Air guide device and processing equipment

Abstract

The utility model provides a gas guide device and processing equipment, the gas guide device is used for being at least partially contained in a reaction furnace, an exhaust port is formed in the side part of the reaction furnace, the exhaust port is located at the first end of the reaction furnace in the vertical direction, the reaction furnace is used for containing a plurality of boats, and the boats are arranged at intervals in the direction perpendicular to the vertical direction; the gas guide device comprises a boat supporting assembly used for supporting a plurality of boats, a first gas port is formed in the boat supporting assembly, and the first gas port is used for being communicated with the reaction furnace and used for corresponding to gaps among the boats; the air guiding assembly and the boat supporting assembly are arranged in the vertical direction, the air guiding assembly comprises an air guiding box and an air guiding pipe, the air guiding box is connected and communicated with the boat supporting assembly, the air guiding pipe is connected and communicated with the air guiding box, the end, away from the air guiding box, of the air guiding pipe is open, and the end, away from the air guiding box, of the air guiding pipe is used for facing the exhaust port.

Description

Technical Field

[0001] The present application relates to the technical field of photovoltaic and semiconductor product production, and in particular to a gas guide device and processing equipment. Background Art

[0002] In the production process of photovoltaic and semiconductor products, multiple sheet materials can be loaded on a boat, and then enter a vertical reactor with the boat for coating processing. The reactor can accommodate multiple boats at the same time.

[0003] At present, it is necessary to introduce reaction gas into the top of the reactor and extract gas from the exhaust port opened at the bottom of the reactor wall, so as to realize the replenishment of reaction gas in the reactor and the discharge of waste gas. When the reactor accommodates multiple boats at the same time, the multiple boats are placed horizontally at intervals; because the gas in the reactor will flow to the exhaust port located on the reactor wall, it is difficult for the reaction gas to flow to the middle position near the bottom of the reactor, that is, it is difficult to flow to the bottom of the area between multiple boats. At this time, the amount of reaction gas contacted by the sheet material at the bottom of the boat is insufficient, resulting in poor coating effect of some sheet materials. Utility Model Content

[0004] In view of the above, it is necessary to provide an air guide device and processing equipment to solve the above defects.

[0005] In a first aspect, an embodiment of the present application provides an air guide device for being at least partially accommodated in a reactor, an exhaust port is provided on the side of the reactor, the exhaust port is located at the first end of the reactor in the vertical direction, the reactor is used to accommodate multiple boats, and the multiple boats are spaced apart in a direction perpendicular to the vertical direction, the air guide device comprises: a boat supporting assembly, the boat supporting assembly is used to receive the multiple boats, a first air port is provided on the boat supporting assembly, the first air port is used to communicate with the reactor and is used to correspond to the gap between the multiple boats; an air guide assembly, the air guide assembly and the boat supporting assembly are arranged in the vertical direction, the air guide assembly comprises an air guide box and an air guide pipe, the air guide box is connected and communicated with the boat supporting assembly, the air guide pipe is connected and communicated with the air guide box, the end of the air guide pipe facing away from the air guide box is opened, and the end of the air guide pipe facing away from the air guide box is used to face the exhaust port.

[0006] Optionally, the gas guide component also includes: a sleeve, which is sleeved on one end of the gas guide pipe away from the gas guide box, and the sleeve is movably connected to the gas guide pipe, and the sleeve is used to move closer to or away from the exhaust port to increase or decrease the flow rate of the gas in the gas guide component.

[0007] Optionally, the air guide box is funnel-shaped. On the side of the air guide box facing away from the boat support assembly and in the direction towards the boat support assembly, the cross-sectional area of the air guide box gradually decreases. The side of the air guide box facing the boat support assembly is provided with an opening. The boat support assembly includes: a boat support seat, a receiving space is formed in the boat support seat, the receiving space is communicated with the air guide box, a first air port is formed on the boat support seat and is communicated with the receiving space; an auxiliary heating element, the auxiliary heating element is received in the receiving space, and the auxiliary heating element is used to generate heat to increase the temperature in the reaction furnace.

[0008] Optionally, a furnace opening is formed at the first end of the reaction furnace, and the opening direction of the furnace opening intersects with the opening direction of the exhaust port. The air guide device further includes: a furnace door, the furnace door is located on the side of the air guide assembly facing away from the boat support assembly, and the furnace door is used to close the furnace opening; a support column, the support column is installed on the furnace door, the support column penetrates through the air guide box along the way, and is connected to the boat support assembly.

