On-line monitoring device for outer sleeve of special gas system

Abstract

The utility model discloses a special gas system outer sleeve on-line monitoring device which comprises a cabinet body, a sampling module and an electric control module are arranged in the cabinet body, and the sampling module comprises a centralized sampling pipeline, a first diaphragm valve, a second diaphragm valve, a pneumatic diaphragm valve, a three-channel switching diaphragm valve, a gas detector and an exhaust pipeline. The centralized sampling pipeline, the first diaphragm valve, the pneumatic diaphragm valve and the exhaust pipeline are sequentially connected, the centralized sampling pipeline, the second diaphragm valve, the gas detector and the exhaust pipeline are sequentially connected, the centralized sampling pipeline, the three-channel switching diaphragm valve and the exhaust pipeline are sequentially connected, the electric control module comprises a controller and the like, and the controller is connected with the gas detector and the pneumatic diaphragm valve. According to the device, modularization is adopted, products of different materials and brands can be selected and matched, and system integration is facilitated; sampling and continuous detection are beneficial to safe operation; three-section alarm is set, corresponding field treatment measures can be set according to alarm levels, and safety production is facilitated; operation is simple, and cost is low.

Description

Technical Field

[0001] The utility model belongs to the technical field of special gas use safety, and particularly relates to an on-line monitoring device for the outer sleeve of a special gas system. Background Technique

[0002] In the manufacturing processes of semiconductor, liquid crystal panel, chemical industry and other projects, many special gases are used due to the needs of process production. For example, 40 to 50 special gases are used in the manufacturing of advanced process semiconductors, including special inert gases, flammable and combustible gases, corrosive gases, etc. According to the different layouts of each process area, among them, flammable and combustible gases, toxic and corrosive gases need to be provided with double sleeves due to safety regulations. For example, for flammable and explosive gases such as 1% GeH4&H2, 5% B2H6 / N2, 1% BH6 / H2, CO, NO, 20% F2 / N2, DCS, PH3 / N2, CLF3, SiH4, SiCl4, CLF3, etc., the inner tube is SUS316EP and the outer tube is SUS304AP or SUS304BA. 12 , for toxic and corrosive gases such as HBr, HCl, etc., the inner tube is SUS316V+V and the outer tube is SUS304AP or SUS304BA. Generally, a negative pressure gauge is used for monitoring outside the double sleeve as Figure 1 shown. During the use of this method, it is impossible to quickly and on-line distinguish whether the leakage is caused by the outer sleeve or the inner tube, it is impossible to actively detect on-line in real time, and it is impossible to take emergency treatment on-site disposal measures in case of leakage. It belongs to a passive alarm measure, which delays the judgment time, is not conducive to the treatment of potential safety hazards in the budding stage, is not conducive to emergency treatment and maintaining the stable operation of the system. Generally speaking, the disadvantages of the existing device are as follows: 1. It is impossible to distinguish whether the outer tube leaks or the inner tube leaks, and additional judgment time and detection are required. It is impossible to quickly judge to provide a basis for subsequent emergency disposal, and the safety risk is high; 2. It is impossible to actively detect, belongs to a passive detection system, cannot detect continuously on-line, cannot judge the leakage concentration and medium conditions, and cannot formulate disposal measures according to the medium conditions; 3. There is no leakage linkage system, only an alarm in SCDA, and there is no linkage safety measure (such as forced exhaust measure, external vacuum treatment equipment measure, etc.); 4. It has no ability of emergency on-site EMO; 5. It is impossible to be modular and realize intelligent detection; 5. The meter is the only judgment basis. If there is a problem with the meter itself, it is impossible to quickly confirm each other to provide a basis for safety guarantee; 6. It is necessary to combine with environmental detection, which increases the safety risk; 7. It is impossible to visually present the actual situation on-site to the management personnel to improve the management and decision-making efficiency. Content of the Utility Model

[0003] In view of this, the purpose of the present utility model is to provide an on-line monitoring device for the outer sleeve of a special gas system to solve the deficiencies in the prior art.

