Translational sealing door of glass substrate baking furnace

Abstract

The utility model discloses a translation sealing door of a glass substrate baking furnace, which is characterized in that a plurality of door leaf units are movably arranged on a baking furnace body, two ends of each door leaf unit are fixedly connected with door leaf end blocks, the door leaf end blocks are respectively and fixedly arranged at two ends of a door leaf supporting rod, and a door leaf sealing plate is arranged on the door leaf supporting rod; the door leaf end blocks are installed on the corresponding swing arm connecting blocks in a sliding mode through sliding bolts, upper swing arms and lower swing arms are hinged to the swing arm connecting blocks, driving air cylinders are hinged to the upper swing arms or the lower swing arms, and the driving air cylinders are hinged to the baking oven body. And an upper swing arm, a lower swing arm and a swing arm connecting block which are arranged on the baking furnace body form a parallelogram mechanism. The sliding bolt comprises a bolt and a nut; a sliding kidney-shaped hole is formed in the door leaf end block or the swing arm connecting block, and a bolt used for connecting the door leaf end block and the swing arm connecting block penetrates through the sliding kidney-shaped hole. The sealing door can effectively prevent the opening and closing door leaf from deforming, is excellent in sealing performance, and is suitable for a flat panel display glass substrate baking oven.

Description

Technical Field

[0001] The utility model relates to a glass substrate manufacturing device used for flat panel displays such as liquid crystal and plasma displays, and particularly relates to a thermal baking oven for curing photoresist coated on the surface of a glass substrate, specifically an improvement in the structure of the inlet and outlet doors and windows of the substrate baking oven furnace. Background Art

[0002] The key factor affecting the baking quality of glass substrates used for flat panel displays such as liquid crystal and plasma displays is the stability of the baking temperature. If the heating temperature in the baking cavity of the baking oven is low or the heating temperature fluctuates, it will cause uneven baking, resulting in insufficient volatilization of the solvent in the photoresist film on the glass substrate. In the under-baked area, the solvent is not fully volatilized, and the unexposed part is dissolved during exposure and development, forming floating glue or deforming the pattern. Over-baking leads to warping and hardening of the film, and the pattern cannot be developed or there is a bottom film left during development; the uneven baking temperature will also cause thermal stress due to the temperature gradient on the glass substrate, resulting in cracking or breaking of the substrate glass and reducing the baking yield.

[0003] A number of openable and closable door and window units are movably installed on the side of the baking furnace body of the glass substrate baking oven furnace. Each door and window unit is an elongated opening door leaf. The structural stability of the elongated door leaf is poor, and it is difficult to ensure the opening control and airtight performance of the door leaf under the action of thermal expansion and contraction. Due to the large temperature difference between the inner and outer sides of the door leaf, the door leaf body will warp and thermally deform under the action of thermal expansion and contraction and temperature change. The bending deformation of the sealing plate will inevitably cause a gap between it and the sealing surface of the baking furnace body window, and this gap is inconsistent in the length direction. On the one hand, the gap between the door leaf sealing plate and the periphery of the furnace body window will cause leakage of the baking heat energy in the baking cavity, making it difficult to reach the ideal baking temperature; on the other hand, due to the inconsistency of the leakage gap in the long direction of the sealing plate, it will cause temperature fluctuations in the baking cavity, resulting in uneven baking of the glass substrate.

[0004] The thermal expansion and contraction of the door leaf body will also cause extrusion damage to the opening and closing drive mechanisms at both ends of the door leaf unit, resulting in damage to the opening and closing drive or inaccurate opening and closing actions. Since each door leaf unit on the furnace body is an elongated strip, opening and closing drive mechanisms are symmetrically arranged at both ends of the door leaf unit. The current opening and closing drive mechanism is a single pendulum rod structure composed of a driving cylinder. In this structure, the door leaf approaches and leaves the furnace body window in a swinging manner. Its defect is that when the door leaf is closed, the approaching speeds and contact pressures of the upper and lower edges of the door leaf are different, and it will stick to the periphery of the furnace body window with an uneven sealing extrusion pressure, resulting in inconsistent sealing on the upper and lower sides of the door leaf, especially prone to leakage on the long side. Content of the Utility Model

[0005] In view of the above deficiencies in the prior art, the technical problem to be solved by the present utility model is to provide a translation sealing door for a glass substrate baking furnace that can effectively prevent the opening and closing door leaf from deforming and has excellent sealing performance.

