Ion source shell and ion source

Abstract

The utility model relates to the technical field of ion sources, in particular to an ion source shell and an ion source. The ion source shell comprises a shell body, a partition plate, a water inlet pipe and a water outlet pipe, and a containing cavity is formed in the shell body in the circumferential direction of the shell body. The partition plate is arranged on the shell and located in the containing cavity. The water inlet pipe and the water outlet pipe are both arranged on the shell and communicate with the containing cavity, and the water inlet pipe and the water outlet pipe are located on the two sides of the partition plate correspondingly so that the water inlet pipe and the water outlet pipe can communicate in the circumferential direction of the containing cavity. The above structure improves the temperature stability of the ion source housing, prevents internal parts of the ion source from being damaged, and prolongs the service life of the ion source.

Description

Technical Field

[0001] The utility model relates to the technical field of ion sources, in particular to an ion source housing and an ion source. Background Art

[0002] During the operation of the ion source, the RF coil provides the energy required for the plasma, but the ion source housing is also affected by the heat of the RF coil, and the surface temperature will continue to rise.

[0003] At present, the heat dissipation of the ion source housing is uneven, resulting in poor cooling effect, so that the temperature inside the ion source continues to rise, and the internal parts of the ion source are damaged by high temperature, thereby reducing the service life of the ion source. Summary of the Utility Model

[0004] The technical problem to be solved by the embodiments of the utility model is to provide an ion source housing and an ion source to solve the problems that the internal parts of the ion source in the prior art are damaged by high temperature, thereby reducing the use stability and service life of the ion source.

[0005] The utility model discloses an ion source housing, including: a housing, a partition, a water inlet pipe and a water outlet pipe. A receiving cavity is formed along the circumferential direction of the housing; the partition is arranged on the housing and located in the receiving cavity; the water inlet pipe and the water outlet pipe are both arranged on the housing and communicated with the receiving cavity. The water inlet pipe and the water outlet pipe are respectively located on both sides of the partition, so that the water inlet pipe and the water outlet pipe are communicated along the circumferential direction of the receiving cavity.

[0006] Optionally, the housing includes a nested inner housing and outer housing, a bottom plate and a top plate. The inner housing and the outer housing are arranged at a preset distance, and the bottom plate and the top plate are arranged at both ends along the height direction of the inner housing and the outer housing, so that the inner housing, the outer housing, the bottom plate and the top plate enclose to form the receiving cavity.

[0007] Optionally, the housing is further provided with:

[0008] A plurality of flow guiding plates divide the receiving cavity into a plurality of partition cavities. A flow guiding port is formed between each flow guiding plate and the bottom plate or the top plate. The flow guiding port is used to communicate the plurality of partition cavities to form a flow guiding channel in the receiving cavity, and the flow guiding channel is in an S-shaped structure.

[0009] Optionally, the plurality of flow guiding plates are distributed in the receiving cavity along the circumferential direction of the housing.

[0010] Optionally, the water inlet pipe, the water outlet pipe and the partition are all located between two adjacent flow guiding plates.

[0011] Optionally, along the height direction of the housing, the water inlet pipe and the water outlet pipe are arranged at the same-side end or both-side ends of the housing.

[0012] Optionally, both the water inlet pipe and the water outlet pipe are inserted into the bottom plate. The water inlet pipe includes a first water inlet and a first water outlet. The first water outlet extends into the accommodation cavity and is located at one end close to the bottom plate. The diversion opening of the diversion plate adjacent to the water inlet pipe is located at one end close to the top plate.

[0013] Optionally, the water outlet pipe includes a second water inlet and a second water outlet. The second water inlet extends into the accommodation cavity and is arranged with a preset gap from the top plate at one end close to the top plate. The diversion opening of the diversion plate adjacent to the water outlet pipe is arranged at one end close to the top plate.

[0014] Optionally, the height of the preset gap is 10 mm to 15 mm, and the height of the diversion opening is 10 mm to 15 mm.

