Evaporation device

By detecting the charged amount of the particulate matter to be evaporated, controlling the opening state of the heating element, and using the back electrode plate to drive the uniform deposition of gaseous particulate matter, the problems of low perovskite battery performance and organic salt decomposition are solved, and the evaporation efficiency and uniformity are improved.

CN223163470UActive Publication Date: 2025-07-29ZHEJIANG YIGESILON INTELLIGENT MANUFACTURING CO LTD
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Patent Information

Application Number
CN202422125932.0
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-08-29
Publication Date
2025-07-29
Estimated Expiration
2034-08-29

AI Technical Summary

Technical Problem

In the prior art, perovskite batteries prepared by evaporated organic salts have low performance, and organic materials are prone to decomposition during heating, resulting in poor uniformity and waste of materials.

Method used

An evaporation device is adopted to control the opening state of the heating element by detecting the real-time charge amount of the particles to be evaporated, and an electric field is used to generate a back electrode plate to drive the uniform deposition of gaseous particles. Combined with multiple power-up parts, ensuring that the particles are fully charged and avoid decomposition.

Benefits of technology

It improves the performance and evaporation efficiency of perovskite batteries, solves the diffusion problem of organic salts during the evaporation process, and reduces material waste.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an evaporation device which comprises a heating piece and a heating box, the heating piece has an opening state and a closing state, the heating box is provided with a heating cavity, and the heating cavity is used for containing particles to be evaporated; the first power-up component is arranged in the heating cavity, and at least part of the first power-up component makes contact with the to-be-evaporated particulate matter, so that the first power-up component applies first charges to the to-be-evaporated particulate matter; the detection part is used for detecting the real-time electric quantity of the to-be-evaporated particulate matter, and the detection part is in communication connection with the heating part, so that when the real-time electric quantity detected by the detection part is larger than zero, the heating part is switched to be in an on state; and when the heating piece is in the starting state, the heating piece heats the heating box, so that the to-be-evaporated particulate matter in the heating cavity is converted into a gas state from a solid state. According to the utility model, the problem of low performance of the perovskite cell in the prior art is solved.
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Description

Technical Field

[0001] The utility model relates to the technical field of perovskite solar cells, and more particularly, to an evaporation device. Background Art

[0002] The preparation methods of perovskite solar cells mainly include vacuum deposition method and solution deposition method. The vacuum deposition method refers to heating an organic material in a vacuum condition to vaporize the organic material, and the vaporized organic material diffuses and deposits on a substrate and reacts with lead halide to realize the preparation of a perovskite solar cell.

[0003] However, some organic materials are prone to decomposition during the heating process, resulting in the deterioration of some organic materials (FAX, MAX, X is a halogen) required for perovskite, reducing the performance of the perovskite battery and causing waste of some organic materials. Secondly, there is a problem of dispersion during the evaporation of organic salts, that is, the vaporized organic materials surround the evaporation source rather than diffuse towards the substrate, resulting in very poor uniformity of the organic salt film deposited by the evaporation method, reducing the performance and yield rate of the perovskite battery. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide an evaporation device to solve the problem of low performance of perovskite batteries prepared by evaporating organic salts in the prior art.

[0005] To achieve the above purpose, the utility model provides an evaporation device, including: a heating element and a heating box. The heating element has an on state and an off state. The heating box has a heating cavity for accommodating particulate matter to be evaporated; a first power supply component is arranged in the heating cavity, and at least part of the first power supply component is in contact with the particulate matter to be evaporated, so that the first power supply component applies a first charge to the particulate matter to be evaporated; a detection component is used for detecting the real-time charge amount of the particulate matter to be evaporated, and the detection component is communicatively connected with the heating element, so that when the real-time charge amount detected by the detection component is greater than zero, the heating element switches to the on state; wherein, when the heating element is in the on state, the heating element heats the heating box, so that the particulate matter to be evaporated in the heating cavity is converted from a solid state to a gaseous state.

