Backflow prevention type exhaust operation cabinet

Abstract

The utility model provides an anti-backflow type exhaust operation cabinet which comprises an operation cabinet body, an exhaust pipe is arranged at the top of the operation cabinet body, an operation window is arranged on the side face of the operation cabinet body, and an air supply pipe is arranged in the operation cabinet body and located above the operation window. The end of the air supply pipe penetrates to the outer side of the operation cabinet body, a plurality of air outlets are formed in the inner bottom of the air supply pipe, and a flow guide mechanism matched with the air outlets is arranged at the inner bottom of the air supply pipe. Compared with the prior art, the filter has the following beneficial effects that through the arrangement of the clamping assembly, the clamping assembly can simply and quickly replace the filter cotton located in the baffle and the filter cotton located at the top of the hinged door, so that the filter cotton can be simply and quickly replaced when needing to be replaced, and the replacement efficiency of the filter cotton is improved. And influence on use caused by too complex replacement process is avoided.

Description

Technical Field

[0001] The utility model relates to an anti - reflux type exhaust operation cabinet, belonging to the technical field of exhaust operation cabinets. Background Art

[0002] In the process of power semiconductor chip production, many processes require the etching and cleaning of silicon wafers. The etching solution or cleaning solution used is often a mixture of multiple acids, which has strong corrosiveness and volatility. Moreover, many chemical reagents are often used, some of which are toxic and have strong pungent odors, which can easily cause adverse consequences in the workplace and affect the working environment of operators. During operation, most operations are carried out in an exhaust operation cabinet with an exhaust outlet and an operation window provided at the top and side respectively. Most of the corrosive or irritating gases are discharged into the atmosphere through the exhaust outlet after being absorbed and treated by an externally connected exhaust fan and absorption tower.

[0003] When designing the existing - technology exhaust operation cabinet for the convenience of operation, its operation window is generally relatively large. During operation, some corrosive or irritating gases are likely to spread and diffuse from the operation window of the operation cabinet to the operation site, seriously affecting the operation environment and the physical health of operators. Summary of the Utility Model

[0004] Aiming at the deficiencies of the existing technology, the purpose of the utility model is to provide an anti - reflux type exhaust operation cabinet.

[0005] In order to achieve the above purpose, the utility model is realized through the following technical solutions:

[0006] An anti - reflux type exhaust operation cabinet, including an operation cabinet body. A exhaust pipe is provided at the top of the operation cabinet body, and an operation window is provided on the side of the operation cabinet body. An air supply pipe is provided inside the operation cabinet body and above the operation window. The end of the air supply pipe penetrates to the outside of the operation cabinet body. A plurality of air outlets are opened at the inner bottom of the air supply pipe, and a diversion mechanism is provided at the inner bottom of the air supply pipe and is matched with the air outlets.

[0007] Further, the diversion mechanism includes a plurality of baffles obliquely arranged at the inner bottom of the air supply pipe. The baffles are located at the side of the air outlets. The side of the baffle close to the air outlet is an arc - surface structure. A plurality of through - grooves are opened on the side of the baffle close to the air outlet. Filter cotton is connected in the through - grooves through a clamping component. A circulation groove is opened inside the baffle. A plurality of the through - grooves are communicated with the circulation groove. Lateral air outlets are respectively opened at the upper and lower ends of the circulation groove.

[0008] Furthermore, the diversion mechanism further includes two hinged doors located inside the air outlet. The air outlet is connected to the hinged doors through spring hinges. The top of the hinged door is of a semi-circular surface structure. An installation groove is formed at the top of the semi-circular surface. The filter cotton is connected in the installation groove through the clamping assembly. A stop block is fixed at the top of the air outlet. The stop block is located in the middle of the air outlet. The tops of the opposite sides of the two hinged doors are all matched with the bottom of the stop block.

