Metal organic source supply device

Abstract

A metal organic source supply device comprises: a steel cylinder for storing a metal organic source; the steel cylinder and the vibration device are arranged in the vertical direction, the vibration device drives the steel cylinder to vibrate, and the vibration device comprises a vibration motor, a vibration shaft and a vibration shaft, the vibration motor is arranged on the base, the elastic piece is connected with the vibration motor, the vibration motor drives the elastic piece to elastically move, and the tray is connected with the elastic piece and used for bearing the steel cylinder. According to the device, the metal organic source in the steel cylinder is uniformly distributed, so that wormholes are prevented from occurring in the metal organic source in the steel cylinder, and the use efficiency of the metal organic source is improved.

Description

Technical Field

[0001] The utility model relates to the field of metal organic chemical vapor deposition equipment, in particular to a metal organic source supply device. Background Art

[0002] Metal organic source is the raw material for MOCVD (metal organic chemical vapor deposition) equipment. Due to its chemical properties and production process requirements, the cylinder providing the metal organic source needs to be stored in a constant temperature bath to form a saturated vapor pressure inside the cylinder, and then carried into the MOCVD reaction chamber by a carrier gas (H2 or N2) for reaction.

[0003] However, since some metal organic sources are solid powders or crystalline states, the carrier gas will form wormholes in the metal organic source during the carrying process, resulting in a greatly reduced use efficiency of the metal organic source. Summary of the Utility Model

[0004] The technical problem solved by the utility model is to provide a metal organic source supply device to improve the use efficiency of the metal organic source.

[0005] To solve the above technical problem, an embodiment of the utility model provides a metal organic source supply device, including: a cylinder for storing the metal organic source; a vibration device, the cylinder and the vibration device are arranged in the vertical direction, the vibration device drives the cylinder to vibrate, and the vibration device includes: a vibration motor; an elastic member connected to the vibration motor, the vibration motor drives the elastic member to perform elastic motion; a tray connected to the elastic member, and the tray is used to carry the cylinder.

[0006] Optionally, it further includes: a water tank, the vibration device is fixed at the bottom of the water tank, the water tank is used to hold a liquid at a constant temperature, and the cylinder is located in the liquid at the constant temperature.

[0007] Optionally, it further includes: a constant temperature bath for generating and storing a constant temperature liquid; a water pumping motor arranged in the water tank; a water pipe, one end of the water pipe is connected to the water pumping motor, and the other end of the water pipe is connected to the constant temperature bath, and the water pumping motor pumps the constant temperature liquid in the constant temperature bath into the water tank through the water pipe.

[0008] Optionally, it further includes: an overflow port arranged on the side wall of the water tank; an overflow pipe, one end of the overflow pipe is connected to the overflow port, and the other end of the overflow pipe is arranged in the constant temperature bath, and the overflow pipe is used to return the liquid in the water tank to the constant temperature bath to keep the liquid in the water tank at a constant temperature.

[0009] Optionally, the overflow port is higher than the top of the cylinder.

[0010] Optionally, the elastic member includes: a first support portion, a second support portion, and an elastic body disposed between the first support portion and the second support portion. The first support portion is connected to the vibration motor, and the second support portion is connected to the tray.

[0011] Optionally, the elastic body includes a rubber elastic pad, a silica gel elastic pad, or a metal spring.

[0012] Optionally, the vibration device further includes: a sealed box, the vibration motor and the elastic member are disposed in the sealed box, and the sealed box is used to isolate the liquid at a constant temperature. The vibration motor is fixed to the bottom of the sealed box.

[0013] Optionally, the sealed box includes an acrylic sealed box or a metal sealed box.

[0014] Optionally, the vibration device further includes: a connecting portion, and both ends of the connecting portion are respectively connected to the elastic member and the tray; the connecting portion passes through the sealed box and is connected to the elastic member, and the connection between the connecting portion and the sealed box is sealed.

[0015] Optionally, the vibration motor includes a pneumatic vibration motor or an electric vibration motor.