[0015] The present utility model also discloses an ion source, including the ion source housing described above.

[0016] Compared with the prior art, the beneficial effects of the ion source housing provided by the embodiments of the present utility model are as follows: An accommodation cavity is formed along the circumferential direction of the housing, and a water inlet pipe and a water outlet pipe are respectively arranged on the housing. The water inlet pipe and the water outlet pipe are isolated by a partition plate, and the two are located on both sides of the partition plate. After the cooling water enters the accommodation cavity of the housing through the water inlet pipe, under the action of the partition plate, the cooling water can flow orderly along the circumferential direction of the housing in the accommodation cavity. After the cooling water circulates around the housing for one week, it is output along the water outlet pipe, is evenly distributed in the accommodation cavity and forms a one-way loop, takes away the heat of the housing, and achieves the purpose of uniformly cooling down the housing. By circulating the process of the cooling water flowing in the accommodation cavity of the housing, the uniform and continuous cooling of the housing is ensured, the cooling effect is ensured, the temperature stability of the ion source housing is improved, the damage of internal parts of the ion source is prevented, and the service life of the ion source is extended. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The technical solutions of the present utility model will be further described in detail below with reference to the drawings and embodiments. In the drawings:

[0018] Figure 1 is one of the overall schematic diagrams of the ion source housing provided by the embodiments of the present utility model;

[0019] Figure 2 is the exploded view of the ion source housing provided by the embodiments of the present utility model;

[0020] Figure 3This is the second overall schematic diagram of the ion source housing provided by the embodiments of the present utility model.

[0021] The reference numerals in the figure are as follows:

[0022] 10. Housing; 101. Accommodating cavity; 110. Inner housing; 120. Outer housing; 130. Bottom plate; 140. Top plate; 20. Partition; 30. Water inlet pipe; 301. First water inlet; 302. First water outlet; 40. Water outlet pipe; 401. Second water inlet; 402. Second water outlet; 50. Deflector; 501. Deflection opening. Detailed implementation manners

[0023] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. Now, in conjunction with the drawings, the preferred embodiments of the present utility model will be described in detail.

[0024] The embodiments of the present utility model provide an ion source housing, as Figure 1 shown, including a housing 10, a partition 20, a water inlet pipe 30 and a water outlet pipe 40. An accommodating cavity 101 is formed along the circumferential direction of the housing 10; the partition 20 is arranged on the housing 10 and located inside the accommodating cavity 101. The water inlet pipe 30 and the water outlet pipe 40 are both arranged on the housing 10 and communicate with the accommodating cavity 101. The water inlet pipe 30 and the water outlet pipe 40 are located on both sides of the partition 20, so that the water inlet pipe 30 and the water outlet pipe 40 communicate along the circumferential direction of the accommodating cavity 101.

[0025] An accommodating cavity 101 is formed along the circumferential direction of the housing 10, and a water inlet pipe 30 and a water outlet pipe 40 are respectively arranged on the housing 10. The water inlet pipe 30 and the water outlet pipe 40 are isolated by the partition 20, so that they are located on both sides of the partition 20. After the cooling water enters the accommodating cavity 101 of the housing 10 through the water inlet pipe 30, under the action of the partition 20, the cooling water can flow orderly along the circumferential direction of the housing 10 in the accommodating cavity 101. After the cooling water circulates around the housing 10 for one week, it is output along the water outlet pipe 40, evenly distributed in the accommodating cavity 101 and forms a one-way circuit, taking away the heat of the housing 10, achieving the purpose of uniformly cooling down the housing 10. By circulating the process of the cooling water flowing in the accommodating cavity 101 of the housing 10, it ensures that the housing 10 is continuously cooled evenly, guarantees the cooling effect, improves the temperature stability of the ion source housing, prevents the damage of the internal parts of the ion source, and improves the service life of the ion source.

