Single crystal furnace auxiliary chamber cleaning device with crawling mechanism

Abstract

The utility model discloses a single crystal furnace auxiliary chamber cleaning device with crawling mechanisms, which comprises a cleaning head body, a cleaning ring and a cleaning sleeve, and crawler crawling mechanisms are uniformly distributed on the side wall of the cleaning head body. The crawler crawling mechanism comprises a crawling rack, an upper rotating shaft, a driving wheel sleeving the upper rotating shaft, a lower rotating shaft, a driven wheel sleeving the lower rotating shaft, and a crawler connected to the driving wheel and the driven wheel; the crawling rack is provided with an elastic abutting mechanism used for abutting the crawler belt against the inner wall of the auxiliary chamber pipeline and a transmission mechanism used for driving the driving wheel to rotate. Through the cleaning head body, the supporting ring and the cleaning sleeve, the crawler crawling mechanism is arranged on the side wall of the cleaning head body, the crawler crawling mechanism is used for driving the cleaning head to move up and down in the auxiliary chamber, the cleaning sleeve cleans the pipe wall of the auxiliary chamber, the problems that the height of an original telescopic rod is limited and centering deflects are solved, the structure is simple, operation is convenient, and practicability is high. The cleaning efficiency of the single crystal furnace auxiliary chamber is high.

Description

Technical Field

[0001] The utility model belongs to the technical field of cleaning devices that are placed in a pipeline and move along the pipeline, and particularly relates to a cleaning device for a secondary chamber of a single crystal furnace provided with a crawling mechanism. Background Art

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polysilicon with a graphite heater in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals by the Czochralski method; the single crystal furnace mainly includes a furnace body, an electrical control cabinet, a heater, a power supply cabinet, a main vacuum pump, a secondary chamber vacuum pump, a vacuum pipeline, a hydraulic system, an argon system, and a cooling water system.

[0003] During the single crystal pulling process, the cleanliness of the inner wall of the secondary chamber of the single crystal furnace cleaning device is one of the key factors affecting crystal crystallization; the main chamber in the single crystal furnace cleaning device is mainly used for the heating reaction of silicon materials, and the crystals formed in the main chamber are lifted upward by a lifting device placed in the secondary chamber. During the pulling process, argon will pass through the secondary chamber and flow into the main chamber, and the argon carrying the reaction volatiles will move downward along the secondary chamber, and the residues of the volatiles will deposit on the inner wall of the furnace chamber. If these residues are not cleaned in time, they will fall into the silicon material in the main chamber during the crystal pulling process, contaminating the purity of the silicon liquid and seriously affecting the crystal crystallization quality; therefore, maintaining the cleanliness of the secondary chamber of the single crystal furnace is of great significance for improving the finished product quality of the crystal.

[0004] For the main chamber of the single crystal furnace, its opening diameter is large and it is easy to clean; while the secondary chamber of the single crystal furnace is a cylindrical structure, long and narrow in height, with an inner diameter of about 400 mm (300 - 450 mm) and a furnace chamber depth of about 5500 mm (4500 - 7500 mm), and is set 1500 mm - 4500 m above the ground. The existing cleaning method for the secondary chamber of the single crystal furnace is relatively common, which is to fix a ring on a stainless steel round pipe or an aluminum alloy round pipe, and the ring is wrapped with sponge and dust-free paper; the cleaning rod is usually two to three sections and is connected by threads; when cleaning the secondary chamber, the operator needs to manually push the cleaning rod into the secondary chamber of the single crystal furnace, and then manually reciprocate the rod to clean; this cleaning method is easy to operate, but the cleanliness is difficult to guarantee, and it is easy to cause problems such as incomplete cleaning due to the uncontrollability of the manual operation of the cleaning rod.

[0005] The Chinese patent application number is: 2021223142568, which discloses a cleaning device for the auxiliary chamber of a single crystal furnace, including: a base; a motor box arranged on the base; a scissor lift platform arranged on the base and connected to the motor box, and the scissor lift platform is driven to lift by the motor box; a support ring arranged at the top of the scissor lift platform. This structure is restricted by the complex and changeable on-site environment during operation and basically cannot adapt to the working conditions, or is restricted by influencing factors such as the ground distance of the auxiliary chamber of the single crystal furnace, the ground flatness, the inner diameter size of the auxiliary chamber, and the weight hammer interference. Especially when the telescopic rod has a large telescopic height, centering cannot be achieved, resulting in poor cleaning effect at the top, and at the same time, it is impossible to carry out the cleaning work safely and reliably.

