Linear moving platform driven by three-rectangular-plate parallel connection type piezoelectric stator

Abstract

The utility model discloses a three-rectangular-plate parallel connection type linear moving platform driven by a piezoelectric stator. The three-rectangular-plate parallel connection type linear moving platform comprises a support assembly, a stator assembly, a moving table assembly and a pre-tightening force adjusting assembly. The stator assembly is fixed on a boss of the base, and the top end of the triangular driving foot is in contact with the friction plate; a moving guide rail and a sliding block in the pre-pressure adjusting mechanism form a moving pair, a spring and a gasket are pressed between a pre-tightening bolt and a bolt bracket, and the tightness of the spring is controlled to realize the adjustment of the pre-tightening force between the triangular driving foot and the friction plate; when the linear moving platform device works, a specified electric signal is applied to the piezoelectric ceramic piece, a first-order longitudinal vibration mode and a second-order bending vibration mode of the stator assembly are excited at the same time, through coupling of the longitudinal vibration mode and the bending vibration mode, the triangular driving foot can generate elliptic motion, and under the action of pretightening force, through friction coupling between the driving foot and the friction plate, the linear moving platform device is driven to move. And the moving plate is pushed to linearly move. The utility model has the advantages of compact structure, simple installation and large thrust.

Description

Technical Field

[0001] The utility model relates to the technical fields of precision drive technology and piezoelectric motor technology, and particularly relates to a linear moving platform driven by a three-rectangular-plate parallel-connected type piezoelectric stator. Background Art

[0002] With the development of high-precision fields such as biomedicine, IC etching, and motion workbenches, the demand for compact and precision-driven micro-motors in actual production activities is continuously increasing. The performance of traditional electromagnetic motors will continuously decrease as the volume shrinks, and they can no longer meet these requirements. With the continuous development of piezoelectric materials, piezoelectric motors, as a new type of motor, have received extensive attention.

[0003] A piezoelectric motor utilizes the inverse piezoelectric effect of piezoelectric ceramics to excite the micro-amplitude vibration of an elastic body, and converts the vibration energy into the linear movement or rotation of a mover through friction. Compared with traditional electromagnetic motors, piezoelectric motors have the advantages of fast response, direct drive, power-off self-locking, no electromagnetic interference, and the ability to work in a vacuum environment. According to the different motion output modes, piezoelectric motors can be divided into: rotary type and linear type. At present, rotary piezoelectric motors have been industrialized, and the development of linear piezoelectric motors lags slightly behind that of rotary piezoelectric motors. However, linear motors are structurally compact, flexibly designed, can directly output linear motion without a conversion mechanism, and can meet the drive requirements in narrow occasions. In 2022, Fan Pingqing proposed a compact micro longitudinal-bending coupled linear piezoelectric motor, whose stator is a pentagonal elastic rod structure, which is overall symmetric left and right, with a hollow design in the middle, and piezoelectric ceramic sheets are pasted on the surface of the metal rod perpendicular to the symmetry axis. The piezoelectric ceramic sheets cause local deformation of the metal rod, so that the corner points of the pentagonal elastic structure vibrate in a chain reaction, and then frictionally contact with the mover rod to realize the linear movement of the mover.

[0004] However, this scheme also has certain deficiencies. The deformation amount of a single metal rod is small, and the thrust output by the stator drive is small, which limits its application in some large-load occasions. The utility model adopts a three-rectangular-plate parallel-connected structure, which can effectively solve the problem of small output thrust. Summary of the Utility Model

[0005] The purpose of the utility model is to solve the technical problems existing in the prior art, and provide a linear moving platform driven by a three-rectangular-plate parallel-connected type piezoelectric stator.

[0006] To achieve the above purpose, the technical solution provided by the utility model is: a linear moving platform driven by a three-rectangular-plate parallel-connected type piezoelectric stator, including a support assembly, a stator assembly, a pre-tightening force adjustment assembly, and a moving platform assembly;

[0007] The support assembly includes a base; the stator assembly consists of three metal rectangular plates and piezoelectric ceramic sheets. The metal rectangular plates overlap in the thickness direction, and the three metal rectangular plates adopt a hollow design. A triangular driving foot is provided on one side of the metal rectangular plate, and three pairs of piezoelectric ceramic sheets are adhesively arranged on the other side of the metal rectangular plate;