[0006] Furthermore, the evaporation device further includes a substrate, a back electrode plate and a second power supply component. The substrate is arranged above the heating box in the vertical direction, the back electrode plate is arranged above the substrate, and the second power supply component is used for applying a second charge to the back electrode plate. The first charge and the second charge have opposite attributes, so that the gaseous particulate matter to be evaporated is attracted by the back electrode plate, so that the gaseous particulate matter to be evaporated moves in the vertical direction towards the direction close to the back electrode plate, so that the gaseous particulate matter to be evaporated adheres to the substrate.

[0007] Further, the evaporation device further includes a conductive wire. The first power supply component includes a plurality of first power supply elements, and the plurality of first power supply elements are arranged at intervals in the vertical direction. One end of the conductive wire is connected to an external power supply, and the other end of the conductive wire is electrically connected to the uppermost first power supply element. Any two adjacent first power supply elements are electrically connected. When the heating element is in the off state, at least one first power supply element is immersed in the solid particulate matter to be evaporated.

[0008] Further, each first power supply element includes a first power supply section, a second power supply section, a third power supply section, and a fourth power supply section that are connected to each other. The first power supply section and the third power supply section both extend along a first preset direction, the second power supply section and the fourth power supply section both extend along a second preset direction, and the first power supply section and the third power supply section are arranged at intervals in the second preset direction between the second power supply section and the fourth power supply section.

[0009] Further, the first power supply component further includes a third power supply element. The third power supply element includes a fifth power supply section, a sixth power supply section, a seventh power supply section, and an eighth power supply section that are connected to each other. The fifth power supply section and the seventh power supply section both extend along the second preset direction, the sixth power supply section and the eighth power supply section both extend in the vertical direction, and the fifth power supply section and the seventh power supply section are arranged at intervals in the vertical direction between the sixth power supply section and the eighth power supply section. Among them, the first preset direction, the second preset direction, and the vertical direction are arranged perpendicular to each other in pairs. Both ends of the fifth power supply section are electrically connected to the first power supply section and the third power supply section of the uppermost first power supply element respectively. Both ends of the seventh power supply section are electrically connected to the first power supply section and the third power supply section of the lowermost first power supply element respectively. The first power supply section of each first power supply element is electrically connected to the sixth power supply section, and the third power supply section of each first power supply element is electrically connected to the eighth power supply section, so that any two adjacent first power supply elements are electrically connected.

[0010] Further, the first power supply component further includes a fourth power supply element. The fourth power supply element includes a ninth power supply section, a tenth power supply section, an eleventh power supply section, and a twelfth power supply section that are connected to each other. The ninth power supply section and the eleventh power supply section both extend along the first preset direction, the tenth power supply section and the twelfth power supply section both extend in the vertical direction, and the ninth power supply section and the eleventh power supply section are arranged at intervals in the vertical direction between the tenth power supply section and the twelfth power supply section. Both ends of the ninth power supply section are electrically connected to the second power supply section and the fourth power supply section of the uppermost first power supply element respectively. Both ends of the eleventh power supply section are electrically connected to the second power supply section and the fourth power supply section of the lowermost first power supply element respectively. The second power supply section of each first power supply element is electrically connected to the tenth power supply section, and the fourth power supply section of each first power supply element is electrically connected to the twelfth power supply section, so that any two adjacent first power supply elements are electrically connected.

[0011] Further, the evaporation device further includes a first circuit, a controller, and a switch. Two ends of the first circuit are respectively connected to the heating element and an external power supply. The switch is disposed on the first circuit. The controller is communicatively connected to the detection component, and the controller is communicatively connected to the switch, so that the controller controls the opening and closing of the switch to control the on-off of the first circuit, and further controls the heating element to switch between an on state and an off state.

[0012] Further, the heating box includes a bottom wall and four side walls. The four side walls surround the bottom wall, and the bottom wall and the four side walls together define a heating cavity. Each side wall extends in the vertical direction. The heating element is disposed below the bottom wall to heat the bottom wall when the heating element is in the on state.

