Mask assembly and apparatus for manufacturing display device

Abstract

A mask assembly and an apparatus for manufacturing a display device are provided. The mask assembly includes: a mask frame including a plurality of side portions and an opening; a first support bar disposed on the mask frame to overlap the opening, the first support bar extending in a direction parallel to at least one of the plurality of side portions of the mask frame; a mask sheet disposed on the first support bar, the mask sheet extending in a direction parallel to one of the plurality of side portions of the mask frame; and a first waterproof film disposed on a surface of the first support bar facing the mask sheet.

Description

[0001] Cross - reference to related applications

[0002] This application claims priority to Korean Patent Application No. 10 - 2023 - 0122043, filed with the Korean Intellectual Property Office on September 13, 2023, the entire contents of which are incorporated herein by reference. Technical field

[0003] One or more embodiments relate to a mask assembly and an apparatus for manufacturing a display device, the apparatus including the mask assembly. Background art

[0004] A display device visually displays data. The display device may provide an image by using light - emitting diodes. The use and structure of display devices have been diversified, and a structure capable of being bent from a substantially flat state to a certain angle has also been developed.

[0005] A display device may include a plurality of pixels arranged in a pattern to generate an image. In this regard, several layers including an emission layer may be included in the pixels arranged in a pattern. These layers may be provided on a substrate in different patterns according to their types.

[0006] Each layer of the display device may be formed by spraying a deposition material onto a mask assembly having an opening corresponding to a pattern to be formed on the substrate. To remove the deposition material remaining on the mask assembly without passing through the opening, the mask assembly may be cleaned using a cleaning solution. In this regard, problems may occur when the cleaning solution remains in some narrow gaps of the mask assembly. Summary of the utility model

[0007] According to an aspect of the present disclosure, a mask assembly and an apparatus for manufacturing a display device are provided to reduce residues of a cleaning solution.

[0008] Additional aspects will be set forth in part in the following description, and will be in part apparent from the description, or may be learned by practice of the presented embodiments of the present disclosure.

[0009] According to one or more embodiments, the mask assembly may include: a mask frame including an opening and a plurality of side portions; a first support bar disposed on the mask frame to overlap the opening, the first support bar extending in a direction parallel to at least one of the plurality of side portions of the mask frame; a mask sheet disposed on the first support bar, the mask sheet extending in a direction parallel to one of the plurality of side portions of the mask frame; and a first waterproof film disposed on a surface of the first support bar facing the mask sheet.

[0010] The mask assembly may further include: a second support rod disposed between the first support rod and the mask sheet, the second support rod intersecting the first support rod; and a second waterproof film disposed on a surface of the second support rod.

[0011] The second waterproof film may be disposed on a surface of the second support rod facing the mask sheet.

[0012] The first support rod may include a groove in a region overlapping with the second support rod, and at least a portion of the second support rod may be disposed in the groove.

[0013] The mask assembly may further include alignment rods disposed on the mask frame, the alignment rods being adjacent to the mask sheet and parallel to one of the plurality of side portions of the mask frame.

[0014] The first waterproof film may include a self-assembled monolayer film.

[0015] According to one or more embodiments, an apparatus for manufacturing a display device may include: a mask assembly; and a deposition source facing the mask assembly and configured to eject a deposition material toward the mask assembly in a first direction, wherein the mask assembly includes: a mask frame including an opening and a plurality of side portions; a first support rod disposed on the mask frame to overlap with the opening, the first support rod extending in a direction parallel to one of the plurality of side portions of the mask frame; a mask sheet disposed on the first support rod, the mask sheet extending in a direction parallel to one of the plurality of side portions of the mask frame; and a first waterproof film disposed on a surface of the first support rod facing the mask sheet.

[0016] The mask assembly may further include: a second support rod disposed between the first support rod and the mask sheet, the second support rod intersecting the first support rod; and a second waterproof film disposed on a surface of the second support rod.

[0017] The second waterproof film may be disposed on a surface of the second support rod facing the mask sheet.

[0018] In a schematic cross-sectional view, the first support rod, the first waterproof film, the second support rod, the second waterproof film, and the mask sheet may be sequentially disposed in the first direction.

[0019] The first support rod may include a groove in a region overlapping with the second support rod, and at least a portion of the second support rod may be disposed in the groove.

[0020] The mask assembly may further include alignment bars disposed on the mask frame, and the alignment bars may be adjacent to the mask sheet and parallel to one of the plurality of sides of the mask frame.

[0021] The first waterproof film may include a self-assembled monolayer film.

[0022] According to one or more embodiments, a method of manufacturing a display device includes: disposing a mask assembly and a deposition source facing a substrate; aligning the mask assembly with the substrate; and depositing a deposition material on the substrate by spraying the deposition material from the deposition source in a first direction toward the mask assembly, wherein the mask assembly may include: a mask frame including a plurality of sides and an opening; a first support bar disposed on the mask frame to overlap with the opening, the first support bar extending in a direction parallel to one of the plurality of sides of the mask frame; a mask sheet disposed on the first support bar, the mask sheet extending in a direction parallel to one of the plurality of sides of the mask frame; and a first waterproof film disposed on a surface of the first support bar facing the mask sheet.

[0023] The mask assembly may further include: a second support bar disposed between the first support bar and the mask sheet, the second support bar intersecting the first support bar; and a second waterproof film disposed on a surface of the second support bar.

[0024] The second waterproof film may be disposed on a surface of the second support bar facing the mask sheet.

[0025] In a schematic cross-sectional view, the first support bar, the first waterproof film, the second support bar, the second waterproof film, and the mask sheet may be sequentially disposed in the first direction.

[0026] The first support bar may include a groove in a region overlapping with the second support bar, and at least a portion of the second support bar may be disposed in the groove.

[0027] The mask assembly may further include alignment bars disposed on the mask frame, and the alignment bars may be adjacent to the mask sheet and parallel to one of the plurality of sides of the mask frame.