[0008] The moving table assembly consists of a slider, a guide rail, friction plate screws, a right-angle bracket, a friction plate, a moving plate, and bracket screws; the slider and the guide rail form a moving pair. The right-angle bracket is installed at both ends of the guide rail. The friction plate is installed on the guide rail with friction plate screws, and the friction plate contacts the top of the triangular driving foot; the moving plate is fixed to the right-angle bracket with bracket screws;

[0009] The pre-tightening force adjustment assembly consists of a connecting bracket, a pre-tightening bolt, a nut, a bolt bracket, a spring, a gasket, a fixing screw, a bracket screw, a pre-tightening slider, a moving guide rail, and a connecting screw; the slider is fixed to the left vertical surface of the connecting bracket through the connecting screw;

[0010] The bolt bracket is in a "C" shape. The bolt bracket is fixed to the base with bracket screws, and the moving guide rail is fixed to the base with fixing screws. The pre-tightening slider and the moving guide rail form a moving pair. The pre-tightening slider is fixedly connected to the connecting bracket. A rectangular hole is provided on the right side of the connecting bracket. The pre-tightening bolt passes through the bolt bracket and is fixed in cooperation with the rectangular hole on the right side of the connecting bracket through a nut. The top of the pre-tightening bolt contacts the left end surface of the connecting bracket, and a spring and a gasket are added between the pre-tightening bolt and the bolt bracket. The pre-tightening force between the stator assembly and the friction plate in the moving table assembly is adjusted by controlling the tightness of the spring.

[0011] Preferably, a large circular mounting through-hole is provided at the center of the metal rectangular plate, and nine small-diameter circular through-holes are provided on both sides of the metal rectangular plate respectively.

[0012] Preferably, the support assembly further includes a boss and support bolts. The base and the boss are integrally formed. The metal rectangular plate is fixed to the boss through support bolts. The support bolts pass through the large circular mounting through-holes on the metal rectangular plate and are threadedly connected to the threaded holes provided on the boss.

[0013] Preferably, a square rubber gasket is pressed into the middle between the metal rectangular plate and the boss, and a circular rubber gasket is pressed between the head of the support bolt and the metal rectangular plate.

[0014] Preferably, the piezoelectric ceramic sheets are adhesively pasted on one side of the metal rectangular plate using epoxy conductive adhesive. Each pair of piezoelectric ceramic sheets is symmetric about the axis of symmetry, and the polarization direction of the piezoelectric ceramic sheets is inward or outward along the thickness direction of the piezoelectric ceramic sheets simultaneously.

[0015] The present utility model also discloses a control method for a linear motion platform driven by a piezoelectric stator with three rectangular plates connected in parallel. The specific control method is as follows: The piezoelectric ceramic sheets are divided into two groups, namely Group I and Group II, along the left-right symmetry axis. Two-phase electrical signals with equal amplitude, the same frequency, and a time phase difference of π / 2 or -π / 2 are applied to the two groups of piezoelectric ceramic sheets. Group I is Usin(ωt) and Group II is Ucos(ωt), where U is the voltage amplitude, ω is the excitation frequency, and t is time.

[0016] Secondly, due to the π / 2 phase difference in the electrical signals applied to the piezoelectric ceramic sheets, the first-order longitudinal vibration mode and the second-order bending vibration mode of the stator assembly can be excited simultaneously. When the stator assembly operates in the first-order longitudinal vibration mode, the triangular driving feet generate vertical displacements along the symmetry axis direction of the stator assembly. While in the second-order bending vibration mode, the triangular driving feet generate left-right displacements along the direction perpendicular to the symmetry axis of the stator assembly.

[0017] Finally, through the coupling of the longitudinal and bending vibration modes, an elliptical motion at the micron level is formed at the triangular driving feet. Under the action of the pre-tightening force, the frictional coupling between the triangular driving feet and the friction plate drives the moving table assembly to perform linear motion. When the phase difference of the excitation signals applied to the two groups of piezoelectric ceramic sheets is -π / 2, the elliptical motion trajectory is reversed, and the reverse linear motion of the moving table assembly can be realized.

[0018] Advantages of the present utility model:

[0019] 1. The present utility model adjusts the pre-tightening force between the stator assembly and the moving table assembly through the pre-tightening bolts and springs in the pre-tightening force adjusting component. The operation is convenient and the structure is compact, making the installation of the entire device simpler and capable of reducing the manufacturing cost.

[0020] 2. The present utility model uses three metal rectangular plates to overlap along the thickness direction, and the three metal rectangular plates are designed with hollowing. At the same time, the structure of superimposing triangular driving feet on one side of the metal rectangular plate. The triangular driving feet significantly increase the load of the present utility model, and the triangular driving feet can output a greater thrust, which is more suitable for use in large-load occasions. Description of the Drawings

[0021] The drawings described herein are used to provide a further understanding of the present utility model and form a part of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model.