[0013] Further, the evaporation device further includes a separation membrane and a third power supply component. A plurality of through holes are spaced on the separation membrane. The separation membrane is detachably disposed on a side of the substrate close to the heating box. The third power supply component is electrically connected to the separation membrane. The third power supply component is configured to apply a first charge to the separation membrane, so that gaseous to-be-evaporated particulate matters adhere to the substrate via the through holes.

[0014] Further, the detection component is an electroscope.

[0015] Applying the technical solution of the present utility model, the evaporation device includes a heating element, a heating box, a first power supply component, and a detection component. The heating box has a heating cavity for accommodating to-be-evaporated particulate matters. First, the first power supply component applies a first charge to the to-be-evaporated particulate matters. When the real-time charge amount of the to-be-evaporated particulate matters detected by the detection component is greater than zero, then the heating element switches to the on state to start heating the to-be-evaporated particles. Such a setting ensures that the to-be-evaporated particulate matters heated by the heating element carry the first charge. At the same time, the first charge can effectively inhibit the thermal decomposition of the to-be-evaporated particulate matters, thereby solving the technical problem of the low performance of the perovskite battery prepared by vapor deposition of organic salts, and improving the evaporation efficiency of the evaporation device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The accompanying drawings constituting a part of this application are used to provide a further understanding of the present utility model. The schematic embodiments of the present utility model and their descriptions are used to explain the present utility model and do not constitute an improper limitation to the present utility model. In the drawings:

[0017] Figure 1 shows an exploded schematic view of an embodiment of the evaporation device (removing the substrate, the separation membrane, the heating element, and the back electrode plate) according to the present utility model;

[0018] Figure 2 shows a schematic structural view of an embodiment of the evaporation device (removing the heating element and the heating box) according to the present utility model;

[0019] Figure 3 The structural schematic diagram of the substrate and the separation membrane of the evaporation device according to the present utility model is shown.

[0020] Among them, the above-mentioned drawings include the following reference numerals:

[0021] 2. Conductive wire; 3. First power supply component; 4. Substrate; 5. Separation membrane; 6. Through hole; 7. Back electrode plate; 20. Heating box; 21. Heating cavity; 22. Bottom wall; 23. Side wall; 31. First power supply section; 32. Second power supply section; 33. Third power supply section; 34. Fourth power supply section; 35. Fifth power supply section; 36. Sixth power supply section; 37. Seventh power supply section; 38. Eighth power supply section; 39. Ninth power supply section; 40. Tenth power supply section; 42. Twelfth power supply section. Specific embodiments

[0022] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they specify the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0023] Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the sake of description, the sizes of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the said technologies, methods, and devices should be regarded as part of the authorized specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that: similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0024] In the description of the present application, it should be understood that the orientation or positional relationship indicated by orientation terms such as "front, rear, top, bottom, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. Without contrary instructions, these orientation terms do not indicate or imply that the device or component referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present application; the orientation terms "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0025] Please refer to Figures 1 to 3 Figures 1 to 3 , the present utility model provides an evaporation device, including: a heating element and a heating box 20. The heating element has an on state and an off state. The heating box 20 has a heating chamber 21 for accommodating the particulate matter to be evaporated; a first power supply component 3 is disposed in the heating chamber 21, and at least a part of the first power supply component 3 contacts the particulate matter to be evaporated, so that the first power supply component 3 applies a first charge to the particulate matter to be evaporated; a detection component is used to detect the real-time charge amount of the particulate matter to be evaporated. The detection component is communicatively connected to the heating element, so that when the real-time charge amount detected by the detection component is greater than zero, the heating element switches to the on state; wherein, when the heating element is in the on state, the heating element heats the heating box 20, so that the particulate matter to be evaporated in the heating chamber 21 is transformed from a solid state to a gaseous state.

