Quickly-inserted wafer box cover buckling jig

Abstract

The utility model relates to a fast plug-in mounting crystal boat box cover buckling jig, which is made of rubber materials and comprises a supporting platform, a base, a base plate and a cover plate, the cover buckling jig comprises a cover buckling jig body, the cover buckling jig body comprises a surrounding plate, and the surrounding plate is enclosed to form the cover buckling jig body, so that the surrounding plate is enclosed to form a cavity; the cavity is provided with an opening which is communicated with the outside; the cover buckling jig body is provided with a first inserting groove, a second inserting groove, a third inserting groove and a fourth inserting groove, and the first inserting groove, the second inserting groove, the third inserting groove and the fourth inserting groove are all communicated with the cavity; the cross section of the cover buckling jig body is square, and the first inserting-connecting groove, the second inserting-connecting groove, the third inserting-connecting groove and the fourth inserting-connecting groove are located in the four corners of the cover buckling jig body correspondingly. The depth of the first inserting groove, the depth of the second inserting groove, the depth of the third inserting groove and the depth of the fourth inserting groove are the same as the height of the surrounding plate. The cover buckling jig body is fixedly installed on the supporting platform.

Description

Technical Field

[0001] The utility model relates to the field of fixtures, and specifically relates to... Background Art

[0002] A susceptor cassette is a device for storing susceptors or wafers, and the susceptor cassette has a cover. In an existing technology, a susceptor cassette cover fixture includes a plurality of components, and the plurality of components are assembled together by screws or bolts. After long-term and frequent use of this susceptor cassette cover fixture, the components are very likely to become loose, and there is even a risk of falling apart. Moreover, the falling of the screws / bolts will cause scratches or other damages to the susceptor cassette cover. In another existing technology, the susceptor cassette cover fixture is made of metal material. This susceptor cassette cover fixture is extremely inconvenient to move due to its heavy weight. Secondly, scratches will be caused on the surface of the susceptor cassette cover fixture during use. Summary of the Invention

[0003] The purpose of the utility model is to solve the disadvantages existing in the prior art, and a susceptor cassette cover fixture with quick insertion and installation is proposed.

[0004] In order to achieve the above purpose, the utility model adopts the following technical scheme: A susceptor cassette cover fixture with quick insertion and installation, which is made of rubber material, and includes:

[0005] A support platform;

[0006] A cover fixture body, the cover fixture body includes a surrounding plate, and the surrounding plate encloses to form the cover fixture body, so that the surrounding plate encloses a chamber; the chamber has an opening, and the opening communicates with the outside; the cover fixture body has a first insertion slot, a second insertion slot, a third insertion slot, and a fourth insertion slot, and the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot all communicate with the chamber; the cross-section of the cover fixture body is square, the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot are respectively located at the four corners of the cover fixture body, and the depths of the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot are the same as the height of the surrounding plate; the cover fixture body is fixedly installed on the support platform; and

[0007] A first clamping member, a second clamping member, a third clamping member, and a fourth clamping member, the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are all fixedly arranged on the support platform; the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member fixedly install the cover fixture body on the support platform.

[0008] Further, the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are respectively around the buckle cover jig body along the circumferential direction of the buckle cover jig body, and the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member clamp the buckle cover jig body, so that the buckle cover jig body is fixedly installed on the support platform.

[0009] Further, the buckle cover jig body is provided with a first clamping groove, a second clamping groove, a third clamping groove, and a fourth clamping groove. The first clamping groove, the second clamping groove, the third clamping groove, and the fourth clamping groove are all recessed inward from the outer wall of the surrounding plate of the buckle cover jig body towards the chamber by a preset depth. The first clamping groove is adapted to the first clamping member, the second clamping groove is adapted to the second clamping member, the third clamping groove is adapted to the third clamping member, and the fourth clamping groove is adapted to the fourth clamping member. When the first clamping member is inserted into the first clamping groove, the second clamping member is inserted into the second clamping groove, the third clamping member is inserted into the third clamping groove, and the fourth clamping member is inserted into the fourth clamping groove, the buckle cover jig body is fixedly installed on the support platform.