[0009] Optionally, the air guide device further includes: a first heat insulation member, the first heat insulation member is located between the air guide assembly and the furnace door, the first heat insulation member is used to support the air guide assembly, the first heat insulation member is connected to the support column, and the support column penetrates through the first heat insulation member. The first heat insulation member is used to block the heat in the reaction furnace from being transferred towards the second end of the reaction furnace; wherein, the first end and the second end of the reaction furnace are oppositely arranged in the vertical direction.

[0010] Optionally, the air guide device further includes: a plurality of second heat insulation members, the plurality of second heat insulation members are arranged at intervals in the vertical direction, the plurality of second heat insulation members are all connected to the support column, and the plurality of second heat insulation members are used to block the heat in the reaction furnace from being transferred towards the second end of the reaction furnace.

[0011] Optionally, the air guide device further includes: a first heat insulation member, the first heat insulation member is located on the side of the air guide assembly away from the boat support assembly, the first heat insulation member is used to support the sleeve, and the plate is used to reflect the heat in the reaction furnace towards the second end of the reaction furnace; wherein, the first end and the second end of the reaction furnace are oppositely arranged in the vertical direction; a limiting member, the limiting member covers the sleeve and is connected to the first heat insulation member, and the limiting member is used to limit the movement of the sleeve.

[0012] Optionally, the number of exhaust ports is multiple, and the multiple exhaust ports are circumferentially distributed on the reaction furnace; the number of air guide pipes is multiple, the multiple air guide pipes are circumferentially distributed, and are all communicated with the air guide box. One end of each air guide pipe facing away from the air guide box is arranged towards the corresponding exhaust port.

[0013] Second aspect, an embodiment of the present application provides a processing apparatus, including: a reaction furnace, an exhaust port is provided on a side of the reaction furnace, the exhaust port is located at a first end of the reaction furnace in the vertical direction, the reaction furnace is used to accommodate a plurality of boats, and the plurality of boats are spaced apart in a direction perpendicular to the vertical direction; a boat support plate for supporting the plurality of boats; a gas guiding device as described in any one of the above, at least a part of the gas guiding device is accommodated in the reaction furnace, and the gas guiding device is used to support the boat support plate.

[0014] Optionally, a second gas port is provided on the boat support plate, and the second gas port is used to communicate with a first gas port of the gas guiding device.

[0015] Through the gas guiding device and the processing apparatus provided by the present application, when a plurality of boats loaded with sheet materials are located in the reaction furnace for processing, a suction force is generated at the exhaust port, thereby sucking the gas in the reaction furnace, so that the waste gas generated by processing in the reaction furnace is discharged from the reaction furnace. Affected by the airflow and suction force at the exhaust port, the gas at the bottom of the area between the plurality of boats can flow through the first gas port and the gas guiding box to the gas guiding pipe, and flow in the direction close to the exhaust port through the gas guiding pipe. In this way, the efficiency of waste gas emission can be improved.

[0016] At the same time, the bottom of the area between the plurality of boats can be maintained in a state where the air pressure is lower than that of at least some other areas in the reaction furnace, so that the reaction gas can approach the bottom of the area between the plurality of boats under the action of the air pressure and contact the corresponding sheet materials in this area, so that the sheet materials can complete the coating process after fully contacting the reaction gas. In this way, the situation that the coating effect of the sheet materials at the bottom of the boat is poor due to insufficient contact with the reaction gas can be reduced, and the coating effect of the sheet materials can be improved. Description of the Drawings

[0017] Figure 1 is a cross-sectional view of the processing apparatus in an embodiment of the present application.

[0018] Figure 2 is an exploded view of the structures of the boat support plate and the gas guiding device in an embodiment of the present application.

[0019] Figure 3 is a schematic structural view of the gas guiding assembly in an embodiment of the present application.

[0020] Figure 4 is a first internal structural view of the boat support plate and the gas guiding device in an embodiment of the present application.

[0021] Figure 5 is a second internal structural view of the boat support plate and the gas guiding device in an embodiment of the present application.

