Multi-chamber dust collection module and corresponding dust collection mechanism

Abstract

The utility model provides a multi-cavity dust collection module and a corresponding dust collection mechanism. The multi-cavity dust collection module comprises a suction cavity and a negative pressure channel, an upper cavity and a lower cavity which are isolated from each other are arranged in the suction cavity, an upper suction inlet is formed in the top of the suction cavity, a lower suction inlet is formed in the bottom of the suction cavity, and a butt joint port is formed in one longitudinal side of the suction cavity; one end of the negative pressure channel inclines downwards and is communicated with the butt joint opening, and the other end of the negative pressure channel is communicated to negative pressure equipment. The suction cavity is of a flat structure, so that the occupied space is reduced; the upper and lower parts are subjected to dust collection treatment through the upper suction inlet and the lower suction inlet at the same time, so that the dust collection efficiency is improved; one end of the negative pressure channel inclines downwards, so that the process that airflow enters the negative pressure channel along the lower suction inlet, the lower cavity and the butt joint port is smoother, and residues on the lower part can be treated conveniently; residues of the upper part are few, the dust collection effect can be achieved without high-flow-speed airflow, reasonable distribution of the airflow is achieved, and the dust collection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of chip processing equipment, and particularly relates to a multi-chamber dust suction module and a corresponding dust suction mechanism. Background Art

[0002] Chips usually need to be encapsulated to protect the internal structure. After encapsulation, a semi-finished product composed of residual glue and a wafer is formed, and the chip is arranged on the wafer. The semi-finished product is usually fixed on a base, and a gluing mechanism is used to move downward to remove the residual glue. In this process, debris of the glue material will remain on the base below and the gluing mechanism above. Since the residue may affect the gluing operation of the next semi-finished product and the cleaning of the wafer after gluing, affecting the product quality, dust suction treatment is required. In the prior art, it is necessary to perform dust suction on the base and the gluing machine respectively, with low efficiency. Summary of the Utility Model

[0003] The utility model provides a multi-chamber dust suction module and a corresponding dust suction mechanism, which can effectively improve the dust suction efficiency.

[0004] On the one hand, the utility model provides a multi-chamber dust suction module, which includes an inhalation cavity and a negative pressure channel. The inhalation cavity is of a flat structure, and its thickness direction is longitudinal. An upper chamber and a lower chamber which are isolated from each other are arranged in the inhalation cavity. An upper suction port is arranged at the top of the inhalation cavity, and a lower suction port is arranged at the bottom of the inhalation cavity. The upper suction port communicates with the upper chamber, and the lower suction port communicates with the lower chamber. Both the upper suction port and the lower suction port are long strips arranged along the transverse direction.

[0005] An interface is arranged on one longitudinal side of the inhalation cavity, and the interface communicates with the upper chamber and the lower chamber.

[0006] The negative pressure channel is arranged longitudinally, one end of which inclines downward and communicates with the interface, and the other end communicates with a negative pressure device.

[0007] Wherein, a partition board is arranged in the inhalation cavity. The partition board is a long strip arranged along the transverse direction and is located at the interface. The upper chamber and the lower chamber are isolated from each other by the partition board.

[0008] Wherein, in the transverse direction, the sizes of both the upper suction port and the lower suction port are larger than the size of the interface.

[0009] Two upper flow guiding plates and two lower flow guiding plates are further arranged in the inhalation cavity. The two upper flow guiding plates are arranged in an inverted V shape, and the bottom ends of the two upper flow guiding plates are respectively connected to the two transverse ends of the partition board. The two lower flow guiding plates are arranged in a V shape, and the top ends of the two lower flow guiding plates are respectively connected to the two transverse ends of the partition board.

[0010] Wherein, the docking port is rectangular, with its length direction being horizontal and its width direction being vertical;

[0011] The isolation plate is located at an upper middle position of the docking port.

[0012] Among them, the negative pressure channel includes a straight section and an inclined section, the straight section is straight and arranged along the longitudinal direction, and the inclined section is inclined and connected between the straight section and the docking port; the bottom surface of the straight section is flush with or higher than the isolation plate.