[0026] The evaporation device of the present utility model includes a heating element, a heating box 20, a first power supply component 3 and a detection component. The heating box 20 has a heating chamber 21 for accommodating the particulate matter to be evaporated. First, the first power supply component 3 applies a first charge to the particulate matter to be evaporated. When the real-time charge amount of the particulate matter to be evaporated detected by the detection component is greater than zero, then the heating element switches to the on state and starts to heat the particulate matter to be evaporated. Such a setting ensures that the particulate matter to be evaporated heated by the heating element carries a first charge. At the same time, the first charge can effectively inhibit the thermal decomposition of the particulate matter to be evaporated, thereby solving the technical problem of the low performance of the perovskite battery prepared by evaporating organic salts and improving the evaporation efficiency of the evaporation device.

[0027] Specifically, the heating box 20 is a crucible; the particulate matter to be evaporated is an organic salt, the gaseous particulate matter to be evaporated is an organic salt vapor, and the solid particulate matter to be evaporated is an organic salt solid.

[0028] In this embodiment, the evaporation device further includes a substrate 4, a back electrode plate 7, and a second power supply component. The substrate 4 is disposed above the heating box 20 in the vertical direction. The back electrode plate 7 is disposed above the substrate 4 and used to generate an electric field. The second power supply component is used to apply a second charge to the back electrode plate 7 and the substrate 4. The first charge and the second charge have opposite attributes, so that the gaseous particulate matter to be evaporated is attracted by the back electrode plate 7 and the substrate 4, so that the gaseous particulate matter to be evaporated moves in the vertical direction toward the direction close to the back electrode plate 7 and the substrate 4, so that the gaseous particulate matter to be evaporated adheres to the substrate 4.

[0029] Specifically, by applying power to the back electrode plate 7 above the substrate 4 through the second power supply component to generate an electric field, the charged gaseous particulate matter to be evaporated is driven by the electric field to move uniformly from bottom to top and finally deposited on the substrate 4, improving the uniformity of the organic salt deposition, thereby solving the technical problem of the low performance of the perovskite battery prepared by evaporating the organic salt.

[0030] Specifically, during the evaporation of FAI and MAI, which are components of the perovskite, the organic salt vapor is prone to agglomerate near the evaporation source and the crystal oscillator probe, rather than uniformly moving around the evaporation source outlet in all directions. By applying charges with different attributes to the back electrode plate 7 and the particulate matter to be evaporated, the back electrode plate 7 can attract the gaseous particulate matter to be evaporated, so that the gaseous particulate matter to be evaporated adheres to the substrate 4; by uniformly heating the organic salt solid to generate uniform organic salt vapor, under the drive of the uniform electric field, the charged organic salt vapor moves toward the back electrode plate 7 above the substrate 4 and finally adheres to the substrate 4, thereby solving the problem of the dispersion of the organic salt during the evaporation process.

[0031] Specifically, the structure of the third power supply component is the same as that of the second power supply component and the first power supply component 3.

[0032] During specific implementation, first, the first power supply component 3 applies a first charge to the particulate matter to be evaporated, and the second power supply component applies a second charge to the back electrode plate 7. When the real-time charge of the particulate matter to be evaporated detected by the detection component is greater than zero, then the heating component switches to the on state and starts to heat the particulate matter to be evaporated. The particulate matter to be evaporated changes from solid state to gaseous state, and the gaseous particulate matter to be evaporated is attracted by the back electrode plate 7 to adhere to the substrate 4.

[0033] Optionally, the first charge is a positive charge and the second charge is a negative charge; or the first charge is a negative charge and the second charge is a positive charge.

[0034] In this embodiment, the evaporation device further includes a conductive wire 2. The first power supply component 3 includes a plurality of first power supply elements, which are arranged at intervals in the vertical direction. One end of the conductive wire 2 is connected to an external power supply, and the other end of the conductive wire 2 is electrically connected to the uppermost first power supply element. Any two adjacent first power supply elements are electrically connected. When the heating element is in the off state, at least one first power supply element is immersed in the solid particulate matter to be evaporated.

[0035] Specifically, the conductive wire 2 is used to electrically connect the external power supply and the first power supply element to make the first power supply element energized. By setting any two adjacent first power supply elements to be electrically connected and at least one first power supply element being immersed in the solid particulate matter to be evaporated, it is ensured that the first power supply element can smoothly apply the first charge to the solid particulate matter to be evaporated, ensuring that the solid particulate matter to be evaporated carries the first charge.