[0016] Optionally, when the vibration motor includes a pneumatic vibration motor, the vibration device further includes: a driving portion disposed outside the water tank; an air pipe, and both ends of the air pipe are respectively connected to the driving portion and the vibration motor, and the driving portion is used to supply driving gas to the vibration motor through the air pipe to drive the pneumatic vibration motor to work.

[0017] Optionally, the vibration mode of the vibration motor includes a four-axis vibration.

[0018] Compared with the prior art, the technical solution of the embodiment of the present invention has the following beneficial effects:

[0019] In the metal organic source supply device of the embodiment of the present invention, the vibration motor drives the elastic member to perform elastic movement, and the elastic member transmits the vibration of the vibration motor to the tray to drive the cylinder on the tray to vibrate, so that the metal organic source in the cylinder is evenly distributed, so as to avoid the appearance of "wormholes" in the metal organic source in the cylinder, thereby improving the use efficiency of the metal organic source.

[0020] Furthermore, the metal organic source supply device further includes a water tank, and the liquid at a constant temperature contained in the water tank is used to keep the metal organic source in the cylinder at a stable saturated vapor pressure, so that when the carrier gas enters the cylinder, a large amount of metal organic source can be carried out, improving the use efficiency of the metal organic source.

[0021] Furthermore, the metal organic source supply device also includes a sealed box, and the vibration motor and the elastic member are arranged in the sealed box, so as to prevent the liquid in the water tank from corroding the vibration motor and the elastic member. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 and Figure 2 is a schematic structural diagram of a metal organic source supply device in one embodiment;

[0023] Figure 3 It is a structural schematic diagram of a metal organic source supply device in one embodiment of the utility model;

[0024] Figure 4 It is a structural schematic diagram of a metal organic source supply device in another embodiment of the utility model;

[0025] Figure 5 It is a structural schematic diagram of a metal organic source supply device in another embodiment of the utility model. DETAILED DESCRIPTION

[0026] As described in the background art, wormholes may be formed in the metal-organic source during the carrying process of the carrier gas, which greatly reduces the utilization efficiency of the metal-organic source.

[0027] Figure 1 and Figure 2 It is a schematic diagram of the structure of a metal organic source supply device in one embodiment.

[0028] Please refer to Figure 1 and Figure 2 The metal-organic source supply device includes: a steel cylinder 100, which is used to store the metal-organic source; an air inlet pipe 101, which is connected to the steel cylinder 100 and is used to transport the carrier gas into the steel cylinder 100; and an air outlet pipe 102, which is connected to the steel cylinder 100 and is used to transport the metal-organic source carried by the carrier gas to the production equipment.

[0029] In the metal organic source supply device, the carrier gas includes hydrogen or nitrogen, and the metal organic source in the cylinder 100 includes solid powder or crystalline state such as TMIn, Cp2Mg, etc., and the carrier gas forms a gas passage in the metal organic source during the carrying process, thereby forming a "wormhole" (such as Figure 2 103), when the subsequent carrier gas enters the cylinder 100, it preferentially flows out from the gas passage and cannot enter other areas to carry the metal-organic source in other areas, thereby reducing the amount of the metal-organic source carried by the carrier gas, causing the cylinder 100 to be scrapped when there is still a large amount of unused metal-organic source, resulting in a greatly reduced utilization efficiency of the metal-organic source.

[0030] To solve the above problems, the present utility model provides a metal organic source supply device. The vibration motor drives the elastic member to perform elastic movement, and the elastic member transmits the vibration of the vibration motor to the tray, so as to drive the cylinder on the tray to vibrate, making the metal organic source in the cylinder evenly distributed, avoiding the occurrence of "wormholes" in the metal organic source in the cylinder, and thus improving the use efficiency of the metal organic source.

[0031] To make the above objects, features and beneficial effects of the present utility model more obvious and understandable, the following detailed description of the specific embodiments of the present utility model will be given in conjunction with the accompanying drawings.