[0006] Therefore, how to realize the automatic cleaning of the auxiliary chamber of the single crystal furnace has become a technical problem that needs to be solved urgently by those skilled in the art. Summary of the Invention

[0007] The present utility model provides a cleaning device for the auxiliary chamber of a single crystal furnace provided with a crawling mechanism. The cleaning device for the auxiliary chamber of a single crystal furnace provided with a crawling mechanism uses a cleaning head body, a support ring, and a cleaning sleeve. A crawler mechanism is arranged on the side wall of the cleaning head body, and the crawler mechanism is used to drive the cleaning head to move up and down in the auxiliary chamber, and the cleaning sleeve cleans the inner wall of the auxiliary chamber pipe. This avoids the problems of limited height of the original telescopic rod and centering deviation. The structure is simple, the operation is convenient, and the cleaning efficiency of the auxiliary chamber of the single crystal furnace is high.

[0008] To solve the above technical problems, a cleaning device for the auxiliary chamber of a single crystal furnace provided with a crawling mechanism according to the present utility model includes a cleaning head for moving in the auxiliary chamber pipe and cleaning the inner wall of the auxiliary chamber pipe. The cleaning head includes a cleaning head body, a cleaning ring fixed on the top of the cleaning head body, and a cleaning sleeve wrapped around the outer wall of the cleaning ring. Crawler mechanisms are evenly distributed on the side wall of the cleaning head body.

[0009] The crawler mechanism includes a crawling frame vertically arranged on the side wall of the cleaning head body, an upper rotating shaft arranged at the top of the crawling frame, a driving wheel or a driven wheel sleeved on the upper rotating shaft, a lower rotating shaft arranged at the bottom of the crawling frame, a driven wheel / driving wheel sleeved on the lower rotating shaft, and a crawler belt connecting the driving wheel and the driven wheel.

[0010] An elastic abutting mechanism for abutting the crawler belt against the inner wall of the auxiliary chamber pipe and a transmission mechanism for driving the driving wheel to rotate are arranged on the crawling frame.

[0011] Further, the transmission mechanism includes a driving motor arranged on the side wall of the crawling frame, a conical driving tooth arranged on the motor shaft of the driving motor, and a conical driven tooth meshing with the conical driving tooth. The conical driven tooth is sleeved on the end of the upper rotating shaft or the lower rotating shaft extending out of the side wall of the crawling frame.

[0012] Further, the elastic abutting mechanism includes a connecting seat arranged on the side wall of the cleaning head body, a connecting rod arranged in the middle of the connecting seat, a pair of guide rods symmetrically arranged at the bottom of the connecting seat, and a pair of scissor closing plates arranged corresponding to the guide rods one by one. The pair of scissor closing plates are hinged to each other. The upper end of one scissor closing plate is hinged to the connecting seat, and its lower end is slidably connected to the crawling frame. The upper end of the other scissor closing plate is hinged to the crawling frame, and its lower end slides on the guide rod. An installation seat fixedly connected to the connecting rod is arranged at the end of the crawling frame, and a compression spring sleeved on the connecting rod is arranged between the installation seat and the connecting seat.

[0013] Further, an adjusting nut for adjusting the extending length of the connecting rod is arranged on the connecting seat.

[0014] Further, it also includes a transfer trolley, a scissor lifting platform arranged on the transfer trolley, a machine base arranged in the middle of the scissor lifting platform, and a floating disk movably connected to the machine base. The cleaning head is detachably connected to the center of the floating disk, and a three-jaw clamping mechanism for centering the cleaning head automatically before entering the auxiliary chamber pipeline is arranged around the floating disk.

[0015] Further, an articulated sleeve sleeved on the machine base is vertically arranged upward in the middle of the floating disk.

[0016] Further, a conical jack is arranged in the middle of the floating disk, and a conical plug head matched with the conical jack is arranged at the bottom of the cleaning head.