[0036] In this embodiment, each first power supply element includes a first power supply section 31, a second power supply section 32, a third power supply section 33, and a fourth power supply section 34 that are connected to each other. Both the first power supply section 31 and the third power supply section 33 extend along a first preset direction, both the second power supply section 32 and the fourth power supply section 34 extend along a second preset direction, and the first power supply section 31 and the third power supply section 33 are arranged at intervals in the second preset direction between the second power supply section 32 and the fourth power supply section 34.

[0037] Specifically, arranging a plurality of first power supply elements at intervals in the vertical direction can prevent the amount of electric charge applied by the first power supply component 3 to the particulate matter to be evaporated from being small. When there are more particulate matters to be evaporated, some of the particulate matters to be evaporated cannot be applied with the first charge, resulting in some of the organic salt vapors carrying the first charge moving towards the back electrode plate under the action of the uniform electric field and finally adhering to the substrate 4, while some of the organic salt vapors are still uncharged and there is still a problem of uneven deposition due to dispersion. With a plurality of first power supply elements, the organic salt solid is fully charged, and then uniform charged organic salt vapor is produced, which is uniformly deposited on the substrate 4 under the action of the electric field, so that the organic salt is uniformly deposited on the substrate 4. At the same time, making the organic salt solid fully charged can prevent some uncharged organic salt solids from being thermally decomposed and deteriorated, thereby improving the evaporation efficiency of the evaporation device.

[0038] In this embodiment, the first power supply component 3 further includes a third power supply component. The third power supply component includes a fifth power supply section 35, a sixth power supply section 36, a seventh power supply section 37, and an eighth power supply section 38 that are connected to each other. Both the fifth power supply section 35 and the seventh power supply section 37 extend along a second preset direction. Both the sixth power supply section 36 and the eighth power supply section 38 extend along the vertical direction. The fifth power supply section 35 and the seventh power supply section 37 are arranged at intervals along the vertical direction between the sixth power supply section 36 and the eighth power supply section 38. Among them, the first preset direction, the second preset direction, and the vertical direction are set perpendicular to each other in pairs. Both ends of the fifth power supply section 35 are electrically connected to the first power supply section 31 and the third power supply section 33 of the first power supply component located at the uppermost position respectively. Both ends of the seventh power supply section 37 are electrically connected to the first power supply section 31 and the third power supply section 33 of the first power supply component located at the lowermost position respectively. The first power supply section 31 of each first power supply component is electrically connected to the sixth power supply section 36, and the third power supply section 33 of each first power supply component is electrically connected to the eighth power supply section 38, so that any two adjacent first power supply components are electrically connected.

[0039] In this embodiment, the first power supply component 3 further includes a fourth power supply component. The fourth power supply component includes a ninth power supply section 39, a tenth power supply section 40, an eleventh power supply section, and a twelfth power supply section 42 that are connected to each other. Both the ninth power supply section 39 and the eleventh power supply section extend along the first preset direction. Both the tenth power supply section 40 and the twelfth power supply section 42 extend along the vertical direction. The ninth power supply section 39 and the eleventh power supply section are arranged at intervals along the vertical direction between the tenth power supply section 40 and the twelfth power supply section 42. Both ends of the ninth power supply section 39 are electrically connected to the second power supply section 32 and the fourth power supply section 34 of the first power supply component located at the uppermost position respectively. Both ends of the eleventh power supply section are electrically connected to the second power supply section 32 and the fourth power supply section 34 of the first power supply component located at the lowermost position respectively. The second power supply section 32 of each first power supply component is electrically connected to the tenth power supply section 40, and the fourth power supply section 34 of each first power supply component is electrically connected to the twelfth power supply section 42, so that any two adjacent first power supply components are electrically connected.