[0013] There are two straight sections parallel to each other, which are arranged in the transverse direction; the two straight sections are connected at one end away from the suction cavity, and are provided with two access ports for connecting to the negative pressure device.

[0014] Wherein, the upper suction inlet and the lower suction inlet are surrounded by rubber.

[0015] Wherein, a brush is arranged on the side of the lower suction port in the longitudinal direction, and the brush protrudes downward from the rubber.

[0016] On the other hand, the utility model provides a dust collection mechanism, including a cantilever, a frame, and the multi-chamber dust collection module, wherein the cantilever is connected to the frame in a longitudinal sliding manner at one lateral end and connected to the negative pressure channel of the multi-chamber dust collection module at the other end.

[0017] Wherein, a lifting cylinder is arranged on the cantilever, and a piston rod of the lifting cylinder is connected to the negative pressure channel to drive the multi-chamber dust collection module to move vertically.

[0018] The multi-chamber dust suction module and the corresponding dust suction mechanism provided by the utility model have a flat structure of the suction chamber, which reduces the occupied space; the upper chamber and the lower chamber are arranged in the suction chamber, and the upper and lower components can be dusted at the same time through the upper suction port and the lower suction port, thereby improving the dust suction efficiency; because the end of the negative pressure channel connected to the docking port is inclined downward, the process of the airflow entering the negative pressure channel along the lower suction port, the lower chamber and the docking port is smoother, which is conducive to the dust suction of the residue on the lower component; the upper component itself has less residue, and it does not need a higher flow rate of airflow to achieve the dust suction effect, thereby realizing a reasonable distribution of the airflow and improving the dust suction efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the structure of a dust collection mechanism is provided for a preferred embodiment of the utility model;

[0020] Figure 2 yes Figure 1 A schematic diagram of the structure of a multi-chamber dust collection module of a central dust collection mechanism;

[0021] Figure 3Yes Figure 1 Stereoscopic cross-sectional view of the suction chamber of the multi-chamber dust suction module in the horizontal and vertical directions;

[0022] Figure 4 Yes Figure 3 Cross-sectional view of the multi-chamber dust suction module in the longitudinal and vertical directions in. Specific embodiments

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0024] In the figure, units with similar structures are denoted by the same reference numerals.

[0025] Please refer to Figure 1 and Figure 2 , a dust suction mechanism of the present invention includes a cantilever 800, a frame 900, and a multi-chamber dust suction module 100. The frame 900 includes a side frame 901 and a base 902. The base 902 is used to carry the sheet. One end of the cantilever 800 in the horizontal direction X is slidably connected to the side frame 901 in the longitudinal direction Y, and the other end is connected to the multi-chamber dust suction module 100 to drive the multi-chamber dust suction module 100 to move to the base 902 to remove dust from the base 902, the sheet, and the components (such as a glue application mechanism) located above the base 902.

[0026] The multi-chamber dust suction module 100 includes a suction cavity 1 and a negative pressure channel 2. The suction cavity 1 is connected to a negative pressure device through the negative pressure channel 2, and dust can be sucked through the upper and lower suction ports of the suction cavity 1. The other end of the cantilever 800 is connected to the negative pressure channel 2, and the suction cavity 1 is located on one side of the cantilever 800 in the longitudinal direction to protrude from the cantilever 800 for easy dust suction.

[0027] The inhalation cavity 1 has a flat structure, with its thickness direction being longitudinal, reducing the occupied space. Inside the inhalation cavity 1, there are separated upper chamber 101 and lower chamber 102. At the top of the inhalation cavity 1, there is an upper suction port 111, and at the bottom, there is a lower suction port 112. The upper suction port 111 is connected to the upper chamber 101, and the lower suction port 112 is connected to the lower chamber 102. Both the upper suction port 111 and the lower suction port 112 are long strips arranged horizontally. On one longitudinal side of the inhalation cavity 1, there is a docking port 10, and the docking port 10 is connected to both the upper chamber 101 and the lower chamber 102. When the inhalation cavity 1 moves longitudinally driven by the cantilever 800 and passes over the base 902, dust on the base 902 and the sheet can be sucked into the inhalation cavity 1 from the lower suction port 112, and components above the base 902 can be dusted through the upper suction port 111. Since the upper suction port 111 and the lower suction port 112 are long strips arranged horizontally, dusting can be gradually carried out longitudinally.