[0017] Further, the three-jaw clamping mechanism includes three mounting frames evenly distributed on the side wall of the articulated sleeve and all extending outward perpendicular to the axis, a slide rail horizontally arranged on the mounting frame, a slide seat sliding on the slide rail, and a clamping block vertically arranged on the slide seat. Guide chutes corresponding to the slide seats one by one and used for driving the slide seats to move on the slide rail when the mounting frame deflects are arranged on the machine base near the slide seats. A slider sliding in the guide chutes is arranged at the bottom of the slide seat. A connecting rod seat is connected to the side wall of the group of connecting frames, and a driving electric cylinder connected to the connecting rod seat and used for driving the articulated sleeve to deflect on the sleeve is arranged on the machine base.

[0018] Further, a control box for electrically connecting to the driving motor is arranged on the other side wall of the crawling frame far away from the driving motor.

[0019] Further, a visual camera mounting frame is arranged on the top of the cleaning head body, and no less than two visual cameras are evenly distributed on the visual camera mounting frame.

[0020] The beneficial effects of the utility model are as follows:

[0021] 1. The cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model includes a cleaning head body, a support ring, and a cleaning sleeve. A crawler mechanism is provided on the side wall of the cleaning head body. The crawler mechanism is used to drive the cleaning head to move up and down in the secondary chamber, and the cleaning sleeve cleans the tube wall of the secondary chamber, avoiding the problems of limited height and centering deviation of the original telescopic rod. The structure is simple, the operation is convenient, and the cleaning efficiency of the secondary chamber of the single crystal furnace is high.

[0022] 2. The cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model is provided with a floating disk and a three-jaw clamping mechanism around the floating disk on the machine base. The three-jaw clamping mechanism is used to clamp the flange of the secondary chamber pipeline, so as to realize the automatic centering of the floating disk, facilitate the centering of the cleaning head for the secondary chamber pipeline, and facilitate the cleaning head body to enter and exit the secondary chamber pipeline opening, especially for high-altitude operations, improving the operation efficiency. Brief Description of the Drawings

[0023] Figure 1 is a usage state diagram of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0024] Figure 2 is a structural schematic diagram of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0025] Figure 3 is a partial cross-sectional view of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0026] Figure 4 is a partial enlarged view of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0027] Figure 5 is a structural schematic diagram of the crawling mechanism in the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0028] Figure 6 is a structural schematic diagram of the outspread structure of the crawling mechanism in the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0029] Figure 7 is a top view of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model;

[0030] Figure 8 is a side view of the cleaning device for the secondary chamber of a single crystal furnace with a crawling mechanism of the present utility model.

[0031] Reference numerals: 1 - transfer trolley; 2 - scissor lift mechanism; 3 - scissor lift platform; 4 - machine base; 5 - three - jaw clamping mechanism; 6 - cleaning head; 7 - cleaning ring; 8 - vision camera; 9 - crawler mechanism; 10 - floating disc; 11 - mounting bracket; 12 - sliding seat; 13 - slide rail; 14 - guide chute; 15 - clamping cylinder; 16 - clamping block; 17 - crawler frame; 18 - vision camera mounting bracket; 19 - drive motor; 20 - conical driving gear; 21 - conical driven gear; 22 - crawler; 23 - driving wheel; 24 - driven wheel; 26 - control box; 27 - support ring; 28 - connecting seat; 29 - scissor closing plate; 30 - guide rod; 31 - scissor lift oil cylinder; 32 - mounting seat; 33 - connecting sleeve, 34 - connecting rod; 35 - compression spring; 36 - adjusting nut; 71 - cleaning head body; 72 - elastic abutting mechanism; 73 - transmission mechanism; 74 - conical plug; 75 - cleaning sleeve. Detailed implementation manners

[0032] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments.

[0033] As Figures 1-7 This is a schematic structural diagram of a cleaning device for the secondary chamber of a single - crystal furnace provided with a crawling mechanism proposed by the present invention. A cleaning device for the secondary chamber of a single - crystal furnace provided with a crawling mechanism of the present invention includes a cleaning head 6 for moving in the secondary chamber pipeline and cleaning the inner wall of the secondary chamber pipeline. The cleaning head 6 includes a cleaning head body 71, a cleaning ring 7 fixed on the top of the cleaning head body 71, and a cleaning sleeve 75 wrapped around the outer wall of the cleaning ring 7. The side wall of the cleaning head body 71 is evenly provided with a crawler mechanism 9.