[0040] Specifically, the third power supply component and the fourth power supply component are used to connect any two adjacent first power supply components, ensuring that any two adjacent first power supply components are electrically connected, and ensuring that the first power supply component can smoothly apply the first charge to the particulate matter to be evaporated.

[0041] In this embodiment, the evaporation device further includes a first circuit, a controller, and a switch. Both ends of the first circuit are respectively connected to the heating element and an external power supply. The switch is arranged on the first circuit. The controller is communicatively connected to the detection component, and the controller is communicatively connected to the switch, so that the controller controls the opening and closing of the switch to control the on-off of the first circuit, and controls the heating element to switch between the on state and the off state.

[0042] Specifically, through communication connection between the controller and the switch, the detection component feeds back the detection result to the controller. Before the first power-on component 3 starts to work, the switch is open, the first circuit is disconnected, and the heating component is powered off and in the off state. The controller determines that the real-time charge of the particulate matter to be evaporated is equal to zero. Then the first power-on component 3 starts to work. When the controller determines that the real-time charge of the particulate matter to be evaporated is greater than zero, the controller controls the switch to close, so that the first circuit is connected, and the heating component is powered on and switched to the on state.

[0043] Optionally, the heating component is an electric furnace or an electric hot plate.

[0044] In this embodiment, the heating box 20 includes a bottom wall 22 and four side walls 23. The four side walls 23 surround the bottom wall 22. The bottom wall 22 and the four side walls 23 together enclose a heating cavity 21. Each side wall 23 extends in the vertical direction. The heating component is arranged below the bottom wall 22 to heat the bottom wall 22 when the heating component is in the on state.

[0045] Specifically, the bottom wall 22 and the four side walls 23 together enclose the heating cavity 21 to accommodate the particulate matter to be evaporated; when the heating component is in the on state, the bottom wall 22 is used to transfer the heat from the heating component to the particulate matter to be evaporated, so that the particulate matter to be evaporated is smoothly converted from solid state to gaseous state.

[0046] In this embodiment, the evaporation device further includes a separation membrane 5. A plurality of through holes 6 are arranged at intervals on the separation membrane 5. The separation membrane 5 is detachably arranged on one side of the substrate 4 close to the heating box 20. The third power-on component is electrically connected to the separation membrane 5. The third power-on component is used to apply a first charge to the separation membrane 5 so that the gaseous particulate matter to be evaporated adheres to the substrate 4 through the through holes 6.

[0047] Specifically, when the particulate matter to be evaporated is an organic substance, the separation membrane 5 is removed, and the gaseous particulate matter to be evaporated directly contacts the substrate 4; when the particulate matter to be evaporated is a metal, the separation membrane 5 is arranged on one side of the substrate 4 close to the heating box 20, so that the gaseous particulate matter to be evaporated adheres to the substrate 4 through the through holes 6. Since the plurality of through holes 6 are linearly arranged on the separation membrane 5, the gaseous particulate matter to be evaporated is linearly arranged on the substrate 4 to form a wire electrode. By applying a first charge to the separation membrane 5 through the third power-on component, the separation membrane 5 and the gaseous particulate matter to be evaporated repel each other, avoiding the gaseous particulate matter to be evaporated from adhering to the separation membrane 5, thereby reducing the metal layer deposited on the separation membrane 5, and further reducing the cleaning and replacement frequency of the separation membrane 5, and reducing the use cost of the evaporation device.

[0048] In this embodiment, the detection component is an electroscope. Such a setting ensures the detection reliability of the detection component for the charge of the particulate matter to be evaporated.

[0049] Optionally, there are multiple detection components, which respectively detect the to-be-evaporated particulate matters at different positions in the heating chamber 21. When the real-time charge amounts detected by each detection component are all greater than zero, the heating component switches to the on state. Such a setting can prevent some to-be-evaporated particles from being heated without carrying the first charge.

