Trichlorosilane adsorption tower

Abstract

The utility model relates to a trichlorosilane adsorption tower in the technical field of adsorption equipment, which comprises a tower body, an air inlet pipe and an emptying pipe are arranged at the bottom of the tower body, and an exhaust pipe is arranged at the top of the tower body; the interior of the tower body is divided into a spraying area and an adsorption area from bottom to top, a spraying pipe is arranged at the top of the spraying area, a spherical gas distribution plate is arranged at the bottom of the spraying area, gas distribution holes are fully distributed in the gas distribution plate, and the gas inlet pipe is located below the gas distribution plate; the adsorption area comprises a filler layer, the filler layer is an activated carbon layer, a heat exchange assembly is arranged in the filler layer, the heat exchange assembly comprises a coiled pipe, and the coiled pipe is connected with a medium inlet pipe and a medium outlet pipe. According to the utility model, trichlorosilane can be subjected to impurity removal and purification after spraying and adsorption in sequence, the efficiency is high, and the effect is good; the temperature of the filler area can be flexibly adjusted according to needs, the adsorption effect can be improved, the filler can be purified, and the next adsorption effect is not affected.

Description

Technical Field

[0001] The utility model belongs to the technical field of adsorption equipment, and particularly relates to a trichlorosilane adsorption tower. Background Art

[0002] Trichlorosilane (SiHCl3) is a widely used organosilicon monomer, which is a raw material for manufacturing solar-grade and electronic-grade polysilicon and semiconductor-grade single-crystalline silicon. At the same time, it is also a basic monomer for the synthesis of various organosilicons. Trichlorosilane is mainly synthesized by directly reacting metallic silicon with HCl. The synthesis reaction of trichlorosilane is an exothermic reaction, and the temperature is 280°C - 300°C. Therefore, the product is a gaseous mixture, including: hydrogen H2, hydrogen chloride HCl, trichlorosilane SiHCl3, silicon tetrachloride SiCl4, silicon dust and high-boiling dust. Therefore, the impurities in the product must be removed, otherwise they will enter the electronic-grade polysilicon through the raw materials. The patent document with the publication number CN 110655081A discloses a method for removing impurities from trichlorosilane, including: using a metal impurity-removing filler to remove impurities from hot trichlorosilane by adsorption; the trichlorosilane impurity-removing system includes: a metal impurity-removing reactor and a heater connected to the air inlet of the metal impurity-removing reactor; the metal impurity-removing reactor is filled with a metal impurity-removing filler. The method for removing impurities from trichlorosilane and the trichlorosilane impurity-removing system provided by the present invention can deeply remove impurities in trichlorosilane to obtain trichlorosilane with extremely low carbon content. Although this patent can remove C impurities through metal fillers, it cannot effectively remove other impurities, and the impurity-removing method is single. Therefore, a trichlorosilane adsorption tower is needed to solve the above technical problems. Content of the Utility Model

[0003] In view of the above defects existing in the prior art, the utility model provides a trichlorosilane adsorption tower; including a tower body, an air inlet pipe and a drain pipe are provided at the bottom of the tower body, a switch valve is provided on the drain pipe, and an exhaust pipe is provided at the top of the tower body; the tower body is divided into a spraying area and an adsorption area from bottom to top, a spraying pipe is provided at the top of the spraying area, a spherical gas distribution plate is provided at the bottom of the spraying area, the gas distribution plate is covered with gas distribution holes, and the air inlet pipe is located below the gas distribution plate;

[0004] The adsorption area includes a filler layer, the filler layer can be an activated carbon layer or a metal filler layer, a heat exchange component is provided in the filler layer, and the heat exchange component includes a serpentine pipe, and the serpentine pipe is connected with a medium inlet pipe and a medium outlet pipe.

[0005] The gas that needs to be purified enters the spray area through the air inlet pipe, and the spray pipe sprays the spray liquid. The spray liquid contacts the gas and removes some impurities in the gas. Then the gas enters the adsorption area, and the activated carbon in the adsorption area adsorbs and removes other impurities in the gas. During the adsorption process, hot medium or cold medium can be circulated into the serpentine pipe as needed to heat or cool the filler to achieve the best adsorption effect. The gas after impurity removal is discharged from the exhaust pipe. Finally, when the filler layer is an activated carbon layer, the filler can be heated by passing hot medium into the serpentine pipe so that the filler purification will not affect the next use.