[0028] The first waterproof film may include a self-assembled monolayer film. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The above and other aspects, features, and advantages of certain embodiments of the present disclosure will become more apparent from the following description taken in conjunction with the accompanying drawings, in which:

[0030] Figure 1 is a schematic cross-sectional view of an apparatus for manufacturing a display device according to an embodiment;

[0031] Figure 2 is an exploded perspective view of a mask assembly according to an embodiment;

[0032] Figure 3A is a perspective view of a first support bar according to an embodiment;

[0033] Figure 3B is a perspective view of a second support bar according to an embodiment;

[0034] Figure 4 is an exploded perspective view of a mask assembly according to an embodiment, showing a first support bar and a second support bar coupled to a mask frame;

[0035] Figure 5 is along Figure 4 a schematic cross-sectional view of the mask assembly taken along line V-V';

[0036] Figure 6A is along Figure 4 a schematic cross-sectional view of the mask assembly taken along line VI-VI';

[0037] Figure 6B is along Figure 4 another schematic cross-sectional view of the mask assembly taken along line VI-VI';

[0038] Figure 7 is a perspective view of a mask assembly according to an embodiment, in which a mask sheet and alignment bars are coupled to a mask frame;

[0039] Figure 8 is along Figure 7 a schematic cross-sectional view of the mask assembly taken along line VIII-VIII';

[0040] Figure 9 is an enlarged schematic cross-sectional view of a part of a waterproof film according to an embodiment;

[0041] Figure 10A and Figure 10B are schematic cross-sectional views for comparing the residual form of a cleaning solution between a second support bar and a mask sheet according to an embodiment;

[0042] Figures 11A to 11F is a schematic cross-sectional view showing a process of manufacturing a mask assembly according to an embodiment;

[0043] Figure 12 is a plan view of a display device manufactured using an apparatus for manufacturing a display device according to an embodiment; and

[0044] Figure 13 is a schematic cross-sectional view of a display device taken along line XIII-XIII’ Figure 12 of the present disclosure. DETAILED DESCRIPTION

[0045] In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of various embodiments or implementations of the present disclosure. As used herein, "embodiment" and "implementation" are interchangeable terms that are non-limiting examples of devices or methods disclosed herein. However, it will be apparent that the various embodiments may be practiced without these specific details or with one or more equivalent arrangements. Here, the various embodiments are not necessarily exclusive and do not limit the present disclosure. For example, the specific shapes, configurations, and characteristics of an embodiment may be used or implemented in another embodiment.

[0046] Unless otherwise specified, the illustrated embodiments should be understood to provide features of the present disclosure. Accordingly, unless otherwise specified, the features, components, modules, layers, films, panels, regions, and / or aspects, etc. (hereinafter, individually or collectively referred to as "elements") of the various embodiments may be combined, separated, interchanged, and / or rearranged in other ways without departing from the spirit of the present disclosure.

[0047] The use of cross-hatching and / or shading in the drawings is generally used to clarify the boundaries between adjacent elements. As such, the presence or absence of cross-hatching or shading does not convey or indicate any preference or requirement for a particular material, material properties, dimensions, ratios, commonality between the illustrated elements, and / or any other characteristics, attributes, properties, etc. of the elements, unless otherwise specified. Additionally, in the drawings, for clarity and / or descriptive purposes, the dimensions and relative dimensions of the elements may be exaggerated. When the embodiments can be implemented differently, the specific process orders may be performed in an order different from that described. For example, two consecutively described processes may be performed substantially simultaneously or in an order opposite to that described. Also, like reference numerals denote like elements.

[0048] When an element such as a layer is referred to as being "on", "connected to", or "coupled to" another element or layer, it can be directly on, connected to, or coupled to the other element or layer, or intervening elements or layers may be present. However, when an element or layer is referred to as being "directly on", "directly connected to", or "directly coupled to" another element or layer, no intervening elements or layers are present. For this reason, the term "connected" can refer to physical, electrical, and / or fluid connection with or without intervening elements. Additionally, the DR1, DR2, and DR3 directions are not limited to the three axes of a rectangular coordinate system, such as the x-axis, y-axis, and z-axis, and can be interpreted in a broader sense. For example, the DR1, DR2, and DR3 directions can be perpendicular to each other, or can represent different directions that are not perpendicular to each other.

[0049] For the purposes of the present disclosure, "at least one of A and B" can be interpreted as only A, only B, or any combination of A and B. Moreover, "at least one of X, Y, and Z" and "at least one selected from the group consisting of X, Y, and Z" can be interpreted as only X, only Y, only Z, or any combination of two or more of X, Y, and Z. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0050] Although terms such as "first", "second", etc. may be used herein to describe various types of elements, these elements should not be limited by these terms. These terms are used to distinguish one element from another. Thus, a first element discussed below could be termed a second element without departing from the teachings of the present disclosure.

[0051] Spatial relative terms such as "beneath", "below", "under", "lower", "above", "upper", "on top of", "higher", and (e.g., as in "sidewall") "side" may be used herein for descriptive purposes to describe the relationship of one element to another as illustrated in the figures. In addition to the orientation depicted in the figures, the spatial relative terms are intended to encompass different orientations of the device in use, operation, and / or manufacture. For example, if the device in the figures is flipped, an element described as "below" or "beneath" other elements or features would then be oriented "above" the other elements or features. Thus, the term "below" can encompass both an upper and a lower orientation. Additionally, the device may be otherwise oriented (e.g., rotated 90 degrees or in other orientations), and as such, the spatial relative descriptors used herein are to be interpreted accordingly.

[0052] The terms used in this document are for the purpose of describing particular embodiments and are not intended to be limiting. As used herein, the singular forms "a" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. Additionally, the terms "comprising" and / or "including" when used in this specification specifically state the presence of the stated features, integers, steps, operations, elements, components, and / or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups thereof. It should also be noted that as used herein, the terms "substantially", "about" and other similar terms are used as approximate terms and not as terms of degree, and as such, are used to account for the inherent deviations of measured, calculated and / or provided values that would be recognized by a person of ordinary skill in the art.

[0053] Various embodiments are described herein with reference to cross-sectional and / or exploded views that are schematic illustrations of embodiments and / or intermediate structures. As such, variations in the shapes of the illustrations due to, for example, manufacturing techniques and / or tolerances are to be expected. Accordingly, the embodiments disclosed herein are not necessarily to be construed as limited to the shapes of particular illustrated regions, but include shape deviations caused, for example, by manufacturing. In this manner, the regions illustrated in the drawings may be schematic in nature and the shapes of these regions may not reflect the actual shapes of the regions of the device, and as such, are not necessarily intended to be limiting.

[0054] Unless otherwise defined or implied herein, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure pertains. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and this disclosure, and should not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

[0055] Figure 1 is a schematic cross-sectional view of an apparatus 100 for manufacturing a display device according to an embodiment.

[0056] Referring to Figure 1 , the apparatus 100 may include a chamber 110, a first support 120, a second support 130, a deposition source 140, a mask assembly 150, a magnetic part 160, a vision part 170, and a pressure controller 180.

[0057] The chamber 110 may include a space therein, and a part of the chamber 110 may be open. In this regard, a gate valve 110-1 may be installed in the open part of the chamber 110. The open part of the chamber 110 may be opened or closed according to the operation of the gate valve 110-1.