[0009] Furthermore, the clamping assembly includes a rubber ring fixed on the outer surface of the filter cotton. One limiting block is respectively arranged on both sides of the outer surface of the rubber ring. One limiting groove I is respectively formed on the inner walls of both sides of the through groove. The limiting block is matched with the limiting groove I. A plurality of convex blocks are respectively fixed on both sides of the outer surface of the limiting block. A plurality of grooves I matched with the convex blocks are respectively formed on the inner walls of both sides of the limiting groove I.

[0010] Furthermore, a limiting groove II matched with the limiting block is formed on the inner wall of the installation groove. A plurality of grooves II matched with the convex blocks are formed on the inner wall of the limiting groove II.

[0011] Furthermore, one positioning block is respectively fixed on the inner walls of both sides of the end of the through groove far away from the arc surface. The end of the rubber ring is matched with the positioning block. Two pull rings are arranged at one end of the rubber ring close to the arc surface.

[0012] Furthermore, both the limiting block and the convex block are made of rubber material. The heights of the plurality of baffle plates increase successively from left to right.

[0013] The beneficial effects of the present utility model:

[0014] During use, compressed air with a certain pressure is sent into the outer end of the air supply pipe. The air flow forms an air curtain by blowing downward through the air outlet on the lower side inside the air supply pipe, effectively isolating the gas exchange channel inside and outside the operating cabinet, preventing the gas inside the operating cabinet from diffusing outward, protecting the production environment and the health of the operator, and not affecting the production operation of the operator.

[0015] Through the settings of the spring hinge, the hinged door and the stop block, when the air flow is flowing, the two hinged doors can be squeezed open by the air flow to open the air outlet. The air flow forms an air curtain by blowing downward through the air outlet. When the air flow is not flowing, under the action of the spring hinge, it will drive the two hinged doors to rotate upward to restore their original positions, and the two hinged doors will block the air outlet, making the air supply pipe in a closed cavity, so that the harmful gas inside the operating cabinet body will not flow back into the air supply pipe.

[0016] Through the setting of the baffle plate, when the air flow circulates inside the air supply duct, when passing through the arc-shaped surfaces of several baffle plates, the air flow will be divided and guided by the arc-shaped surfaces at the ends of the baffle plates, and then flow towards the hinged door. When the pressure inside the air supply duct gradually increases, the high-pressure air flow will then squeeze the two hinged doors to open the air outlet, and the air flow blows downward through the air outlet to form an air curtain.

[0017] Through the setting of the clamping assembly, the clamping assembly can simply and quickly replace the filter cotton inside the baffle plate and the filter cotton on the top of the hinged door, so that when the filter cotton needs to be replaced, it can be simply and quickly replaced, avoiding the complexity of the replacement process affecting its use. Brief Description of the Drawings

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required to be used in the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0019] Figure 1 Structural schematic diagram of the usage state of an anti-backflow type exhaust operation cabinet of the present invention Figure 1 ;

[0020] Figure 2 Structural schematic diagram of the usage state of an anti-backflow type exhaust operation cabinet of the present invention Figure 2 ;

[0021] Figure 3 Structural schematic diagram of point A of an anti-backflow type exhaust operation cabinet of the present invention;

[0022] Figure 4 Structural schematic diagram of the baffle plate of an anti-backflow type exhaust operation cabinet of the present invention;

[0023] Figure 5 Partial structural schematic diagram of the baffle plate of an anti-backflow type exhaust operation cabinet of the present invention;

[0024] Figure 6 Cross-sectional structural schematic diagram of the connection between the filter cotton and the rubber ring of an anti-backflow type exhaust operation cabinet of the present invention;

[0025] Figure 7 Side view structural schematic diagram of the connection between the filter cotton and the rubber ring of an anti-backflow type exhaust operation cabinet of the present invention;

[0026] Figure 8 Structural schematic diagram of the hinged door of an anti-backflow type exhaust operation cabinet of the present invention;

[0027] Figure 9 Schematic cross-sectional view of the hinged door of an anti-backflow exhaust operation cabinet of the present utility model.