[0050] From the above description, it can be seen that the above embodiments of the present utility model achieve the following technical effects:

[0051] The evaporation device of the present utility model includes a heating component, a heating box 20, a first power supply component 3, a detection component, a substrate 4, a back electrode plate 7, and a second power supply component. The heating box 20 has a heating chamber 21 for accommodating the to-be-evaporated particulate matters. First, the first power supply component 3 applies a first charge to the to-be-evaporated particulate matters. When the real-time charge amount of the to-be-evaporated particulate matters detected by the detection component is greater than zero, then the heating component switches to the on state and starts to heat the to-be-evaporated particles. Such a setting ensures that the to-be-evaporated particulate matters heated by the heating component carry the first charge. By applying power to the back electrode plate 7 above the substrate 4 through the second power supply component to generate an electric field, the organic salt vapor carrying the first charge is driven by the electric field to move uniformly towards the back electrode plate 7 and finally adheres to the substrate 4, solving the problem of uneven deposition of organic salts due to diffusivity during the evaporation process. At the same time, the first charge can effectively inhibit the thermal decomposition of the to-be-evaporated particulate matters, solving the problem that some organic materials are prone to deterioration during the heating process, and further solving the technical problem of the low performance of perovskite batteries prepared by evaporating organic salts, thereby improving the evaporation efficiency of the evaporation device.

[0052] For the sake of convenience in description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "above" and the like can be used herein to describe the spatial positional relationship between one device or feature and other devices or features as shown in the figures. It should be understood that the spatial relative terms are intended to cover different orientations in use or operation in addition to the orientation shown in the figures of the device. For example, if the device in the figure is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientation of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations will be made to the spatial relative descriptions used herein.

[0053] In addition, it should be noted that the use of terms such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Without additional statements, the above terms have no special meanings, and thus should not be construed as limiting the scope of protection of this application.

[0054] The above are only the preferred embodiments of the present utility model and are not intended to limit the present utility model. For those skilled in the art, the present utility model can have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the scope of protection of the present utility model.

Claims

1. An evaporation device, characterized in that, Comprising: A heating element and a heating cartridge (20), the heating element having an on state and an off state, the heating cartridge (20) having a heating chamber (21) for accommodating the particulate matter to be evaporated; A first power supply component (3), the first power supply component (3) being disposed in the heating chamber (21), at least a part of the first power supply component (3) being in contact with the particulate matter to be evaporated, so that the first power supply component (3) applies a first charge to the particulate matter to be evaporated; A detection component, the detection component being used for detecting the real-time charge amount of the particulate matter to be evaporated, the detection component being communicatively connected to the heating element, so that when the real-time charge amount detected by the detection component is greater than zero, the heating element switches to the on state; wherein, when the heating element is in the on state, the heating element heats the heating cartridge (20), so that the particulate matter to be evaporated in the heating chamber (21) is transformed from a solid state to a gaseous state.

2. The evaporation device according to claim 1, wherein The evaporation device further includes a substrate (4), a back electrode plate (7) and a second power supply component, the substrate (4) being disposed above the heating cartridge (20) in the vertical direction, the back electrode plate (7) being disposed above the substrate (4), the second power supply component being used for applying a second charge to the back electrode plate (7), the first charge and the second charge having opposite attributes, so that the gaseous particulate matter to be evaporated is attracted by the back electrode plate (7), so that the gaseous particulate matter to be evaporated moves in the vertical direction towards the direction close to the back electrode plate (7), so that the gaseous particulate matter to be evaporated adheres to the substrate (4).

3. The evaporation device according to claim 1, wherein The evaporation device further includes a conducting wire (2), the first power supply component (3) includes a plurality of first power supply elements, the plurality of first power supply elements are arranged at intervals in the vertical direction, one end of the conducting wire (2) is connected to an external power supply, the other end of the conducting wire (2) is electrically connected to the uppermost first power supply element, any two adjacent first power supply elements are electrically connected, and when the heating element is in the off state, at least one first power supply element is immersed in the solid particulate matter to be evaporated.

