Safe and reliable raw material gas holder isolation device

Abstract

The utility model discloses a safe and reliable raw material gas holder isolation device, and belongs to the field of raw material gas holders. The isolation device comprises an audible and visual alarm and an isolation box body which is communicated with an exhaust port of the raw material gas holder and is communicated with a main air pipe, the filter structure is arranged in the isolation box body and is used for dividing the internal space of the isolation box body into a reaction area and a discharge area; the first connecting pipe and the second connecting pipe are respectively used for communicating an exhaust port of the raw material gas holder with the reaction area and the discharge area with the main air pipe; a differential pressure gauge of which the two ends are respectively connected with the reaction area and the discharge area is arranged on the isolation box body; and the output end of the differential pressure gauge is connected with the input end of an audible and visual alarm. The isolation device is simple in structure and convenient and safe to use, the raw material gas cabinets are communicated with the main air pipe through the isolation device, all the raw material gas cabinets can be effectively isolated, it is avoided that one of the raw material gas cabinets is damaged to affect use of other raw material gas cabinets, and accidents and further expansion of losses can be effectively avoided.

Description

Technical Field

[0001] This application relates to the technical field of raw material gas cabinets, and specifically to a safe and reliable isolation device for raw material gas cabinets. Background Art

[0002] Dangerous chemicals such as silicon tetrachloride, dichlorosilane, and trichlorosilane are widely used in multiple industries such as optical fibers, lasers, glass, and semiconductors. During the use of silicon tetrachloride, a raw material gas cabinet is always used to add silicon tetrachloride from the storage tank to the reactor in the workshop through metering, flow distribution, etc. During the operation of the equipment, the raw material gas cabinet needs to maintain continuous ventilation so that the dangerous chemicals leaking critically inside the raw material gas cabinet can be taken out of the raw material gas cabinet.

[0003] Silicon tetrachloride, dichlorosilane, trichlorosilane, etc. are all deliquescent in rainwater, generating white smoke and highly toxic and strongly corrosive hydrogen chloride. The white smoke agglomerates in the pipeline, blocking the pipeline and preventing the subsequent discharge of raw materials in a timely manner; the generated hydrogen chloride absorbs moisture and condenses into fine hydrochloric acid droplets, which are highly corrosive and can damage the raw material gas cabinet made of stainless steel within a very short time, resulting in the damage of the raw material gas cabinet. Since all raw material gas cabinets are connected to the main air duct, when one of the raw material gas cabinets is blocked or corroded, it will affect other raw material gas cabinets through the main air duct, further expanding the accident and losses and affecting the safety and reliability of the ventilation of the raw material gas cabinet.

[0004] Therefore, this application provides a safe and reliable isolation device for raw material gas cabinets to solve the above problems. Utility Model Content

[0005] This application provides a safe and reliable isolation device for raw material gas cabinets, aiming to solve the problems in the background art that the existing raw material gas cabinets are directly connected to the main air duct, and when one of the raw material gas cabinets is damaged, it is easy to affect other raw material gas cabinets, resulting in the further expansion of accidents and losses and affecting the safety and reliability of the ventilation of the raw material gas cabinet.

[0006] To achieve the above object, the present application provides the following technical solution: A safe and reliable raw material gas cabinet isolation device, including an audible and visual alarm, an isolation box body communicated with the exhaust port of the raw material gas cabinet and communicated with the main air duct, a filtering structure arranged inside the isolation box body for separating the internal space of the isolation box body into a reaction area and an emission area, and a first connecting pipe and a second connecting pipe respectively used for communicating the exhaust port of the raw material gas cabinet with the reaction area and communicating the emission area with the main air duct; a differential pressure gauge with two ends respectively connected to the reaction area and the emission area is arranged on the isolation box body, and the output end of the differential pressure gauge is connected to the input end of the audible and visual alarm. In this way, the raw material gas cabinet is respectively communicated with the main air duct through the isolation device, and the raw material discharge of the raw material gas cabinet can be effectively pretreated through the reaction area and the filtering structure, and the raw material gas cabinet is isolated from the main air duct, avoiding the damage of other raw material gas cabinets caused by the damage of one raw material gas cabinet, and avoiding the further expansion of accidents and losses; moreover, by detecting the differential pressure between the emission area and the reaction area through the differential pressure gauge, when the pressure in the emission area is greater than the pressure in the reaction area, the main air duct may be blocked, and the audible and visual alarm emits an alarm to remind the staff, which can effectively ensure the safety and reliability of the exhaust of the raw material gas cabinet.

[0007] Preferably, a spray pipe communicated with an external liquid supply device is fixedly installed on the inner wall of the isolation box body at a position corresponding to the reaction area.

[0008] Preferably, a discharge pipe is arranged at the bottom of the isolation box body, and the discharge pipe is provided with a cut-off manual valve.

