Isolation valve structure

Abstract

The utility model discloses an isolating valve structure which is applied to a vacuum process to accelerate a connected space to reach a vacuum negative pressure state. The valve comprises the first body and the second body, so that through the hardware design that the second body is arranged in the first body, the first valve chamber and the second valve chamber which are communicated with each other are effectively formed in the valve, an external valve chamber does not need to be arranged, and the first valve chamber and the second valve chamber are communicated with each other. The reciprocating motion stability of the movable piece and the stop piece is effectively improved by connecting the movable piece and the stop piece through the shaft rod, the material and manufacturing cost is really reduced, the lightweight design of the whole isolating valve structure is facilitated, atmospheric pressure reverse flow caused by damage of the vacuum pump is effectively prevented, and the service life of the vacuum pump is prolonged. And the space in which vacuum is to be formed quickly reaches a negative pressure state.

Description

Technical Field

[0001] The utility model relates to a structure of an isolation valve, in particular to an isolation valve structure applied to a vacuum process to accelerate the vacuum negative pressure state of a space connected to one end thereof. Background Art

[0002] With the rapid development of technology, in many high-precision processes, such as semiconductor processes, liquid crystal display processes or high-precision machinery processes, etc., different degrees of vacuum are required. Currently, the vacuum manufacturing methods used in factories are to use a vacuum pump to evacuate the air in a closed space to keep the space in a negative pressure state, so as to achieve a certain degree of vacuum.

[0003] Please refer to Figure 1 As shown, it is a schematic diagram of the hardware configuration of a vacuum process. When a device A is to be formed with a specific vacuum degree, an isolation valve C is usually provided between the device A and a vacuum pump B for performing a vacuum extraction process. The function of the isolation valve C is mainly to keep the device A in a vacuum negative pressure state and prevent the problem that the atmospheric pressure flows back to the device A due to the sudden failure of the vacuum pump B. However, the traditional isolation valve C has the following problems in hardware design: 1) Since the isolation valve C is formed by correspondingly arranging a first main body in a U shape and a second main body in a ring shape, and the second main body is fixed in a valve chamber space formed inside the first main body, when preparing the first main body, a valve chamber space must be dug for the second main body to be arranged. In this way, the complexity of the overall manufacturing process will be increased; 2) Since the traditional isolation valve C has two inner and outer airtight structures, and only one ventilation channel is provided between the two airtight structures to provide the vacuum pump B to evacuate the air in the device A and the isolation valve C. However, the single ventilation channel will slow down the speed of the vacuum pump B evacuating the air. Therefore, how to effectively reduce the cost of preparation materials and process processing, aim at the lightweight design of the overall isolation valve structure, and accelerate the speed of forming the vacuum negative pressure through innovative hardware design is a subject that developers and relevant researchers in the isolation valve and related industries need to continuously strive to overcome and solve. Summary of the Utility Model

[0004] The utility model aims to solve the technical problems of the utility model and provide a structure of an isolation valve. The purpose is to provide an isolation valve structure applied to a vacuum process to accelerate the space connected to one end thereof to reach a negative pressure state of vacuum. It mainly forms a first valve chamber and at least two second valve chambers that are connected to each other inside the isolation valve structure through a hardware design of arranging a second body in the accommodation space of a first body, so as to eliminate the need for an externally connected valve chamber. By means of connecting the movable piece and the stop piece on both sides of the airway valve with a shaft rod to effectively improve the stability of the reciprocating movement of the movable piece and the stop piece, it can effectively reduce the cost of the prepared materials and the process processing, contribute to the lightweight design of the overall isolation valve structure, effectively prevent the reverse flow of atmospheric pressure caused by the damage of the vacuum pump, and enable the space to be evacuated to quickly reach a negative pressure state and other main advantages.

[0005] The technical means adopted by the utility model are as follows.

[0006] According to the purpose of the utility model, the utility model provides an isolation valve structure, which at least includes a first body and a second body. The first body includes a base, a side ring surrounding the base, and an accommodation space surrounded by the base and the side ring, wherein the base is penetrated by a first interface connecting the accommodation space. The second body is arranged in the accommodation space, and a first valve chamber is formed between the second body and the first body. The second body includes at least two second valve chambers surrounded by a side wall and communicating with the first valve chamber, an air flow channel arranged between the second valve chambers, and an airway valve communicating with the second valve chambers and the air flow channel. One end of the airway valve is provided with a movable piece, and the movable piece controls the path for the first valve chamber and the second valve chambers to communicate with the first interface through the air flow channel and the airway valve.