[0026] As a preferred solution of this embodiment, as Figure 3, the housing 10 includes a nested inner housing 110, an outer housing 120, a bottom plate 130, and a top plate 140. The inner housing 110 and the outer housing 120 are arranged with a preset spacing. The bottom plate 130 and the top plate 140 are arranged at both ends thereof along the height direction of the inner housing 110 and the outer housing 120, so that the inner housing 110, the outer housing 120, the bottom plate 130, and the top plate 140 enclose to form a receiving cavity 101.

[0027] In this embodiment, a structural example of the housing 10 is provided. Specifically, the housing 10 includes a nested inner housing 110, an outer housing 120, a bottom plate 130, and a top plate 140. By arranging the bottom plate 130 and the top plate 140 at both ends of the inner housing 110 and the outer housing 120 along their height directions respectively, the inner housing 110, the outer housing 120, the bottom plate 130, and the top plate 140 enclose to form a receiving cavity 101. The composition structure of the above-mentioned housing 10 is simple and convenient for assembly. The preset spacing between the inner housing 110 and the outer housing 120 is the thickness of the receiving cavity 101, which is related to the flow rate of the cooling water in the housing 10 and directly affects the cooling efficiency of the cooling water on the housing 10. The greater the thickness of the receiving cavity 101, the greater the flow rate of the cooling water flowing in the housing 10, and the higher the cooling efficiency. Therefore, the thickness of the receiving cavity 101 can be adjusted adaptively according to the actual working requirements, and no specific limitation is made here.

[0028] In this embodiment, the shape of the housing 10 can be set according to the actual situation, and no specific limitation is made here. Refer to Figures 1 to 3 , and an example in which the housing 10 is cylindrical is given.

[0029] The above-mentioned bottom plate 130 and the top plate 140 are respectively welded to the inner housing 110 and the outer housing 120. Among them, the welding not only has high connection strength but also has good connection tightness, which can prevent the leakage of the cooling water and ensure the use effect and service life of the housing 10.

[0030] As a preferred solution of this embodiment, as Figures 1 to 3 , a plurality of flow guiding plates 50 are further arranged in the housing 10. The plurality of flow guiding plates 50 divide the receiving cavity 101 into a plurality of partition cavities. A flow guiding port 501 is formed between each flow guiding plate 50 and the bottom plate 130 or the top plate 140. The flow guiding port 501 is used to communicate the plurality of partition cavities to form a flow guiding channel in the receiving cavity 101, and the flow guiding channel is in an S-shaped structure.

[0031] A flow deflector 50 is arranged inside the housing 10, which can divide the accommodation cavity 101 into multiple partition cavities, and through the flow guiding openings 501 respectively formed by the multiple flow deflectors 50 in cooperation with the bottom plate 130 or the top plate 140, after the above-mentioned multiple partition cavities are connected in sequence, a flow guiding channel is formed in the accommodation cavity 101. The above-mentioned flow guiding channel has an S-shaped structure, and the cooling water also flows in the housing 10 along the flow guiding channel. While extending the flow path of the cooling water, the uniformity of the cooling water flowing on the housing 10 in the height direction of the housing 10 is improved, the cooling effect is ensured again, and the temperature stability of the ion source housing and the service life of the ion source are further improved.

[0032] As a preferred solution of this embodiment, as Figures 1 to 3 , the multiple flow deflectors 50 are circumferentially distributed in the accommodation cavity 101 along the housing 10.

[0033] Among them, the above-mentioned arrangement form of the flow deflector 50 can improve the uniformity of the flow velocity of the cooling water when flowing in the housing 10, achieve the purpose of uniformly cooling the housing 10, ensure the cooling effect, and further improve the temperature stability of the ion source housing and the service life of the ion source.

[0034] The set number of the above-mentioned flow deflectors 50 can be adjusted according to the diameter of the housing 10, etc., and no specific limitation is made here. Please refer to Figure 3 , and an example of setting the number of the flow deflectors 50 to seven is given.