[0004] To achieve the above object, the utility model is realized by the following technical solutions:

[0005] Provide an on-line monitoring device for the outer sleeve of a special gas system. Among them, it includes a cabinet body, a sampling module and an electric control module are arranged in the cabinet body. The sampling module includes a centralized sampling pipeline, a first diaphragm valve, a second diaphragm valve, a pneumatic diaphragm valve, a three-channel switching diaphragm valve, a gas detector and an exhaust pipeline. The centralized sampling pipeline, the first diaphragm valve, the pneumatic diaphragm valve and the exhaust pipeline are connected in sequence. The centralized sampling pipeline, the second diaphragm valve, the gas detector and the exhaust pipeline are connected in sequence. The centralized sampling pipeline, the three-channel switching diaphragm valve and the exhaust pipeline are connected in sequence. The electric control module includes a controller and is configured with a relay, an incoming line circuit breaker and a terminal block. The controller is connected to the gas detector and the pneumatic diaphragm valve.

[0006] As the on-line monitoring device for the outer sleeve of the special gas system, among them, the gas detector is an inhalation type on-line gas detector, and the gas detector is one of an electro-chemical type, an infrared type, a semiconductor type, a constant potential electrolysis type, and an optical interference type.

[0007] As the on-line monitoring device for the outer sleeve of the special gas system, among them, it further includes a fourth diaphragm valve and a pressure sensor. The pressure sensor is arranged between the first diaphragm valve and the second diaphragm valve. The fourth diaphragm valve is connected to the three-channel switching diaphragm valve and is arranged outside the cabinet body.

[0008] As the on-line monitoring device for the outer sleeve of the special gas system, among them, when the cabinet door is closed, the negative pressure inside the cabinet is not less than 30 - 50 Pa, and the exhaust and ventilation frequency is not less than 50 - 80 times / h.

[0009] The beneficial effects of the technical solution of the utility model are:

[0010] 1. This device adopts modularization and can select products of different materials and brands, which is conducive to system integration;

[0011] 2. This device samples and continuously detects, which is conducive to safe operation;

[0012] 3. The emergency control measures set in this device ensure safety measures;

[0013] 4. This device can be operated manually and automatically;

[0014] 5. This device can be integrated with GMS, and relevant data can be fed back to GMS in time, which is conducive to GMS making timely judgments, achieving intelligent control, and facilitating data collection and analysis and decision-making;

[0015] 6. This device sets three-stage alarms, and corresponding on-site disposal measures can be set according to the alarm levels, which is conducive to safe production;

[0016] 7. This device is connected to an uninterruptible power supply (UPS), and the use of a safety voltage of DC24V is conducive to explosion protection and the safety of personnel operation.

[0017] 8. All signals of this device adopt 4 - 20mA, which is conducive to explosion protection and signal stability.

[0018] 9. When this device is closed, it should maintain a negative pressure of not less than 50Pa, and the exhaust and ventilation frequency inside the cabinet should not be less than 80 - 100 times / h, which is conducive to the removal of harmful substances in case of emergencies.

[0019] 10. This device is provided with reserved interfaces, which is conducive to maintenance and emergency disposal.

[0020] 11. It is easy to operate, avoiding the risk of working at heights.

[0021] 12. It has low cost, which is conducive to manufacturing and production, and is conducive to modularization.

[0022] 13. Compared with environmental detection, it has higher sensitivity and shorter response time.

[0023] 14. It is easy to install and can be installed on the floor or on the wall. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to further illustrate the above - mentioned objects, structural features and effects of the present utility model, the present utility model will be described in detail below with reference to the drawings.

[0025] Figure 1 It is a schematic diagram of the prior - art monitoring method;

[0026] Figure 2 It is a schematic diagram of the logical structure of the device in the preferred embodiment of the present utility model;

[0027] Figure 3 It is a schematic diagram of the application state in the preferred embodiment of the present utility model;

[0028] In the figure: 1. Cabinet body; 2. Sampling module; 3. Electric control module; 4. Sampling pipeline; 5. First diaphragm valve; 6. Second diaphragm valve; 7. Pneumatic diaphragm valve; 8. Three - channel switching diaphragm valve; 9. Gas detector; 10. Exhaust pipeline; 11. Controller; 12. Relay; 13. Incoming line circuit breaker; 14. Terminal block; 15. Fourth diaphragm valve; 16. Pressure sensor; 17. PFA hose. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0029] The terms "utility model" and "the present utility model" as used in this specification are intended in a broad sense to refer to all the subject matters of this specification and any of the following patent claims. Statements containing these terms should not be construed as limiting the subject matters described herein or the meaning or scope of any of the following patent claims. Additionally, this specification does not attempt to describe or limit the subject matters covered by any of the claims of any specific component, paragraph, statement, or drawing of this application. The subject matters should be understood with reference to the entire specification, all the drawings, and any of the following claims. The present utility model may have other embodiments and be practiced or implemented in other ways. Moreover, it should be understood that the wording and terms adopted herein are for illustrative purposes and should not be considered limiting.