[0007] In an embodiment of the utility model, a cover body can be further arranged at the other end of the side ring relative to the base, and the cover body is penetrated by a second interface communicating with the first interface.

[0008] In an embodiment of the utility model, a first gasket can be further arranged between the cover body and the side ring.

[0009] In an embodiment of the utility model, a second gasket can be further arranged between the cover body and the second body.

[0010] In an embodiment of the utility model, a stop piece can be further arranged at the other end of the airway valve relative to the movable piece, and the stop piece controls the path for the second valve chamber to communicate with the second interface.

[0011] In an embodiment of the utility model, the stop piece and the movable piece can be further connected to each other by a shaft rod.

[0012] In an embodiment of the present utility model, a spring member may be further disposed at the other end of the movable piece relative to the stopper piece.

[0013] In an embodiment of the present utility model, the outer wall of the air passage valve is connected to the side wall by a plurality of brackets.

[0014] In an embodiment of the present utility model, an air flow channel is formed inside the bracket.

[0015] In an embodiment of the present utility model, a disk-shaped bracket with an arc shape may be further disposed between one bracket and another bracket.

[0016] In an embodiment of the present utility model, a plurality of convex columns may be further disposed between the disk-shaped bracket and the stopper piece. Technical effects produced by the present utility model: Thus, the isolation valve structure of the present utility model mainly forms a first valve chamber and at least two second valve chambers that are connected to each other inside the isolation valve structure through the hardware design of disposing the second body in the accommodation space of the first body, so as to eliminate the need for an externally connected valve chamber, and connect the first valve chamber and the second valve chamber to each other. By combining the movable piece and the stopper piece on both sides of the air passage valve connected by a shaft rod, the stability of the reciprocating movement of the movable piece and the stopper piece is effectively improved, effectively achieving the main advantages of reducing the cost of preparation materials and process processing, contributing to the lightweight design of the overall isolation valve structure, effectively preventing the backflow of atmospheric pressure caused by the damage of the vacuum pump, and quickly bringing the space to be evacuated to a negative pressure state. Description of the Drawings

[0017] Figure 1 : Schematic diagram of the hardware configuration of the vacuum process

[0018] Figure 2 : Schematic diagram of the overall appearance of a preferred embodiment of the isolation valve structure of the present utility model

[0019] Figure 3 : Exploded view of the overall structure of a preferred embodiment of the isolation valve structure of the present utility model

[0020] Figure 4 : Perspective view of the overall structure of a preferred embodiment of the isolation valve structure of the present utility model

[0021] Figure 5 : Exploded view of the second body of a preferred embodiment of the isolation valve structure of the present utility model

[0022] Figure 6 : Top view of the overall structure of a preferred embodiment of the isolation valve structure of the present utility model

[0023] Figure 7 : Cross-sectional view of the overall structure of a preferred embodiment of the isolation valve structure of the present utility model

[0024] Figure 8 : Perspective view of the overall structure of a preferred embodiment of the isolation valve structure of the present utility model

[0025] Figure 9 : Top view of the second body of the second preferred embodiment of the isolation valve structure of the present utility model

[0026] Figure 10 : Schematic diagram of the structural operation (1) of a preferred embodiment of the isolation valve structure of the present utility model

[0027] Figure 11 : Schematic diagram of the structural operation (2) of a preferred embodiment of the isolation valve structure of the present utility model.

