Chlorosilane closed sampler with high safety
By introducing activated carbon adsorption tanks and latex tubes into chlorosilane sealed samplers, the problem of chlorosilane crystal blockage is solved, safe and efficient chlorosilane sampling is achieved, and the risk of bursting and environmental hazards are reduced.
Patent Information
- Application Number
- CN202422266922.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-14
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-14
AI Technical Summary
During the sampling process of existing chlorosilane sealed samplers, chlorosilane is prone to crystallization and blockage in the vent pipe, resulting in an increase in the air pressure in the sampling bottle, posing a risk of bursting, and the leakage of chlorosilane gas poses a threat to the environment and personnel safety.
A chlorosilane sealed sampler was designed, using an activated carbon adsorption tank to adsorb unliqued chlorosilane gas, and detects the pipeline blockage through the latex tube, and uses a nitrogen back-blowing pipeline to detect and prevent dangers in a timely manner in combination with the expansion characteristics of the latex tube to prevent chlorosilane leakage.
It effectively avoids crystal blockage of the vent pipe, reduces the risk of bursting of the sampling bottle, improves safety, reduces the harm of chlorosilane to the environment, and ensures the safety of operators.
Smart Images
Figure CN223139050U_ABST
Abstract
Description
Technical Field:
[0001] The utility model relates to the technical field of sampler equipment, in particular to a highly safe hermetic sampler for chlorosilane. Background Technique:
[0002] Chlorosilane is a colorless liquid at room temperature. Due to its volatile nature and the property of decomposing to produce gas, it can also exhibit gas characteristics. Chlorosilane is an intermediate product in the production of polysilicon. Chlorosilane has the characteristics of low boiling point, extremely volatile, soluble in water, flammable, and strong corrosiveness. In the production process of polysilicon, it is necessary to detect and analyze the impurities and component contents of chlorosilane, and timely adjust the process operation parameters to improve the quality of polysilicon products. Therefore, the requirements for chlorosilane samplers are very high.
[0003] The temperature of chlorosilane used in the polysilicon production process is usually relatively high and contains components such as silicon tetrachloride, trichlorosilane, and dichlorosilane. High-purity chlorosilane is a colorless transparent liquid, and the slightly lower purity ones are yellowish or light yellow. Among them, dichlorosilane has a density of 3.52 at normal temperature and pressure, a melting point of -122 °C, and a boiling point of 8.2 °C. It is flammable in the air, produces corrosive smoke in a humid environment, and is corrosive to the skin. Therefore, chlorosilane is usually sampled using a hermetic sampler.
[0004] The existing hermetic samplers for chlorosilane have the following deficiencies: During the sampling process, chlorosilane enters the sampling bottle in liquid form. However, due to the characteristics of chlorosilane, a small amount of chlorosilane is discharged from the exhaust pipe of the sampling bottle in a vaporized form. Since the temperature inside the exhaust pipe is relatively low and the pipe is long, the small amount of discharged chlorosilane starts to crystallize as the heat dissipates and adsorbs on the inner wall of the exhaust pipe, causing the exhaust pipe to be blocked by crystallization and it cannot be detected. As a result, during subsequent sampling, the volatilized chlorosilane cannot continue to be discharged from the exhaust pipe, causing the air pressure inside the sampling bottle to increase, easily causing the sampling bottle to explode. At the same time, dichlorosilane will also be released, posing a certain safety hazard to the surrounding staff. Content of the Utility Model:
[0005] The purpose of the present utility model is to provide a highly safe hermetic sampler for chlorosilane to solve the problems raised in the above background technique.
[0006] The present utility model is implemented by the following technical solutions:
[0007] A highly secure chlorosilane closed sampler, comprising a box body, on one side of which there are a cooling water inlet, an outlet, a material inlet and a nitrogen inlet, and on the other side of which there are a material outlet and a nitrogen outlet; inside the box body there are a feed pipe, a heat exchanger, a first three-way valve, a discharge pipe, a sampling pipe, a sampling bottle, an exhaust pipe, a gas discharge pipe, an activated carbon adsorption tank, an inlet pipe, a second three-way valve, a first air duct and a second air duct;
[0008] The input end of the feed pipe is connected to the material inlet, the output end of the feed pipe passes through the heat exchanger and is connected to the input end of the first three-way valve, the first output end of the first three-way valve is connected to the material outlet through the discharge pipe, the second output end of the first three-way valve is inserted into the sampling bottle through the sampling pipe, an exhaust pipe is inserted at the bottle mouth of the sampling bottle, the exhaust pipe is connected to the input end of the activated carbon adsorption tank through the gas discharge pipe, and the output end of the activated carbon adsorption tank is connected to the nitrogen outlet; one end of the inlet pipe is connected to the nitrogen inlet, the other end of the inlet pipe is connected to the input end of the second three-way valve, the first output end of the second three-way valve is connected to the feed pipe through the first air duct, and the second output end of the second three-way valve is connected to the gas discharge pipe through the second air duct.