[0028] In the figure, 1 is the operation cabinet body; 2 is the operation window; 3 is the exhaust pipe; 4 is the air supply pipe; 5 is the air outlet; 6 is the spring hinge; 7 is the hinged door; 8 is the stop block; 9 is the baffle; 10 is the through groove; 11 is the flow groove; 12 is the side air outlet; 13 is the filter cotton; 14 is the rubber ring; 15 is the limit block; 16 is the convex block; 17 is the first limit groove; 18 is the positioning block; 19 is the pull ring. Specific embodiments

[0029] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.

[0030] Please refer to Figures 1-9 , the present utility model provides a technical solution for an anti-backflow exhaust operation cabinet. An anti-backflow exhaust operation cabinet includes an operation cabinet body 1. A exhaust pipe 3 is provided at the top of the operation cabinet body 1. An operation window 2 is provided on the side of the operation cabinet body 1. An air supply pipe 4 is provided inside the operation cabinet body 1 and above the operation window 2. The end of the air supply pipe 4 penetrates to the outside of the operation cabinet body 1. A plurality of air outlets 5 are provided at the inner bottom of the air supply pipe 4. The air outlets 5 can be provided above the air supply pipe 4 according to requirements. A diversion mechanism matching with the air outlets 5 is provided at the inner bottom of the air supply pipe 4. When in use, compressed air with a certain pressure is sent into the outer end of the air supply pipe 4. The air flow forms an air curtain by blowing downward through the air outlets 5 at the lower side inside the air supply pipe 4, effectively isolating the gas exchange channel inside and outside the operation cabinet, preventing the gas inside the operation cabinet from diffusing outward, protecting the production environment and the health of the operator, and not affecting the production operation of the operator.

[0031] Refer to Figure 3 , Figure 4 , Figure 8 and Figure 9, the air guiding mechanism includes a plurality of baffles 9 inclinedly arranged at the inner bottom of the air supply duct 4. The baffles 9 are located on the side of the air outlet 5. The side of the baffle 9 close to the air outlet 5 is of an arc surface structure. A plurality of through grooves 10 are opened on the side of the baffle 9 close to the air outlet 5. A filter cotton 13 is connected in the through groove 10 through a clamping component. A flow groove 11 is opened inside the baffle 9. A plurality of the through grooves 10 communicate with the flow groove 11. A lateral air outlet 12 is opened at each of the upper and lower ends of the flow groove 11. The air guiding mechanism further includes two hinged doors 7 located inside the air outlet 5. The air outlet 5 and the hinged doors 7 are connected through a spring hinge 6. The top of the hinged door 7 is of a semi-circular surface structure. An installation groove is opened at the top of the semi-circular surface. The filter cotton 13 is connected in the installation groove through the clamping component. A stop block 8 is fixed at the top of the air outlet 5. The stop block 8 is located in the middle of the air outlet 5. The bottoms of the tops of the opposite sides of the two hinged doors 7 are respectively matched with the bottom of the stop block 8. Through the arrangement of the spring hinge 6, the hinged doors 7 and the stop block 8, when the air flows, the two hinged doors 7 can be squeezed open by the air flow to open the air outlet 5, and the air flows downward through the air outlet 5 to form an air curtain. When the air does not flow, under the action of the spring hinge 6, the two hinged doors 7 will rotate upward to return to their original positions, and the two hinged doors 7 will block the air outlet 5, making the air supply duct 4 in a closed cavity, so that the harmful gas in the operation cabinet body 1 will not flow back into the air supply duct 4.