[0028] Symbol description:

[0029] (A): Equipment

[0030] (B): Vacuum pump

[0031] (C): Isolation valve

[0032] (1): Isolation valve structure

[0033] (10): First body

[0034] (11): Base

[0035] (111): First interface

[0036] (12): Side ring

[0037] (13): First valve chamber

[0038] (14): Cover

[0039] (141): Second interface

[0040] (142): First washer

[0041] (143): Second washer

[0042] (144): Airtight member

[0043] (20): Second body

[0044] (21): Side wall

[0045] (22): Second valve chamber

[0046] (23): Air flow channel

[0047] (24): Airway valve

[0048] (241): Movable piece

[0049] (242): Stop piece

[0050] (243): Shaft rod

[0051] (244): Spring member

[0052] (25): Bracket

[0053] (26): Tray

[0054] (261): Convex post. Detailed implementation manner

[0055] First, please refer to Figure 2 and Figure 3 shown, which is the overall appearance schematic diagram and the overall structure decomposition diagram of a preferred embodiment of the isolation valve structure of the present invention. The isolation valve structure 1 of the present invention is disposed between a device to be subjected to a vacuum process and a vacuum pump for performing a vacuum pumping process. The vacuum pump performs a vacuum pumping process on the device through the isolation valve structure 1. The isolation valve structure 1 of the present invention can accelerate the vacuum pumping process of the vacuum pump so that the device can quickly reach a negative pressure state and can continuously maintain the negative pressure state. Moreover, it can prevent the atmospheric pressure from flowing back to the device A when the vacuum pump suddenly fails (please refer to Figure 1 shown). The isolation valve structure 1 of the present invention is composed of a first body 10 and a second body 20; please refer to Figure 5 together. Thus, the isolation valve structure 1 of the present invention mainly forms a first valve chamber 13 and at least two second valve chambers 22 that are connected and communicated inside the isolation valve structure 1 by means of a hardware design in which the second body 20 is disposed in the accommodation space of the first body 10, so that there is no need to provide an external valve chamber, and the first valve chamber 13 and the second valve chambers 22 are communicated with each other. By combining a shaft rod 243 to connect the movable pieces 241 on both sides of an air passage valve 24 and a stop piece 242, the stability of the reciprocating movement of the movable piece 241 and the stop piece 242 is effectively improved, and the main advantages of effectively reducing the cost of the prepared materials and the process processing, contributing to the lightweight design of the overall isolation valve structure 1, effectively preventing the reverse flow of atmospheric pressure caused by the damage of the vacuum pump, and quickly reaching a negative pressure state in the space to be evacuated are indeed achieved.

[0056] The first body 10 is at least composed of a base 11, a side ring 12, a receiving space (not shown in the figure), and a cover body 14. The base 11 and the cover body 14 are disposed at the upper and lower ends of the side ring 12, and the receiving space is enclosed by the base 11, the cover body 14, and the side ring 12 for the second body 20 to be disposed therein. Since the receiving space for the second body 20 in the first body 10 is enclosed by the base 11 and the side ring 12, and there is no need to dig a valve chamber space in the first body for the second body to be disposed as in the traditional isolation valve, therefore, the isolation valve structure 1 of the present utility model can effectively reduce the costs of materials and manufacturing processes, and reduce the manufacturing time of the hardware.

[0057] In addition, a first interface 111 and a second interface 141 are respectively provided at the central positions of the base 11 and the cover body 14. The receiving space can be respectively communicated with the outside of the isolation valve structure 1 through the first interface 111 and the second interface 141; that is to say, during the vacuum process, the first interface 111 below the isolation valve structure 1 is connected to a vacuum pump for performing the vacuum pumping process, and the second interface 141 above the isolation valve structure 1 is connected to the equipment to be subjected to the vacuum process. When the vacuum pump starts to operate for the vacuum process, the air in the equipment enters the isolation valve structure 1 through the second interface 141, and then enters the vacuum pump through the first interface 111 to complete the steps of the vacuum process.

[0058] Please refer to Figures 4 to 8 as shown, which are the overall structure perspective view, the exploded view of the second body, the overall structure top view, the overall structure cross-sectional view, and the overall structure three-dimensional view of a preferred embodiment of the isolation valve structure of the present utility model, wherein Figure 7 is Figure 6 a cross-sectional view in the AA' direction of. The second body 20 is disposed in the receiving space of the first body 10 and is in contact with the base 11 and the cover body 14, and a first valve chamber 13 is provided annularly between the second body 20 and the first body 10; in addition, a first gasket 142 and a second gasket 143 are respectively provided annularly between the cover body 14 and the side ring 12 and between the cover body 14 and the second body 20. The first gasket 142 and the second gasket 143 in the shape of a ring respectively seal the gaps between the cover body 14 and the side ring 12 and between the cover body 14 and the second body 20 to prevent air from leaking to the outside from these positions during the vacuum process and failing to reach the set vacuum degree.