[0058] The first support member 120 can have the display substrate D placed thereon to support the display substrate D. In one embodiment, the first support member 120 can be in the form of a plate fixed inside the chamber 110. In one embodiment, the first support member 120 can have the display substrate D placed thereon and can be in the form of a shuttle member linearly movable in the chamber 110. In one embodiment, the first support member 120 can include an electrostatic chuck or an adhesive chuck, which is arranged in the chamber 110 to be fixed to the chamber 110 or capable of being raised or lowered in the chamber 110. Hereinafter, for convenience, the case where the first support member 120 is in the form of a plate fixed inside the chamber 110 will be described.

[0059] The mask assembly 150 can be placed on the second support member 130. In this regard, the second support member 130 can be arranged inside the chamber 110. The second support member 130 can finely adjust the position of the mask assembly 150. In one embodiment, the second support member 130 can include separate drivers or alignment components for moving the mask assembly 150 in different directions. In one embodiment, the second support member 130 can be in the form of a shuttle member. The second support member 130 can have the mask assembly 150 placed thereon and can transfer the mask assembly 150. For example, the second support member 130 can move out of the chamber 110 to have the mask assembly 150 placed thereon, and then can enter the chamber 110 from the outside of the chamber 110.

[0060] The first support member 120 and the second support member 130 can be integrally formed with each other. The first support member 120 and the second support member 130 can include a movable shuttle member. In this regard, the first support member 120 and the second support member 130 can include a structure for fixing the mask assembly 150 and the display substrate D such that the display substrate D is placed on the mask assembly 150, and the display substrate D and the mask assembly 150 can be linearly moved simultaneously.

[0061] Hereinafter, for convenience, the case where the first support member 120 and the second support member 130 are different from each other and arranged at different positions and the case where the first support member 120 and the second support member 130 are arranged inside the chamber 110 will be described.

[0062] The deposition source 140 can face the mask assembly 150 and can be configured to eject deposition material towards the mask assembly 150 in the first direction DR1. In this regard, the deposition material can be accommodated in the deposition source 140 and can be evaporated or sublimated by heating. The deposition source 140 can be fixed inside the chamber 110 or can be arranged inside the chamber 110 to be linearly movable in one direction. Hereinafter, for convenience, the case where the deposition source 140 is fixed inside the chamber 110 will be described.

[0063] The mask assembly 150 may include a mask frame 151, a first support bar 152, a second support bar 153, and a mask sheet 154.

[0064] The magnetic force part 160 may be disposed inside the chamber 110 to face the display substrate D. In this regard, the magnetic force part 160 may apply a magnetic force to the mask sheet 154, thereby pressing the mask assembly 150 against the display substrate D. In particular, the magnetic force part 160 may prevent the mask sheet 154 from sagging and may also bring the mask sheet 154 into close contact with the display substrate D. The magnetic force part 160 may maintain a uniform space between the mask sheet 154 and the display substrate D in the length direction of the mask sheet 154.

[0065] The vision part 170 may be mounted on the wall of the chamber 110 and may capture an image of the positions of the display substrate D and the mask assembly 150. In this regard, the vision part 170 may include a camera for capturing an image of the display substrate D and the mask assembly 150. The positions of the display substrate D and the mask assembly 150 may be identified based on the image captured by the vision part 170, and based on the image, the first support 120 may finely adjust the position of the display substrate D, or the second support 130 may finely adjust the position of the mask assembly 150. Hereinafter, a case where the second support 130 finely adjusts the position of the mask assembly 150 to align the positions of the display substrate D and the mask assembly 150 with each other will be described.

[0066] The pressure controller 180 may be connected to the chamber 110 to control the internal pressure of the chamber 110. For example, the pressure controller 180 may adjust the internal pressure of the chamber 110 to a level the same as or similar to the atmospheric pressure. The pressure controller 180 may adjust the internal pressure of the chamber 110 to a level the same as or similar to the internal pressure of a vacuum state.

[0067] The pressure controller 180 may include a connection pipe 181 connected to the chamber 110 and a pump 182 installed at the connection pipe 181. In this regard, depending on the operation of the pump 182, external air may flow in through the connection pipe 181, or the gas inside the chamber 110 may be guided to the outside through the connection pipe 181.

[0068] The above-described apparatus 100 may be used to manufacture the display device described below. First, in the case where the pressure controller 180 adjusts the internal pressure of the chamber 110 to a level the same as or similar to the atmospheric pressure, the gate valve 110-1 may be operated to open the open portion of the chamber 110.

[0069] Thereafter, the display substrate D can be inserted into the chamber 110 from the outside of the chamber 110. In this regard, the display substrate D can be inserted into the chamber 110 in various ways. For example, the display substrate D can be inserted into the chamber 110 from the outside of the chamber 110 by a robotic arm or the like arranged outside the chamber 110. In one embodiment, in the case where the first support member 120 is in the form of a shuttle member, the first support member 120 can be transported out of the chamber 110 from the inside of the chamber 110, and then, the display substrate D can be placed on the first support member 120 by a separate robotic arm or the like arranged outside the chamber 110, and the first support member 120 can be inserted into the chamber 110 from the outside of the chamber 110. Hereinafter, for convenience, the case where the display substrate D is inserted into the chamber 110 from the outside of the chamber 110 by a robotic arm arranged outside the chamber 110 will be described.

[0070] As described above, the mask assembly 150 can be arranged inside the chamber 110. In one embodiment, in the same or similar manner as the display substrate D, the mask assembly 150 can be inserted into the chamber 110 from the outside of the chamber 110. Hereinafter, for convenience, the case where only the display substrate D is inserted into the chamber 110 from the outside of the chamber 110 and the mask assembly 150 is arranged inside the chamber 110 will be described.

[0071] In one embodiment, the first support member 120 and the second support member 130 can be in the form of shuttle members, and the display substrate D and the mask assembly 150 can be fixed and then inserted into the chamber 110 from the outside of the chamber 110.

[0072] In the case where the display substrate D is inserted into the chamber 110, the display substrate D can be placed on the first support member 120. In this regard, the vision part 170 can capture an image of the positions of the display substrate D and the mask assembly 150. In particular, the vision part 170 can capture an image of the first alignment mark of the display substrate D and the second alignment mark of the mask assembly 150.

[0073] Based on the captured images of the first alignment mark and the second alignment mark, the positions of the display substrate D and the mask assembly 150 can be identified. In this regard, the device 100 can include a separate controller to identify the positions of the display substrate D and the mask assembly 150.

[0074] In the case where the positions of the display substrate D and the mask assembly 150 have been identified, the second support member 130 can finely adjust the position of the mask assembly 150.

[0075] Thereafter, the deposition source 140 can be operated to eject a deposition material (e.g., in a first direction DR1) toward the mask assembly 150, and the deposition material passing through the plurality of openings of the mask sheet 154 can be deposited on the display substrate D. In this regard, the pump 182 can suck the gas from the inside of the chamber 110 and discharge the gas to the outside, thereby maintaining the internal pressure of the chamber 110 at a level the same as or similar to the internal pressure of the vacuum state.