[0022] Figure 1 is the overall structural schematic diagram of the present utility model;

[0023] Figure 2 is the schematic diagram of the support assembly in the present utility model;

[0024] Figure 3 It is a schematic diagram of the structure of the stator assembly and the position arrangement of piezoelectric ceramics in the present utility model;

[0025] Figure 4 It is a schematic diagram of the pre-tightening force adjusting assembly in the present utility model;

[0026] Figure 5 It is a schematic diagram of the moving table assembly in the present utility model;

[0027] Figure 6 It is a schematic diagram of the polarization direction of piezoelectric ceramics and the power supply configuration in the present utility model;

[0028] Figure 7 It is a schematic diagram of the longitudinal vibration mode simulation in the present utility model;

[0029] Figure 8 It is a schematic diagram of the bending vibration mode simulation in the present utility model.

[0030] Reference numerals in the drawings:

[0031] 1 - Support assembly, 11 - Base, 12 - Boss, 13 - Square rubber gasket, 14 - Support bolt, 15 - Circular rubber gasket;

[0032] 2 - Stator assembly, 21 - Metal rectangular plate, 22 - Triangular driving foot, 23 - Piezoelectric ceramic sheet;

[0033] 3 - Pre-tightening force adjusting assembly, 31 - Connecting bracket, 32 - Pre-tightening bolt, 33 - Nut, 34 - Bolt bracket, 35 - Spring, 36 - Gasket, 37 - Fixing screw, 38 - Bracket screw, 39 - Pre-tightening slider, 310 - Moving guide rail, 311 - Connecting screw;

[0034] 4 - Moving table assembly, 41 - Slider, 42 - Guide rail, 43 - Friction plate screw, 44 - Right-angle bracket, 45 - Friction plate, 46 - Moving plate, 47 - Bracket screw. Detailed implementation manners

[0035] This part will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the drawings. The role of the drawings is to supplement the description in the text part of the specification, enabling people to intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but it should not be construed as a limitation on the protection scope of the present utility model.

[0036] In the description of the present utility model, it should be understood that regarding the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the present utility model.

[0037] In the description of the present utility model, the meaning of several is one or more, the meaning of multiple is two or more. Understanding greater than, less than, exceeding, etc. does not include the recited number, and understanding above, below, within, etc. includes the recited number. If there is a description of first and second, it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.

[0038] In the description of the present utility model, unless otherwise clearly defined, terms such as set, install, connect, etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meaning of the above terms in the present utility model in combination with the specific content of the technical solution.

[0039] Referring to Figure 1 , a preferred embodiment of the present utility model, a linear moving platform driven by a three-rectangular-plate parallel-connected piezoelectric stator, includes a support assembly 1, a stator assembly 2, a pre-tightening force adjusting assembly 3, and a moving table assembly 4;

[0040] Furthermore, as Figure 2 shown, the support assembly 1 includes a base 11; the support assembly 1 further includes a boss 12 and a support bolt 14. The base 11 and the boss 12 are integrally formed. The metal rectangular plate 21 is fixed on the boss 12 through the support bolt 14. The support bolt 14 passes through the large circular mounting through-hole on the metal rectangular plate 21 and is threadedly connected with the threaded hole opened on the boss 22.

[0041] Furthermore, a square rubber gasket 13 is pressed into the middle between the metal rectangular plate 21 and the boss 12 to achieve the purpose of vibration reduction, and a circular rubber gasket 15 is pressed between the head of the support bolt 14 and the metal rectangular plate 21.

[0042] As Figure 3 shown, the stator assembly 2 is composed of three metal rectangular plates 21 and piezoelectric ceramic sheets 23. The metal rectangular plates 21 overlap in the thickness direction, and the three metal rectangular plates 21 adopt a hollow design. A triangular driving foot 22 is arranged on one side of the metal rectangular plate 21 to amplify the amplitude of the metal rectangular plate 21; three pairs of piezoelectric ceramic sheets 23 are pasted and arranged on the other side of the metal rectangular plate 21.

[0043] Further, a large circular mounting through-hole is provided at the center of the metal rectangular plate 21, and nine small-diameter circular through-holes are respectively provided on both sides of the metal rectangular plate 21; the large circular mounting through-hole in the middle penetrates the entire stator assembly 2 for clamping and fixing, and the small-diameter circular through-holes on the left and right sides are used to reduce the weight of the entire stator assembly 2 while increasing the flexibility, and can increase the amplitude of the triangular driving foot 22.