4. The evaporation device according to claim 3, characterized in that Each of the first power supply elements includes a first power supply section (31), a second power supply section (32), a third power supply section (33) and a fourth power supply section (34) that are connected to each other, the first power supply section (31) and the third power supply section (33) both extend along a first preset direction, the second power supply section (32) and the fourth power supply section (34) both extend along a second preset direction, and the first power supply section (31) and the third power supply section (33) are arranged at intervals in the second preset direction between the second power supply section (32) and the fourth power supply section (34).

5. The evaporation device according to claim 4, characterized in that, The first power-on component (3) further includes a third power-on member, and the third power-on member includes a fifth power-on section (35), a sixth power-on section (36), a seventh power-on section (37), and an eighth power-on section (38) that are connected to each other. The fifth power-on section (35) and the seventh power-on section (37) both extend along the second preset direction, the sixth power-on section (36) and the eighth power-on section (38) both extend along the vertical direction, and the fifth power-on section (35) and the seventh power-on section (37) are arranged at intervals along the vertical direction between the sixth power-on section (36) and the eighth power-on section (38); wherein, the first preset direction, the second preset direction, and the vertical direction are arranged perpendicular to each other in pairs; Both ends of the fifth power-on section (35) are electrically connected to the first power-on section (31) and the third power-on section (33) of the first power-on member located at the uppermost position respectively. Both ends of the seventh power-on section (37) are electrically connected to the first power-on section (31) and the third power-on section (33) of the first power-on member located at the lowermost position respectively. The first power-on section (31) of each first power-on member is electrically connected to the sixth power-on section (36), and the third power-on section (33) of each first power-on member is electrically connected to the eighth power-on section (38), so that any two adjacent first power-on members are electrically connected.

6. The evaporation device according to claim 4, wherein The first power-on component (3) further includes a fourth power-on member, and the fourth power-on member includes a ninth power-on section (39), a tenth power-on section (40), an eleventh power-on section, and a twelfth power-on section (42) that are connected to each other. The ninth power-on section (39) and the eleventh power-on section both extend along the first preset direction, the tenth power-on section (40) and the twelfth power-on section (42) both extend along the vertical direction, and the ninth power-on section (39) and the eleventh power-on section are arranged at intervals along the vertical direction between the tenth power-on section (40) and the twelfth power-on section (42); Both ends of the ninth power-on section (39) are electrically connected to the second power-on section (32) and the fourth power-on section (34) of the first power-on member located at the uppermost position respectively. Both ends of the eleventh power-on section are electrically connected to the second power-on section (32) and the fourth power-on section (34) of the first power-on member located at the lowermost position respectively. The second power-on section (32) of each first power-on member is electrically connected to the tenth power-on section (40), and the fourth power-on section (34) of each first power-on member is electrically connected to the twelfth power-on section (42), so that any two adjacent first power-on members are electrically connected.

7. The evaporation device according to claim 1, characterized in that, The evaporation device further includes a first circuit, a controller, and a switch. Two ends of the first circuit are respectively connected to the heating element and an external power supply. The switch is disposed on the first circuit. The controller is communicatively connected to the detection component, and the controller is communicatively connected to the switch, so that the controller controls the opening and closing of the switch to control the on-off of the first circuit, thereby controlling the switching of the heating element between the on state and the off state.

8. The evaporation device according to claim 1, wherein The heating box (20) includes a bottom wall (22) and four side walls (23). The four side walls (23) surround the bottom wall (22). The bottom wall (22) and the four side walls (23) together define the heating chamber (21). Each of the side walls (23) extends in the vertical direction. The heating element is disposed below the bottom wall (22) to heat the bottom wall (22) when the heating element is in the on state.

9. The evaporation device according to claim 2, characterized in that, The evaporation device further includes a separation membrane (5) and a third power supply component. A plurality of through holes (6) are spaced apart on the separation membrane (5). The separation membrane (5) is detachably disposed on a side of the substrate (4) close to the heating box (20). The third power supply component is electrically connected to the separation membrane (5). The third power supply component is configured to apply a first charge to the separation membrane (5) so that the gaseous particulate matter to be evaporated adheres to the substrate (4) through the through holes (6).

10. The evaporation device according to claim 1, characterized in that, The detection component is an electroscope.