[0022] Main Element Symbol Description:

[0023] 100. Processing equipment; 101. Reaction furnace; 1011. Reaction space; 1012. Furnace opening; 1013. Furnace body; 1014. Flange; 1015. Exhaust port; 102. Boat support plate; 1021. Second air port; 1022. Positioning groove; 103. Air guiding device; 10. Boat supporting assembly; 11. Boat support seat; 111. First air port; 112. Receiving space; 12. Auxiliary heating element; 13. Positioning protrusion; 20. Air guiding assembly; 21. Air guiding box; 22. Air guiding pipe; 23. Sleeve; 30. Furnace door; 40. Support column; 50. First heat insulation member; 60. Second heat insulation member; 70. Limiting member; 200. Sheet material; 300. Boat. Detailed implementation manners

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments.

[0025] In the present application, the term "a plurality of" refers to two or more. In addition, it should be understood that in the description of the present application, terms such as "first" and "second" are only used for the purpose of distinguishing descriptions, and cannot be understood as indicating or implying relative importance, nor can they be understood as indicating or implying an order.

[0026] In the description of the embodiments of the present application, words such as "exemplary" or "for example" are used to represent examples, illustrations or explanations. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be construed as being more preferred or having more advantages than other embodiments or design solutions. Exactly speaking, the use of words such as "exemplary" or "for example" is intended to present relevant concepts in a specific manner.

[0027] Please refer to Figure 1 , Figure 1 which shows a processing equipment 100 provided by the embodiment of the present application.

[0028] In the embodiment of the present application, the processing equipment 100 can accommodate a plurality of sheet materials 200 and perform coating processing on the plurality of sheet materials 200. A reaction space 1011 can be opened in the processing equipment 100, and a plurality of boats 300 loaded with sheet materials 200 can enter the reaction space 1011. After the boat 300 is located in the reaction space 1011, the processing equipment 100 can heat the reaction space 1011, the processing equipment 100 can access reaction gases to make the reaction gases enter the reaction space 1011, and at the same time the processing equipment 100 can remove the gases generated by the reaction from the reaction space 1011, so that the sheet materials 200 in the reaction space 1011 can achieve coating.

[0029] In the embodiments of the present application, the type of the sheet material 200 is not specifically limited. For example, the sheet material 200 may be, but is not limited to, a silicon wafer, a silicon carbide wafer, or a wafer, and the boat 300 may be a quartz boat or a graphite boat.

[0030] In the embodiments of the present application, the principle of the coating process of the sheet material 200 by the processing equipment 100 is not specifically limited. For example, the processing equipment 100 may perform a coating process on the sheet material 200 based on the principle of Low Pressure Chemical Vapor Deposition (LPCVD).

[0031] Please refer to Figure 2 , in the embodiments of the present application, the processing equipment 100 may include a reaction furnace 101, a boat support plate 102, and a gas guiding device 103. The length direction of the processing equipment 100 may be defined as the first horizontal direction, the width direction as the second horizontal direction, and the height direction as the vertical direction. For example, the first horizontal direction may be the X direction as shown in Figure 2 and its opposite direction, the second horizontal direction may be the Y direction as shown in Figure 2 and its opposite direction, and the vertical direction may be the Z direction as shown in Figure 1 and Figure 2 and its opposite direction.

[0032] Among them, the reaction furnace 101 is a vertical furnace body, and a reaction space 1011 is opened inside the reaction furnace 101. A furnace opening 1012 is opened at the first end of the reaction furnace 101 in the vertical direction, and the furnace opening 1012 communicates with the reaction space 1011. The boat support plate 102 can carry a plurality of boats 300, and the boat support plate 102 and the boats 300 carried thereon can enter the reaction space 1011 through the furnace opening 1012. A part of the structure of the gas guiding device 103 can enter the reaction space 1011 through the furnace opening 1012. The reaction gas used for the coating process of the sheet material 200 can enter the reaction space 1011 from the second end of the reaction furnace 101, and the waste gas generated during the coating process can be removed from the reaction space 1011 from the first end of the reaction furnace 101.

[0033] It can be understood that the reaction furnace 101 may include a first end and a second end in the vertical direction. The first end and the second end may be oppositely arranged. For example, the first end of the reaction furnace 101 is the bottom end, and the second end is the top end.

[0034] It can be understood that at least two of the plurality of boats 300 on the boat support plate 102 are spaced apart in the first horizontal direction and at least two of the plurality of boats 300 are spaced apart in the second horizontal direction.

[0035] For example, the boat support plate 102 can hold two rows of boats 300 placed upright. The two rows of boats 300 can be spaced apart in the first horizontal direction. The number of boats 300 in each row of boats 300 is two, that is, the boat support plate 102 can hold four boats 300. The two boats 300 in each row of boats 300 are spaced apart in the second horizontal direction. In this way, a cross-shaped gap is formed between the four boats 300 on the boat support plate 102.