[0006] To solve the above technical problem, the translation sealing door of the glass substrate baking furnace of the present utility model includes a baking furnace body, on which a number of door leaf units are movably installed. Both ends of the door leaf unit are fixedly connected with door leaf end blocks, and the door leaf end blocks are respectively fixedly installed at both ends of a door leaf support rod. A door leaf sealing plate is installed on the door leaf support rod. The door leaf end block is slidably installed on the corresponding swing arm connection block through a sliding bolt. An upper swing arm and a lower swing arm are hinged on the swing arm connection block, and a driving cylinder is hinged on the upper swing arm or the lower swing arm, and the driving cylinder is hinged to the baking furnace body.

[0007] Preferably, the door leaf unit includes door leaf end blocks at both ends. Two mutually parallel door leaf support rods are fixedly connected between the two door leaf end blocks, and the door leaf sealing plate is installed on the door leaf support rod. The upper swing arm, the lower swing arm and the swing arm connection block installed on the baking furnace body form a parallelogram mechanism.

[0008] Preferably, the sliding bolt includes a bolt and a nut; a sliding waist hole is provided on the door leaf end block or the swing arm connection block, and the bolt for connecting the door leaf end block and the swing arm connection block passes through the sliding waist hole, and the bolt has a set torque value during installation.

[0009] Preferably, the sliding bolt includes a bolt and a nut; a sliding waist hole is provided on the door leaf end block or the swing arm connection block, and the bolt for connecting the door leaf end block and the swing arm connection block passes through the sliding waist hole, and a spring or an elastic sleeve is sleeved on the bolt.

[0010] Preferably, the hinged ends of the upper swing arm and the lower swing arm are hinged to a swing arm hinge support, and the swing arm hinge support is fixedly installed on the baking furnace body through an opening and closing mechanism mounting seat; the piston rod of the driving cylinder is hinged to the piston rod end through a piston rod hinge connection head, and the cylinder body of the driving cylinder is fixedly installed on the baking furnace body through an opening and closing mechanism mounting seat.

[0011] Preferably, the middle of the door leaf sealing plate is fixedly installed at the middle position of the door leaf support rod, and both ends of the door leaf sealing plate freely extend along the length direction of the door leaf support rod towards both ends.

[0012] Preferably, the door leaf sealing plate includes a number of sealing plates, and each sealing plate is installed on the door leaf support rod with a gap therebetween.

[0013] Preferably, the door leaf sealing plate is located on the heat side of the door leaf unit, and a door leaf outer cover plate is fixedly arranged on the outer side of the door leaf unit.

[0014] In the above structure, since the door leaf unit does not adopt an integral plate structure, but installs the door leaf sealing plate for closing and sealing on the door leaf strut, this split structure effectively avoids the closing gap caused by the warping deformation of the integral sealing plate due to thermal expansion and contraction. In the structure of the present invention, when the door leaf unit is affected by temperature fluctuations and changes, the door leaf sealing plate can extend towards both ends relative to the door leaf strut to remain flat, thereby ensuring its uniform and fitting sealing effect. At the same time, door leaf end blocks are symmetrically installed at both ends of the door leaf strut. This structure allows the driving units to be symmetrically installed at both ends of the door leaf unit, which is conducive to realizing the overall synchronous operation of the slender strip-shaped door leaf.

[0015] Moreover, since the door leaf end blocks installed at both ends of the door leaf strut are slidably installed on the swing arm connection block through sliding bolts, the sliding bolts can not only provide the binding force between the door leaf end block and the swing arm connection block, but also ensure the relative micro-sliding between the door leaf end block and the swing arm connection. In this way, when the door leaf strut undergoes length changes due to thermal expansion and contraction, the relative sliding between the door leaf end block and the swing arm connection block can compensate for and eliminate this length change, neither causing warping deformation of the door leaf and strut due to temperature changes nor causing extrusion damage to the opening and closing driving mechanisms at both ends due to this length change.