[0044] Furthermore, the piezoelectric ceramic sheets 23 are pasted on one side of the metal rectangular plate 21 using epoxy conductive adhesive. Each pair of piezoelectric ceramic sheets 23 is symmetric about the axis of symmetry, and the polarization direction of the piezoelectric ceramic sheets 23 is simultaneously inward or outward along the thickness direction of the piezoelectric ceramic sheets 23.

[0045] As Figure 5 shown, the mobile platform assembly 4 is composed of a slider 41, a guide rail 42, a friction plate screw 43, a right-angle bracket 44, a friction plate 45, a moving plate 46, and a bracket screw 47; the slider 41 and the guide rail 42 form a moving pair, the right-angle bracket 44 is installed at both ends of the guide rail 42, and the friction plate 45 is installed on the guide rail 42 with the friction plate screw 43 to increase the frictional force. The friction plate 45 contacts the top of the triangular driving foot 22, and a plane is cut out at the top of the triangular driving foot 22 to increase the contact area between the triangular driving foot 22 and the friction plate 45; the moving plate 46 is fixed to the right-angle bracket 44 with the bracket screw 47 to achieve the installation of the moving plate 46.

[0046] As Figure 4 shown, the pre-tightening force adjustment assembly 3 is composed of a connecting bracket 31, a pre-tightening bolt 32, a nut 33, a bolt bracket 34, a spring 35, a gasket 36, a fixing screw 37, a bracket screw 38, a pre-tightening slider 39, a moving guide rail 310, and a connecting screw 311; the slider 41 is fixed to the left vertical surface of the connecting bracket 31 with the connecting screw 311.

[0047] Further, the bolt bracket 34 is in a "C" shape. The bolt bracket 34 is fixed to the base 11 with the bracket screw 38, the moving guide rail 310 is fixed to the base 11 with the fixing screw 37. The pre-tightening slider 39 and the moving guide rail 310 form a moving pair. The pre-tightening slider 39 is fixedly connected to the connecting bracket 31. A rectangular hole is provided on the right side of the connecting bracket 31. The pre-tightening bolt 32 passes through the bolt bracket 34 and is fixedly matched with the rectangular hole on the right side of the connecting bracket 31 through the nut 33. The top of the pre-tightening bolt 32 is in surface contact with the left end surface of the connecting bracket 31, and a spring 35 and a gasket 36 are added between the pre-tightening bolt 32 and the bolt bracket 34. The pre-tightening force between the stator assembly 2 and the friction plate 45 in the mobile platform assembly 4 is adjusted by controlling the tightness of the spring 35.

[0048] The present utility model also discloses a control method for a linear motion platform driven by a piezoelectric stator of a three-rectangular-plate parallel connection type. The specific control method is as follows: The piezoelectric ceramic sheets 23 are divided into two groups, group I and group II, along the left-right symmetry axis. Two-phase electrical signals with equal amplitude, the same frequency, and a time phase difference of π / 2 or -π / 2 are applied to the two groups of piezoelectric ceramic sheets 23. Group I is Usin(ωt), and group II is Ucos(ωt), where U is the voltage amplitude, ω is the excitation frequency, and t is time.

[0049] Secondly, due to the π / 2 phase difference in the electrical signals applied to the piezoelectric ceramic sheets 23, the first-order longitudinal vibration mode and the second-order bending vibration mode of the stator assembly 2 can be excited simultaneously. The simulation schematic diagrams of the first-order longitudinal vibration and the second-order bending vibration are respectively as Figure 6 and Figure 7 shown.

[0050] When the stator assembly 2 operates in the first-order longitudinal vibration mode, the triangular driving feet 22 generate up-and-down displacements along the symmetry axis direction of the stator assembly 2. When in the second-order bending vibration mode, the triangular driving feet 22 generate left-and-right displacements along the direction perpendicular to the symmetry axis of the stator assembly 2.

[0051] Finally, through the coupling of the longitudinal vibration and bending vibration modes, an elliptical motion at the micron level is formed at the triangular driving feet 22. Under the action of the pre-tightening force, the frictional coupling between the triangular driving feet 22 and the friction plate 45 drives the moving platform assembly 4 to perform a linear motion. When the phase difference of the excitation signals applied to the two groups of piezoelectric ceramic sheets 23 is -π / 2, the elliptical motion trajectory is reversed, and the reverse linear motion of the moving platform assembly 4 can be realized.