[0036] In some embodiments, the reaction furnace 101 can include a furnace body 1013 and a flange 1014. The first end of the furnace body 1013 is open in the vertical direction. The flange 1014 is fixedly installed at the first end of the furnace body 1013. The furnace opening 1012 is formed on the side of the flange 1014 facing away from the furnace body 1013. The inner walls of the flange 1014 and the furnace body 1013 cooperate to form the inner wall of the reaction space 1011. An exhaust port 1015 is provided on the peripheral wall of the flange 1014. The exhaust port 1015 communicates with the reaction space 1011, and the exhaust port 1015 penetrates the inner wall of the flange 1014 in a direction perpendicular to the vertical direction.

[0037] The air guiding device 103 can include a boat supporting component 10 and an air guiding component 20. The boat supporting component 10 can enter the reaction space 1011, and the boat supporting component 10 can hold the boat support plate 102. The boat supporting component 10 is provided with a first air port 111 on the side facing the boat support plate 102, and a receiving space 112 is provided inside the boat supporting component 10. The first air port 111 communicates with the receiving space 112. A second air port 1021 is provided on the boat support plate 102, and the second air port 1021 penetrates the boat support plate 102 in the vertical direction. The projection of the second air port 1021 in the vertical direction coincides with the projection of the first air port 111 in the vertical direction. When the boat supporting component 10 holds the boat support plate 102, the first air port 111 is aligned and communicated with the second air port 1021, and both the first air port 111 and the second air port 1021 are aligned with the gap between the multiple boats 300 on the boat support plate 102.

[0038] Please refer to Figure 3 , the air guiding component 20 and the boat supporting component 10 are arranged in the vertical direction and are located on the side of the boat supporting component 10 facing away from the boat support plate 102. The air guiding component 20 can include an air guiding box 21 and an air guiding pipe 22. The air guiding box 21 is fixedly connected to the boat supporting component 10. The side of the air guiding box 21 facing the boat supporting component 10 is open. The air guiding box 21 communicates with the receiving space 112. The air guiding pipe 22 is located on the side of the air guiding box 21 away from the boat supporting component 10. The air guiding pipe 22 is connected to the air guiding box 21 and communicates with the air guiding box 21. The end of the air guiding pipe 22 away from the air guiding box 21 is open, and the end of the air guiding pipe 22 away from the air guiding box 21 faces the exhaust port 1015.

[0039] It can be understood that an air extraction device (not shown in the figure) can be connected to the exhaust port 1015 and extract air from the reaction space 1011 through the exhaust port 1015. One end of the air guide pipe 22 is arranged towards the exhaust port 1015, so that the air extraction device can extract the gas in the air guide pipe 22 through the exhaust port 1015. It can be defined that in the gap between multiple boats 300, the area close to the first end of the reaction furnace 101 is the air guiding area. The gas in the air guiding area can sequentially pass through the second air port 1021, the first air port 111, the accommodation space 112 and the air guide box 21, then enter the air guide pipe 22, and flow through the air guide pipe 22 to the exhaust port 1015 and then be removed from the reaction space 1011.

[0040] The air guiding device 103 can increase the flow rate of the gas in the air guiding area towards the exhaust port 1015, improve the negative pressure effect in the air guiding area, and make the air pressure in the air guiding area less than that in at least some other areas in the reaction space 1011 (for example, the area on the side of the air guiding area facing the second end of the reaction furnace 101 in the vertical direction). Under the action of the air pressure, the reaction gas in other areas in the reaction space 1011 can flow towards the direction close to the air guiding area and contact the sheet material 200 corresponding to the air guiding area, so as to realize the coating process of the sheet material 200 corresponding to the air guiding area. The waste gas generated after processing can be discharged from the reaction space 1011 through the air guiding assembly 20 and the exhaust port 1015. Among them, the projections of the sheet material 200 corresponding to the air guiding area in the first horizontal direction and the second horizontal direction respectively coincide with the projections of the air guiding area in the first horizontal direction and the second horizontal direction.

[0041] In this way, the flow rate and flow volume of the reaction gas flowing to the air guiding area can be increased, and the efficiency of removing the waste gas from the air guiding area can be improved. The amount of reaction gas contacting the sheet material 200 at the bottom of the boat 300 can be increased, so as to improve the coating effect of the sheet material 200 at the bottom of the boat 300.