[0016] Also, since an upper swing arm and a lower swing arm are hinged to the swing arm connection block, and a driving cylinder supported on the furnace body is hinged to the upper swing arm or the lower swing arm, the swing arm connection block, the upper swing arm, the lower swing arm, and the furnace body can form a parallelogram mechanism. In this way, the door leaf sealing surface fixedly connected to the swing arm connection block can evenly and synchronously approach the position of the feeding and discharging window on the furnace body, enabling the sealing plate of the door leaf unit to maintain an evenly pressed and fitting effect with the edge of the feeding and discharging window, and the sealing performance is more stable and reliable. The driving cylinder hinged to the swing arm can obtain a larger opening and closing translational movement amount of the door leaf unit through a smaller telescopic displacement amount. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The following further describes the translational sealing door of the glass substrate baking furnace of the present invention in conjunction with the drawings and specific embodiments.

[0018] Figure 1 is a three-dimensional structure diagram of the furnace body of the glass substrate baking furnace;

[0019] Figure 2 is a three-dimensional structure diagram of a specific embodiment of the translational sealing door of the glass substrate baking furnace of the present invention;

[0020] Figure 3 is Figure 2 an enlarged structure diagram of the door leaf driving mechanism in;

[0021] Figure 4 is Figure 3 a three-dimensional structure diagram of the door leaf end block in;

[0022] Figure 5 is Figure 3 a three-dimensional structure diagram of the middle swing arm connecting block;

[0023] Figure 6 is Figure 3 a sectional structure diagram of an implementation of the middle sliding bolt;

[0024] Figure 7 is Figure 3 a sectional structure diagram of another implementation of the middle sliding bolt;

[0025] Figure 8 is Figure 3 a sectional structure diagram of yet another implementation of the middle sliding bolt;

[0026] Figure 9 is Figure 2 a three-dimensional structure diagram of an implementation of the door leaf unit (with the door leaf sealing plate removed);

[0027] Figure 10 is Figure 9 a three-dimensional diagram of the door leaf support rod in the middle;

[0028] Figure 11 is installed on Figure 9 the three-dimensional diagram of the door leaf sealing plate on the door leaf support rod shown;

[0029] Figure 12 is Figure 2 a three-dimensional structure diagram of another implementation of the door leaf unit (towards the hot side of the surface);

[0030] Figure 13 is Figure 12 a three-dimensional structure diagram with the door leaf sealing plate removed.

[0031] In the figure, 1 - baking furnace body, 2 - driving cylinder, 3 - door leaf unit, 4 - heater, 5 - blower, 6 - mounting seat for opening and closing mechanism, 7 - door leaf end block, 8 - swing arm connecting block, 9 - lower swing arm, 10 - upper swing arm, 11 - cylinder hinge support, 12 - swing arm hinge support, 13 - piston rod hinge joint, 14 - sliding bolt, 15 - sliding waist hole, 16 - bolt, 17 - washer, 18 - nut, 19 - spring, 20 - elastic sleeve, 21 - door leaf support rod, 22 - support rod screw hole, 23 - door leaf outer cover plate, 24 - door leaf sealing plate, 25 - sealing plate screw hole. Specific implementation manners

[0032] As Figure 1As shown in the figure, several groups of heaters 4 and blowers 5 are installed on the right side of the baking furnace body 1 of the glass substrate baking furnace. The heater 4 uses an electric heater. A preheating air supply port and a maintenance window are also provided on the side of the baking furnace body 1. On the front side (the side for feeding and discharging) of the baking furnace body 1, several furnace body windows for inputting or taking out glass substrates are arranged in parallel. Each furnace body window is horizontally arranged and parallel to each other. A door leaf unit 3 that can be movably opened or closed is provided on the furnace body window. The length of the door leaf unit 3 on the furnace body window is 4000 mm, and the height of the door leaf is 120 mm, forming a slender strip-shaped door leaf. Door leaf opening and closing driving mechanisms are provided at both ends of each door leaf unit 3.

[0033] As Figure 2 and Figure 3 For the translational sealing door of the glass substrate baking furnace shown in the figure, symmetric driving opening and closing structures are adopted at both ends of the door leaf unit 3. Door leaf end blocks 7 are fixedly connected to both ends of it. The door leaf end blocks 7 are relatively slidably installed on the corresponding swing arm connection blocks 8 through sliding bolts 14. The sliding bolts 14 enable the two parts to bear a certain mutual connection force by using friction and elastic force, so that the two parts remain relatively fixed, and can relatively slide under the action of a certain rated acting force.