[0009] Preferably, a first sample valve and a second sample valve are installed on the feed pipe; the first sample valve and the second sample valve are respectively distributed on both sides of the heat exchanger, and the first air duct is connected to the feed pipe between the first sample valve and the heat exchanger.
[0010] Preferably, a pressure gauge is installed on the discharge pipe.
[0011] Preferably, the sampling pipe comprises a first stainless steel pipe and a first needle; one end of the first stainless steel pipe is connected to the second output end of the first three-way valve, the other end of the first stainless steel pipe is fixedly connected to the first needle, and the head of the first needle is inserted into the middle position inside the sampling bottle.
[0012] Preferably, the exhaust pipe comprises a second needle, a second stainless steel pipe and a latex tube; the head of the second needle is inserted into the top of the sampling bottle, the second needle is fixed to one end of the second stainless steel pipe, the other end of the second stainless steel pipe is connected to one end of the latex tube, and the other end of the latex tube is connected to the gas discharge pipe.
[0013] Preferably, a valve and a first one-way valve are sequentially installed on the gas discharge pipe along the exhaust direction, and the second air duct is connected to the gas discharge pipe between the valve and the first one-way valve.
[0014] Preferably, a second one-way valve is installed on the inlet pipe.
[0015] Preferably, a regulating valve is installed on the second air duct.
[0016] Preferably, a protective cover is provided outside the sampling bottle.
[0017] Advantages of the present utility model: By controlling nitrogen through the second three-way valve to backflush the pipeline through which the material (chlorosilane) flows, the pipeline is cleaned. At the same time, the unliquefied material (chlorosilane) in the discharge pipe can also be assisted to blow into the activated carbon adsorption tank for adsorption treatment, improving the cleaning ability inside the pipeline; Utilizing the characteristics of the latex tube, according to whether the latex tube expands, it is convenient for the staff to timely discover problems and close the regulating valve, effectively preventing the formation of danger. Brief Description of the Drawings:
[0018] Figure 1 It is a schematic diagram of the main structure of the present utility model.
[0019] In the figure: 1, feed pipe; 2, heat exchanger; 3, first three-way valve; 4, discharge pipe; 5, sampling pipe; 5.1, first stainless steel pipe; 5.2, first needle; 6, sampling bottle; 7, exhaust pipe; 7.1, second needle; 7.2, second stainless steel pipe; 7.3, latex tube; 8, discharge gas pipe; 9, activated carbon adsorption tank; 10, inlet pipe; 11, second three-way valve; 12, first guide pipe; 13, second guide pipe; 14, first sample valve; 15, second sample valve; 16, pressure gauge; 17, first check valve; 18, second check valve; 19, regulating valve; 20, protective cover; 21, valve. Specific Embodiments:
[0020] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts fall within the protection scope of the present utility model.