[0076] The deposition material can be deposited on the display substrate D by passing through the openings arranged in the deposition area (not shown) of the mask assembly 150. In this regard, the mask assembly 150 can provide a deposition area the same as or similar to the designed deposition area.

[0077] The above operation can be repeatedly performed on a plurality of display substrates D. In this regard, when the number of depositions on the display substrate D is equal to the preset number of depositions, the device 100 can stop operating, and the mask assembly 150 can be withdrawn from the chamber 110.

[0078] The deposition material used during deposition can be deposited on the mask assembly 150. In particular, when the deposition material is deposited in the openings of the mask sheet 154, the deposition material may not be deposited on the display substrate D as much as in the pre-designed area, so precise deposition may be difficult. The above problem can be solved by cleaning the deposition material adsorbed on the outer surface of the mask assembly 150 and / or the inner surface of the openings of the mask sheet 154.

[0079] Accordingly, the device 100 can allow the deposition material to be deposited on an area having the same or similar shape as designed on the display substrate D. The device 100 can allow the deposition material to be deposited in a precise pattern, thereby allowing the manufacture of a display device capable of achieving a precise image.

[0080] Figure 2 is an exploded perspective view of a mask assembly 150 according to an embodiment.

[0081] Reference Figure 2 , the mask assembly 150 can include a mask frame 151, a first support rod 152 and a second support rod 153, and a mask sheet 154.

[0082] The mask frame 151 may have a plurality of frames (e.g., a plurality of sides) connected to each other to form a space inside. In one embodiment, the mask frame 151 may be in the form of a frame having an opening 151-1 formed in the center. In one embodiment, the mask frame 151 may be a mesh shape, such as a window frame including a plurality of openings. Hereinafter, for convenience, the case where the mask frame 151 includes an opening 151-1 in the center will be described. In this regard, the length of one side (or long side) of the mask frame 151 may be greater than the length of the other side (or short side). In one embodiment, when the side of the mask frame 151 extending in the second direction DR2 is defined as the long side and the side of the mask frame 151 extending in the third direction DR3 is defined as the short side, the length of the long side may be greater than the length of the short side.

[0083] The mask frame 151 may include a first groove 151-2 and a second groove 151-3 in its surface (e.g., the surface facing the first direction DR1). The first groove 151-2 and the second groove 151-3 do not penetrate the mask frame 151 and may be arranged at regular intervals. For example, the first groove 151-2 may include a plurality of first grooves 151-2, may be spatially connected to the opening 151-1 of the mask frame 151, and may be arranged in the third direction DR3. Similarly, the second groove 151-3 may include a plurality of second grooves 151-3, may be spatially connected to the opening 151-1 of the mask frame 151, and may be arranged in the second direction DR2. The first groove 151-2 and the second groove 151-3 may provide a space into which both ends of the first support bar 152 and the second support bar 153 may be inserted and fixed to the mask frame 151, respectively.

[0084] The first support bar 152 and the second support bar 153 can be disposed on the mask frame 151 to overlap with the opening 151-1 of the mask frame 151. In this regard, each of the first support bar 152 and the second support bar 153 can be provided in a plurality of numbers and can be disposed on the mask frame 151 to be separated from each other. For example, each of the plurality of first support bars 152 and the plurality of second support bars 153 can be spaced apart and parallel to one side portion of the mask frame 151. The first support bar 152 can extend in a direction parallel to at least one of the plurality of side portions of the mask frame 151. In one embodiment, the first support bar 152 can extend in the second direction DR2 and can be disposed in the third direction DR3. The first support bar 152 can be parallel to the long side portion of the mask frame 151. The second support bar 153 can be disposed between the first support bar 152 and the mask sheet 154, and the second support bar 153 intersects the first support bar 152. The second support bar 153 can extend in the third direction DR3 and can be disposed in the second direction DR2. The second support bar 153 can be parallel to the short side portion of the mask frame 151. In one embodiment, the first support bar 152 can be omitted, and only the second support bar 153 can be disposed on the mask frame 151. In one embodiment, the second support bar 153 can be omitted, and only the first support bar 152 can be disposed on the mask frame 151. Although Figure 2 four first support bars 152 and seven second support bars 153 are shown, one or more embodiments are not necessarily limited to the numbers of the first support bar 152 and the second support bar 153.

[0085] Figure 3A is a perspective view of the first support bar 152 according to one embodiment.

[0086] Reference Figure 3A , a first waterproof film 152-1 can be disposed on the surface of the first support bar 152. The first waterproof film 152-1 can be disposed on the surface of the first support bar 152 facing the mask sheet 154. For example, the first waterproof film 152-1 can be disposed on the surface of the first support bar 152 facing the first direction DR1. In other words, the first waterproof film 152-1 can be disposed on the surface of the first support bar 152 that faces away from the surface of the deposition material ejected by the deposition source 140 of ( Figure 1 ).

[0087] Figure 3B is a perspective view of the second support bar 153 according to one embodiment.

[0088] Reference Figure 3B, in a manner similar to the first support bar 152, the second waterproof film 153-1 can be disposed on the surface of the second support bar 153. The second waterproof film 153-1 can be arranged on the surface of the second support bar 153 facing the mask sheet 154. For example, the second waterproof film 153-1 can be disposed on the surface of the second support bar 153 facing the first direction DR1. In other words, the second waterproof film 153-1 can be disposed on the surface of the second support bar 153 facing away from the surface of the deposition material ejected by the deposition source 140 of ( Figure 1 ). In various embodiments, unless otherwise specified, it will be understood that the first waterproof film 152-1 and the second waterproof film 153-1 are respectively disposed on the first support bar 152 and the second support bar 153.

[0089] Figure 4 is an exploded perspective view of a mask assembly 150 according to an embodiment, showing the first support bar 152 and the second support bar 153 coupled to the mask frame 151.

[0090] Reference Figure 4 , the first support bar 152 and the second support bar 153 can be coupled to the mask frame 151. In one embodiment, the first support bar 152 can have two ends respectively inserted into the first slots 151-2 facing each other in the mask frame 151, so that it can be coupled to the mask frame 151. Similarly, the second support bar 153 can have two ends respectively inserted into the second slots 151-3 facing each other in the mask frame 151, so that it can be coupled to the mask frame 151. In one embodiment, different from that shown in Figure 4 , the first slots 151-2 and the second slots 151-3 can be omitted, and the first support bar 152 and the second support bar 153 can be welded to the surface of the mask frame 151 (for example, the surface facing the first direction DR1).

[0091] The first support bar 152 and the second support bar 153 coupled to the mask frame 151 can divide the opening 151-1 of the mask frame 151 into a plurality of holes 151-H. The holes 151-H defined by the first support bar 152 and the second support bar 153 can define a deposition area through which the deposition material to be deposited on the display substrate D passes.