[0032] Refer to Figure 4 , Figure 5 , Figure 6 and Figure 7, the clamping component includes a rubber ring 14 fixed on the outer surface of the filter cotton 13. On both sides of the outer surface of the rubber ring 14, a limiting block 15 is respectively provided. On both inner walls of the two sides of the through groove 10, a first limiting groove 17 is respectively opened. The limiting block 15 is matched with the first limiting groove 17. On both sides of the outer surface of the limiting block 15, a plurality of convex blocks 16 are respectively fixed. On both inner walls of the two sides of the first limiting groove 17, a plurality of first grooves matched with the convex blocks 16 are respectively opened. On the inner wall of the installation groove, a second limiting groove matched with the limiting block 15 is opened. On the inner wall of the second limiting groove, a plurality of second grooves matched with the convex blocks 16 are opened. On both inner walls of the two sides of the end of the through groove 10 far away from the arc surface, a positioning block 18 is respectively fixed. The end of the rubber ring 14 is matched with the positioning block 18. At one end of the rubber ring 14 close to the arc surface, two pull rings 19 are provided. Through the setting of the clamping component, the clamping component can simply and quickly replace the filter cotton 13 inside the baffle 9 and the filter cotton 13 at the top of the hinged door 7, so that when the filter cotton 13 needs to be replaced, it can be simply and quickly replaced, avoiding the complexity of the replacement process from affecting its use.

[0033] Refer to Figure 4 , Figure 6 , Figure 7 and Figure 9 , both the limiting block 15 and the convex block 16 are made of rubber material. The heights of the plurality of baffles 9 increase sequentially from left to right. Through the setting of the baffle 9, when the air flow circulates inside the air supply pipe 4, when passing through the arc surfaces on the plurality of baffles 9, the air flow will be divided and guided by the arc surfaces at the ends of the baffles 9, and then flow towards the hinged door 7. When the pressure inside the air supply pipe 4 gradually increases, then the high-pressure air flow squeezes the two hinged doors 7 to open the air outlet 5, and the air flow blows downward through the air outlet 5 to form an air curtain.

[0034] During use, compressed air at a certain pressure is sent into the outer end of the air supply pipe 4. This air flow forms an air curtain by blowing downward through the air outlet 5 on the lower side inside the air supply pipe 4, effectively preventing the gas inside the operating cabinet from diffusing outward without affecting the production operation of the operator. The pressure of the compressed air can be appropriately determined according to the width and height of the operating cabinet and the situation of the diffusing gas. When the air flow circulates inside the air supply pipe 4 and passes through the arc surfaces on several baffles 9, the air flow will be divided and guided by the arc surfaces at the ends of the baffles 9 and then flow towards the hinged door 7. When the pressure inside the air supply pipe 4 gradually increases, the high-pressure air flow then squeezes the two hinged doors 7 to open the air outlet 5, and the air flow forms an air curtain by blowing downward through the air outlet 5. After the work is completed, when external air does not need to enter the operating cabinet body 1, at this time, under the action of the spring hinge 6, it will drive the two hinged doors 7 to rotate upward to return to their original positions. The tops of the two hinged doors 7 come into contact with the bottom ends of the stoppers 8, and the two hinged doors 7 can stop rotating. At this time, the two hinged doors 7 block the air outlet 5, making the air supply pipe 4 in a closed cavity, so that the harmful gas inside the operating cabinet body 1 will not flow back into the air supply pipe 4;

[0035] When the air flow passes through the arc surface of the baffle 9, the guided air flow passing through the arc surface will impact the hinged door 7, and then push the hinged door 7 to open the air outlet 5 through the spring hinge 6. During the process of the air flow impacting the hinged door 7, the dust in the air flow will be filtered by the filter cotton 13 on the surface of the hinged door 7. When the air flow passes through the arc surface on the baffle 9, a part of the air flow passes through the through groove 10 and the flow through groove 11, and finally flows out through the lateral air outlets 12 at both ends of the flow through groove 11. When the dust in the air flow passes through the through groove 10, it will be filtered by the filter cotton 13 in the through groove 10;

[0036] Taking the filter cotton 13 inside the baffle 9 as an example, when the filter cotton 13 needs to be replaced, pull the two pull rings 19 outward. The two pull rings 19 drive the rubber ring 14 and the filter cotton 13 to move outward, and then leave the through groove 10. Subsequently, take out a brand-new filter cotton 13, align the two limit blocks 15 on the outer surface of the rubber ring 14 with the limit grooves 17 on the inner walls on both sides of the through groove 10, so that the filter cotton 13 and the rubber ring 14 can be quickly positioned with the through groove 10. Then, push the rubber ring 14 inward. When the rubber ring 14 moves inward, the convex blocks 16 on the two limit blocks 15 will be squeezed as the rubber ring 14 moves. At this time, the convex blocks 16 are deformed until the end of the rubber ring 14 comes into contact with the positioning block 18. At this time, stop pushing the rubber ring 14, and the convex blocks 16 are stuck in the grooves 1 in the inner wall of the limit groove 17, and the replacement of the filter cotton 13 can be completed.

