Quartz boat and conversion device

Abstract

The utility model relates to the technical field of photovoltaic cell manufacturing, and discloses a quartz boat and a conversion device, the quartz boat comprises a small quartz boat and a quartz boat support, and the small quartz boat can bear a silicon wafer; a plurality of small quartz boats can be placed on the quartz boat support; the conversion device comprises a supporting assembly, quartz boat frames and transmission assemblies, the supporting assembly comprises a supporting frame plate A, a supporting frame plate B and a rotating shaft, the rotating shaft is arranged in the supporting frame plate A and the supporting frame plate B. The number of the quartz boat frames is two, and the number of the transmission assemblies is two. The transmission assemblies are respectively arranged above the support frame plate A and the support frame plate B, the two groups of quartz boat racks are respectively and fixedly connected to the two groups of transmission assemblies, and the placing state of the quartz boat can be converted through the conversion device, so that a silicon wafer carried on the quartz boat can be converted between a vertical position and a horizontal position.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic cell manufacturing, and particularly relates to a quartz boat and a conversion device. Background Art

[0002] In the high-temperature manufacturing process of photovoltaic cells, a tool is often required to carry and transport silicon wafers. This tool for carrying silicon wafers is called a quartz boat, and multiple grooves are provided thereon, and each groove is used to place a silicon wafer. For example, in the diffusion process of the photovoltaic cell manufacturing process, multiple silicon wafers are first placed on a quartz boat, and then the quartz boat is placed in a furnace tube for batch manufacturing.

[0003] Currently, the mainstream quartz boats in use are roughly divided into two types: For example, in the centralized quartz boat in the patent "Diffusion Quartz Boat for Solar Cell Silicon Wafers" announced by Hengdian Group Dongci Co., Ltd. in September 2018, the crossbars of this quartz boat are provided with card slots for placing silicon wafers along the axis direction of the quartz tube of the diffusion furnace, and the card slot spacing and distance on each crossbar are the same. The structure of the utility model is simple, the cost is low, and the production efficiency of the silicon wafer process can be effectively improved, but it is limited by the length of the boat body, has a small output, a low heat-resistant temperature, and a short service life.

[0004] In response to the above problems, companies such as Shenzhen Jiejiawei New Energy Equipment Co., Ltd. and Laplace (Wuxi) Semiconductor Technology Co., Ltd. have respectively designed and manufactured different distributed diffusion quartz boats. The characteristic of this quartz boat is a large boat support, on which multiple small quartz boats are placed.

[0005] Currently, both of the above two types of quartz boat production lines are in use; however, both of the above two solutions have different disadvantages: When the silicon wafers are horizontally placed in the furnace tube, the cleanliness, temperature, and humidity of the high-temperature environment cause bulk defects in the silicon wafers and are prone to cross marks on the silicon wafers. When the silicon wafers are vertically placed in the furnace tube, the gas flow in the furnace tube is easily affected by gravity, resulting in poor intra-wafer uniformity. Summary of the Utility Model

[0006] The purpose of the utility model is to overcome the problems that when the silicon wafers are horizontally placed in the furnace tube in the prior art, the cleanliness, temperature, and humidity of the high-temperature environment cause bulk defects in the silicon wafers and are prone to cross marks, and when the silicon wafers are vertically placed in the furnace tube, the gas flow in the furnace tube is easily affected by gravity, resulting in poor intra-wafer uniformity.

[0007] To achieve the above purpose, on the one hand, the utility model provides a quartz boat, which is characterized by comprising:

[0008] A small quartz boat for carrying silicon wafers;

[0009] Quartz boat holder, on which a plurality of quartz boats can be placed, and the quartz boat holder can be flipped to convert the placement state of the wafers carried by the corresponding quartz boats.

[0010] Preferably, the quartz boat includes:

[0011] Support plates, and there are two support plates;

[0012] Support beams, and there are two groups of support beams. Each group of support beams contains a plurality of the support beams. The two ends of the support beams are respectively detachably connected to the inner sides of the two support plates. The two groups of support beams are parallel to each other and are respectively arranged on the upper and lower sides of the surface of the support plates;

[0013] Preferably, boat handles, and there are a plurality of boat handles. The boat handles are arranged on the outer sides of the support plates and the support beams, and at least two boat handles extend in different directions.