[0042] In the embodiments of the present application, the shape of the air guide box 21 is not specifically limited. For example, the air guide box 21 can be a cuboid box body, a cylindrical box body, a funnel-shaped box body, etc. Exemplarily, as Figure 2 and Figure 3 shown, the air guide box 21 is in a funnel shape, and the cross-sectional area of the air guide box 21 gradually decreases along the direction from the top to the bottom of the air guide box 21; the boat supporting assembly 10 is located at the top of the air guide box 21.

[0043] It can be understood that when the air guide box 21 is in a funnel shape, the flow rate of the gas at the position with a small cross-sectional area in the air guide box 21 is less than that at the position with a large cross-sectional area in the air guide box 21, that is, the air guide box 21 can increase the flow rate of the gas entering from the top of the air guide box 21 and improve the air extraction efficiency of the air guiding area.

[0044] In the embodiments of the present application, no specific limitations are imposed on the shapes and numbers of the first air ports 111 and the second air ports 1021. For example, both the first air ports 111 and the second air ports 1021 can be in a cross shape, and the number of each is one. For another example, the numbers of the first air ports 111 and the second air ports 1021 are in multiple rows. The number of the first air ports 111 in each row of the first air ports 111 is at least one, and the number of the second air ports 1021 in each row of the second air ports 1021 is at least one. The multiple rows of the first air ports 111 are distributed in the circumferential direction and extend in a direction perpendicular to the vertical direction; the multiple rows of the second air ports 1021 are distributed in the circumferential direction and extend in a direction perpendicular to the vertical direction.

[0045] Exemplarily, four first air ports 111 are provided on the boat support assembly 10, and four second air ports 1021 are provided on the boat support plate 102. The four first air ports 111 are distributed in the circumferential direction, and an angle of 45 degrees is provided between every two adjacent first air ports 111. The four second air ports 1021 are distributed in the circumferential direction, and an angle of 45 degrees is provided between every two adjacent second air ports 1021.

[0046] It can be understood that the width of the first air port 111 can be smaller than the width of the second air port 1021, and the number of the first air ports 111 is equal to the number of the second air ports 1021.

[0047] In the embodiments of the present application, no specific limitations are imposed on the number of the air guide pipes 22. For example, the number of the exhaust ports 1015 can be multiple, the number of the air guide pipes 22 can be multiple, the multiple air guide pipes 22 correspond to the multiple exhaust ports 1015 one by one, the multiple air guide pipes 22 are all connected to the air guide box 21, and one end of each air guide pipe 22 facing away from the air guide box 21 is arranged towards the corresponding exhaust port 1015.

[0048] Exemplarily, the numbers of both the exhaust ports 1015 and the air guide pipes 22 can be four. The four air guide pipes 22 can be distributed in the circumferential direction, and an angle of 45 degrees is provided between every two adjacent air guide pipes 22. The four exhaust ports 1015 can be distributed in the circumferential direction, and an angle of 45 degrees is provided between every two adjacent exhaust ports 1015.

[0049] In the embodiments of the present application, no specific limitations are imposed on the connection manner between the air guide pipe 22 and the air guide box 21. For example, the air guide pipe 22 can be fixedly connected to the air guide box 21, and a part of the structure of the air guide pipe 22 extends into the air guide box 21. For another example, a part of the structure of the air guide pipe 22 extends into the air guide box 21, the air guide pipe 22 is rotatably connected to the air guide box 21, and a sealed connection is provided between the air guide pipe 22 and the air guide box 21.

[0050] In the embodiments of the present application, no specific limitation is imposed on the fixing method during fixed connection and fixed installation. For example, the fixing method may include screw fixing, welding fixing, integral molding fixing, etc.

[0051] Please refer to Figure 4 and Figure 5 simultaneously. In some embodiments, the boat support assembly 10 may include a boat support base 11 and an auxiliary heating element 12. The boat support base 11 is fixedly connected to the air guide box 21. A receiving space 112 may be formed in the boat support base 11, and a first air port 111 may be formed on a side of the boat support base 11 vertically away from the air guide box 21. The auxiliary heating element 12 is received in the receiving space 112. The auxiliary heating element 12 may be fixedly connected to the inner wall of the receiving space 112. After being energized, the auxiliary heating element 12 can generate heat and heat the environment around the boat support assembly 10 through thermal radiation.