[0010] Further, the first clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a first convex plate; the fourth clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a second convex plate, and the first convex plate and the second convex plate are opposite to each other.

[0011] Further, the second clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a first convex platform; the third clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a second convex platform.

[0012] Further, the first convex platform is an inclined convex platform, and the second convex platform is an inclined convex platform.

[0013] Further, the first convex platform has a first arc concave surface, and the second convex platform has a second arc concave surface.

[0014] Further, it further includes a first support convex platform, a second support convex platform, a third support convex platform, and a fourth support convex platform. The first support convex platform, the second support convex platform, the third support convex platform, and the fourth support convex platform are all fixedly installed on the support platform, and the first support convex platform, the second support convex platform, the third support convex platform, and the fourth support convex platform are all located below the support platform.

[0015] Further, the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are fixedly connected to the support platform by adhesion or integrally formed with the support platform.

[0016] Further, the first support boss, the second support boss, the third support boss, and the fourth support boss are fixedly installed on the support platform by adhesion or integrally formed with the support platform.

[0017] The beneficial effects of the present application are as follows: The quick-inserting crystal boat cassette capping jig provided by the present application has a simple structure and is easy to manufacture. In view of the fact that four clamping members are provided on the support platform, and the four clamping members form a clamping space, the capping jig body is clamped in this clamping space, thus eliminating metal fasteners such as screws / bolts in the prior art, and greatly improving safety; in addition, the jig is made of rubber material and is not likely to produce scratches on its surface. Description of the Drawings

[0018] Figure 1 It is a schematic structural diagram of a quick-inserting crystal boat cassette capping jig provided by the present utility model.

[0019] Figure 2 It is another schematic structural diagram of a quick-inserting crystal boat cassette capping jig provided by the present utility model.

[0020] Figure 3 It is another schematic structural diagram of a quick-inserting crystal boat cassette capping jig provided by the present utility model.

[0021] Figure 4 It is another schematic structural diagram of a quick-inserting crystal boat cassette capping jig provided by the present utility model.

[0022] Figure 5 It is another schematic structural diagram of a quick-inserting crystal boat cassette capping jig provided by the present utility model. Detailed Embodiments

[0023] The present application will be further described in detail below in conjunction with the accompanying drawings through specific embodiments. Similar elements in different embodiments are denoted by related similar element numbers. In the following embodiments, many detailed descriptions are provided to enable a better understanding of the present application. However, those skilled in the art can easily recognize that some of the features can be omitted in different situations, or can be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification, in order to avoid the core part of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and they can fully understand the related operations based on the descriptions in the specification and the general technical knowledge in the art.

[0024] In addition, the features, operations, or characteristics described in the specification can be combined in any appropriate manner to form various embodiments, and the operation steps involved in each embodiment can also be reordered or adjusted in an obvious manner by those skilled in the art. Therefore, the specification and the drawings are only for clearly describing a certain embodiment, and do not mean that they are essential components and / or sequences.

[0025] The serial numbers assigned to the components herein, such as "first", "second", etc., are only used to distinguish the described objects and do not have any sequential or technical meanings. The "connection" and "coupling" mentioned in the present application, unless otherwise specified, both include direct and indirect connections (couplings).

[0026] Please refer to Figures 1-5 , the present application provides a wafer cassette capping fixture for quick insertion (hereinafter referred to as "the fixture"), which is made of rubber material and includes:

[0027] A support platform 1;

[0028] Cover pressing fixture body 2, the cover pressing fixture body 2 includes a surrounding plate 25, the surrounding plate 25 encloses to form the cover pressing fixture body 2, so that the surrounding plate 25 encloses a chamber 20; the chamber 20 has an opening, and the opening communicates with the outside; the cover pressing fixture body 2 has a first insertion slot 21, a second insertion slot 22, a third insertion slot 23, and a fourth insertion slot 24, the first insertion slot 21, the second insertion slot 22, the third insertion slot 23, and the fourth insertion slot 24 all communicate with the chamber 20; the cross-section of the cover pressing fixture body 2 is square, the first insertion slot 21, the second insertion slot 22, the third insertion slot 23, and the fourth insertion slot 24 are respectively located at the four corners of the cover pressing fixture body 2, and the depths of the first insertion slot 21, the second insertion slot 22, the third insertion slot 23, and the fourth insertion slot 24 are the same as the height of the surrounding plate 25; the cover pressing fixture body 2 is fixedly installed on the support platform 1; and

[0029] A first clamping member 3, a second clamping member 4, a third clamping member 5, and a fourth clamping member 6, the first clamping member 3, the second clamping member 4, the third clamping member 5, and the fourth clamping member 6 are all fixedly arranged on the support platform 1; the first clamping member 3, the second clamping member 4, the third clamping member 5, and the fourth clamping member 6 fixedly install the cover pressing fixture body 2 on the support platform 1.