[0014] Preferably, boat handle reinforcing ribs are respectively arranged on the outer sides of the two support plates, and wafer placement grooves are arranged on the two groups of support beams in the opposite directions of the upper and lower sides.

[0015] Preferably, the quartz boat holder includes:

[0016] Holder handles, and there are two holder handles;

[0017] Side plates, and the two ends of the side plates are respectively detachably connected to the inner sides of the two holder handles;

[0018] Bottom plate, and the two ends of the bottom plate are respectively detachably connected to the inner sides of the two holder handles;

[0019] Wherein, openings for cooperating with the boat handles are formed on both the side plates and the bottom plate, and the side plates and the bottom plate clamp the quartz boat through the openings.

[0020] Preferably, there are two side plates, the two side plates are parallel to the left and right sides of the quartz boat, and the bottom plate is perpendicular to the side plates.

[0021] Preferably, the conversion device is used to flip the quartz boat holder of the quartz boat so as to convert the placement state of the wafers carried by the corresponding quartz boats.

[0022] A second aspect of the present utility model provides a conversion device, and the conversion device is used to convert the placement state of the quartz boat.

[0023] Preferably, the conversion device includes:

[0024] Support assembly, the support assembly includes a support frame plate A, a support frame plate B and a rotating shaft, the rotating shaft is arranged at the connection of the support frame plate A and the support frame plate B, and the rotating shaft is used to control the rotation of the support frame plate A and the support frame plate B, so that the support frame plate A and the support frame plate B rotate and switch between the horizontal position and the perpendicular position;

[0025] Quartz boat frame, there are two groups of quartz boat frames, and the quartz boat frames are used to support the quartz boat holder;

[0026] Drive assembly, there are two groups of drive assemblies, the drive assemblies are respectively arranged above the support frame plate A and the support frame plate B, and the two groups of quartz boat frames are respectively fixedly connected to the two drive assemblies, and the drive assembly is used to control the forward and backward movement of the quartz boat frame.

[0027] Preferably, a clamping member A, a clamping member B and a clamping member C are fixedly connected to the rotating shaft, a bearing A and a bearing B are sleeved on the rotating shaft, and the bearing A and the bearing B are respectively fixedly connected to the support frame plate A and the support frame plate B;

[0028] Wherein, the clamping member B and the clamping member C are adjacent along the axial direction of the rotating shaft and are perpendicular to each other in a plane perpendicular to the axial direction of the rotating shaft. Clamping holes are formed in both the bearing A and the bearing B, the clamping holes are L-shaped, and the clamping member A, the clamping member B and the clamping member C can all pass through the clamping holes to drive the support frame plate A and the support frame plate B to rotate.

[0029] Preferably, fixing blocks are arranged inside both sides of the quartz boat frame, and rubber blocks are arranged inside both sides of the quartz boat frame and on the fixing blocks respectively, and the rubber blocks are used to support the quartz boat holder.

[0030] Preferably, the drive assembly includes a belt, a drive wheel is arranged inside the belt, and the drive wheel is rotationally connected to the support assembly through a support rod.

[0031] Through the above technical solution, the quartz boat of the present utility model is provided with a quartz boatlet and a quartz boat support, so that the silicon wafer is assembled in the placement groove of the quartz boatlet, and then the quartz boatlet is placed on the boat support, which facilitates the conversion of the placement state of the silicon wafer by the quartz boat. Moreover, the conversion device of the present utility model drives the support assembly to switch between a horizontal position and a mutually perpendicular position through a rotating shaft, and can drive the entire support assembly to rotate in the mutually perpendicular position, so that the support plate A and the support plate B in the support assembly are horizontally placed, or a single support plate stands upright to form two vertical plates and the two support plates drive the quartz boat to rotate vertically, and switch among three modes to achieve a rapid and reasonable conversion of the placement state of the silicon wafer. Through the cooperation of the quartz boat support and the quartz boat, the stable support of the quartz boat during different mode switches is ensured, and the drive assembly is used to drive the quartz boat support and the quartz boat in different modes to enter and exit the main machine platform.