[0034] The crawler mechanism 9 includes a crawler frame 17 vertically arranged on the side wall of the cleaning head body, an upper rotating shaft arranged at the top of the crawler frame 17, a driving wheel 23 or a driven wheel sleeved on the upper rotating shaft, a lower rotating shaft arranged at the bottom of the crawler frame, a driven wheel 24 / driving wheel sleeved on the lower rotating shaft, and a crawler 22 connected between the driving wheel 23 and the driven wheel 24.

[0035] An elastic abutting mechanism 72 for abutting the crawler 22 against the inner wall of the secondary chamber pipeline and a transmission mechanism 73 for driving the driving wheel 23 to rotate are arranged on the crawler frame 17.

[0036] In this embodiment, through the cleaning head body 71, the support ring 7, and the cleaning sleeve 75, a crawler mechanism is provided on the side wall of the cleaning head body. The crawler mechanism is used to drive the cleaning head to move up and down in the auxiliary chamber, and the cleaning sleeve cleans the wall of the auxiliary chamber, avoiding the problems of limited height and centering skew of the original telescopic rod. The structure is simple and easy to operate, and the cleaning efficiency of the auxiliary chamber of the single crystal furnace is high.

[0037] In this embodiment, the cleaning head 6 is abutted against the bottom entrance of the pipeline auxiliary chamber through the elastic abutting mechanism 72, preventing the cleaning head 6 from slipping out of the pipeline auxiliary chamber. The transmission mechanism 73 drives the driving wheel 23 and the driven wheel 24 to rotate, realizing the movement of the crawler 22, so that the cleaning head 6 moves up and down in the pipeline auxiliary chamber. During the up and down movement of the cleaning head 6, the cleaning sleeve 75 on the cleaning head 6 cleans the pipeline auxiliary chamber, and the cleaning effect is good.

[0038] In a preferred embodiment, the transmission mechanism 73 includes a driving motor 19 provided on the side wall of the crawling frame 17, a conical driving tooth 20 provided on the motor shaft of the driving motor, and a conical driven tooth 21 meshing with the conical driving tooth. The conical driven tooth 21 is sleeved on the end of the upper rotating shaft or the lower rotating shaft extending out of the side wall of the crawling frame 17. In this embodiment, this structure adopts the method of conical gear transmission, making the structure layout of the transmission mechanism 73 compact and the transmission stable. At the same time, by using the synchronous rotation of the driving motor 19, it is convenient for the evenly distributed crawler mechanism 9 to move up and down simultaneously, realizing the up and down movement of the cleaning head 6.

[0039] In a preferred embodiment, the elastic abutting mechanism 72 includes a connecting seat 28 provided on the side wall of the cleaning head body 71, a connecting rod 34 provided in the middle of the connecting seat 28, a pair of guide rods 30 symmetrically provided at the bottom of the connecting seat 28, and a pair of scissor closing plates 29 arranged corresponding to the guide rods one by one. The pair of scissor closing plates 29 are hinged to each other. The upper end of one of the scissor closing plates 29 is hinged to the connecting seat 28, and its lower end is slidably connected to the crawling frame 17. The upper end of the other scissor closing plate 29 is hinged to the crawling frame, and its lower end slides on the guide rod 30. An installation seat 32 fixedly connected to the connecting rod 34 is provided at the end of the crawling frame 17. A compression spring 35 sleeved on the connecting rod 34 is provided between the installation seat 32 and the connecting seat 28. In this embodiment, this structure uses the compression spring 35 and the scissor closing plates 29 to make the crawler mechanism 9 abut against the inner wall of the pipeline auxiliary chamber. The cleaning head body 71 is on the center line of the pipeline auxiliary chamber. When the crawler mechanism 9 works, the cleaning head body 71 moves up and down along the center line of the pipeline auxiliary chamber. During the crawling process of the cleaning head body 71 in the pipeline auxiliary chamber, the elastic force of the compression spring 35 is used to make the cleaning head body abut against the inside of the pipeline auxiliary chamber, preventing the cleaning head body from slipping.