[0028] The negative pressure channel 2 is arranged longitudinally. One end of it slopes downward and is connected to the docking port 10, and the other end is connected to a negative pressure device. There are two chambers, the upper chamber 101 and the lower chamber 102, inside the inhalation cavity 1, and dusting of the upper and lower components can be carried out simultaneously through the upper suction port 111 and the lower suction port 112, improving the dusting efficiency. Since the end of the negative pressure channel 2 connected to the docking port 10 slopes downward, the process of air flow entering the negative pressure channel 2 from the lower suction port 112, the lower chamber 102, and the docking port 10 is smoother, which is beneficial for dusting the residue on the lower component. The caulking mechanism above the base 902 has less residue itself, and it can achieve the dusting effect without a high-flow air current, realizing a reasonable distribution of air flow and improving the dusting efficiency.

[0029] Inside the inhalation cavity 1, there is a partition plate 19. The partition plate 19 is a long strip arranged horizontally and is located at the docking port 10. The upper chamber 101 and the lower chamber 102 are separated by the partition plate 19. By dividing the space of the inhalation cavity 1 through the partition plate, the structure is simple and convenient for processing and preparation.

[0030] Horizontally, the sizes of both the upper suction port 111 and the lower suction port 112 are larger than the size of the docking port 10, making the air flow speed at the docking port 10 relatively large, capable of quickly sucking away residues and other substances in the upper chamber 101 and the lower chamber 102, preventing accumulation in the inhalation cavity 1.

[0031] There are also two upper guide plates 121 and two lower guide plates 122 arranged in the inhalation cavity 1. The two upper guide plates 121 are arranged in an inverted V shape, and their bottom ends are respectively connected to the transverse two ends of the isolation plate 19. The two lower guide plates 122 are arranged in a V shape, and their top ends are respectively connected to the transverse two ends of the isolation plate 19. The upper guide plates 121 and the lower guide plates 122 can be used to achieve the transition between the upper suction port 111, the lower suction port 112 and the docking port 10, ensuring the smooth flow of air.

[0032] The docking port 10 is rectangular, with its length direction being horizontal and its width direction being vertical, so as to facilitate the processing and forming of the docking port 10, making the long strip shape of the docking port 10 match the long strip shapes of the upper suction port 111 and the lower suction port 112, which is beneficial for dust collection. The isolation plate 19 is located at a position slightly above the middle of the docking port 10, so that the suction force at the lower suction port 112 is greater, which is beneficial for sucking away the residue on the base 902.

[0033] The negative pressure channel 2 includes a straight section 21 and an inclined section 22. The straight section 21 is arranged in a straight shape along the longitudinal direction, and the inclined section 22 is inclined and connected between the straight section 21 and the docking port 10; the bottom surface of the straight section 21 is flush with or higher than the isolation plate 19, so that the air flow at the position close to the isolation plate 19 in the lower chamber 102 flows in an inclined upward direction after passing through the docking port 10, and the residue and other objects in the lower chamber 102 are sucked away to avoid accumulation at the isolation plate 19.

[0034] There are two parallel straight sections 21, and the two are arranged horizontally. The ends of the two straight sections 21 facing away from the inhalation cavity 1 are connected, and there are two access ports 211 for connecting the negative pressure device. By using the two straight sections 21 and the two access ports 211, the air pressure at each position in the transverse direction of the docking port 10 can be kept relatively balanced, and thus the suction force at each position of the upper suction port 111 can be kept relatively consistent, and the suction force at each position of the lower suction port 112 can be kept relatively consistent, improving the dust collection effect.