[0037] Although this specification is described in terms of embodiments, not every embodiment contains only one independent technical solution. This narrative style of the specification is only for clarity. Those skilled in the art should regard the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A backflow prevention type exhaust operation cabinet, characterized in that, It includes an operation cabinet body (1). An exhaust duct (3) is provided at the top of the operation cabinet body (1). An operation window (2) is provided on the side of the operation cabinet body (1). An air supply duct (4) is provided inside the operation cabinet body (1) and above the operation window (2). The end of the air supply duct (4) penetrates to the outside of the operation cabinet body (1). A plurality of air outlets (5) are opened at the inner bottom of the air supply duct (4). A flow guiding mechanism is provided at the inner bottom of the air supply duct (4) and is matched with the air outlets (5).

2. The anti-backflow type exhaust operation cabinet according to claim 1, wherein, The flow guiding mechanism includes a plurality of baffles (9) obliquely arranged at the inner bottom of the air supply duct (4). The baffles (9) are located on the sides of the air outlets (5). The side of the baffle (9) close to the air outlet (5) is of an arc surface structure. A plurality of through slots (10) are opened on the side of the baffle (9) close to the air outlet (5). A filter cotton (13) is connected in the through slots (10) through a clamping component. A flow through slot (11) is opened inside the baffle (9). A plurality of the through slots (10) are communicated with the flow through slot (11). Lateral air outlets (12) are respectively opened at the upper and lower ends of the flow through slot (11).

3. The anti-backflow type exhaust operation cabinet according to claim 2, characterized in that, The flow guiding mechanism further includes two hinged doors (7) located inside the air outlets (5). The air outlets (5) and the hinged doors (7) are connected through spring hinges (6). The top of the hinged door (7) is of a semi-circular surface structure. An installation slot is opened at the top of the semi-circular surface. The filter cotton (13) is connected in the installation slot through the clamping component. A stop block (8) is fixed at the top of the air outlet (5). The stop block (8) is located in the middle of the air outlet (5). The tops of the opposite sides of the two hinged doors (7) are respectively matched with the bottom of the stop block (8).

4. The anti-backflow type exhaust operation cabinet according to claim 3, wherein, The clamping component includes a rubber ring (14) fixed on the outer surface of the filter cotton (13). A limiting block (15) is respectively arranged on both sides of the outer surface of the rubber ring (14). A first limiting slot (17) is respectively opened on the inner walls of both sides of the through slot (10). The limiting block (15) is matched with the first limiting slot (17). A plurality of convex blocks (16) are respectively fixed on both sides of the outer surface of the limiting block (15). A plurality of grooves one matched with the convex blocks (16) are respectively opened on the inner walls of both sides of the first limiting slot (17).

5. The anti-backflow type exhaust operation cabinet according to claim 4, characterized in that, A second limiting slot matched with the limiting block (15) is opened on the inner wall of the installation slot. A plurality of grooves two matched with the convex blocks (16) are opened on the inner wall of the second limiting slot.

6. The anti-backflow type exhaust operation cabinet according to claim 5, wherein, Positioning blocks (18) are respectively fixed on the inner walls of both sides of the end of the through slot (10) far from the arc surface. The end of the rubber ring (14) is matched with the positioning blocks (18). Two pull rings (19) are arranged at the end of the rubber ring (14) close to the arc surface.

7. The anti-backflow type exhaust operation cabinet according to claim 6, characterized in that, Both the limiting block (15) and the convex blocks (16) are made of rubber material. The heights of the plurality of baffles (9) increase sequentially from left to right.

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