[0034] An upper swing arm 10 and a lower swing arm 9 are hinged on the swing arm connection block 8. The other ends of the upper swing arm 10 and the lower swing arm 9 are hinged to a swing arm hinge support 12. The swing arm hinge support 12 is fixedly installed on the opening and closing mechanism mounting seat 6. The swing arm hinge support 12 is fixedly installed on the opening and closing mechanism mounting seat 6. The opening and closing mechanism mounting seat 6 in a plate-like structure is fixedly installed on the baking furnace body 1. A driving cylinder 2 is hinged on the opening and closing mechanism mounting seat 6. The cylinder body of the driving cylinder 2 is hinged to the opening and closing mechanism mounting seat 6 through a cylinder hinge support 11. The piston rod end of the driving cylinder 2 is hinged to the lower swing arm 9 through a piston rod hinge joint 13; of course, the piston rod end of the driving cylinder 2 can also be hinged to the upper swing arm 10 through the piston rod hinge joint 13. The upper swing arm 10, the lower swing arm 9 and the swing arm connection block 8 hinged on the baking furnace body 1 form a parallelogram mechanism, which can ensure the translational opening and closing of the door leaf unit 3 to ensure its sealing performance when closed.

[0035] As Figure 4 and Figure 5 As shown in the figure, the door leaf end block 7 includes a mounting end and a connection end, and a threaded hole is provided on its connection end. The swing arm connection block 8 includes a hinged end and a connection end. The upper swing arm 10 and the lower swing arm 9 are hinged to the swing arm connection block 8. A sliding waist hole 15 for passing through a through bolt 16 is provided at the connection end of the swing arm connection block 8. Of course, the sliding waist hole 15 can also be provided on the door leaf end block 7. At this time, the threaded hole for connection is provided on the swing arm connection block 8.

[0036] Figure 6It is a structural form in which the door leaf end block 7 and the swing arm connection block 8 are slidably connected. The bolt 16 passes through the sliding waist hole 15 on the swing arm connection block 8 and is tightened into the threaded hole of the door leaf end block 7. The outer extending end of the bolt 16 is provided with a washer 17 and a nut 18 to form a locking structure. The rated torque of the screwing connection of the bolt 16 and the nut 18 is determined according to the frictional force between the sliding surfaces of the door leaf end block 7 and the swing arm connection block 8. The initial tightening and final tightening of the bolt 16 and the nut 18 are both completed using a torque wrench.

[0037] Figure 7 It is another structural form in which the door leaf end block 7 and the swing arm connection block 8 are slidably connected. The bolt 16 passes through the sliding waist hole 15 on the swing arm connection block 8 and the clearance hole on the door leaf end block 7 and is screwed with a nut 18. A washer 17 is also padded between the nut 18 and the door leaf end block 7. A spring 19 is also sleeved on the bolt 16, and the spring 19 is a cylindrical helical compression spring. The extending end of the bolt 16 should also be provided with a loosening prevention locking structure, such as a split pin, a double loosening prevention nut and other structures. Similarly, the rated torque of the screwing connection of the bolt 16 and the nut 18 is determined according to the frictional force between the sliding surfaces of the door leaf end block 7 and the swing arm connection block 8. The initial tightening and final tightening of the bolt 16 and the nut 18 are also completed using a torque wrench.

[0038] Figure 8 It is yet another structural form in which the door leaf end block 7 and the swing arm connection block 8 are slidably connected. The difference between this structure and the structure shown above Figure 7 is that an elastic sleeve 20 is sleeved on the outside of the bolt 16, and the material of the elastic sleeve 20 can be rubber, or polyurethane foam or polyurethane elastomer, etc.

[0039] Such as Figure 9 shown, both ends of two mutually parallel door leaf support rods 21 are fixedly connected with door leaf end blocks 7. Support rod screw holes 22 are provided on the side (heat side) of the door leaf support rods 21 facing the baking furnace cavity. A door leaf outer cover plate 23 is fixedly installed on the outside of the two door leaf support rods 21. The door leaf support rods 21 are made of steel square tubes, and the door leaf sealing plate 24 is made of high-temperature resistant stainless steel plates.