[0035] As a preferred solution of this embodiment, as Figure 3 , the water inlet pipe 30, the water outlet pipe 40 and the partition plate 20 are all located between two adjacent flow deflectors 50.

[0036] The above-mentioned setting can increase the contact area between the cooling water and the housing 10 during the flow process in the accommodation cavity 101 of the housing 10, achieve uniform cooling of the housing 10, and ensure the cooling effect.

[0037] As a preferred solution of this embodiment, along the height direction of the housing 10, the water inlet pipe 30 and the water outlet pipe 40 are arranged at the same-side end or both-side ends of the housing 10.

[0038] Among them, an example of the setting method of the water inlet pipe 30 and the water outlet pipe 40 on the housing 10 is given here. Specifically, the water inlet pipe 30 and the water outlet pipe 40 can both be inserted into the bottom plate 130, as Figure 1 shown; or, the water inlet pipe 30 and the water outlet pipe 40 are both inserted into the top plate 140 (not shown in the figure), or, one of the water inlet pipe 30 and the water outlet pipe 40 is inserted into the bottom plate 130, and the other is arranged on the top plate 140 (not shown in the figure). The above-mentioned setting methods of the water inlet pipe 30 and the water outlet pipe 40 on the housing 10 are not specifically limited and can be selected according to actual needs.

[0039] As a preferred solution of this embodiment, as Figure 3 , both the water inlet pipe 30 and the water outlet pipe 40 are inserted into the bottom plate 130. The water inlet pipe 30 includes a first water inlet 301 and a first water outlet 302. The first water outlet 302 extends into the accommodation cavity 101 and is located at one end close to the bottom plate 130. The diversion port 501 of the diversion plate 50 adjacent to the water inlet pipe 30 is located at one end close to the top plate 140.

[0040] Among them, a structural example is given here when both the water inlet pipe 30 and the water outlet pipe 40 are provided at one end of the bottom of the housing 10. Specifically, both the water inlet pipe 30 and the water outlet pipe 40 are inserted into the bottom plate 130; the water inlet pipe 30 includes a first water inlet 301 and a first water outlet 302. The first water outlet 302 extends into the accommodation cavity 101. The first water inlet 301 is communicated with an external cooling water source. The purpose of supplying cooling water to the accommodation cavity 101 is realized through the water inlet pipe 30. After the cooling water enters the accommodation cavity 101 through the first water outlet 302, it starts to flow upward from the bottom of the housing 10. After reaching the top of the adjacent diversion plate 50, it enters the next partition cavity through the diversion port 501. The above setting ensures the flow uniformity of the cooling water in the height direction of the housing 10 again and improves the cooling effect.

[0041] As a preferred solution of this embodiment, as Figure 3 , the water outlet pipe 40 includes a second water inlet 401 and a second water outlet 402. The second water inlet 401 extends into the accommodation cavity 101 and has a preset gap with the top plate 140 at one end close to the top plate 140. The diversion port 501 of the diversion plate 50 adjacent to the water outlet pipe 40 is arranged at one end close to the top plate 140.

[0042] The water outlet pipe 40 is used to output the cooling water in the accommodation cavity 101 to an external cooling water source. Specifically, the cooling water in the accommodation cavity 101 is transported along the water outlet pipe 40 through the second water inlet 401 of the water outlet pipe 40 and output through the second water outlet 402; after the cooling water passes through the diversion plate 50 adjacent to the water outlet pipe 40, since the second water inlet 401 is at a high position, the cooling water can only flow upward from the bottom in this partition cavity. After reaching a position equal to or higher than the second water inlet 401, the cooling water will flow out through the water outlet pipe 40. This setting can ensure the flow uniformity of the cooling water in the height direction of the housing 10 again and improve the cooling effect.