[0052] The present utility model adjusts the pre-tightening force between the stator assembly 2 and the moving platform assembly 4 through the pre-tightening bolts 32 and the springs 35 in the pre-tightening force adjusting assembly 3. The operation is convenient and the structure is compact, making the installation of the entire device simpler and capable of reducing the manufacturing cost.

[0053] Secondly, the present utility model uses three metal rectangular plates 21 to overlap in the thickness direction, and the three metal rectangular plates 21 adopt a hollow design. At the same time, a structure with triangular driving feet is superimposed on one side of the metal rectangular plates 21. The triangular driving feet 22 significantly increase the load of the present utility model, and the triangular driving feet 22 can output a greater thrust, which is more suitable for use in large-load occasions.

[0054] On the premise of not causing conflicts, those skilled in the art can freely combine and superimpose the above-mentioned additional technical features.

[0055] The above is only the preferred implementation mode of the present utility model. As long as the technical solutions that achieve the purpose of the present utility model by basically the same means fall within the protection scope of the present utility model.

Claims

1. A linear moving platform driven by a three-rectangular-plate parallel-connected piezoelectric stator, characterized in that: It includes a support assembly, a stator assembly, a pre-tightening force adjustment assembly, and a moving table assembly; The support assembly includes a base; the stator assembly is composed of three metal rectangular plates and piezoelectric ceramic sheets. The metal rectangular plates overlap in the thickness direction, and the three metal rectangular plates adopt a hollow design. A triangular driving foot is provided on one side of the metal rectangular plate, and three pairs of piezoelectric ceramic sheets are pasted and arranged on the other side of the metal rectangular plate; The moving table assembly is composed of a slider, a guide rail, friction plate screws, a right-angle bracket, a friction plate, a moving plate, and bracket screws; the slider and the guide rail form a moving pair. The right-angle bracket is installed at both ends of the guide rail. The friction plate is installed on the guide rail with friction plate screws, and the friction plate contacts the top of the triangular driving foot; the moving plate is fixed to the right-angle bracket with bracket screws; The pre-tightening force adjustment assembly is composed of a connecting bracket, a pre-tightening bolt, a nut, a bolt bracket, a spring, a gasket, a fixing screw, a bracket screw, a pre-tightening slider, a moving guide rail, and a connecting screw; the slider is fixed to the left vertical surface of the connecting bracket through the connecting screw; The bolt bracket is in a "C" shape. The bolt bracket is fixed to the base through the bracket screw, and the moving guide rail is fixed to the base through the fixing screw. The pre-tightening slider and the moving guide rail form a moving pair. The pre-tightening slider is fixedly connected to the connecting bracket. A rectangular hole is provided on the right side of the connecting bracket. The pre-tightening bolt passes through the bolt bracket and is fixed in cooperation with the rectangular hole on the right side of the connecting bracket through the nut. The top of the pre-tightening bolt contacts the left end surface of the connecting bracket, and a spring and a gasket are added between the pre-tightening bolt and the bolt bracket. The pre-tightening force between the stator assembly and the friction plate in the moving table assembly is adjusted by controlling the tightness of the spring.

2. The linear moving platform driven by a three-rectangular-plate parallel-connected piezoelectric stator according to claim 1, wherein: A large circular mounting through-hole is provided at the center of the metal rectangular plate, and nine small-diameter circular through-holes are provided on both sides of the metal rectangular plate respectively.

3. The linear moving platform driven by a three-rectangular-plate parallel-connected piezoelectric stator according to claim 2, wherein: The support assembly further includes a boss and a support bolt. The base and the boss are integrally formed. The metal rectangular plate is fixed to the boss through the support bolt. The support bolt passes through the large circular mounting through-hole on the metal rectangular plate and is threadedly connected to the threaded hole provided on the boss.

4. The linear moving platform driven by a three-rectangular-plate spliced piezoelectric stator according to claim 3, characterized in that: A square rubber gasket is pressed into the middle between the metal rectangular plate and the boss, and a circular rubber gasket is pressed between the head of the support bolt and the metal rectangular plate.

5. A linear moving platform driven by a three-rectangular-plate parallel-connected piezoelectric stator according to claim 1, characterized in that: The piezoelectric ceramic sheets are pasted on one side of the metal rectangular plate using epoxy conductive adhesive. Each pair of piezoelectric ceramic sheets is symmetric about the axis of symmetry. The polarization direction of the piezoelectric ceramic sheets is inward or outward simultaneously along the thickness direction of the piezoelectric ceramic sheets.

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