[0032] Figure 3 It is a schematic structural diagram of a metal organic source supply device in an embodiment of the present utility model.

[0033] Please refer to Figure 3 , the metal organic source supply device includes: a cylinder 201 for storing the metal organic source; a vibration device. The cylinder 201 and the vibration device are arranged in the vertical direction, and the vibration device drives the cylinder 201 to vibrate. The vibration device includes: a vibration motor 202; an elastic member 200 connected to the vibration motor 202, and the vibration motor 202 drives the elastic member 200 to perform elastic movement.

[0034] In this embodiment, the cylinder 201 stores the metal organic source, and the metal organic source is in a solid powder, crystalline state or liquid state in the cylinder.

[0035] Please refer to the following table, which shows information such as the type, English name, chemical formula, melting point and boiling point of the metal organic source. The metal organic source includes: TMGa (Trimethyl Gallium), TEGa (triethyl gallium), TMIn (trimethyl indium), TMAl (Trimethylaluminium), Cp2Mg (Di-cyclopentadienyl magnesium).

[0036]

[0037] Among them, TMIn and Cp2Mg have relatively high melting points, and TMIn and Cp2Mg are in a solid powder or crystalline state in the cylinder 201.

[0038] Please continue to refer to Figure 1 , in this embodiment, the vibration device further includes: a tray 206 connected to the elastic member 200, and the tray 206 is used to carry the cylinder 201.

[0039] In this embodiment, the cylinder 201, the tray 206, the elastic member 200, and the vibration motor 202 are arranged in the vertical direction, and the vertical direction is perpendicular to the horizontal direction.

[0040] Please continue to refer to Figure 1 , in this embodiment, the vibration device further includes: a connecting portion 207, and two ends of the connecting portion 207 are respectively connected to the elastic member 200 and the tray 206.

[0041] Please continue to refer to Figure 1 , in this embodiment, the elastic member 200 includes: a first support portion 205, a second support portion 203, and an elastic body 204 disposed between the first support portion 205 and the second support portion 203. The first support portion 205 is connected to the vibration motor 202, and the second support portion 203 is connected to the tray 206 through the connecting portion 207.

[0042] In this embodiment, the elastic body 204 includes a rubber elastic pad, a silica gel elastic pad, or a metal spring.

[0043] In this embodiment, the vibration motor 202 includes a pneumatic vibration motor or an electric vibration motor.

[0044] In this embodiment, the vibration mode of the vibration motor 202 includes four-axis vibration.

[0045] The vibration motor 202 drives the elastic member 200 to perform elastic movement, and the elastic member 200 transmits the vibration of the vibration motor 202 to the tray 206 to drive the cylinder 201 fixed on the tray 206 to vibrate, so that the metal organic source in the cylinder 201 is evenly distributed, avoiding the appearance of "wormholes" in the metal organic source in the cylinder 201, thereby improving the use efficiency of the metal organic source.

[0046] Figure 4 is a schematic structural diagram of a metal organic source supply device in another embodiment of the present invention.

[0047] Please refer to Figure 4 , Figure 4 is a schematic diagram based on Figure 3 , in this embodiment, the metal organic source supply device further includes: a water tank 300, the vibration device is fixed to the bottom of the water tank 300, and the water tank 300 is used to contain a liquid at a constant temperature.

[0048] The liquid with a constant temperature contained in the water tank 300 is used to keep the metal organic source in the cylinder 201 at a stable saturated vapor pressure, so that when the carrier gas enters the cylinder 201, a large amount of the metal organic source can be carried out, improving the utilization efficiency of the metal organic source.

[0049] In this embodiment, the cylinder 201 is located in the liquid with a constant temperature to ensure that the metal organic source in the cylinder 201 maintains a stable saturated vapor pressure.

[0050] In this embodiment, the vibration device is immersed in the liquid with a constant temperature. The vibration motor 202 includes a pneumatic vibration motor to prevent the vibration motor 202 immersed in the liquid with a constant temperature from being easily affected by the constant liquid and malfunctioning.

