Polishing machine table with vacuum adsorption function

Abstract

The utility model discloses a polishing machine table with vacuum adsorption, which comprises a vacuum adsorption platform, first displacement mechanisms are arranged at two ends of the vacuum adsorption platform, the vacuum adsorption platform is connected with a second displacement mechanism through the first displacement mechanisms, the second displacement mechanism is connected with an L-shaped sliding seat, and a vertical adjusting hole is arranged on the sliding seat. A screw is slidably arranged in the adjusting hole, the end, facing the adsorption hole, of the screw is connected with a mounting seat, the mounting seat is connected with a polishing mechanism, and the end, away from the adsorption hole, of the screw is in threaded connection with a nut; the first displacement mechanism drives the grinding mechanism to move front and back, and the second displacement mechanism drives the grinding mechanism to move left and right. And through cooperation of the vacuum adsorption mechanism and the adsorption holes, the product is firmly adsorbed to the platform, a pressing device does not need to be used for pressing the product, and therefore the surface of the product cannot be covered, and comprehensive grinding of the product is facilitated.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor grinding, in particular to a grinding machine with vacuum adsorption. Background Technique

[0002] With the progress of technology, the integrated circuit industry is increasingly relying on automation, and various advanced manufacturing processes are emerging continuously. The current integrated circuit grinding operation has the following problems: (1) Manually holding sandpaper and grinding one by one, the grinding efficiency is low, and the grinding methods of each person are different, so it is easy to damage the material, affecting the output and quality. Moreover, a large amount of time is required to train grinding techniques, increasing the cost; (2) When grinding, it is necessary to press the integrated circuit on the grinding platform by hand or with the help of a pressing device, so that a part of the surface of the integrated circuit is covered by the pressing device, making it difficult to grind the covered part. Content of the Utility Model

[0003] Aiming at the deficiencies of the prior art, the utility model provides a grinding machine with vacuum adsorption to solve the problems mentioned in the above background technique.

[0004] To solve the above technical problems, the utility model provides the following technical solutions:

[0005] A grinding machine with vacuum adsorption includes a vacuum adsorption platform. A vacuum adsorption mechanism is arranged inside the vacuum adsorption platform. Adsorption holes communicating with the vacuum adsorption mechanism are arranged on the top surface of the vacuum adsorption platform, and the product is adsorbed on the platform through the adsorption holes. First displacement mechanisms are arranged at both ends of the vacuum adsorption platform, and a second displacement mechanism is connected through the first displacement mechanisms. An L-shaped sliding seat is connected to the second displacement mechanism. A vertical adjustment hole is arranged on the sliding seat. A screw rod is slidably arranged in the adjustment hole. One end of the screw rod facing the adsorption hole is connected with a mounting seat, and a grinding mechanism is connected to the mounting seat. The other end of the screw rod away from the adsorption hole is threadedly connected with a nut. The grinding mechanism is driven to move back and forth by the first displacement mechanism, and the grinding mechanism is driven to move left and right by the second displacement mechanism.

[0006] Preferably, the vacuum adsorption mechanism includes a vacuum generator and an adsorption cover arranged inside the vacuum adsorption platform. An opening is arranged on the top surface of the vacuum adsorption platform. The upper end of the adsorption cover protrudes from the opening, and a plurality of adsorption holes are arranged on the top surface of the adsorption cover. The vacuum generator is connected with the adsorption cover through an air pipe.

[0007] Preferably, the first displacement mechanism includes two first bearing seats connected to both ends of the vacuum adsorption platform, a first lead screw rotatably connected to the two first bearing seats at one end, a first guide rod connected to the two first bearing seats at the other end, a first motor installed on the vacuum adsorption platform and in transmission connection with the first lead screw, and a sliding plate threadedly connected to the first lead screw. The other end of the sliding plate is slidably connected to the first guide rod.

[0008] Preferably, the second displacement mechanism includes second bearing seats installed at both ends of the slide plate, a second lead screw rotatably connected to the two second bearing seats, second guide rods connected to the two second bearing seats, and a second motor installed on the slide plate and drivingly connected to one end of the second lead screw. The sliding seat is threadedly connected to the second lead screw and is slidably connected to the second guide rod.

[0009] Preferably, the grinding mechanism includes a third motor installed on the mounting seat, a transmission shaft connected to the third motor through a coupling, and a sandpaper wheel connected to the transmission shaft.

[0010] Preferably, a power switch and three control keys are installed on the vacuum adsorption platform. A controller is provided inside the vacuum adsorption platform. The power switch, control keys, first motor, second motor, third motor, and vacuum generator are all electrically connected to the controller. The power switch is used to control the opening and closing of the vacuum generator, and the three control keys are respectively used to control the operation of the first motor, second motor, and third motor.