[0040] In Figure 9 、 10 and Figure 11 shown in the embodiments, the door leaf sealing plate 24 is only fixed to the door leaf support rod 21 by screws passing through the screw holes in the middle of the plate. Both ends of the door leaf sealing plate 24 can freely extend towards both ends to avoid bending deformation caused by the asynchronous thermal expansion and contraction of the door leaf sealing plate 24 and the door leaf support rod 21.

[0041] Figure 12 、 13The difference between the illustrated embodiment and the above-described embodiment is that the door leaf sealing plate 24 does not adopt an integral plate structure, but is composed of multiple sealing plates, and there are micro-gaps or staggered overlaps between the sealing plates. Each sealing plate can also be connected to the door leaf strut 21 only through connecting screws in the middle of the plate.

[0042] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. According to the content of this specification, many modifications and changes can be made. These embodiments are selected and specifically described in this specification to better explain the principle and practical application of the present invention, so that those skilled in the relevant technical field can understand and utilize the present invention well. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

Claims

1. A translationally sealed door for a glass substrate baking furnace, comprising a baking furnace body (1), on which a plurality of door leaf units (3) are movably installed, characterized in that: Both ends of the door leaf unit (3) are fixedly connected with door leaf end blocks (7), the door leaf end blocks (7) are respectively fixedly installed at both ends of the door leaf support rod (21), and a door leaf sealing plate (24) is installed on the door leaf support rod (21); the door leaf end blocks (7) are slidably installed on the corresponding swing arm connection blocks (8) through sliding bolts (14), an upper swing arm (10) and a lower swing arm (9) are hinged on the swing arm connection block (8), and a driving air cylinder (2) is hinged on the upper swing arm (10) or the lower swing arm (9), and the driving air cylinder (2) is hinged on the baking furnace body (1).

2. The translational sealing door of the glass substrate baking furnace according to claim 1, wherein: The door leaf unit (3) includes door leaf end blocks (7) at both ends, and two mutually parallel door leaf support rods (21) are fixedly connected between the two door leaf end blocks (7), and the door leaf sealing plate (24) is installed on the door leaf support rod (21); the upper swing arm (10), the lower swing arm (9) and the swing arm connection block (8) installed on the baking furnace body (1) form a parallelogram mechanism.

3. The translational sealing door of the glass substrate baking furnace according to claim 1, wherein: The sliding bolt (14) includes a bolt (16) and a nut (18); a sliding waist hole (15) is provided on the door leaf end block (7) or the swing arm connection block (8), and the bolt (16) for connecting the door leaf end block (7) and the swing arm connection block (8) passes through the sliding waist hole (15), and the bolt (16) has a set torque value during installation.

4. The translational sealing door of the glass substrate baking furnace according to claim 1, characterized in that: The sliding bolt (14) includes a bolt (16) and a nut (18); a sliding waist hole (15) is provided on the door leaf end block (7) or the swing arm connection block (8), and the bolt (16) for connecting the door leaf end block (7) and the swing arm connection block (8) passes through the sliding waist hole (15), and a spring (19) or an elastic sleeve (20) is sleeved on the bolt (16).

5. The translation of the glass substrate baking furnace translational sealing door according to claim 1, characterized in that: The hinged ends of the upper swing arm (10) and the lower swing arm (9) are hinged on a swing arm hinge support (12), and the swing arm hinge support (12) is fixedly installed on the baking furnace body (1) through an opening and closing mechanism mounting seat (6); the piston rod of the driving air cylinder (2) is hinged to the piston rod end through a piston rod hinge connection head (13), and the cylinder body of the driving air cylinder (2) is fixedly installed on the baking furnace body (1) through an opening and closing mechanism mounting seat (6).

6. The translational sealing door of the glass substrate baking furnace according to claim 1, wherein: The middle part of the door leaf sealing plate (24) is fixedly installed at the middle position of the door leaf support rod (21), and both ends of the door leaf sealing plate (24) freely extend along the length direction of the door leaf support rod (21) towards both ends.

7. The translational sealing door of the glass substrate baking furnace according to claim 1, characterized in that: The door leaf sealing plate (24) includes a plurality of sealing plates, and the sealing plates are installed on the door leaf support rod (21) with gaps between them.

8. The translation and movement sealing door of the glass substrate baking furnace according to claim 1, wherein: The door leaf sealing plate (24) is located on the hot side of the door leaf unit (3), and a door leaf outer cover plate (23) is fixedly arranged on the outside of the door leaf unit (3).

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