[0035] Rubber 13 is surrounded around the upper suction port 111 and the lower suction port 112. By using the rubber 13, the upper suction port 111 and the lower suction port 112 can better approach the component to be dusted, improving the dust collection effect.

[0036] A brush is arranged on the side of the lower suction port 112 in the longitudinal direction, and the brush protrudes downward from the rubber 13. By using the brush, the residue on the base 902 can be brushed, which is beneficial for sucking away the residue.

[0037] A lifting cylinder is arranged on the cantilever 800, and the piston rod of the lifting cylinder is connected to the negative pressure channel 2 to drive the multi-chamber dust collection module 100 to move along the vertical direction Z, so that it can approach or move away from the base 902, facilitating dust collection.

[0038] In summary, although the present utility model has been disclosed above with preferred embodiments, the above preferred embodiments are not intended to limit the present utility model. Those of ordinary skill in the art can make various modifications and refinements without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the scope defined by the claims.

Claims

1. A multi-chamber dust suction module, characterized in that It includes an inhalation cavity and a negative pressure channel. The inhalation cavity is a flat structure, and its thickness direction is longitudinal. An upper chamber and a lower chamber are arranged separately in the inhalation cavity. An upper suction port is arranged at the top of the inhalation cavity, and a lower suction port is arranged at the bottom. The upper suction port communicates with the upper chamber, and the lower suction port communicates with the lower chamber. Both the upper suction port and the lower suction port are long strips arranged along the transverse direction. A docking port is arranged on one longitudinal side of the inhalation cavity, and the docking port communicates with the upper chamber and the lower chamber. The negative pressure channel is arranged longitudinally. One end of it inclines downward and communicates with the docking port, and the other end communicates with a negative pressure device.

2. The multi-chamber dust suction module according to claim 1, wherein A partition board is arranged in the inhalation cavity. The partition board is a long strip arranged along the transverse direction and is located at the docking port. The upper chamber and the lower chamber are separated by the partition board.

3. The multi-chamber dust suction module according to claim 2, characterized in that, In the transverse direction, the sizes of both the upper suction port and the lower suction port are larger than the size of the docking port. Two upper guide plates and two lower guide plates are also arranged in the inhalation cavity. The two upper guide plates are arranged in an inverted V shape, and their bottom ends are respectively connected to the two transverse ends of the partition board. The two lower guide plates are arranged in a V shape, and their top ends are respectively connected to the two transverse ends of the partition board.

4. The multi-chamber dust suction module according to claim 2, characterized in that, The docking port is rectangular, with its length direction being transverse and its width direction being vertical. The partition board is located at a position slightly above the middle of the docking port.

5. The multi-chamber dust suction module according to claim 2, wherein The negative pressure channel includes a straight section and an inclined section. The straight section is straight and arranged longitudinally, and the inclined section is inclined and connected between the straight section and the docking port. The bottom surface of the straight section is flush with the partition board or higher than the partition board.

6. The multi-chamber dust suction module according to claim 5, wherein, There are two parallel straight sections, which are arranged transversely. One end of the two straight sections away from the inhalation cavity is connected, and two access ports for connecting a negative pressure device are arranged.

7. The multi-chamber dust suction module according to any one of claims 1-6, characterized in that, Rubber is surrounded around the upper suction port and the lower suction port.

8. The multi-chamber dust suction module according to claim 7, characterized in that A brush is arranged on the longitudinal side of the lower suction port, and the brush protrudes downward from the rubber.

9. A dust suction mechanism, characterized in that, It includes a cantilever, a frame, and the multi-chamber dust suction module according to any one of claims 1-8. One transverse end of the cantilever is slidably connected to the frame longitudinally, and the other end is connected to the negative pressure channel of the multi-chamber dust suction module.

10. The dust suction mechanism according to claim 9, characterized in that, A lifting cylinder is arranged on the cantilever, and the piston rod of the lifting cylinder is connected to the negative pressure channel to drive the multi-chamber dust suction module to move vertically.

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