[0021] Please refer to Figure 1 , the present utility model provides a technical solution for a highly safe chlorosilane closed sampler:
[0022] A highly safe chlorosilane closed sampler includes a box body. On one side of the box body, there are a cooling water inlet, outlet, material inlet, and nitrogen inlet. On the other side of the box body, there are a material outlet and a nitrogen outlet; Inside the box body, there are a feed pipe 1, a heat exchanger 2, a first three-way valve 3, a discharge pipe 4, a sampling pipe 5, a sampling bottle 6, an exhaust pipe 7, a discharge gas pipe 8, an activated carbon adsorption tank 9, an inlet pipe 10, a second three-way valve 11, a first guide pipe 12, and a second guide pipe 13;
[0023] The input end of the feed pipe 1 is connected to the material inlet, and the feed pipe 1 is connected to the input end of the first three-way valve 3 through the output end of the heat exchanger 2. The heat exchanger 2 is used to quickly cool and liquefy the material (chlorosilane) in the feed pipe 1. The first output end of the first three-way valve 3 is connected to the material outlet through the discharge pipe 4, and the second output end of the first three-way valve 3 is inserted into the sampling bottle 6 through the sampling pipe 5. An exhaust pipe 7 is inserted at the bottle mouth of the sampling bottle 6, and the exhaust pipe 7 is connected to the input end of the activated carbon adsorption tank 9 through the discharge pipe 8. The output end of the activated carbon adsorption tank 9 is connected to the nitrogen outlet; the gas discharged from the exhaust pipe 7 is absorbed and treated by the activated carbon adsorption tank 9, which can effectively prevent the chlorosilane gas from flowing into the air and reduce the harm to the environment.
[0024] At the same time, in order to avoid crystallization on the inner walls of each pipeline, one end of the inlet pipe 10 is connected to the nitrogen inlet, and the other end of the inlet pipe 10 is connected to the input end of the second three-way valve 11. The first output end of the second three-way valve 11 is connected to the feed pipe 1 through the first guide pipe 12, and the second output end of the second three-way valve 11 is connected to the discharge pipe (8) through the second guide pipe 13. Nitrogen is introduced into the feed pipe 1.
[0025] Specifically: a first sample valve 14 and a second sample valve 15 are installed on the feed pipe 1; the first sample valve 14 and the second sample valve 15 are respectively distributed on both sides of the heat exchanger 2, and the first guide pipe 12 is connected to the feed pipe 1 between the first sample valve 14 and the heat exchanger 2.
[0026] A pressure gauge 16 is installed on the discharge pipe 4.
[0027] The sampling pipe 5 includes a first stainless steel pipe 5.1 and a first needle 5.2; one end of the first stainless steel pipe 5.1 is connected to the second output end of the first three-way valve 3, the other end of the first stainless steel pipe 5.1 is fixedly connected to the first needle 5.2, and the head of the first needle 5.2 is inserted into the middle position inside the sampling bottle 6.
[0028] The exhaust pipe 7 includes a second needle 7.1, a second stainless steel pipe 7.2 and a latex tube 7.3; the head of the second needle 7.1 is inserted into the top of the sampling bottle 6, the second needle 7.1 is fixedly connected to one end of the second stainless steel pipe 7.2, the other end of the second stainless steel pipe 7.2 is connected to one end of the latex tube 7.3, and the other end of the latex tube 7.3 is connected to the discharge pipe 8. Since the latex tube 7.3 has good elasticity, the general tensile range can be 6-9 times its own, and the resilience is 100%. Therefore, when the exhaust pipe is blocked by crystallization, the volatilized chlorosilane will cause the latex tube 7.3 to expand, which is convenient for the staff to timely discover the problem and close the regulating valve, effectively preventing the formation of danger.
[0029] An exhaust pipe 8 is successively installed with a valve 21 and a first one-way valve 17 along the exhaust direction. A second air duct 13 is connected to the exhaust pipe 8 between the valve 21 and the first one-way valve 17.
[0030] A second one-way valve 18 is installed on the air inlet pipe 10.
[0031] A regulating valve 19 is installed on the second air duct 13.
[0032] A protective cover 20 is arranged outside the sampling bottle 6, which is used to prevent the sampling bottle 6 from exploding and spreading, threatening the surroundings, and playing a certain protective role.
[0033] The working principle is as follows: During sampling, first open the first sample valve 14, the second sample valve 15 and the valve 21, control the first three-way valve 3 to connect the feed pipe 1 and the sampling pipe 5. The material (chlorosilane) in the feed pipe 1 liquefies and slowly enters the sampling bottle 6 along the sampling pipe 5 for collection. The unliquefied material (chlorosilane) is discharged from the exhaust pipe 7 at the top of the sampling bottle 6 in a gaseous state, and enters the activated carbon adsorption tank 9 through the exhaust pipe 8 for adsorption treatment.
[0034] During the sampling process, the air inlet pipe 10 and the second air duct 13 are always connected, and the unliquefied material (chlorosilane) in the exhaust pipe 8 is blown into the activated carbon adsorption tank 9 for adsorption treatment. If it is found that the latex tube 7.3 expands, immediately close the first sample valve 14 or the second sample valve 15 to prevent danger.