[0009] Preferably, the isolation device further includes a pressure gauge arranged on the connecting pipe.

[0010] Preferably, the filtering structure includes a support frame penetrating through one side of the isolation box body and slidably connected with the isolation box body, a buckle plate fixedly arranged at one end of the support frame far away from the inside of the isolation box body, filter cotton arranged inside the support frame, and support grids fixedly arranged inside the support frame corresponding to the bottom surface and the top surface of the filter cotton.

[0011] Preferably, the isolation box body is provided with a maintenance opening corresponding to the support frame, and the area of the buckle plate is at least larger than the area of the maintenance opening.

[0012] Preferably, a sealing strip is arranged on one side of the buckle plate close to the support frame.

[0013] Preferably, support strips for contacting the bottom of the support frame are symmetrically arranged inside the isolation box body.

[0014] The isolation device is simple in structure, convenient to use and safe. By connecting the raw material gas cabinet with the main air duct through the isolation device, each raw material gas cabinet can be effectively isolated, preventing the damage of one raw material gas cabinet from affecting the use of other raw material gas cabinets, and effectively avoiding the further expansion of accidents and losses.

[0015] Through the reaction zone and the filtration structure, the isolation device can effectively pre-treat the discharged raw materials entering the reaction zone, reduce the harm of the discharged raw materials, and effectively reduce the risk of white smoke generated by the deliquescence of raw materials when they encounter water from agglomerating in the pipeline.

[0016] The differential pressure gauge of the isolation device detects the differential pressure between the discharge area and the reaction area. When the pressure in the discharge area is greater than that in the reaction area, the main air duct may be blocked, and the sound and light alarm will sound to remind the staff, effectively ensuring the safety and reliability of the exhaust of the raw material gas cabinet. Description of the Drawings

[0017] Figure 1 is a schematic structural diagram of the raw material gas cabinet isolation device;

[0018] Figure 2 is a schematic structural diagram of the filtering mechanism in the raw material gas cabinet isolation device;

[0019] Figure 3 is a schematic diagram of the principle of differential pressure alarm in the raw material gas cabinet isolation device.

[0020] In the figure:

[0021] 1. Raw material gas cabinet; 2. Main air duct; 3. Isolation box body; 31. Reaction zone; 32. Discharge zone; 33. Detailed Embodiments

[0022] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present application.

[0023] This embodiment provides a safe and reliable raw material gas cabinet isolation device, as Figure 1 and Figure 3As shown in the figure, the isolation device includes an audible and visual alarm, an isolation box body 3 that is communicated with the exhaust port of the raw material gas cabinet 1 and communicated with the main air duct 2, a filtering structure 4 arranged inside the isolation box body 3 for separating the internal space of the isolation box body 3 into a reaction area 31 and an emission area 32, and a first connecting pipe 5 and a second connecting pipe 6 respectively used for communicating the exhaust port of the raw material gas cabinet 1 with the reaction area 31 and communicating the emission area 32 with the main air duct 2; a differential pressure gauge 7 with two ends respectively connected to the reaction area 31 and the emission area 32 is arranged on the isolation box body 3, and the output end of the differential pressure gauge 7 is connected to the input end of the audible and visual alarm. Wherein, a spray pipe 8 communicated with an external liquid supply device is fixedly installed on the inner wall of the isolation box body 3 corresponding to the position of the reaction area 31.

[0024] When the raw material gas cabinet 1 is exhausted and discharged, the raw materials discharged from the raw material gas cabinet 1 enter the reaction area 31 of the isolation box body 3 through the first connecting pipe 5. Liquid is provided to the spray pipe 8 through an external liquid supply device, so that the liquid contacts the leaked raw materials for hydrolysis reaction. After the hydrolysis reaction, the raw materials pass upward through the filtering structure 4 for further filtration, so as to realize the pretreatment of the leaked raw materials. The treated raw materials enter the main air duct 2 through the second connecting pipe 6 and are discharged into the treatment equipment for treatment. In this way, the raw material gas cabinet 1 and the main air duct 2 are isolated by the isolation device, so as to prevent the damage of one raw material gas cabinet 1 from affecting other raw material gas cabinets 1 and avoid the further expansion of accidents and losses; when the leaked raw materials are discharged, the differential pressure between the emission area 32 and the reaction area 31 is detected by the differential pressure gauge. When the pressure in the emission area 32 is greater than the pressure in the reaction area 31, the audible and visual alarm emits an alarm to remind the staff, thereby improving the safety and reliability of the exhaust of the raw material gas cabinet.

[0025] In order to facilitate the cleaning of the reaction area 31, further, a discharge pipe 33 is arranged at the bottom of the isolation box body 3, and the discharge pipe 33 is provided with a cut-off hand valve 331; after the cut-off hand valve 331 is opened, the accumulated liquid and dust in the reaction area 31 can be discharged.