[0051] In this embodiment, the elastomer 204 includes a rubber elastic pad or a silica gel elastic pad. The rubber elastic pad or the silica gel elastic pad is not easily damaged by the liquid with a constant temperature when immersed in it.

[0052] Please continue to refer to Figure 4 , the vibration device further includes: a driving part 305 arranged outside the water tank 300; an air pipe 306, both ends of the air pipe 306 are respectively connected to the driving part 305 and the vibration motor 202, and the driving part 305 is used to provide driving gas to the vibration motor 202 through the air pipe 306 to drive the pneumatic vibration motor to work.

[0053] In this embodiment, the driving gas includes high-purity nitrogen (GN2).

[0054] Please continue to refer to Figure 4 , the metal organic source supply device further includes: a thermostatic bath 301 for generating and storing a constant-temperature liquid; a water pumping motor 302 arranged in the water tank 300; a water pipe 303, one end of the water pipe 303 is connected to the water pumping motor 302, and the other end of the water pipe 303 is connected to the thermostatic bath 301. The water pumping motor 302 pumps the constant-temperature liquid in the thermostatic bath 301 into the water tank 300 through the water pipe 303; an overflow port arranged on the side wall of the water tank 300; an overflow pipe 304, one end of the overflow pipe 304 is connected to the overflow port, and the other end of the overflow pipe 304 is arranged in the thermostatic bath 301. The overflow pipe 304 is used to return the liquid in the water tank 300 to the thermostatic bath 301. When the liquid in the water tank 300 exceeds the overflow port, the liquid in the water tank 300 flows back to the thermostatic bath 301 through the overflow pipe 304 to keep the constant temperature of the liquid in the water tank 300.

[0055] In this embodiment, the overflow port is higher than the top of the cylinder 201, so that the cylinder 201 is immersed in the constant-temperature liquid in the water tank 300.

[0056] In this embodiment, one end of the overflow port is arranged at the top of the side wall of the water tank 300, so as to return the liquid in the water tank 300 that exceeds the overflow port to the constant-temperature tank 301.

[0057] The liquid in the constant-temperature tank 301 has a constant temperature. The pumping motor 302 pumps the constant-temperature liquid in the constant-temperature tank 301 into the water tank 300 through the water pipe 303. When the constant-temperature liquid in the water tank 300 exceeds the overflow port, it flows back to the constant-temperature tank 301 through the overflow pipe 304. The pumping motor 302 pumps the constant-temperature liquid in the constant-temperature tank 301 back into the water tank 300 through the water pipe, so as to ensure that the liquid in the water tank 300 maintains a constant temperature effect.

[0058] In this embodiment, the range of the constant temperature of the liquid with a constant temperature is less than or equal to the normal temperature, and the normal temperature is 25 degrees Celsius.

[0059] In this embodiment, the liquid in the constant-temperature tank 301 includes water.

[0060] Figure 5 It is a schematic structural diagram of a metal organic source supply device in another embodiment of the present invention.

[0061] Please refer to Figure 5 , Figure 5 For the schematic diagram based on Figure 4 In this embodiment, the metal organic source supply device further includes: a sealed box 400. The vibration motor 202 and the elastic member 200 are arranged in the sealed box 400. The sealed box 400 is used to isolate the liquid with a constant temperature. The vibration motor 202 is fixed to the bottom of the sealed box 400.

[0062] The vibration motor 202 and the elastic member 200 are arranged in the sealed box 400, so as to avoid the liquid in the water tank 300 from corroding the vibration motor 202 and the elastic member 200.

[0063] In this embodiment, the sealed box 400 includes an acrylic sealed box or a metal sealed box.

[0064] The vibration motor 202 includes a pneumatic vibration motor or an electric vibration motor.