[0059] Furthermore, the second body 20 is at least composed of a side wall 21, four second valve chambers 22, four air flow channels 23, an air passage valve 24, a plurality of brackets 25 and a bracket plate 26. The side wall 21 is in a circular shape and surrounds the second body 20. Inside the second body 20, the outer walls of the side wall 21 and the air passage valve 24 are connected by the brackets 25. An arc-shaped bracket plate 26 is arranged between one bracket 25 and another bracket 25. The second valve chambers 22 are surrounded by the side wall 21, the brackets 25 and the bracket plate 26. The number of the air flow channels 23 is the same as that of the brackets 25, and the air flow channels 23 are covered inside the brackets 25. Please refer to Figure 9 shown in the top view of the second body of the second preferred embodiment of the isolation valve structure of the present invention. The second body 20 of the second preferred embodiment includes three of the air flow channels 23. Since the isolation valve structure 1 of the present invention is provided with at least two of the air flow channels 23, the speed at which the vacuum pump evacuates air to reach a predetermined vacuum degree can be increased.

[0060] Furthermore, the air passage valve 24 communicates with the second valve chambers 22 and the air flow channels 23. An active piece 241 and a stop piece 242 are respectively arranged at the upper and lower ends of the air passage valve 24. The active piece 241 and the stop piece 242 are connected to each other by a shaft rod 243. A spring member 244 is connected to the other end of the active piece 241 away from the stop piece 242. The second interface 141 can be communicated with the first interface 111 through the first valve chamber 13, the second valve chambers 22, the air flow channels 23 and the air passage valve 24. The active piece 241 can control the communication of this passage, and the reason will be described below. Furthermore, since the stop piece 242 and the active piece 241 can move simultaneously by the connection of the shaft rod 243, when the active piece 241 moves downward away from the air passage valve 24, the stop piece 242 contacts the bracket plate 26 and covers the second valve chamber 22. When the active piece 241 moves upward close to the air passage valve 24, the stop piece 242 leaves the second body 20 and covers the cover 14 of the first body 10. The shaft rod 243 can effectively improve the stability of the reciprocating movement of mutual traction between the active piece 241 and the stop piece 242.

[0061] In addition, an airtight member 144 is arranged between the stop piece 242 and the cover 14, and a plurality of convex columns 261 are arranged between the stop piece 242 and the bracket plate 26. The airtight member 144 and the convex columns 261 can both help to achieve airtightness between the stop piece 242 and the cover 14, and between the stop piece 242 and the bracket plate 26, so that it is easier for the vacuum pump to meet the requirement of the vacuum degree.

[0062] That is to say, please refer to Figure 10 and Figure 11As shown, the structural operation schematic diagram of a preferred embodiment of the isolation valve structure of the present utility model Figure 1 , and the structural operation schematic diagram Figure 2 , wherein when the vacuum pump disposed at the lower end of the isolation valve structure 1 starts to operate for the vacuum process, the vacuum pump evacuates the air above the isolation valve structure 1 and the air inside the isolation valve structure 1 downward, as shown by the air flow path indicated by the arrow in Figure 9 . Since all the air flows downward towards the vacuum pump, the air entering the isolation valve structure 1 from the second interface 141 will enter the first valve chamber 13 and the second valve chambers 22. Part of the air will directly enter the vacuum pump through the first interface 111 from the second valve chambers 22, and the other part of the air will flow into the air flow channel 23 and then enter the airway valve 24. At this time, the air in the airway valve 24 will push the movable piece 241 and the spring member 244 downward (please refer to the enlarged view of the spring member shown in the lower right corner of Figure 10 ), so as to generate a gap between the movable piece 241 and the airway valve 24, enabling the gas flowing through the airway valve 24 to enter the vacuum pump through the first interface 111 to complete the vacuum pumping procedure of the equipment's vacuum process.