[0011] Compared with the prior art, the present utility model has the following beneficial effects:

[0012] (1) Through the cooperation of the vacuum adsorption mechanism and the adsorption holes, the product is firmly adsorbed on the platform without using a pressing device to press on the product, so that the surface of the product will not be covered, which is beneficial to comprehensively grinding the product.

[0013] (2) During grinding, the grinding mechanism is controlled to move towards the product through the first displacement mechanism, and the grinding mechanism is controlled to move left and right through the second displacement mechanism, so that the product is automatically ground by the grinding mechanism, improving the grinding efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 is a schematic diagram of the present utility model;

[0015] Figure 2 is a schematic diagram of the vacuum adsorption mechanism;

[0016] Figure 3 is a schematic diagram of the present utility model in another direction;

[0017] In the figure, 1 - vacuum adsorption platform, 2 - adsorption hole, 3 - sliding seat, 4 - adjustment hole, 5 - mounting seat, 6 - nut, 7 - vacuum generator, 8 - adsorption cover, 9 - air pipe, 10 - first bearing seat, 11 - first lead screw, 12 - first guide rod, 13 - first motor, 14 - slide plate, 15 - second bearing seat, 16 - second lead screw, 17 - second guide rod, 18 - second motor, 19 - third motor, 20 - sandpaper wheel, 21 - power switch, 22 - control key, 23 - integrated circuit. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0018] Next, in combination with the accompanying drawings in the embodiments of the present utility model, the technical solutions in the embodiments of the present utility model will be clearly and completely described. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0019] Please refer to Figure 1 、 Figure 2 , a grinding machine platform with vacuum adsorption, including a vacuum adsorption platform 1. A vacuum adsorption mechanism is provided inside the vacuum adsorption platform 1. Specifically, the vacuum adsorption mechanism includes a vacuum generator 7 and an adsorption hood 8 provided inside the vacuum adsorption platform. An opening is provided on the top surface of the vacuum adsorption platform 1, and the upper end of the adsorption hood 8 protrudes from the opening. A plurality of adsorption holes 2 are provided on the top surface of the adsorption hood. The vacuum generator 7 is connected to the adsorption hood 8 through an air pipe 9 (as Figure 2 shown). When the vacuum generator 7 works, negative pressure is generated, and the product is firmly adsorbed on the vacuum adsorption platform 1 through the adsorption holes 2, so that the product is kept stable.

[0020] Both ends of the vacuum adsorption platform 1 are provided with a first displacement mechanism, and a second displacement mechanism is connected through the first displacement mechanism. A slide seat 3 in an L shape is connected to the second displacement mechanism. Specifically, the first displacement mechanism includes two first bearing seats 10 connected to both ends of the vacuum adsorption platform, a first lead screw 11 rotatably connected to the two first bearing seats at one end, a first guide rod 12 connected to the two first bearing seats at the other end, a first motor 13 installed on the vacuum adsorption platform and drivingly connected to the first lead screw, and a slide plate 14 threadedly connected to the first lead screw. The other end of the slide plate 14 is slidably connected to the first guide rod 12. When the first motor is started to drive the first lead screw to rotate, the slide plate can be driven to move back and forth on the first guide rod.

[0021] The second displacement mechanism includes second bearing seats 15 installed at both ends of the slide plate, a second lead screw 16 rotatably connected to the two second bearing seats, a second guide rod 17 connected to the two second bearing seats, a second motor 18 installed on the slide plate and drivingly connected to one end of the second lead screw. The slide seat 3 is threadedly connected to the second lead screw 16, and the slide seat 3 is slidably connected to the second guide rod 17. When the second motor is started to drive the second lead screw to rotate, the slide seat can be driven to move left and right on the second guide rod.

[0022] A vertical adjustment hole 4 is provided on the slide seat 3. A screw rod is slidably arranged in the adjustment hole 4. One end of the screw rod facing the adsorption hole is connected with a mounting seat 5, and a grinding mechanism is connected to the mounting seat 5. A nut 6 is threadedly connected to the other end of the screw rod away from the adsorption hole. By loosening the fastening nut, the height and angle of the screw rod can be adjusted, so as to adjust the height and angle of the grinding mechanism.

[0023] The grinding mechanism includes a third motor 19 mounted on the mounting base, a transmission shaft connected to the third motor through a coupling, and a sandpaper wheel 20 connected to the transmission shaft. Starting the third motor 19 drives the transmission shaft to rotate, thereby driving the sandpaper wheel 20 to rotate for grinding the product.

[0024] An on-off key 21 and three control keys 22 are mounted on the vacuum adsorption platform 11. A controller is provided inside the vacuum adsorption platform 1. The on-off key 21, control keys 22, first motor 13, second motor 18, third motor 19, and vacuum generator 7 are all electrically connected to the controller. The on-off key 21 is used to control the opening and closing of the vacuum generator 7, and the three control keys 22 are respectively used to control the operation of the first motor 13, second motor 18, and third motor 19.