[0030] In an embodiment of the present application, the first clamping member 3, the second clamping member 4, the third clamping member 5, and the fourth clamping member 6 are respectively around the cover pressing fixture body 2 along the circumferential direction of the cover pressing fixture body 2, and the first clamping member 3, the second clamping member 4, the third clamping member 5, and the fourth clamping member 6 clamp the cover pressing fixture body 2, so that the cover pressing fixture body 2 is fixedly installed on the support platform 1.

[0031] In an embodiment of the present application, a first clamping groove 27, a second clamping groove 26, a third clamping groove 28, and a fourth clamping groove 29 are provided on the buckle cover fixture body 2. The first clamping groove 27, the second clamping groove 26, the third clamping groove 28, and the fourth clamping groove 29 are all recessed inward from the outer wall of the surrounding plate 25 of the buckle cover fixture body 2 toward the chamber 20 by a preset depth. The first clamping groove 27 is adapted to the first clamping member 3, the second clamping groove 26 is adapted to the second clamping member 4, the third clamping groove 28 is adapted to the third clamping member 5, and the fourth clamping groove 29 is adapted to the fourth clamping member 6. When the first clamping member 3 is inserted into the first clamping groove 27, the second clamping member 4 is inserted into the second clamping groove 26, the third clamping member 5 is inserted into the third clamping groove 28, and the fourth clamping member 6 is inserted into the fourth clamping groove 29, the buckle cover fixture body 2 is fixedly installed on the support platform 1.

[0032] In an embodiment of the present application, the first clamping groove 27 is recessed inward by a preset depth, so that the inner wall of the surrounding plate 25 protrudes toward the chamber 20, thereby forming a first convex plate 251. The fourth clamping groove 29 is recessed inward by a preset depth, so that the inner wall of the surrounding plate 25 protrudes toward the chamber 20, thereby forming a second convex plate 252, and the first convex plate 251 and the second convex plate 252 are opposite to each other.

[0033] In an embodiment of the present application, the second clamping groove 26 is recessed inward by a preset depth, so that the inner wall of the surrounding plate 25 protrudes toward the chamber, thereby forming a first convex platform 253. The third clamping groove 28 is recessed inward by a preset depth, so that the inner wall of the surrounding plate 25 protrudes toward the chamber, thereby forming a second convex platform 254.

[0034] In an embodiment of the present application, the first convex platform 253 is an inclined convex platform, and the second convex platform 254 is an inclined convex platform.

[0035] In an embodiment of the present application, the first convex platform 253 has a first arc concave surface 2530, and the second convex platform 254 has a second arc concave surface 2540.

[0036] In an embodiment of the present application, the fixture further includes a first support convex platform 7, a second support convex platform 8, a third support convex platform 9, and a fourth support convex platform 10. The first support convex platform 7, the second support convex platform 8, the third support convex platform 9, and the fourth support convex platform 10 are all fixedly installed on the support platform 1, and the first support convex platform 7, the second support convex platform 8, the third support convex platform 9, and the fourth support convex platform 10 are all located below the support platform 1.

[0037] In an embodiment of the present application, the first clamping member 3, the second clamping member 4, the third clamping member 5, and the fourth clamping member 6 are fixedly connected to the support platform 1 by adhesion or integrally formed with the support platform 1.

[0038] In an embodiment of the present application, the first support boss 7, the second support boss 8, the third support boss 9, and the fourth support boss 10 are fixedly installed on the support platform 1 by adhesion or integrally formed with the support platform 1.