[0043] Referring to Figure 3 , the direction of the arrow in the figure is the flow direction of the cooling water in the diversion channel of the housing 10.

[0044] As a preferred solution of this embodiment, the height of the preset gap is 10 mm to 15 mm, and the height of the diversion port 501 is 10 mm to 15 mm.

[0045] In this embodiment, the heights of the preset gap and the diversion port 501 are limited to ensure the smooth flow of cooling water. Specifically, the height of the preset gap can be 10 mm, 11 mm, 12 mm, 13 mm, 14 mm, 15 mm. The height of the diversion port 501 can be 10 mm, 11 mm, 12 mm, 13 mm, 14 mm, 15 mm.

[0046] The embodiment of the present application also discloses an ion source, including the ion source housing in the foregoing embodiment. This ion source has the same structure and beneficial effects as the ion source housing in the foregoing embodiment. The beneficial effects of the ion source housing have been described in detail in the foregoing embodiment and will not be elaborated here.

[0047] The above ion source can be applied in vacuum coating equipment, ion beam etching equipment, and no specific limitation is imposed on its application field here.

[0048] It should be understood that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them. For those skilled in the art, the technical solutions described in the above embodiments can be modified, or some of the technical features can be equivalently replaced; and all such modifications and replacements should fall within the protection scope of the appended claims of the present invention.

Claims

1. An ion source housing, characterized in that, Comprising: A housing, on which a receiving cavity is formed along its circumferential direction; A partition plate, provided on the housing and located within the receiving cavity; An inlet pipe and an outlet pipe, both provided on the housing and communicating with the receiving cavity, the inlet pipe and the outlet pipe being located on both sides of the partition plate respectively, so that the inlet pipe and the outlet pipe communicate along the circumferential direction of the receiving cavity.

2. The ion source housing according to claim 1, characterized in that, The housing includes a nested inner housing and outer housing, a bottom plate, and a top plate. The inner housing and the outer housing are arranged with a preset spacing, and the bottom plate and the top plate are provided at both ends along the height direction of the inner housing and the outer housing, so that the inner housing, the outer housing, the bottom plate, and the top plate enclose to form the receiving cavity.

3. The ion source housing according to claim 2, wherein, There is also provided in the housing: A plurality of flow guiding plates, which divide the receiving cavity into a plurality of partition cavities. A flow guiding opening is formed between each flow guiding plate and the bottom plate or the top plate. The flow guiding opening is used to communicate the plurality of partition cavities to form a flow guiding channel in the receiving cavity, and the flow guiding channel has an S-shaped structure.

4. The ion source housing according to claim 3, characterized in that, The plurality of flow guiding plates are distributed in the receiving cavity along the circumferential direction of the housing.

5. The ion source housing according to claim 3, characterized in that, The inlet pipe, the outlet pipe, and the partition plate are all located between two adjacent flow guiding plates.

6. The ion source housing according to claim 3, characterized in that, Along the height direction of the housing, the inlet pipe and the outlet pipe are provided at the same-side end or both-side ends of the housing.

7. The ion source housing according to claim 3, wherein The inlet pipe and the outlet pipe are both inserted into the bottom plate. The inlet pipe includes a first water inlet and a first water outlet. The first water outlet extends into the receiving cavity and is located at one end close to the bottom plate. The flow guiding opening of the flow guiding plate adjacent to the inlet pipe is located at one end close to the top plate.

8. The ion source housing according to claim 7, wherein, The outlet pipe includes a second water inlet and a second water outlet. The second water inlet extends into the receiving cavity and is provided with a preset gap at one end close to the top plate. The flow guiding opening of the flow guiding plate adjacent to the outlet pipe is arranged at one end close to the top plate.

9. The ion source housing according to claim 8, characterized in that, The height of the preset gap is 10 mm to 15 mm, and the height of the flow guiding opening is 10 mm to 15 mm.

10. An ion source, characterized in that, Including the ion source housing according to any one of claims 1 to 9.

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