[0032] Other features and advantages of the present utility model will be described in detail in the subsequent specific implementation section. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] By reading the detailed description of the non-restrictive embodiments with reference to the following drawings, other features, objectives, and advantages of the present application will become more apparent:

[0034] Figure 1 is a schematic structural diagram of the quartz boatlet provided by the present utility model;

[0035] Figure 2 is a three-dimensional structural diagram of the quartz boat support provided by the present utility model;

[0036] Figure 3 is a structural diagram of the quartz boat support and the support assembly of the conversion device provided by the present utility model, where the support assembly is in a mutually perpendicular position;

[0037] Figure 4 is a three-dimensional structural diagram of the rotating shaft provided by the present utility model;

[0038] Figure 5 is a side view of the conversion device provided by the present utility model;

[0039] Figure 6 is a side view of bearing A provided by the present utility model.

[0040] DESCRIPTION OF THE REFERENCE NUMERALS

[0041] 1 - Quartz boatlet, 2 - Boat handle, 3 - Boat handle reinforcing rib, 4 - Placement groove, 5 - Support handle, 6 - Side plate, 7 - Bottom plate, 8 - Quartz boat support, 9 - Belt, 10 - Support plate A, 11 - Support plate B, 12 - Rotating shaft, 13 - Bracket A, 14 - Bracket B, 15 - Bracket C, 16 - Bearing A, 17 - Bearing B, 18 - Rubber block, 19 - Fixed block. Detailed implementation manners

[0042] In the present utility model, unless otherwise specified, the orientation terms such as "upper" and "lower" generally refer to the orientation shown in the attached drawings. "Inner" and "outer" refer to the inner and outer of the contour of each component itself. On the one hand, the present utility model provides a quartz boat, which comprises:

[0043] A quartz boatlet 1 for carrying silicon wafers;

[0044] A quartz boat support on which a plurality of the quartz boatlets can be placed. The quartz boat support can be turned over to convert the placement state of the silicon wafers carried by the corresponding quartz boatlets.

[0045] The quartz boat of the present utility model is provided with a quartz boatlet and a quartz boat support, so that the silicon wafers are assembled in the placement grooves of the quartz boatlet, and then a plurality of quartz boatlets are placed on the quartz boat support, which is convenient for the quartz boat to convert the placement state of the silicon wafers.

[0046] In some embodiments, as Figure 1 shown, the quartz boatlet 1 comprises:

[0047] Two support plates;

[0048] Two groups of support beams, each group of support beams containing a plurality of the support beams. The two ends of each support beam are detachably connected to the inner sides of the two support plates. The two groups of support beams are parallel to each other and are respectively arranged on the upper and lower sides of the surfaces of the support plates;

[0049] A plurality of boat handles 2 are arranged on the outer sides of the support plates and the support beams. At least two of the boat handles 2 extend in different directions.

[0050] The quartz boat of the present utility model is connected to the quartz boat support through multiple groups of boat handles 2, so that the quartz boatlet 1 can be placed on the quartz boat support, ensuring a stable connection between the quartz boatlet 1 and the quartz boat support during the rotation of the quartz boat support, and ensuring that the quartz boatlet 1 can rotate stably following the rotation of the quartz boat support.

[0051] In some embodiments, as Figure 1 shown, boat handle reinforcing ribs 3 are respectively arranged on the outer sides of the two support plates, and silicon wafer placement grooves 4 are arranged on the two groups of support beams in the opposite directions of the upper and lower sides.

[0052] The quartz boat of the present utility model is respectively provided with boat handle reinforcing ribs 3 on both sides of the quartz boatlet 1 to enhance the reliability of the boat handles 2 during rotation, and placement grooves 4 are respectively arranged inside the upper and lower sides of the quartz boatlet 1 to carry multiple groups of silicon wafers.

[0053] In some embodiments, as Figure 1 shown, three boat handles 2 are provided, and the boat handles 2 are respectively arranged on the outer side of the support plate and the lower side of a support beam located on the lower side of the support plate surface.

[0054] The quartz boat of the present utility model realizes the cooperative limit of the quartz boatlet 1 and the quartz boat support through three directions by respectively arranging three groups of boat handles 2 on the left and right sides and the lower side of the quartz boatlet 1, so as to fully ensure the stability when rotating in cooperation with the quartz boat support with a smaller number of boat handles 2.