[0039] The jig structure for quickly inserting and installing the lid of the wafer cassette provided by the present application is simple and easy to manufacture. In view of the fact that four clamping members are provided on the support platform, and the four clamping members form a clamping space, the jig body for covering the lid is clamped in this clamping space, thus eliminating metal fasteners such as screws / bolts in the prior art, and greatly improving the safety. In addition, the jig is made of rubber material and is not easy to produce scratches on its surface.

[0040] The above embodiments are only used to illustrate the technical concept and characteristics of the present invention, and their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims

1. A crystal boat case capping fixture for quick insertion and installation, characterized in that, This jig is made of rubber material and includes: A support platform; A cover-clamping jig body, the cover-clamping jig body includes a surrounding plate, and the surrounding plate encloses to form the cover-clamping jig body, so that the surrounding plate encloses a chamber; the chamber has an opening, and the opening communicates with the outside; the cover-clamping jig body has a first insertion slot, a second insertion slot, a third insertion slot, and a fourth insertion slot, and the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot all communicate with the chamber; the cross-section of the cover-clamping jig body is square, the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot are respectively located at the four corners of the cover-clamping jig body, and the depths of the first insertion slot, the second insertion slot, the third insertion slot, and the fourth insertion slot are the same as the height of the surrounding plate; the cover-clamping jig body is fixedly installed on the support platform; and A first clamping member, a second clamping member, a third clamping member, and a fourth clamping member, the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are all fixedly arranged on the support platform; the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member fixedly install the cover-clamping jig body on the support platform.

2. The quick-inserting cassette cover fixture according to claim 1, wherein The first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are respectively around the cover-clamping jig body along the circumferential direction of the cover-clamping jig body, and the first clamping member, the second clamping member, the third clamping member, and the fourth clamping member clamp the cover-clamping jig body, so that the cover-clamping jig body is fixedly installed on the support platform.

3. The wafer cassette capping jig for quick insertion and installation according to claim 2, wherein The cover-clamping jig body is provided with a first clamping groove, a second clamping groove, a third clamping groove, and a fourth clamping groove. The first clamping groove, the second clamping groove, the third clamping groove, and the fourth clamping groove are all recessed inward from the outer wall of the surrounding plate of the cover-clamping jig body towards the chamber by a preset depth. The first clamping groove is adapted to the first clamping member, the second clamping groove is adapted to the second clamping member, the third clamping groove is adapted to the third clamping member, and the fourth clamping groove is adapted to the fourth clamping member; when the first clamping member is inserted into the first clamping groove, the second clamping member is inserted into the second clamping groove, the third clamping member is inserted into the third clamping groove, and the fourth clamping member is inserted into the fourth clamping groove, the cover-clamping jig body is fixedly installed on the support platform.

4. The quick-inserting cassette cover fixture according to claim 3, wherein The first clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a first convex plate; the fourth clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a second convex plate, and the first convex plate and the second convex plate are opposite to each other.

5. The quick-inserting cassette cover fixture according to claim 4, wherein The second clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a first boss; the third clamping groove is recessed inward by a preset depth, so that the inner wall of the surrounding plate protrudes towards the chamber, thereby forming a second boss.

6. The quick-installing wafer cassette capping fixture according to claim 5, characterized in that, The first boss is an inclined boss, and the second boss is an inclined boss.

7. The quick-installation wafer cassette capping fixture according to claim 6, characterized in that, The first boss has a first arc concave surface, and the second boss has a second arc concave surface.

8. The quick-insertion wafer cassette capping fixture according to claim 1, wherein It further includes a first support boss, a second support boss, a third support boss, and a fourth support boss. The first support boss, the second support boss, the third support boss, and the fourth support boss are all fixedly installed on the support platform, and the first support boss, the second support boss, the third support boss, and the fourth support boss are all located below the support platform.

9. The quick-inserting cassette cover fixture according to claim 7, wherein, The first clamping member, the second clamping member, the third clamping member, and the fourth clamping member are fixedly connected to the support platform by bonding or integrally formed with the support platform.

10. The quick-installing wafer cassette capping jig according to claim 8, wherein The first support boss, the second support boss, the third support boss, and the fourth support boss are fixedly installed on the support platform by bonding or integrally formed with the support platform.

Images