[0026] In order to monitor the leakage pressure of the raw material gas cabinet 1, still further, the isolation device further includes a pressure gauge 9 arranged on the connecting pipe 5.

[0027] In order to filter the leaked raw materials after hydrolysis while facilitating the maintenance and cleaning of the filtering structure 4; specifically, such as Figure 1 and Figure 2As shown in the figure, the filtering structure 4 includes a support frame 41 that penetrates one side of the isolation box body 3 and is slidably connected to the isolation box body 3, a clamping plate 42 fixedly arranged at one end of the support frame 41 away from the inside of the isolation box body 3, a filter cotton 43 arranged in the support frame 41, and support grids 44 fixedly arranged inside the support frame 41 corresponding to the bottom surface and the top surface of the filter cotton 43. Among them, the isolation box body 3 is provided with a maintenance opening 34 corresponding to the support frame 41, and the area of the clamping plate 42 is at least larger than the area of the maintenance opening 34.

[0028] It can be understood that when the leaked raw material passes through the hydrolysis reaction, the raw material is further filtered by the filter cotton 43 to further remove harmful substances in the leaked raw material, so as to realize the pretreatment of the leaked raw material; after long-term use, the support frame 41 can be pulled out from the maintenance opening 34 to clean the filtering structure 4 and realize the maintenance of the filtering structure 4.

[0029] Among them, in order to ensure the sealing performance of the isolation box body 3 and prevent the raw material from leaking; a sealing strip 45 is arranged on the surface of the clamping plate 42 close to the support frame 41; the gap between the maintenance opening 34 and the support frame 41 is sealed through the sealing strip 45, so as to prevent the raw material in the isolation box body 3 from leaking and ensure the safety of the use of the isolation device.

[0030] In addition, in order to support and guide the support frame 41 and ensure the stability of the support frame 41 in the isolation box body 3; support bars 35 for contacting the bottom of the support frame 41 are symmetrically arranged inside the isolation box body 3.

[0031] The above is only the preferred specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present application, according to the technical solution and its concept of the present application, makes equivalent replacement or change, and should be covered by the protection scope of the present application.

Claims

1. A safe and reliable raw material gas holder isolation device, characterized in that: It includes an acoustic-optic alarm, an isolation box body (3) that is communicated with the exhaust port of the raw material gas cabinet (1) and is communicated with the main air duct (2), a filtering structure (4) arranged inside the isolation box body (3) for separating the internal space of the isolation box body (3) into a reaction area (31) and an emission area (32), and a first connecting pipe (5) and a second connecting pipe (6) respectively used for communicating the exhaust port of the raw material gas cabinet (1) with the reaction area (31) and the emission area (32) with the main air duct (2); A differential pressure gauge (7) with two ends respectively communicated with the reaction area (31) and the emission area (32) is arranged on the isolation box body (3), and the output end of the differential pressure gauge (7) is connected with the input end of the acoustic-optic alarm.

2. The safe and reliable raw material gas holder isolation device according to claim 1, characterized in that: A spray pipe (8) communicated with an external liquid supply device is fixedly installed on the inner wall of the isolation box body (3) at a position corresponding to the reaction area (31).

3. The safe and reliable raw material gas holder isolation device according to claim 2, wherein: A discharge pipe (33) is arranged at the bottom of the isolation box body (3), and the discharge pipe (33) is provided with a cut-off manual valve (331).

4. The safe and reliable raw material gas cabinet isolation device according to claim 2, characterized in that: The isolation device further includes a pressure gauge (9) arranged on the connecting pipe (5).

5. The safe and reliable raw gas cabinet isolation device according to claim 1, characterized in that: The filtering structure (4) includes a support frame (41) that penetrates through one side of the isolation box body (3) and is slidably connected with the isolation box body (3), a buckle plate (42) fixedly arranged at one end of the support frame (41) far from the inside of the isolation box body (3), a filter cotton (43) arranged inside the support frame (41), and support grids (44) fixedly arranged inside the support frame (41) corresponding to the bottom surface and the top surface of the filter cotton (43).

6. The safe and reliable raw gas cabinet isolation device according to claim 5, characterized in that: The isolation box body (3) is provided with a maintenance opening (34) corresponding to the support frame (41), and the area of the buckle plate (42) is at least larger than the area of the maintenance opening (34).

7. The safe and reliable raw material gas holder isolation device according to claim 6, characterized in that: A sealing strip (45) is arranged on one side of the buckle plate (42) close to the support frame (41).

8. The safe and reliable raw material gas holder isolation device according to claim 5, characterized in that: Support bars (35) used for contacting the bottom of the support frame (41) are symmetrically arranged inside the isolation box body (3).

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