[0055] In some embodiments, as Figure 2 shown, there are two handle supports 5, and the handle supports 5 are provided with two;

[0056] Side plates 6, both ends of the side plates 6 are detachably connected to the inner sides of the two handle supports 5 respectively;

[0057] Bottom plates 7, both ends of the bottom plates 7 are detachably connected to the inner sides of the two handle supports 5 respectively;

[0058] Wherein, openings for cooperating with the boat handles 2 are provided on both the side plates 6 and the bottom plates 7, and the side plates 6 and the bottom plates 7 are used to clamp the quartz boatlet 1 through the openings.

[0059] The quartz boat of the present utility model improves the stability of the side plates 6 and the bottom plates 7 when carrying the quartz boatlet 1 by arranging handle supports 5 on both sides of the quartz boat support and detachably connecting the side plates 6 and the bottom plates 7 to the inner sides of the handle supports 5 on both sides respectively.

[0060] In some embodiments, as Figure 2 shown, there are two side plates 6, the two side plates 6 are parallel to both sides of the quartz boatlet 1, and the bottom plate 7 is perpendicular to the side plates 6.

[0061] The quartz boat of the present utility model can reasonably carry the quartz boatlet 1 in three directions through this setting method. Whether the silicon wafers carried on the quartz boat support and the quartz boatlet 1 are in the vertical position or in the horizontal position, there is always one side plate 6 or bottom plate 7 that supports the bottom surface of the quartz boatlet 1 in the corresponding state in a parallel and fitting manner, thereby improving the stability of the connection between the quartz boat support and the quartz boatlet 1.

[0062] On the other hand, the present utility model also provides a conversion device, and the conversion device is used to flip the quartz boat support of the quartz boat, so as to realize the conversion of the placement state of the silicon wafers carried by the corresponding quartz boatlet.

[0063] The conversion device of the present utility model converts the placement state of the quartz boat, so that the silicon wafers carried on the quartz boat can be converted between the horizontal position and the vertical position.

[0064] In some embodiments, as Figure 3 shown, the conversion device includes:

[0065] A support assembly, the support assembly includes a support frame plate A10, a support frame plate B11 and a rotating shaft 12. The rotating shaft 12 is arranged at the connection of the support frame plate A10 and the support frame plate B11. The rotating shaft 12 is used to control the rotation of the support frame plate A10 and the support frame plate B11, so that the support frame plate A10 and the support frame plate B11 can rotate and switch between the horizontal position and the perpendicular position;

[0066] Two quartz boat holders 8 are provided, and the quartz boat holders 8 are used to support the quartz boat tray;

[0067] Two drive assemblies are provided. The drive assemblies are respectively arranged above the support frame plate A10 and the support frame plate B11. The two quartz boat holders 8 are respectively fixedly connected to the two drive assemblies. The drive assemblies are used to control the forward and backward movement of the quartz boat holders 8;

[0068] The conversion device of the present utility model controls the rotation of the support frame plate A10 and the support frame plate B11 through the rotating shaft 12, so that it can switch among three modes. When both the support frame plate A10 and the support frame plate B11 are in the horizontal position, the silicon wafers carried on the quartz boat are in the vertical position; when the support frame plate A10 and the support frame plate B11 are in the perpendicular position but do not drive the quartz boat to rotate, the support assembly is in a ready state to drive the quartz boat to rotate; when the support frame plate A10 and the support frame plate B11 rotate in the perpendicular position, it can drive the silicon wafers carried on the quartz boat to be converted from the vertical position to the horizontal position.

[0069] And by setting the drive assembly to drive the quartz boat tray supported by the quartz boat holder 8 to move forward and backward, so as to realize the reasonable entry and exit of the quartz boat holder 8 and the quartz boat tray into and out of the furnace tube, and further realize the automation in the silicon wafer processing process.

[0070] In some embodiments, as Figure 4 and Figure 6 shown, a clamping part A13, a clamping part B14 and a clamping part C15 are fixedly connected to the rotating shaft 12. A bearing A16 and a bearing B17 are sleeved on the rotating shaft 12. The bearing A16 and the bearing B17 are respectively fixedly connected to the support frame plate A10 and the support frame plate B11;

[0071] Among them, the card B14 and the card C15 are adjacent along the axial direction of the rotating shaft 12 and are perpendicular to each other in a plane perpendicular to the axial direction of the rotating shaft 12. Card holes 20 are provided on both the bearing A16 and the bearing B17. The card holes 20 are L-shaped. The card A13, the card B14, and the card C15 can all pass through the card holes 20 to drive the support frame plate A10 and the support frame plate B11 to rotate. The rotating shaft 12 is connected to an external driving device.