[0052] It can be understood that the coating process of the sheet material 200 needs to be carried out in a high-temperature environment (for example, the ambient temperature is greater than 200 degrees Celsius). Electric heating wires may be provided on the peripheral wall of the furnace body 1013 to heat the reaction space 1011. The auxiliary heating element 12 can cooperate with the electric heating wires on the furnace body 1013 to heat the reaction space 1011, so that the temperature of the reaction space reaches the temperature required for the coating process. The auxiliary heating element 12 can improve the heating efficiency of the reaction space 1011.

[0053] In the embodiments of the present application, no specific limitation is imposed on the type of the auxiliary heating element 12. For example, the auxiliary heating element 12 may be, but is not limited to, an infrared heater, an electric heating wire, etc.

[0054] In some embodiments, a plurality of positioning protrusions 13 protrude from a side of the boat support base 11 where the first air port 111 is formed. A plurality of positioning grooves 1022 may be formed on the boat support plate 102, and the plurality of positioning grooves 1022 correspond to the plurality of positioning protrusions 13 one by one. Each positioning protrusion 13 is used for being inserted into the corresponding positioning groove 1022. In this way, through the insertion of the positioning protrusions 13 and the positioning grooves 1022, the positioning of the boat support plate 102 on the boat support assembly 10 can be realized, and the convenience of placing the boat support plate 102 on the boat support assembly 10 can be improved.

[0055] In some embodiments, the gas guide device 103 may further include a furnace door 30 and a support column 40. The furnace door 30 may be located on a side of the gas guide assembly 20 that is away from the boat support assembly 10 in the vertical direction, and the furnace door 30 may be detachably connected to the flange 1014. The furnace door 30 may close and open the furnace opening 1012 by connecting and separating with the flange 1014. The support column 40 extends in the vertical direction and is fixedly mounted on a side of the furnace door 30 that faces the reaction space 1011. The support column 40 passes through the gas guide box 21 and is fixedly connected to the gas guide box 21. One end of the support column 40 that is away from the furnace door 30 is fixedly connected to the boat support seat 11.

[0056] It can be understood that the support column 40 can realize the fixed connection of the furnace door 30, the air guide assembly 20 and the boat support assembly 10. When the air guide assembly 20 and the boat support assembly 10 are located outside the reaction space 1011, the staff or the automated equipment can move the boat support plate 102 carrying multiple boats 300 to the boat support seat 11, and then the staff or the automated equipment can move the furnace door 30 so that the furnace door 30 is close to the reaction space 1011, and the air guide assembly 20, the boat support assembly 10, the boat support plate 102 and the boat 300 can be synchronously moved to enter the reaction space 1011. After the furnace door 30 can be relatively fixed with the flange 1014, the processing equipment 100 can perform a coating process on the sheet material 200 loaded on the boat 300.

[0057] In the embodiments of the present application, the detachable connection method is not specifically limited. For example, the detachable connection method may include, but is not limited to, screw connection, bolt connection, snap connection, etc.

[0058] In some embodiments, the air guide device 103 may further include a first heat insulating member 50. The first heat insulating member 50 is located between the furnace door 30 and the air guide assembly 20, and may receive the air guide assembly 20. The first heat insulating member 50 is arranged perpendicular to the vertical direction. The support column 40 passes through the first heat insulating member 50 and is fixedly connected to the first heat insulating member 50.

[0059] It can be understood that the first heat insulating member 50 can prevent the heat in the reaction space 1011 from flowing toward the side close to the furnace opening 1012, that is, prevent the heat from being lost through the second end of the reaction furnace 101. By reducing the heat loss in the area where the boat 300 is located, the effect of the coating process is improved.

[0060] In some embodiments, the air guiding device 103 may further include a plurality of second heat insulation members 60. The plurality of second heat insulation members 60 are all located between the first heat insulation member 50 and the air guiding box 21. The plurality of second heat insulation members 60 are spaced apart in the vertical direction. The support column 40 passes through the plurality of second heat insulation members 60 and is fixedly connected to the plurality of second heat insulation members 60. The plurality of second heat insulation members 60 can all block the flow of heat towards the second end of the reaction furnace 101, thereby reducing the heat dissipation in the area where the boat 300 is located and improving the effect of the coating process.