[0025] The working principle of the present utility model is as follows: As Figure 1 shown, place the integrated circuit 23 on the adsorption holes 2, then press the on-off key of the vacuum generator 21. The vacuum generator works and firmly adsorbs the product on the platform through the adsorption holes 2, and even if it is slightly warped, it can be adsorbed flat. Then adjust the height of the screw rod and rotate the screw rod to adjust the angle of the sandpaper wheel 20 to form a left-low and right-high angle of about 15° to ensure that the required grinding depth is consistent and the grinding direction is the same. Then lock the nut 6. When operating, start the first motor 13 to drive the first lead screw 11 to rotate, drive the slide plate 14 to move towards the product on the first guide rod 12 until the sandpaper wheel contacts the product. Then start the second motor 18 to drive the second lead screw 16 to rotate, drive the slide seat 3 to move left and right on the second guide rod 17, and at the same time start the third motor 19 to drive the transmission shaft to rotate, thereby driving the sandpaper wheel 20 to rotate for grinding the product. After grinding is completed, move the sandpaper wheel 20 away from the product, press the on-off key to release the vacuum, so that the product can be separated from the platform, and then take away the product.

[0026] It should be noted that the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device. Without further limitation, an element defined by the statement "including one..." does not exclude the existence of additional identical elements in the process, method, article or device including the said element.

[0027] Although the embodiments of the present utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present utility model. The scope of the present utility model is defined by the appended claims and their equivalents.

Claims

1. A grinding machine table with vacuum adsorption, characterized in that, It includes a vacuum adsorption platform (1) with a vacuum adsorption mechanism inside. The top surface of the vacuum adsorption platform (1) is provided with adsorption holes (2) communicating with the vacuum adsorption mechanism, and the product is adsorbed on the vacuum adsorption platform (1) through the adsorption holes (2). At both ends of the vacuum adsorption platform (1), there are first displacement mechanisms, and a second displacement mechanism is connected through the first displacement mechanisms. A slide seat (3) in an L shape is connected to the second displacement mechanism. A vertical adjustment hole (4) is provided on the slide seat (3), and a screw rod is slidably arranged in the adjustment hole (4). One end of the screw rod facing the adsorption hole is connected with a mounting seat (5), and a grinding mechanism is connected to the mounting seat (5). The other end of the screw rod away from the adsorption hole is threadedly connected with a nut (6). The grinding mechanism is driven to move back and forth by the first displacement mechanism, and the grinding mechanism is driven to move left and right by the second displacement mechanism.

2. The grinding machine platform with vacuum adsorption according to claim 1, characterized in that, The vacuum adsorption mechanism includes a vacuum generator (7) and an adsorption cover (8) arranged inside the vacuum adsorption platform. There is an opening on the top surface of the vacuum adsorption platform (1), and the upper end of the adsorption cover (8) protrudes from the opening, and a plurality of adsorption holes (2) are provided on the top surface of the adsorption cover. The vacuum generator (7) is connected to the adsorption cover (8) through an air pipe (9).

3. The grinding machine with vacuum adsorption according to claim 2, wherein, The first displacement mechanism includes two first bearing seats (10) connected to both ends of the vacuum adsorption platform, a first lead screw (11) rotatably connected to the two first bearing seats at one end, a first guide rod (12) connected to the two first bearing seats at the other end, a first motor (13) installed on the vacuum adsorption platform and in transmission connection with the first lead screw, and a slide plate (14) threadedly connected to the first lead screw. The other end of the slide plate (14) is slidably connected to the first guide rod (12).

4. A grinding machine table with vacuum adsorption according to claim 3, characterized in that, The second displacement mechanism includes second bearing seats (15) installed at both ends of the slide plate, a second lead screw (16) rotatably connected to the two second bearing seats, a second guide rod (17) connected to the two second bearing seats, a second motor (18) installed on the slide plate and in transmission connection with one end of the second lead screw. The slide seat (3) is threadedly connected to the second lead screw (16), and the slide seat (3) is slidably connected to the second guide rod (17).

5. The grinding machine platform with vacuum adsorption according to claim 4, characterized in that, The grinding mechanism includes a third motor (19) installed on the mounting seat, a transmission shaft connected to the third motor through a coupling, and a sandpaper wheel (20) connected to the transmission shaft.

6. The grinding machine table with vacuum adsorption according to claim 5, characterized in that, An on-off key (21) and three control keys (22) are installed on the vacuum adsorption platform (1). A controller is provided inside the vacuum adsorption platform (1). The on-off key (21), the control keys (22), the first motor (13), the second motor (18), the third motor (19), and the vacuum generator (7) are all electrically connected to the controller. The on-off key (21) is used to control the opening and closing of the vacuum generator (7), and the three control keys (22) are respectively used to control the operation of the first motor (13), the second motor (18), and the third motor (19).

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