[0072] The conversion device of the present utility model cooperates with the card A13, the card B14, and the card C15 through the card holes. When the device needs to switch between the state where the support frame plate A10 and the support frame plate B11 are both in the horizontal position and the state where the support frame plate A10 and the support frame plate B11 are perpendicular to each other, first drive the rotating shaft 12 to slide between the support frame plate A10 and the support frame plate B11 through an external driving device until only the card A13 is in the card hole 20 on the bearing A16 or the bearing B17, and then drive the rotating shaft 12 to rotate through the external driving device, so that the support frame plate on the bearing where the card hole 20 in contact with the card A13 is located can rotate independently until the support frame plate A10 and the support frame plate B11 are in a perpendicular position or both in the horizontal position. When the device needs the support frame plate A10 and the support frame plate B11 to rotate in the perpendicular position, first drive the rotating shaft 12 to slide between the support frame plate A10 and the support frame plate B11 through an external driving device until the card B14 and the card C15 are respectively in the card holes 20 of the bearing A16 and the bearing B17, and then drive the rotating shaft 12 to rotate through the external driving device to drive the support frame plate A10 and the support frame plate B11 to rotate in the perpendicular position, thereby realizing the conversion between the horizontal position and the vertical position of the silicon wafer.

[0073] In some embodiments, as Figure 5 shown, fixing blocks 19 are provided inside both sides of the quartz boat holder 8, and rubber blocks 18 are respectively provided inside both sides of the quartz boat holder 8 and on the fixing blocks 19. The rubber blocks 18 are used to support the quartz boat tray.

[0074] Through the arrangement of the rubber blocks 18 in the present utility model, during any mode or mode switching process of the conversion device, the quartz boat only contacts the rubber ring on the quartz boat holder 8, avoiding metal contamination.

[0075] In some embodiments, as Figure 5 shown, the transmission assembly includes a belt 9. A transmission wheel is provided inside the belt 9, and the transmission wheel is rotatably connected to the support assembly through a support rod.

[0076] The conversion device of the present utility model transmits the motion to the belt 9 through the rotation of the transmission wheel, thereby driving the quartz boat holder 8 and the quartz boat carried thereon to move back and forth, further realizing the automation in the silicon wafer processing process.

[0077] The working principle of a conversion device provided by the present utility model: First, place the silicon wafer to be processed inside the placement groove 4 on the quartz boat 1, then connect the quartz boat 1 to the quartz boat support through the boat handle 2, and then place the quartz boat support carrying the quartz boat 1 on the quartz boat holder 8. When the conversion device needs to switch the silicon wafer carried on the quartz boat from the vertical position to the horizontal position, first drive the rotating shaft 12 to slide between the support plate A 10 and the support plate B 11 through an external driving device until only the clamping part A 13 is in the clamping hole 20 on the bearing A 16 or the bearing B 17, and then drive the rotating shaft 12 to rotate through an external driving device, so that the support plate on the bearing where the clamping hole 20 in contact with the clamping part A 13 is located can rotate independently until the support plate A 10 and the support plate B 11 are in a mutually perpendicular position. Then drive the rotating shaft 12 to slide between the support plate A 10 and the support plate B 11 through an external driving device until the clamping part B 14 and the clamping part C 15 are respectively in the clamping holes 20 of the bearing A 16 and the bearing B 17. At this time, drive the rotating shaft 12 to rotate through an external driving device, drive the support plate A 10 and the support plate B 11 to rotate in the mutually perpendicular position until the silicon wafer carried on the quartz boat is in the horizontal position, thereby realizing the conversion between the horizontal position and the vertical position of the silicon wafer.

[0078] The preferred embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the specific details in the above embodiments. Within the technical concept of the present utility model, various simple modifications can be made to the technical solution of the present utility model, including the combination of each specific technical feature in any suitable way. To avoid unnecessary repetition, the present invention will not separately describe various possible combination methods. But these simple modifications and combinations should also be regarded as the content disclosed by the present invention and all fall within the protection scope of the present invention. These simple modifications all fall within the protection scope of the present utility model.