[0030] Details of the present utility model will now be discussed with reference to the drawings that illustrate the present utility model by way of example only. In the drawings, like features or components may be labeled with the same reference numerals.

[0031] The use of "comprising", "having", "including" and their variants herein means including the items listed hereinafter, their equivalents and additional items. Although directions such as above, below, upward, downward, backward, bottom, top, front, back, etc. may be referred to in the description of the drawings for convenience with reference to the drawings. These directions are not intended to be literally accepted or limit the present utility model in any form. Additionally, terms such as "first", "second", "third", etc. are used herein for illustrative purposes and are not intended to indicate or imply importance or significance.

[0032] See Figure 2 and Figure 3 As shown, in a preferred embodiment, the on-line monitoring device for the outer sleeve of the special gas system of the present utility model includes a cabinet 1, and a sampling module 2 and an electric control module 3 are arranged in the cabinet 1. The sampling module 2 includes a centralized sampling pipeline 4, a first diaphragm valve 5, a second diaphragm valve 6, a pneumatic diaphragm valve 7, a three-channel switching diaphragm valve 8, a gas detector 9 and an exhaust pipeline 10. The centralized sampling pipeline 4, the first diaphragm valve 5, the pneumatic diaphragm valve 7 and the exhaust pipeline 10 are connected in sequence. The centralized sampling pipeline 4, the second diaphragm valve 6, the gas detector 9 and the exhaust pipeline 10 are connected in sequence. The centralized sampling pipeline 4, the three-channel switching diaphragm valve 8 and the exhaust pipeline 10 are connected in sequence. The electric control module 3 includes a controller 11 and is configured with a relay 12, an incoming line circuit breaker 13 and a terminal block 14. The controller 11 is connected to the gas detector 9 and the pneumatic diaphragm valve 7.

[0033] This device adopts a modular approach. SUS304 AP or BA pipes with a diameter of 0.25 to 0.5 inches are used to connect the joints of the special gas outer sleeves. Welding or VCR joints can be used according to the construction requirements. The centralized sampling pipeline 4 has an interface of 0.25 to 0.5 inches, and the first diaphragm valve 5 and the second diaphragm valve 6 are 0.25 to 0.5 inches. The gas detector 9 is an inhalation type on-line gas detector, and electro-chemical type, infrared type, semiconductor type, constant potential electrolytic type, optical interference type, etc. can be selected according to the type of special gas medium. The pneumatic diaphragm valve 7 is driven by CDA or GN2. The upper end of the exhaust pipeline 10 has an interface of 2 - 4 inches. SUS304 or SUS304 ETFE Coating material is selected according to different special gas media and is connected to the system process exhaust treatment system according to different media. The lower end of the exhaust pipeline 10 is an exhaust filter, which is made of SUS304 material. A PFA hose 17 is used to connect between the gas detector 9 and the second diaphragm valve 6. The cabinet 1 is grounded, and the incoming line circuit breaker 13 uses DC24V. A three-color alarm can be set outside the cabinet 1. The cabinet surface of the cabinet 1 mainly includes an HMI display screen, operation indication, fault indication, and EMO button, etc. Through the above device configuration, on-line active sampling detection is completed. Different from environmental detection, the detection of the environment inside the closed outer sleeve reaches active detection, predicting potential safety hazards in advance. Through the linkage control of the controller, the pneumatic valve is controlled to be connected to the exhaust, achieving the purpose of exhausting accidents to the treatment equipment. At the same time, an external interface is reserved, and it can also be emergently connected to the nearest vacuum Scrber treatment equipment according to the medium type to ensure safety and reduce the occurrence of safety accidents. When the cabinet 1 is closed, the negative pressure inside the cabinet is not less than 30 - 50 Pa, and the exhaust ventilation rate is not less than 50 - 80 times / h.