[0092] The mask sheet 154 may include at least one mask sheet 154. In the case where the mask sheet 154 includes at least two mask sheets 154, the at least two mask sheets 154 may extend in a direction parallel to one of the plurality of side portions of the mask frame 151 (e.g., the third direction DR3) and may be arranged in another direction (e.g., the second direction DR2). The side portion of the mask sheet 154 that extends in the third direction DR3 may be understood as the long side portion of the mask sheet 154, and the side portion of the mask sheet 154 that extends in the second direction DR2 may be understood as the short side portion of the mask sheet 154. In some embodiments, the first support bar 152 that extends in the second direction DR2 may intersect the plurality of mask sheets 154, and the second support bar 153 that extends in the third direction DR3 may overlap two adjacent mask sheets 154 with each other at the same time.

[0093] The mask sheet 154 may include at least one hole 154-H. For example, a plurality of holes 154-H may be formed in the mask sheet 154 in the length direction of the mask sheet 154 (e.g., the third direction DR3). In this regard, the holes 154-H may be separated from each other by a certain distance in one direction (e.g., the second direction DR2) and may penetrate the mask sheet 154. In some embodiments, the holes 154-H in the mask sheet 154 may overlap with each of the holes 151-H defined by the first support bar 152 and the second support bar 153. In some embodiments, the holes 154-H may not be formed in the region of the mask sheet 154 that overlaps with the first support bar 152 and the second support bar 153.

[0094] Figure 5 is a schematic cross-sectional view of the mask assembly 150 taken along the line V-V’ Figure 4 of.

[0095] Refer to Figure 5 , a part of the second support bar 153 may be arranged in the second groove 151-3 of the mask frame 151.

[0096] The second waterproof film 153-1 may be provided on the second support bar 153. Since the second waterproof film 153-1 may be provided on the surface of the second support bar 153 facing the first direction DR1, the second support bar 153 may contact (e.g., directly contact) the mask frame 151 in the second groove 151-3. Although Figure 5 shows that the upper surface of the second waterproof film 153-1 is coplanar (or flush) with the upper surface of the mask frame 151, one or more embodiments are not limited thereto. In one embodiment, the upper surface of the second support bar 153 may coincide with the upper surface of the mask frame 151, and the second waterproof film 153-1 may protrude beyond the upper surface of the mask frame 151. In one embodiment, the upper surface of the second support bar 153 may protrude beyond the upper surface of the mask frame 151.

[0097] Figure 6A is taken along Figure 4 a schematic cross-sectional view of the mask assembly 150 taken along line VI-VI'.

[0098] Referring to Figure 6A , the second support bar 153 may be disposed on the first support bar 152. The first waterproof film 152-1 may be disposed between the first support bar 152 and the second support bar 153. The second waterproof film 153-1 may be disposed on the second support bar 153. In other words, the first support bar 152, the first waterproof film 152-1, the second support bar 153, and the second waterproof film 153-1 may be arranged in sequence in the first direction DR1 (or the deposition direction). Although Figure 6A shows the first waterproof film 152-1 in contact (e.g., in direct contact) with the second support bar 153, one or more embodiments are not limited thereto. In one embodiment, the first waterproof film 152-1 and the second support bar 153 may be separated from each other. In another example, the first waterproof film 152-1 and the second support bar 153 may be in contact (e.g., in direct contact) with each other in some regions and separated from each other in other regions.

[0099] Figure 6B is taken along Figure 4 line VI-VI' of Figure 4 another schematic cross-sectional view of the mask assembly 150.

[0100] Referring to Figure 6B , the first support bar 152 may include a groove 152-G in a region overlapping with the second support bar 153. A portion of the first waterproof film 152-1 may be disposed in the groove 152-G. A portion of the second support bar 153 and the second waterproof film 153-1 may be disposed in the groove 152-G. Although Figure 6B shows the upper surface of the second waterproof film 153-1 coplanar (or flush) with the upper surface of the first waterproof film 152-1, one or more embodiments are not limited thereto. In one embodiment, the upper surface of the second support bar 153 may coincide with the upper surface of the first waterproof film 152-1, and the second waterproof film 153-1 may protrude beyond the upper surface of the first waterproof film 152-1. In one embodiment, the upper surface of the second support bar 153 may protrude beyond the upper surface of the first waterproof film 152-1. Similar to Figure 6A the situation, the first waterproof film 152-1 and the second support bar 153 may be separated from each other, or may be in contact (e.g., in direct contact) with each other in some regions and separated from each other in other regions.

[0101] In reference to Figure 6A and Figure 6BIn the described embodiment, when the first support bar 152 and the second support bar 153 are separated from each other and there is a gap therebetween, cleaning solution may remain in the gap during the process of cleaning the mask assembly 150. In this regard, the first waterproof film 152-1 may comprise a hydrophobic material, so that the amount of the remaining cleaning solution can be reduced.

[0102] Figure 7 is a perspective view of a mask assembly 150 according to an embodiment, in which a mask sheet 154 and alignment bars 155 in the mask assembly 150 are coupled to a mask frame 151.

[0103] Reference Figure 7 , the mask sheet 154 may be coupled to the mask frame 151. For example, the mask sheet 154 may be welded to the upper surface (or the surface facing the first direction DR1) of the mask frame 151. The mask sheets 154 may contact each other (e.g., directly contact) or be separated from each other. When the mask sheets 154 are separated from each other, a part of the second support bar 153 of ( Figure 4 ) may be exposed in the spaced region.

[0104] The edges of the mask sheet 154 and the mask frame 151 may contact each other. In an embodiment, the edge of the mask sheet 154 extending in the second direction DR2 (e.g., the short side portion of the mask sheet 154) and the edge of the mask frame 151 extending in the second direction DR2 (e.g., the long side portion of the mask frame 151) may contact each other and may be coplanar with each other.

[0105] The alignment bars 155 may be arranged on the mask frame 151. The alignment bars 155 may be arranged on one side of the outermost mask sheet 154. The alignment bars 155 may be parallel to one side of a plurality of side portions of the mask frame 151. In an embodiment, the alignment bars 155 extending in the third direction DR3 may be arranged on the second direction DR2 side of the outermost mask sheet 154 in the second direction DR2 among the plurality of mask sheets 154. Additionally, the alignment bars 155 extending in the third direction DR3 may be arranged on the side opposite to the second direction DR2 of the outermost mask sheet 154 in the direction opposite to the second direction DR2 among the plurality of mask sheets 154. The alignment bars 155 may contact (e.g., directly contact) the mask sheet 154 or be separated from the mask sheet 154. The alignment bars 155 may be used as the second alignment marks of the mask assembly 150 described with reference to Figure 1 .