[0065] In this embodiment, the vibration motor 202 includes a pneumatic vibration motor. The air pipe 306 passes through the sealing box 400 and is connected to the pneumatic vibration motor, and the penetration part of the air pipe 306 and the sealing box 400 is sealed.

[0066] In this embodiment, the elastic body 204 includes a rubber elastic pad, a silica gel elastic pad or a metal spring.

[0067] In this embodiment, the vibration device further includes: a connecting portion 207. Two ends of the connecting portion 207 are respectively connected to the elastic member 200 and the tray 206. The connecting portion 207 passes through the sealing box 400 and is connected to the elastic member 200, and the connection portion between the connecting portion 207 and the sealing box 400 is sealed.

[0068] Although the present utility model is disclosed as above, the present utility model is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present utility model. Therefore, the protection scope of the present utility model should be subject to the scope defined by the claims.

Claims

1. A metal organic source supply device, characterized in that, Comprising: A cylinder for storing a metal organic source; A vibration device, the cylinder and the vibration device are arranged in the vertical direction, the vibration device drives the cylinder to vibrate, and the vibration device includes: a vibration motor; an elastic member connected to the vibration motor, the vibration motor drives the elastic member to perform elastic movement; a tray connected to the elastic member, the tray is used to carry the cylinder.

2. The metal organic source supply device according to claim 1, characterized in that, Also comprising: A water tank, the vibration device is fixed to the bottom of the water tank, the water tank is used to hold a liquid at a constant temperature, and the cylinder is located in the liquid at the constant temperature.

3. The metal organic source supply device according to claim 2, wherein Also comprising: A thermostat for generating and storing a constant temperature liquid; a pumping motor arranged in the water tank; a water pipe, one end of the water pipe is connected to the pumping motor, and the other end of the water pipe is connected to the thermostat, and the pumping motor pumps the constant temperature liquid in the thermostat into the water tank through the water pipe.

4. The metal organic source supply device according to claim 3, wherein Also comprising: An overflow port arranged on the side wall of the water tank; an overflow pipe, one end of the overflow pipe is connected to the overflow port, and the other end of the overflow pipe is arranged in the thermostat, and the overflow pipe is used to return the liquid in the water tank to the thermostat to keep the liquid in the water tank at a constant temperature.

5. The metal organic source supply device according to claim 4, characterized in that, The overflow port is higher than the top of the cylinder.

6. The metal organic source supply device according to claim 1, characterized in that, The elastic member includes: a first support portion, a second support portion and an elastic body arranged between the first support portion and the second support portion, the first support portion is connected to the vibration motor, and the second support portion is connected to the tray.

7. The metal organic source supply device according to claim 6, wherein The elastic body includes a rubber elastic pad, a silica gel elastic pad or a metal spring.

8. The metal-organic source supply device according to claim 2, wherein The vibration device further includes: a sealed box, the vibration motor and the elastic member are arranged in the sealed box, the sealed box is used to isolate the liquid at a constant temperature, and the vibration motor is fixed to the bottom of the sealed box.

9. The metal organic source supply device according to claim 8, characterized in that, The sealed box includes an acrylic sealed box or a metal sealed box.

10. The metal organic source supply device according to claim 8, characterized in that, The vibration device further includes: a connecting portion, both ends of the connecting portion are respectively connected to the elastic member and the tray; the connecting portion penetrates through the sealed box and is connected to the elastic member, and the connection portion between the connecting portion and the sealed box is sealed.

11. The metal organic source supply device according to claim 1, characterized in that, The vibration motor includes a pneumatic vibration motor or an electric vibration motor.

12. The metal organic source supply device according to claim 1, wherein The vibration motor includes a pneumatic vibration motor, and the vibration device further includes: a driving portion arranged outside the water tank; an air pipe, both ends of the air pipe are respectively connected to the driving portion and the vibration motor, and the driving portion is used to provide driving gas to the vibration motor through the air pipe to drive the pneumatic vibration motor to work.

13. The metal organic source supply device according to claim 1, wherein The vibration mode of the vibration motor includes four-axis vibration.

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