[0061] In the embodiments of the present application, the materials of the first heat insulation member 50 and the second heat insulation members 60 are not specifically limited. For example, the materials of the first heat insulation member 50 and the second heat insulation members 60 can both be, but are not limited to, stainless steel, ceramics, quartz, etc. Exemplarily, the first heat insulation member 50 and the second heat insulation members 60 are both stainless steel plates, and the surfaces of the first heat insulation member 50 and the second heat insulation members 60 facing away from the furnace door 30 are polished to form reflective surfaces, and the reflective surfaces can reflect the heat generated by the heating wire of the reaction furnace 101 and the heat generated by the auxiliary heating member 12 towards the second end of the reaction furnace 101. In this way, the first heat insulation member 50 and the second heat insulation members 60 can reflect heat into the reaction space 1011 while blocking the flow of heat, reducing the rate of temperature drop in the reaction space 1011.

[0062] In some embodiments, the air guiding assembly 20 may further include sleeves 23. The number of sleeves 23 is the same as the number of air guiding pipes 22. Each sleeve 23 is sleeved on one end of the corresponding air guiding pipe 22 facing the exhaust port 1015, and the sleeve 23 is in communication with the air guiding pipe 22. The sleeve 23 is movably connected to the air guiding pipe 22, and the sleeve 23 can move in a direction close to or away from the corresponding exhaust port 1015.

[0063] The air guiding device 103 may further include limit members 70. The number of limit members 70 is the same as the number of sleeves 23. The sleeve 23 can abut against the first heat insulation member 50. The limit member 70 can cover the sleeve 23 and is fixedly connected to the first heat insulation member 50. The limit member 70 can limit the movement of the sleeve 23 through the frictional force between the limit member 70 and the sleeve 23.

[0064] It can be understood that by moving the sleeve 23 and adjusting the distance between the sleeve 23 and the exhaust port 1015, the flow rate of the gas in the air guiding pipe 22 can be adjusted, thereby adjusting the flow rate of the gas in the air guiding area. In this way, the staff can determine the positions of the respective sleeves 23 when the coating effect of the sheet material 200 reaches the preset effect through experiments, fix the sleeve 23 at the corresponding positions through the limit members 70, and then assemble the air guiding device 103 into the processing equipment 100. In this way, the coating effect of the sheet material 200 can be improved.

[0065] In the embodiments of the present application, no specific limitation is imposed on the type of the limiting member 70. For example, the limiting member 70 may be, but is not limited to, a clamp, a band clamp, a hose clamp, etc.

[0066] With the gas guiding device 103 and the processing equipment 100 provided by the embodiments of the present application, when a plurality of boats 300 loaded with sheet materials 200 enter the reaction space 1011 and the processing equipment 100 performs coating processing on the sheet materials 200, the air extraction device can extract air from the reaction space 1011 through the exhaust port 1015. Affected by the airflow at the exhaust port 1015 and the suction force of the air extraction device, the gas in the gas guiding area can flow to the gas guiding pipe 22 through the second air port 1021, the first air port 111 and the gas guiding box 21, and flow in the direction close to the exhaust port 1015 through the gas guiding pipe 22, so as to improve the efficiency of waste gas emission. At the same time, affected by the suction force of the air extraction device, the gas guiding area can be maintained in a state where the air pressure is lower than at least some other areas in the reaction space 1011, so that the reaction gas can approach the gas guiding area under the action of the air pressure and contact the sheet material 200 corresponding to the gas guiding area, so that the sheet material 200 can complete the coating processing after fully contacting the reaction gas.

[0067] In this way, the situation that the coating effect of the sheet material 200 at the bottom of the boat 300 is poor due to insufficient contact with the reaction gas can be reduced, and the coating effect of the sheet material 200 can be improved.

[0068] For those skilled in the art, it is obvious that the present application is not limited to the details of the above exemplary embodiments, and without departing from the spirit or basic characteristics of the present application, the present application can be implemented in other specific forms. Therefore, from any point of view, the above embodiments of the present application should be regarded as exemplary and non-limiting. The scope of the present application is defined by the appended claims rather than the above description. Therefore, all changes falling within the meaning and scope of the equivalent elements of the claims are intended to be included in the present application.