[0106] Figure 8 is a schematic cross-sectional view of the mask assembly 150 taken along the line VIII-VIII’ of Figure 7 .

[0107] Reference Figure 8, the first support rod 152, the first waterproof film 152-1, the second support rod 153, the second waterproof film 153-1, and the mask sheet 154 may be arranged in sequence in the first direction DR1.( Figure 7 The) hole 154-H may not be arranged in the region of the mask sheet 154 that overlaps with the second support rod 153.

[0108] Although Figure 8 it is shown that the mask sheet 154 is in contact with (e.g., directly in contact with) the second waterproof film 153-1 and the second support rod 153 is in contact with (e.g., directly in contact with) the first waterproof film 152-1, one or more embodiments are not limited thereto. In one embodiment, the mask sheet 154 may be separated from the second waterproof film 153-1, or may be in contact with the second waterproof film 153-1 in some regions and separated from the second waterproof film 153-1 in other regions. The second support rod 153 may be separated from the first waterproof film 152-1, or may be in contact with the first waterproof film 152-1 in some regions and separated from the first waterproof film 152-1 in other regions. During the process of cleaning the mask assembly 150, a portion of the cleaning solution may remain between the mask sheet 154 and the second support rod 153 and / or between the second support rod 153 and the first support rod 152. The first waterproof film 152-1 and the second waterproof film 153-1 may comprise a hydrophobic material, thereby reducing the amount of residual cleaning solution.

[0109] Figure 9 is an enlarged schematic cross-sectional view of a part of a waterproof film according to an embodiment.

[0110] Referring to Figure 9 , the first waterproof film 152-1 and / or the second waterproof film 153-1 may be formed on the first support rod 152 and / or the second support rod 153. The first waterproof film 152-1 and the second waterproof film 153-1 may include a self-assembled monolayer (SAM) 156. The SAM 156 may include a head portion 156-a, a connecting portion 156-b, and a terminal portion 156-c. The head portion 156-a may be in contact with (e.g., directly in contact with) the surface of the first support rod 152 or the second support rod 153, and may be coupled to the surface of the first support rod 152 or the second support rod 153. The terminal portion 156-c may be separated from the surface of the first support rod 152 or the second support rod 153. The connecting portion 156-b may extend between the head portion 156-a and the terminal portion 156-c, and may connect the head portion 156-a to the terminal portion 156-c. The head portion 156-a may comprise a hydrophilic material. The terminal portion 156-c may comprise a hydrophobic material. The connecting portion 156-b may comprise various types of polymer chains that can be connected to the head portion 156-a and the terminal portion 156-c.

[0111] The SAM 156 can be formed integrally on the first support bar 152 and / or the second support bar 153, and can be formed by various processes such as a deposition process and a solution process. In some embodiments, the SAM 156 can include one or more selected from fluorooctatrichlorosilane (FOTS), trichlorooctadecylsilane (OTS), and dichlorodimethylsilane (DDMS).

[0112] Figure 10A and Figure 10B is a schematic cross-sectional view for comparing the residual form of the cleaning solution between the second support bar 153 and the mask sheet 154 according to an embodiment. Figure 10A The embodiment shown in Figure 10B is a comparative example in which the second waterproof film is omitted.

[0113] Reference Figure 10A and Figure 10B , there may be some gaps W-A between the second support bar 153 and the mask sheet 154, and a part of the cleaning solution W may remain in the gaps after cleaning the mask assembly 150. In this regard, depending on the presence or absence of the second waterproof film 153-1, the surface tension can be different, and the surface shape of the cleaning solution W can be different.

[0114] For example, referring to Figure 10A , since the second waterproof film 153-1 is not arranged, the surfaces of both the second support bar 153 and the mask sheet 154 can be hydrophilic. Accordingly, the surface tension of the cleaning solution W can be strong on both the surface of the second support bar 153 and the surface of the mask sheet 154. The first contact angle θ1 between the cleaning solution W and the surface of the second support bar 153 can be less than 90°. The second contact angle θ2 between the cleaning solution W and the surface of the mask sheet 154 can be less than 90°. Accordingly, the edge of the cleaning solution W can be recessed in the direction from the edges of the second support bar 153 and the mask sheet 154 (for example, in the direction opposite to the third direction DR3). This high surface tension and the resulting surface shape make it difficult to remove the residual cleaning solution W and prolong the time taken to completely dry the mask assembly 150 after cleaning. In another example, when drying for the same amount of time, a part of the cleaning solution W may remain in the mask assembly 150, which may cause deterioration of the deposition quality when the mask assembly 150 is used for a subsequent deposition process.

[0115] Reference Figure 10B , the second waterproof film 153-1 can be provided on the second support bar 153 so that the cleaning solution W can contact the second waterproof film 153-1 (for example, directly contact). Referring together to Figure 9, the end portion 156-c of the SAM 156 can be at the outer surface of the second waterproof film 153-1 (e.g., the surface separated from the second support bar 153). Accordingly, the cleaning solution W can be stated to be in contact with (e.g., in direct contact with) the end portion 156-c. The end portion 156-c can include a hydrophobic material, so that it can have a low surface tension relative to the cleaning solution W. Accordingly, the third contact angle θ3 between the cleaning solution W and the second waterproof film 153-1 can be greater than 90°. The surface tension of the cleaning solution W on the lower surface of the cleaning solution W or the surface of the cleaning solution W facing the direction opposite to the first direction DR1 can be Figure 10B lower in the embodiment shown in Figure 10A than in the embodiment shown in Figure 10B . Accordingly, in the embodiment shown in Figure 10A , the amount of the cleaning solution W remaining between the mask sheet 154 and the second support bar 153 due to surface tension can be less than Figure 10B the amount of the cleaning solution W remaining between the mask sheet 154 and the second support bar 153 in the embodiment shown in Figure 10A . Accordingly, in the embodiment shown in

[0116] Figures 11A to 11E It is a schematic cross-sectional view showing an operation in the process of manufacturing the mask assembly 150 according to an embodiment.

[0117] Referring to Figure 11A , the first waterproof film 152-1 and the second waterproof film 153-1 can be formed on the surface of the first support bar 152 and the surface of the second support bar 153, respectively. For example, the first waterproof film 152-1 can be formed on the surface of the first support bar 152 facing the first direction DR1. The second waterproof film 153-1 can be formed on the surface of the second support bar 153 facing the first direction DR1. The first waterproof film 152-1 and the second waterproof film 153-1 can include the same material. Although the first waterproof film 152-1 and the second waterproof film 153-1 can be respectively deposited on the first support bar 152 and the second support bar 153 by using the deposition device AP, one or more embodiments are not limited thereto.