Claims

1. A quartz boat, characterized in that, Comprising: A quartz boat (1) for carrying silicon wafers. A quartz boat support on which a plurality of the quartz boats can be placed. The quartz boat support can be flipped to change the placement state of the silicon wafers carried by the corresponding quartz boat.

2. The quartz boat according to claim 1, characterized in that, The quartz boat (1) comprises: Boat handles (2), with a plurality of the boat handles (2) provided. At least two of the boat handles (2) extend in different directions.

3. The quartz boat according to claim 2, wherein: Two support plates are provided. A support beam perpendicular to the support plates and having both ends respectively connected to the two support plates. A silicon wafer placement groove (4) is provided on the support beam. A plurality of the boat handles are provided as three, with two of the boat handles respectively provided on the outer sides of the two support plates and protruding in a direction perpendicular to the support plates. Boat handle reinforcing ribs (3) are also respectively provided on the outer sides of the two support plates. The other boat handle is provided on one of the support beams and is perpendicularly arranged to the support beam.

4. The quartz boat according to claim 2 or 3, characterized in that, The quartz boat support comprises: Two support handles (5). Side plates (6) with both ends respectively detachably connected to the inner sides of the two support handles (5). A bottom plate (7) with both ends respectively detachably connected to the inner sides of the two support handles (5). Wherein, openings for cooperating with the boat handles (2) are provided on both the side plates (6) and the bottom plate (7). The side plates (6) and the bottom plate (7) clamp the quartz boat (1) through the openings.

5. The quartz boat according to claim 4, characterized in that, Two of the side plates (6) are parallel to the left and right sides of the quartz boat (1), and the bottom plate (7) is perpendicular to the side plates (6).

6. A conversion device, characterized in that, The conversion device is used to flip the quartz boat support of the quartz boat according to any one of claims 1 to 5, so as to change the placement state of the silicon wafers carried by the corresponding quartz boat.

7. The conversion device according to claim 6, characterized in that, The conversion device comprises: A support assembly including a support plate A (10), a support plate B (11), and a rotating shaft (12). The rotating shaft (12) is arranged at the connection of the support plate A (10) and the support plate B (11), and the rotating shaft (12) is used to control the rotation of the support plate A (10) and the support plate B (11), so that the support plate A (10) and the support plate B (11) rotate and switch between a horizontal position and a perpendicular position. Two sets of quartz boat frames (8) for supporting the quartz boat support. Two sets of transmission assemblies respectively arranged above the support plate A (10) and the support plate B (11). The two sets of quartz boat frames (8) are respectively fixedly connected to the two sets of transmission assemblies, and the transmission assemblies are used to control the forward and backward movement of the quartz boat frames (8).

8. A conversion device according to claim 7, characterized in that, A clamping member A (13), a clamping member B (14), and a clamping member C (15) are fixedly connected to the rotating shaft (12). A bearing A (16) and a bearing B (17) are sleeved on the rotating shaft (12). The bearing A (16) and the bearing B (17) are respectively fixedly connected to the support plate A (10) and the support plate B (11). Among them, the clamping member B (14) and the clamping member C (15) are adjacent along the axial direction of the rotating shaft (12) and are perpendicular to each other in a plane perpendicular to the axial direction of the rotating shaft (12). Clamping holes (20) are formed in both the bearing A (16) and the bearing B (17). The clamping holes (20) are L-shaped. The clamping member A (13), the clamping member B (14), and the clamping member C (15) can all pass through the clamping holes (20) to drive the support plate A (10) and the support plate B (11) to rotate.

9. The conversion device according to claim 7, characterized in that, Fixing blocks (19) are arranged inside both sides of the quartz boat holder (8). Rubber blocks (18) are respectively arranged inside both sides of the quartz boat holder (8) and on the fixing blocks (19). The rubber blocks (18) are used to support the quartz boat tray.

10. A conversion device according to claim 7, characterized in that, The transmission assembly includes a belt (9). A transmission wheel is arranged inside the belt (9). The transmission wheel is rotatably connected to the support assembly through a support rod.

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