[0035] After sampling, take out the sampling bottle 6, close the first sample valve 14, open the second sample valve 15 and the valve 21, control the second three-way valve 11 to connect the air inlet pipe 10 and the first air duct 12, and nitrogen enters the feed pipe 1 to backflush the pipeline through which the material (chlorosilane) flows, realizing pipeline cleaning.
[0036] The above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.
Claims
1. A highly secure chlorosilane closed sampler, comprising a box body, on one side of the box body there are provided a cooling water inlet, an outlet, a material inlet and a nitrogen inlet, and on the other side of the box body there are provided a material outlet and a nitrogen outlet; characterized in that: Inside the box, there are a feed pipe (1), a heat exchanger (2), a first three-way valve (3), a discharge pipe (4), a sampling pipe (5), a sampling bottle (6), an exhaust pipe (7), a gas discharge pipe (8), an activated carbon adsorption tank (9), an inlet pipe (10), a second three-way valve (11), a first gas guide pipe (12), and a second gas guide pipe (13); The input end of the feed pipe (1) is connected to the material inlet. The feed pipe (1) passes through the output end of the heat exchanger (2) and is connected to the input end of the first three-way valve (3). The first output end of the first three-way valve (3) is connected to the material outlet through the discharge pipe (4). The second output end of the first three-way valve (3) is inserted into the sampling bottle (6) through the sampling pipe (5). An exhaust pipe (7) is inserted at the mouth of the sampling bottle (6). The exhaust pipe (7) is connected to the input end of the activated carbon adsorption tank (9) through the gas discharge pipe (8). The output end of the activated carbon adsorption tank (9) is connected to the nitrogen outlet. One end of the inlet pipe (10) is connected to the nitrogen inlet, and the other end of the inlet pipe (10) is connected to the input end of the second three-way valve (11). The first output end of the second three-way valve (11) is connected to the feed pipe (1) through the first gas guide pipe (12), and the second output end of the second three-way valve (11) is connected to the gas discharge pipe (8) through the second gas guide pipe (13).
2. The highly secure chlorosilane closed sampler according to claim 1, wherein: A first sample valve (14) and a second sample valve (15) are installed on the feed pipe (1). The first sample valve (14) and the second sample valve (15) are respectively distributed on both sides of the heat exchanger (2). The first gas guide pipe (12) is connected to the feed pipe (1) between the first sample valve (14) and the heat exchanger (2).
3. The highly secure chlorosilane closed sampler according to claim 1, characterized in that: A pressure gauge (16) is installed on the discharge pipe (4).
4. A highly secure chlorosilane closed sampler according to claim 1, characterized in that: The sampling pipe (5) includes a first stainless steel pipe (5.1) and a first needle head (5.2). One end of the first stainless steel pipe (5.1) is connected to the second output end of the first three-way valve (3), and the other end of the first stainless steel pipe (5.1) is fixedly connected to the first needle head (5.2). The head of the first needle head (5.2) is inserted into the middle position inside the sampling bottle (6).
5. The highly secure chlorosilane closed sampler according to claim 1, wherein: The exhaust pipe (7) includes a second needle head (7.1), a second stainless steel pipe (7.2), and a latex tube (7.3). The head of the second needle head (7.1) is inserted into the top inside the sampling bottle (6). The second needle head (7.1) is fixed to one end of the second stainless steel pipe (7.2). The other end of the second stainless steel pipe (7.2) is connected to one end of the latex tube (7.3). The other end of the latex tube (7.3) is connected to the gas discharge pipe (8).
6. The highly secure chlorosilane closed sampler according to claim 1, characterized in that: A valve (21) and a first one-way valve (17) are installed on the gas discharge pipe (8) in the exhaust direction. The second gas guide pipe (13) is connected to the gas discharge pipe (8) between the valve (21) and the first one-way valve (17).
7. The highly secure chlorosilane closed sampler according to claim 1, characterized in that: A second one-way valve (18) is installed on the inlet pipe (10).
8. The highly secure chlorosilane closed sampler according to claim 1, wherein: A regulating valve (19) is installed on the second gas guide pipe (13).
9. The highly secure chlorosilane closed sampler according to claim 1, characterized in that: A protective cover (20) is provided outside the sampling bottle (6).