[0118] Referring to Figure 11B, the first support bar 152 can be coupled to the mask frame 151. The first support bar 152 can include a plurality of first support bars 152, and each of the first support bars 152 can be arranged parallel to the long side portion of the mask frame 151 (or the side portion extending in the second direction DR2). Thereafter, the first support bar 152 can be pushed in a direction opposite to the first direction DR1 to insert both ends of each of the first support bars 152 into the corresponding first slots 151-2 of the mask frame 151. The first slots 151-2 can be shaped to perfectly fit the ends of the first support bar 152. The first support bar 152 can be welded to the first slots 151-2.

[0119] Reference Figure 11C , the second support bar 153 can be disposed on the Figure 11B structure shown. The second support bar 153 can be coupled to the mask frame 151. The second support bar 153 can include a plurality of second support bars 153, and each of the second support bars 153 can be arranged parallel to the short side portion of the mask frame 151 (or the side portion extending in the third direction DR3). Thereafter, the second support bar 153 can be pushed in a direction opposite to the first direction DR1 to insert both ends of each of the second support bars 153 into the corresponding second slots 151-3 of the mask frame 151. The second slots 151-3 can be shaped to perfectly fit the ends of the second support bar 153. The depth of the second slots 151-3 (or the length in the first direction DR1) can be less than the depth of the first slots 151-2 (or the length in the first direction DR1). The second support bar 153 can intersect the first support bar 152, and a part of the second support bar 153 can overlap a part of the first support bar 152. The second support bar 153 can be welded to the second slots 151-3. The first support bar 152 and the second support bar 153 can intersect each other and can define a hole 151-H.

[0120] Reference Figure 11D , the mask sheet 154 can be disposed on the Figure 11C structure shown. The mask sheet 154 can be set on the mask frame 151 while being tensioned in one direction (e.g., the third direction DR3 and the opposite direction) to maintain a substantially flat shape. The mask sheet 154 can include holes 154-H separated from each other. The mask sheet 154 can be welded to the mask frame 151 such that the mask sheet 154 can be arranged so that the holes 154-H in the mask sheet 154 and the hole 151-H defined by the first support bar 152 and the second support bar 153 ( Figure 11C of) overlap each other. Since the mask sheet 154 can be welded and fixed to the mask frame 151 while being tensioned, the mask frame 151 can be bent or deformed by the receiving force from the mask sheet 154. In this regard, (Figure 11C The first support bar 152 and the second support bar 153 can prevent deformation of the mask frame 151 by supporting the mask frame 151. The mask sheets 154 can include a plurality of mask sheets 154, and can be arranged in one direction (e.g., the second direction DR2), welded, and fixed to the mask frame 151.

[0121] Reference Figure 11E , the alignment bars 155 can be provided on the Figure 11D structure shown in. The alignment bars 155 can extend in one direction (e.g., the third direction DR3) and can be arranged on both sides of the mask sheet 154. For example, the alignment bars 155 can be arranged in the second direction DR2 of the mask sheet 154 and in the direction opposite to the second direction DR2. The length of the alignment bars 155 in the third direction DR3 can be the same as the length of the short side portion of the mask frame 151. The alignment bars 155 can be welded and fixed to the mask frame 151.

[0122] Reference Figure 11F , a part of the mask sheet 154 can be cut. For example, the mask sheet 154 can be cut along the long side portion of the mask frame 151 or along the second direction DR2. After cutting, a part of the mask sheet 154 separated from the mask frame 151 can be removed. Accordingly, after cutting, the edge of the short side portion of the mask sheet 154 can coincide (or be flush) with the edge of the long side portion of the mask frame 151.

[0123] Figure 12 is a plan view of a display device 20 manufactured using an apparatus for manufacturing a display device according to an embodiment. Figure 13 is along Figure 12 the XIII-XIII' line of Figure 12 a schematic cross-sectional view of the display device 20.

[0124] Reference Figure 12 and Figure 13 , the display device 20 can have a display area DA and a non-display area NDA defined on the substrate 21, and the non-display area NDA can be arranged around the display area DA. The light-emitting elements 28 can be arranged in the display area DA, and a power supply line (not shown) etc. can be arranged in the non-display area NDA. The pad portion C can be arranged in the non-display area NDA.

[0125] A plurality of deposition material patterns that have passed through the deposition area described above can be arranged in the display area DA. In this regard, the display area DA can have an atypical shape.

[0126] The display device 20 may include a display substrate D, an intermediate layer 28-2 disposed on the display substrate D, and a counter electrode 28-3 disposed on the intermediate layer 28-2. The display device 20 may include a thin film encapsulation layer E disposed over the counter electrode 28-3.

[0127] The display substrate D may include a substrate 21, thin film transistors TFT, a via hole layer 27, and a pixel electrode 28-1.

[0128] The substrate 21 may include a plastic material, or may include a metal material such as SUS, Ti, etc. The substrate 21 may include polyimide (PI).

[0129] The thin film transistors TFT may be disposed on the substrate 21, the via hole layer 27 may cover the thin film transistors TFT, and a light emitting element 28 may be disposed on the via hole layer 27.

[0130] A buffer layer 22 including an organic compound and / or an inorganic compound may be further disposed on the upper surface of the substrate 21, and the buffer layer 22 may include SiO x (x≥1) and / or SiN x (x≥1).

[0131] After the active layer 23 is disposed on the buffer layer 22 in a specific pattern, the active layer 23 may be buried by a gate insulating layer 24. The active layer 23 may include a source region 23-1 and a drain region 23-3, and may further include a channel region 23-2 disposed between the source region 23-1 and the drain region 23-3.

[0132] The active layer 23 may include various materials. In one embodiment, the active layer 23 may include an inorganic semiconductor material such as amorphous silicon or crystalline silicon. In one embodiment, the active layer 23 may include an oxide semiconductor. In one embodiment, the active layer 23 may include an organic semiconductor material. However, for convenience, the case where the active layer 23 is formed of amorphous silicon will be described below.

[0133] The active layer 23 may be formed by forming an amorphous silicon layer on the buffer layer 22, crystallizing the amorphous silicon layer into a polysilicon layer, and patterning the polysilicon layer. Depending on the type of thin film transistor (such as a driving thin film transistor (not shown), a switching thin film transistor (not shown), etc.), the active layer 23 may have a source region 23-1 and a drain region 23-3 doped with impurities.

[0134] An interlayer insulating layer 26 corresponding to the active layer 23 and the buried gate electrode 25 may be provided on the upper surface of the gate insulating layer 24. After a contact hole H1 is formed in the interlayer insulating layer 26 and the gate insulating layer 24, the source electrode 27-1 and the drain electrode 27-2 may be provided on the interlayer insulating layer 26 to contact the source region 23-1 and the drain region 23-3, respectively.