[0040] In a preferred embodiment, an adjusting nut 36 for adjusting the extending length of the connecting rod 34 is provided on the connecting seat 28. In this embodiment, this structure enables the elastic abutting mechanism 72 to adapt to the apertures of pipe auxiliary chambers of different sizes. When the diameter difference of the pipe auxiliary chambers is not significant, the cleaning device can clean pipe auxiliary chambers of different diameters by adjusting the adjusting nut 36.

[0041] In a preferred embodiment, it further includes a transfer trolley 1, a scissor lift platform 3 provided on the loading trolley 1, a machine base 4 provided in the middle of the scissor lift platform 3, and a floating disk 10 movably connected to the machine base. The cleaning head 6 is detachably connected to the center of the floating disk 10. A three-jaw clamping mechanism 5 for centering the cleaning head 6 before automatically entering the auxiliary chamber pipe is provided around the floating disk 10. In this embodiment, when the entrance of the pipe auxiliary chamber is relatively high from the ground, the cleaning head 6 is transferred to the entrance of the pipe auxiliary chamber through the transfer trolley 1 and the scissor lift platform 3. The flange of the auxiliary chamber pipe is clamped by the three-jaw clamping mechanism 5 to achieve centering of the cleaning head 6 with the center of the pipe auxiliary chamber. After centering, the transmission mechanism 73 drives the crawler crawling mechanism 9 to work, so that under the action of the elastic abutting mechanism 72, the cleaning head 6 enters the pipe auxiliary chamber from the entrance of the pipe auxiliary chamber, successively realizing the centering of the cleaning head 6 before entering the pipe auxiliary chamber and the crawling work after entering the pipe auxiliary chamber.

[0042] In a preferred embodiment, a hinge sleeve 33 sleeved on the machine base 4 is vertically upward provided in the middle of the floating disk 10. In this embodiment, this structure facilitates the floating disk 10 to deflect with the movement of the three-jaw clamping mechanism 5 when the three-jaw clamping mechanism 5 clamps the upper flange of the auxiliary chamber pipe, facilitating the centering of the cleaning head 6.

[0043] In a preferred embodiment, a conical socket is provided in the middle of the floating disk 10, and a conical plug 74 matched with the conical socket is provided at the bottom of the cleaning head 6. This structure facilitates the cleaning head 6 to move out of the conical socket in the middle of the floating disk 10 under the action of the transmission mechanism 73 after centering.

[0044] In a preferred embodiment, the three-jaw clamping mechanism 5 includes three mounting frames 11 evenly distributed on the side wall of the hinge sleeve 33 and all extending axially outward perpendicularly, a slide rail 13 horizontally provided on the mounting frame 11, a slide seat 12 sliding on the slide rail 13, and a clamping block 16 vertically provided on the slide seat 12. A guide chute 14 corresponding to the slide seat 12 one by one and used to drive the slide seat to move on the slide rail when the mounting frame 11 deflects is provided on the machine base 4 near the slide seat 12. A slider sliding in the guide chute 14 is provided at the bottom of the slide seat 12. A connecting rod seat is connected to the side wall of a group of connecting frames, and a clamping cylinder 15 connected to the connecting rod seat and used to drive the hinge sleeve to deflect on the shaft sleeve is provided on the machine base 4. In this embodiment, this structure uses the clamping cylinder 15 to deflect the mounting frame 11, and uses the guide chute 14 to drive the clamping block 16 to move towards the middle along the slide rail 13 to achieve the function of clamping and centering.

[0045] Preferred embodiment, a control box 26 for electrically connecting with the drive motor 19 is provided on the side wall of the crawling frame 17 on the other side away from the drive motor. This structure facilitates wireless remote control. By using the control box 26 to control the operation of the drive motor 19, the up and down movement of the cleaning head 6 can be remotely controlled.

[0046] Preferred embodiment, a vision camera mounting bracket 18 is provided on the top of the cleaning head body 71. There are evenly distributed no less than 2 vision cameras 8 on the vision camera mounting bracket. In this embodiment, this structure uses the vision cameras 8 to facilitate real-time monitoring of the cleaning effect of the cleaning head 6 during remote control, improving the cleaning effect of the cleaning head 6.

[0047] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution and inventive concept of the present invention, making equivalent substitutions or changes, should be covered by the protection scope of the present invention.

