2, characterized in that: First support bars are fixedly arranged at both ends of the first fixing plate, two mutually parallel inserting plates are fixedly arranged between the two first support bars, and first cushion blocks are fixedly arranged at both ends of each of the first support bars.
4. The quartz boat flipping and positioning mechanism according to claim 3, characterized in that: The pushing assembly includes a pushing cylinder, a fixed block, a slide plate, a first slide rail fixedly arranged at both ends of the second fixed plate, and two first sliders slidably connected to each of the first slide rails, each of the first sliders is fixedly connected to a side of the slide plate close to the second fixed plate, the fixed block is fixedly connected to one end of the pushing cylinder and one side of the fixed block is fixedly connected to a side of the slide plate close to the second fixed plate; the length direction of the first slide rail is perpendicular to the width direction of the second fixed plate.
5. The quartz boat flipping and positioning mechanism according to claim 4, characterized in that: Second support bars are fixedly provided at both ends of the slide plate, and the second support bars are located on the side of the slide plate close to the quartz boat, and second pads are fixedly provided at both ends of each of the second support bars; support platforms are also fixedly provided at both ends of the side of the slide plate close to the first fixed plate, and the support platforms are arranged one-to-one with the second support bars, and a third pad is fixedly provided on each of the support platforms.
6. The quartz boat flipping and positioning mechanism according to claim 5, characterized in that: The first clamping assembly includes a first clamping cylinder, a second clamping cylinder, a first clamping plate fixedly connected to one end of the first clamping cylinder, and a second clamping plate fixedly connected to one end of the second clamping cylinder; when the flip frame is in the first state, the first clamping assembly is used to clamp the quartz boat and position it on the flip frame, the first clamping plate is located on the outside of one end of the quartz boat, and the second clamping plate is located above the top of the quartz boat.
7. The quartz boat flipping and positioning mechanism according to claim 6, characterized in that: A stopper is fixedly provided at one end of the slide plate away from the first clamping plate, and the stopper is located on the outer side of an adjacent second support bar. Fourth pads are fixedly provided at both ends of the stopper and the first clamping plate on the side close to the quartz boat. An extension portion perpendicular to the stopper is also provided at the bottom of the stopper, and the extension portion extends outward from the side of the stopper away from the slide plate. The fourth pad is also fixedly provided at one end of the extension portion away from the fixed plate; fifth pads are fixedly provided at both ends of the second clamping plate on the side close to the quartz boat.
8. The quartz boat flipping and positioning mechanism according to claim 6, characterized in that: The second clamping assembly includes a third clamping cylinder, a fourth clamping cylinder, a third clamping plate fixedly connected to one end of the third clamping cylinder, a fourth clamping plate fixedly connected to one end of the fourth clamping cylinder, a fixing bar fixedly connected to the top of the fourth clamping plate, a connecting bar fixedly connected to one end of the fixing bar, a clamping rod fixedly arranged at both ends of the top surface of the connecting bar, a second slider fixedly arranged at both ends of the bottom surface of the connecting bar, and a second slide rail slidably connected to each of the second sliders, the third clamping cylinder is fixedly connected to the first fixing plate, and the fourth clamping cylinder is fixedly connected to the base.
9. The quartz boat flipping and positioning mechanism according to claim 8, characterized in that: When the flip frame is in the second state, the second clamping assembly is used to clamp the quartz boat and position it on the flip frame, the third clamping plate is located on the outside of one end of the quartz boat, and the clamping rod is located above the top of the quartz boat; the third clamping plate and the first clamping plate are both located on the outside of the same end of the quartz boat; the clamping rod is perpendicular to the base, and a sixth pad is fixedly provided on one side of each clamping rod close to the quartz boat.
10. The quartz boat flipping and positioning mechanism according to claim 4, characterized in that: The lifting assembly includes a lifting cylinder, a first lifting block fixedly connected to one end of the lifting cylinder, a second lifting block fixedly connected to the first lifting block, and a top plate fixedly connected to one end of the second lifting block, wherein the top plate is located on a side of the slide plate close to the quartz boat, the slide plate is provided with a through groove running through the thickness direction thereof, one side of the second lifting block passes through the through groove, and the length of the top plate is greater than the length of the through groove.