[0135] The via hole layer 27 is provided over the thin film transistor TFT, and the pixel electrode 28-1 of the light emitting element 28 is provided on the via hole layer 27. The pixel electrode 28-1 may be electrically connected to the drain electrode 27-2 of the thin film transistor TFT through a via hole H2 formed in the via hole layer 27. The via hole layer 27 may be formed of an inorganic material and / or an organic material in a single layer or two or more layers, and may be a planarization layer having a substantially flat upper surface regardless of the curvature in its underlying layer, or may be curved along the curvature in its underlying layer.

[0136] After the pixel electrode 28-1 is provided on the via hole layer 27, the pixel defining layer 29 may be formed of an organic material and / or an inorganic material to cover the pixel electrode 28-1 and the via hole layer 27, and may have an opening to expose the pixel electrode 28-1.

[0137] The intermediate layer 28-2 and the counter electrode 28-3 may be provided on the pixel electrode 28-1. In one embodiment, the counter electrode 28-3 may be provided over the entire surface of the display substrate D. The counter electrode 28-3 may be provided on the intermediate layer 28-2 and the pixel defining layer 29. Hereinafter, for convenience, the case where the counter electrode 28-3 is provided on the intermediate layer 28-2 and the pixel defining layer 29 will be described.

[0138] The pixel electrode 28-1 may be used as an anode, the counter electrode 28-3 may be used as a cathode, and the polarities of the pixel electrode 28-1 and the counter electrode 28-3 may be reversed.

[0139] The pixel electrode 28-1 and the counter electrode 28-3 may be insulated from each other through the intermediate layer 28-2, and voltages of different polarities may be applied to the intermediate layer 28-2 to cause light emission from the organic emission layer.

[0140] The intermediate layer 28-2 may include an organic emission layer. As another optional example, the intermediate layer 28-2 may include an organic emission layer, and may further include at least one of a hole injection layer, a hole transport layer, an electron transport layer, and an electron injection layer. This embodiment is not limited thereto, and the intermediate layer 28-2 may include an organic emission layer, and may further include various other functional layers (not shown).

[0141] In this regard, the intermediate layer 28-2 can be formed by the apparatus for manufacturing a display device described above. The intermediate layer 28-2 can include a plurality of intermediate layers 28-2, and the intermediate layer 28-2 can form a display area DA. In this regard, the intermediate layers 28-2 can be separated from each other in the display area DA.

[0142] A unit pixel is composed of a plurality of sub-pixels, and the sub-pixels can emit light of various colors. For example, the sub-pixels can include sub-pixels that emit red light, green light, and blue light respectively, and can include sub-pixels (not shown) that emit red light, green light, blue light, and white light.

[0143] The sub-pixels described above can include the intermediate layer 28-2. In this regard, in the case of forming the sub-pixels, the intermediate layer 28-2 can be formed by the apparatus for manufacturing a display device described above.

[0144] The thin film encapsulation layer E can include a plurality of inorganic layers, or can include an inorganic layer and an organic layer. The organic layer of the thin film encapsulation layer E can be formed of a polymer, and more specifically, can be a single layer or a laminated layer formed of one or more of polyethylene terephthalate, polyimide, polycarbonate, epoxy resin, polyethylene, and polyacrylate. The inorganic layer of the thin film encapsulation layer E can be a single layer or a laminated layer containing a metal oxide or a metal nitride. More specifically, the inorganic layer can contain SiN x , one or more of Al2O3, SiO2, and TiO2. The top layer of the thin film encapsulation layer E that is externally exposed can be an inorganic layer for preventing moisture from penetrating into the light-emitting element.

[0145] The thin film encapsulation layer E can include at least one sandwich structure having at least one organic layer between at least two inorganic layers. As another example, the thin film encapsulation layer E can include at least one sandwich structure having at least one inorganic layer between at least two organic layers. As another example, the thin film encapsulation layer E can include a sandwich structure having at least one organic layer between at least two inorganic layers and a sandwich structure having at least one inorganic layer between at least two organic layers.

[0146] According to one or more of the above embodiments, a mask assembly can be realized in which cleaning solution residues can be reduced by disposing a waterproof film in the gaps between the mask sheet and the support bars and at positions between the support bars that are particularly vulnerable to cleaning solution residues. An apparatus for manufacturing a display device, the apparatus including the mask assembly, and a method of manufacturing a display device by using the mask assembly can be realized to manufacture a display device having an improved panel life. However, one or more embodiments are not limited by such effects.

[0147] It should be understood that the embodiments described herein are to be considered in a descriptive sense only and not for purposes of limitation. The description of a feature or aspect in each embodiment is generally to be considered as available for other similar features or aspects in other embodiments. Although one or more embodiments have been described with reference to the accompanying drawings, those of ordinary skill in the art will understand that various changes in form and detail may be made therein without departing from the spirit and scope defined by the claims.

Claims

1. A mask component, characterized in that, Comprising: A mask frame, including an opening and a plurality of side portions; A first support rod, arranged on the mask frame to overlap with the opening, the first support rod extending in a direction parallel to at least one of the plurality of side portions of the mask frame; A mask sheet, arranged on the first support rod, the mask sheet extending in a direction parallel to one of the plurality of side portions of the mask frame; And A first waterproof film, arranged on the surface of the first support rod facing the mask sheet.

2. The mask assembly according to claim 1, wherein Further comprising: A second support rod, arranged between the first support rod and the mask sheet, the second support rod intersecting with the first support rod; And A second waterproof film, arranged on the surface of the second support rod.

3. The mask assembly according to claim 2, wherein The second waterproof film is arranged on the surface of the second support rod facing the mask sheet.

4. The mask assembly according to claim 2, wherein The first support rod includes a groove in the region overlapping with the second support rod, and At least a part of the second support rod is arranged in the groove.

5. The mask assembly according to claim 1, wherein Further comprising: An alignment rod, arranged on the mask frame, the alignment rod being adjacent to the mask sheet and parallel to one of the plurality of side portions of the mask frame.

6. The mask assembly according to claim 1, wherein The first waterproof film includes a self-assembled monolayer film.

7. An apparatus for manufacturing a display device, characterized in that, The apparatus includes: The mask assembly according to claim 1, 5 or 6; and A deposition source, facing the mask assembly and configured to spray deposition material towards the mask assembly in a first direction.

8. The device according to claim 7, characterized in that, The mask assembly further includes: A second support rod, arranged between the first support rod and the mask sheet, the second support rod intersecting with the first support rod; and A second waterproof film, arranged on the surface of the second support rod facing the mask sheet.

9. The device according to claim 8, characterized in that, In a cross-sectional view, the first support rod, the first waterproof film, the second support rod, the second waterproof film and the mask sheet are arranged in sequence in the first direction.

10. The apparatus according to claim 8, wherein The first support rod includes a groove in the region overlapping with the second support rod, and At least a part of the second support rod is disposed in the groove.

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