Claims

1. A cleaning device for the auxiliary chamber of a single crystal furnace equipped with a crawling mechanism, comprising a cleaning head for moving inside the auxiliary chamber pipeline and cleaning the inner wall of the auxiliary chamber pipeline, characterized in that: The cleaning head includes a cleaning head body, a cleaning ring fixed on the top of the cleaning head body, and a cleaning sleeve wrapped around the outer wall of the cleaning ring. The side wall of the cleaning head body is evenly provided with crawler mechanisms. The crawler mechanism includes a crawler frame vertically arranged on the side wall of the cleaning head body, an upper rotating shaft arranged at the top of the crawler frame, a driving wheel or a driven wheel sleeved on the upper rotating shaft, a lower rotating shaft arranged at the bottom of the crawler frame, a driven wheel / driving wheel sleeved on the lower rotating shaft, and a crawler connected between the driving wheel and the driven wheel. An elastic abutting mechanism for abutting the crawler against the inner wall of the auxiliary chamber pipeline and a transmission mechanism for driving the driving wheel to rotate are arranged on the crawler frame.

2. The cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 1, wherein: The transmission mechanism includes a driving motor arranged on the side wall of the crawler frame, a conical driving tooth arranged on the motor shaft of the driving motor, and a conical driven tooth meshing with the conical driving tooth. The conical driven tooth is sleeved on the end of the upper rotating shaft or the lower rotating shaft extending out of the side wall of the crawler frame.

3. A cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 1 or 2, characterized in that: The elastic abutting mechanism includes a connecting seat arranged on the side wall of the cleaning head body, a connecting rod arranged in the middle of the connecting seat, a pair of guide rods symmetrically arranged at the bottom of the connecting seat, and a pair of scissor closing plates arranged corresponding to the guide rods one by one. The pair of scissor closing plates are hinged to each other. The upper end of one scissor closing plate is hinged to the connecting seat, and its lower end is slidably connected to the crawler frame. The upper end of the other scissor closing plate is hinged to the crawler frame, and its lower end slides on the guide rod. An installation seat fixedly connected to the connecting rod is arranged at the end of the crawler frame, and a compression spring sleeved on the connecting rod is arranged between the installation seat and the connecting seat.

4. The cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 3, characterized in that: An adjusting nut for adjusting the extending length of the connecting rod is arranged on the connecting seat.

5. The cleaning device for the secondary chamber of a single crystal furnace equipped with a crawling mechanism according to claim 3, characterized in that: It further includes a transfer trolley, a scissor lifting platform arranged on the loading trolley, a machine base arranged in the middle of the scissor lifting platform, and a floating disc movably connected to the machine base. The cleaning head is detachably connected to the center of the floating disc. A three-jaw clamping mechanism for centering the cleaning head automatically before it enters the auxiliary chamber pipeline is arranged around the floating disc.

6. The cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 5, wherein: An articulated sleeve sleeved on the machine base is vertically arranged upward in the middle of the floating disc.

7. A cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 5, characterized in that: A conical socket is arranged in the middle of the floating disc, and a conical plug head matched with the conical socket is arranged at the bottom of the cleaning head.

8. A cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 6, characterized in that: The three-jaw clamping mechanism includes three mounting frames evenly arranged on the side wall of the articulated sleeve and all extending outward perpendicular to the axis, a slide rail horizontally arranged on the mounting frame, a slide seat sliding on the slide rail, and a clamping block vertically arranged on the slide seat. A guide chute corresponding to the slide seat one by one and used for driving the slide seat to move on the slide rail when the mounting frame deflects is arranged on the machine base near the slide seat. A slider sliding in the guide chute is arranged at the bottom of the slide seat. A connecting rod seat is connected to the side wall of the group of connecting frames, and a driving electric cylinder connected to the connecting rod seat and used for driving the articulated sleeve to deflect on the shaft sleeve is arranged on the machine base.

9. The cleaning device for the secondary chamber of a single crystal furnace equipped with a crawling mechanism according to claim 2, wherein: A control box for electrically connecting with the driving motor is arranged on the other side wall of the crawler frame far away from the driving motor.

10. A cleaning device for the secondary chamber of a single crystal furnace provided with a crawling mechanism according to claim 1, characterized in that: A visual camera mounting frame is arranged on the top of the cleaning head body, and no less than two visual cameras are evenly arranged on the visual camera mounting frame.

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