[0034] Furthermore, this device also includes a fourth diaphragm valve 15 and a pressure sensor 16. The pressure sensor 16 is arranged between the first diaphragm valve 5 and the second diaphragm valve 6, and the fourth diaphragm valve 15 is connected to the three-channel switching diaphragm valve 8 and is placed outside the cabinet 1. The pressure sensor 16 has a 4 - 20 mA transmission. The fourth diaphragm valve 15 is a diaphragm valve reserved outside the panel, which can be used for vacuum detection of the outer sleeve and emergency vacuum treatment to SCR, and can also be used for mobile device detection to check whether the current state of the pressure sensor 16 is good, which is convenient for maintenance and emergency treatment after a failure.

[0035] Under the system detection logic: during normal operation, the outer sleeve should be in the range of -15 to -20 Pa, and the value of the pressure sensor 16 of the on-line monitoring device should be within the normal range. When the pressure is not in the range of -15 to -20 Pa, it indicates that there is a leak in the pipeline, which may be a leak in the outer sleeve itself or a leak in the inner pipe. At this time, an alarm is activated according to the set range. According to the first-stage alarm setting, at the same time, whether the gas detector 9 detects the gas and flow conditions of the corresponding medium is set according to the second-stage alarm setting. When the two-stage alarm is reached, emergency measures are activated, and the controller 11 uploads to the GMS to automatically cut off the gas supply valve or the EMO cuts off the corresponding gas supply valve. At the same time, the pneumatic diaphragm valve 7 connected to the exhaust system in the on-line monitoring device is manually or automatically opened to quickly discharge the harmful medium. During this period, relevant personnel are evacuated in a timely manner, and the emergency plan is activated at the same time. The treatment equipment can be directly connected to the reserved interface to timely treat the harmful gas in the pipeline. After passing the inspection, it is repaired and put back into normal use. This device can cooperate with the emergency disposal measures automatically and manually quickly, reduce and prevent the occurrence of safety accidents, ensure safety first and prevention first, not only ensure safety, but also increase the reliability of the system operation. Cooperating with the GMS, relevant data forms a continuous record, achieving the goal of safe and intelligent management, and at the same time providing safety guarantees for maintenance and operation personnel.

[0036] The above are only the preferred embodiments of the present utility model, and do not limit the implementation modes and protection scope of the present utility model. For those skilled in the art, it should be realized that all equivalent replacements and obvious changes made by using the description and illustrations of the present utility model should be included in the protection scope of the present utility model.

Claims

1. An on-line monitoring device for the outer sleeve of a special gas system, characterized in that, It includes a cabinet body, inside which there is a sampling module and an electric control module. The sampling module includes a centralized sampling pipeline, a first diaphragm valve, a second diaphragm valve, a pneumatic diaphragm valve, a three-channel switching diaphragm valve, a gas detector and an exhaust pipeline. The centralized sampling pipeline, the first diaphragm valve, the pneumatic diaphragm valve and the exhaust pipeline are connected in sequence. The centralized sampling pipeline, the second diaphragm valve, the gas detector and the exhaust pipeline are connected in sequence. The centralized sampling pipeline, the three-channel switching diaphragm valve and the exhaust pipeline are connected in sequence. The electric control module includes a controller and is configured with a relay, an incoming line circuit breaker and a terminal block. The controller is connected to the gas detector and the pneumatic diaphragm valve.

2. The on-line monitoring device for the outer sleeve of the special gas system according to claim 1, characterized in that, The gas detector is an inhalation type on-line gas detector, and the gas detector is one of an electro-chemical type, an infrared type, a semiconductor type, a constant potential electrolytic type, and an optical interference type.

3. The on-line monitoring device for the outer tube of the special gas system according to claim 1, characterized in that, It further includes a fourth diaphragm valve and a pressure sensor. The pressure sensor is arranged between the first diaphragm valve and the second diaphragm valve. The fourth diaphragm valve is connected to the three-channel switching diaphragm valve and is placed outside the cabinet body.

4. The on-line monitoring device for the outer sleeve of the special gas system according to claim 1, wherein When the cabinet door is closed, the negative pressure inside the cabinet is maintained at not less than 30 - 50 Pa, and the exhaust and ventilation frequency is not less than 50 - 80 times / h.

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