[0063] As shown in Figure 11 , when the air in the equipment is completely evacuated and the vacuum pump stops operating, a negative pressure state is formed inside the equipment, and the air pressure inside the isolation valve structure 1 will push towards the equipment, that is, the gas backfill effect. The backfilled air will drive the stop piece 242 to cover the first interface 111 upward to achieve airtightness, so as to prevent the gas from entering the equipment through the first interface 111 again. The originally compressed spring member 244 also forms an upward pushing elastic force when the stop piece 242 drives the movable piece 241 to move upward (please refer to the enlarged view of the spring member shown in the lower right corner of Figure 10 ), which can further accelerate the speed of pushing the movable piece 241 and the stop piece 242 to move upward, enabling the movable piece 241 to move upward into the airway valve 24 and also accelerating the speed of the stop piece 242 isolating the first interface 111; Therefore, the isolation valve structure 1 of the present utility model can also prevent the atmospheric pressure from flowing back into the equipment due to the sudden failure of the vacuum pump connected to the first interface 111.

[0064] From the above implementation description, it can be seen that compared with the prior art and products, the present utility model has the following advantages:

[0065] 1. The isolation valve structure of the present utility model mainly forms a first valve chamber and at least two second valve chambers that are connected to each other inside the isolation valve structure through a hardware design in which a second body is disposed in the accommodation space of a first body, so that there is no need to provide an external valve chamber. In a manner that the first valve chamber and the second valve chambers are interconnected, the movable piece and the stop piece on both sides of the air passage valve are connected by a shaft rod, effectively improving the stability of the reciprocating movement of the movable piece and the stop piece, truly achieving the main advantages of effectively reducing the cost of the prepared materials and the process processing, contributing to the lightweight design of the overall isolation valve structure, effectively preventing the backflow of atmospheric pressure caused by the damage of the vacuum pump, and enabling the space to be evacuated to quickly reach a negative pressure state, etc.

Claims

1. An isolation valve structure, characterized in that, At least including: A first body (10), including a base (11), a side ring (12) disposed around the base (11), and an accommodation space surrounded by the base (11) and the side ring (12), wherein a first interface (111) connecting the accommodation space penetrates through the base (11); and A second body (20) disposed in the accommodation space, a first valve chamber (13) is formed between the second body (20) and the first body (10), the second body (20) includes a space surrounded by a side wall (21), and at least two second valve chambers (22) communicate with the first valve chamber (13), an air flow channel (23) is disposed between these second valve chambers (22), and an air passage valve (24) communicates these second valve chambers (22) with the air flow channel (23), wherein one end of the air passage valve (24) is provided with a movable piece (241), and the movable piece (241) controls the path for the first valve chamber (13) and the second valve chambers (22) to communicate with the first interface (111) via the air flow channel (23) and the air passage valve (24).

2. The isolation valve structure according to claim 1, characterized in that At the other end of the side ring (12) relative to the base (11), a cover body (14) is further provided, the cover body (14) has a second interface (141), and the second interface (141) communicates with the first interface (111).

3. The isolation valve structure according to claim 2, wherein, A first gasket (142) is further provided between the cover body (14) and the side ring (12).

4. The isolation valve structure according to claim 2, wherein A second gasket (143) is further provided between the cover body (14) and the second body (20).

5. The isolation valve structure according to claim 2, wherein, At the other end of the air passage valve (24) relative to the movable piece (241), a stop piece (242) is further provided, and the stop piece (242) controls the path for the second valve chamber (22) to communicate with the second interface (141).

6. The isolation valve structure according to claim 5, characterized in that The stop piece (242) and the movable piece (241) are further connected to each other by a shaft rod (243).

7. The isolation valve structure according to claim 5, wherein, At the other end of the movable piece (241) relative to the stop piece (242), a spring member (244) is further provided.

8. The isolation valve structure according to claim 5, wherein, An airtight member (144) is further provided between the stop piece (242) and the cover body (14).

9. The isolation valve structure according to claim 1, wherein The outer wall of the air passage valve (24) is connected to the side wall (21) by a plurality of brackets (25).

10. The isolation valve structure according to claim 9, characterized in that, The air flow channel (23) is formed inside the bracket (25).

11. The isolation valve structure according to claim 9, characterized in that, An arc-shaped tray (26) is further provided between one bracket (25) and another bracket (25).

12. The isolation valve structure according to claim 11, wherein, At the other end of the air passage valve (24) relative to the movable piece (241), a stop piece (242) is further provided, and a plurality of convex columns (261) are further provided between the tray (26) and the stop piece (242).

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