Claims

1. An air guiding device for being at least partially received in a reaction furnace, an exhaust port is formed in a side portion of the reaction furnace, the exhaust port is located at a first end of the reaction furnace in a vertical direction, the reaction furnace is used for receiving a plurality of boats, and the plurality of boats are arranged at intervals in a direction perpendicular to the vertical direction, characterized in that, The air guide device comprises: A boat supporting assembly, the boat supporting assembly is used to receive the plurality of boats, the boat supporting assembly is provided with a first air port, the first air port is used to communicate with the reaction furnace and is used to correspond to the gaps between the plurality of boats; An air guide assembly, wherein the air guide assembly and the boat support assembly are arranged in the vertical direction, the air guide assembly comprises an air guide box and an air guide tube, the air guide box is connected and communicated with the boat support assembly, the air guide tube is connected and communicated with the air guide box, one end of the air guide tube away from the air guide box is open, and the end of the air guide tube away from the air guide box is used to face the exhaust port.

2. The air guiding device according to claim 1, wherein, The air guide component also includes: The sleeve is sleeved on one end of the air guide tube away from the air guide box, the sleeve is movably connected to the air guide tube, and the sleeve is used to move closer to or away from the exhaust port to increase or decrease the flow rate of the gas in the air guide component.

3. The air guiding device according to claim 1, characterized in that, The air guide box is funnel-shaped, and the cross-sectional area of the air guide box gradually decreases in the direction from the side of the air guide box away from the boat supporting assembly toward the boat supporting assembly. The air guide box is opened toward the side of the boat supporting assembly. The boat supporting assembly includes: A boat support seat, wherein a receiving space is provided in the boat support seat, the receiving space is communicated with the air guide box, and the first air port is provided on the boat support seat and is communicated with the receiving space; An auxiliary heating component is accommodated in the accommodation space and is used to generate heat to increase the temperature in the reaction furnace.

4. The air guiding device according to claim 1, characterized in that, The first end of the reaction furnace is provided with a furnace opening, the opening direction of the furnace opening intersects with the opening direction of the exhaust port, and the gas guide device further comprises: A furnace door, the furnace door is located on a side of the air guide assembly away from the boat support assembly, and the furnace door is used to close the furnace opening; A support column is installed on the furnace door, the support column passes through the air guide box, and is connected to the boat support assembly.

5. The air guiding device according to claim 4, characterized in that, The air guide device also includes: a first heat insulating member, the first heat insulating member is located between the air guide assembly and the furnace door, the first heat insulating member is used to receive the air guide assembly, the first heat insulating member is connected to the support column, and the support column passes through the first heat insulating member, and the first heat insulating member is used to block the heat in the reaction furnace from being transferred toward the second end of the reaction furnace; Wherein, the first end and the second end of the reaction furnace are arranged opposite to each other in the vertical direction.

6. The air guiding device according to claim 4, wherein, The air guide device also includes: A plurality of second thermal insulation members are arranged at intervals along the vertical direction, and the plurality of second thermal insulation members are all connected to the support column, and the plurality of second thermal insulation members are used to block the heat in the reaction furnace from being transferred toward the second end of the reaction furnace.

7. The air guiding device according to claim 2, characterized in that, The air guide device also includes: a first heat insulating member, the first heat insulating member being located at a side of the air guide assembly away from the boat support assembly, the first heat insulating member being used to receive the sleeve, and being used to reflect the heat in the reaction furnace toward the second end of the reaction furnace; wherein the first end and the second end of the reaction furnace are arranged opposite to each other in the vertical direction; A limiting member, wherein the limiting member is covered on the sleeve and connected to the first heat insulating member, and the limiting member is used to limit the movement of the sleeve.

8. The air guiding device according to claim 1, characterized in that, There are multiple exhaust ports, and the multiple exhaust ports are circumferentially distributed on the reactor; There are multiple air ducts, which are distributed in a circle and are all connected to the air duct box. Each of the air ducts is arranged with one end away from the air duct box toward the corresponding exhaust port.

9. A processing device, characterized in that, include: A reaction furnace, wherein an exhaust port is provided on a side of the reaction furnace, wherein the exhaust port is located at a first end of the reaction furnace in a vertical direction, and wherein the reaction furnace is used to accommodate a plurality of boats, wherein the plurality of boats are spaced apart in a direction perpendicular to the vertical direction; A boat support plate, the boat support plate is used to receive a plurality of the boats; The gas guide device as described in any one of claims 1 to 8, wherein the gas guide device is at least partially accommodated in the reaction furnace, and the gas guide device is used to receive the boat pallet.

10. The processing equipment according to claim 9, characterized in that The boat support plate is provided with a second air port, and the second air port is used to communicate with the first air port of the air guide device.

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