[0006] Preferably, the outlet end of the air inlet pipe extends into the spray area and is fixedly connected to the air distribution plate via a connecting rod 1. The air inlet end of the air inlet pipe is located outside the tower body and is connected to an air guide pipe via a rotary joint. A bevel gear 1 is fixed to the air inlet pipe outside the tower body, and the bevel gear 1 is meshed with a bevel gear 2, which is connected to a stepper motor. The top of the air distribution plate is connected to a plurality of stirring blades via a connecting rod 2. The stirring blades are covered with air vents, and the plurality of stirring blades are evenly distributed along the circumference of the air distribution plate. The air inlet pipe is driven to rotate by the stepper motor, and the air distribution plate distributes the incoming gas more evenly in the spray area. The rotation of the stirring blades can stir the gas, so that the gas and the spray liquid come into contact more fully. The air vents on the stirring blades allow the spray liquid to wet the stirring blades, so that the gas comes into contact with the spray liquid when passing through the air vents, further improving the degree of contact.

[0007] Preferably, the stirring blade is rectangular, with one long side of the stirring blade fixedly connected to the second connecting rod, and the other long side of the stirring blade facing the central axis of the tower body. This arrangement can fully stir the gas in the spray area, improve the contact between the gas and the spray liquid, and further improve the spray effect.

[0008] Preferably, the serpentine tubes are provided in plurality, and the heat exchange assembly further comprises an upper annular tube and a lower annular tube fixed to the inner wall of the tower body, the upper annular tube being connected to the medium inlet tube, the upper annular tube being fixedly connected to a plurality of upper connecting tubes, the plurality of upper connecting tubes intersecting and connecting at the center of the upper annular tube, the lower annular tube being connected to the medium outlet tube, the lower annular tube being fixedly connected to a plurality of lower connecting tubes, the plurality of lower connecting tubes intersecting and connecting at the center of the lower annular tube, the plurality of serpentine tubes being evenly distributed along the circumference of the tower body, the lower end of the serpentine tube being fixedly connected to the corresponding lower connecting tube, and the upper end of the serpentine tube being fixedly connected to the corresponding upper connecting tube. The provision of multiple serpentine tubes increases the heat exchange range, improves the heat exchange efficiency, and allows the temperature of the adsorption zone to be flexibly adjusted according to the adsorption requirements. A temperature sensor or thermometer may be provided in the adsorption zone to timely understand the temperature conditions of the adsorption zone.

[0009] Preferably, the bent part on one side of the serpentine tube faces the outer wall of the tower body, and the bent part on the other side of the serpentine tube faces the central axis of the tower body. The contact area between each serpentine tube and the packing is increased as much as possible at this position, further improving the heat exchange effect.

[0010] The present utility model further includes other components that can enable a trichlorosilane adsorption tower to be used normally, such as the control component of the stepping motor, the control component of the spray head, the control component for controlling the circulation of the medium in and out of the serpentine tube (such as liquid pumps, gas pumps, etc.), and the control component of the temperature sensor, etc., which are all conventional technical means in the art. In addition, devices or components not defined in the present utility model, such as temperature sensors, rotary joints, etc., all adopt conventional technical means and conventional equipment in the art.

[0011] The beneficial effects of the present utility model are as follows: Trichlorosilane is purified by impurity removal through spraying and adsorption in sequence, with high efficiency and good effect; at the same time, the temperature of the packing area can be flexibly adjusted as needed, which can not only improve the adsorption effect but also purify the packing without affecting the next adsorption effect. Description of the Drawings

[0012] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0013] Figure 1 It is a schematic structural diagram of a trichlorosilane adsorption tower in an embodiment of the present utility model;

[0014] Figure 2 is Figure 1 the end view at A-A in

[0015] Figure 3 is Figure 1 the end view at B-B in

[0016] In the figure: 1. Tower body; 2. Inlet pipe; 3. Air distribution plate; 4. Drain pipe; 5. Connecting rod 1; 6. Bevel gear 1; 7. Bevel gear 2; 8. Stepping motor; 9. Connecting rod 2; 10. Stirring blade; 11. Air distribution hole; 12. Vent hole; 13. Spray pipe; 14. Lower ring pipe; 15. Medium outlet pipe; 16. Serpentine tube; 17. Upper ring pipe; 18. Medium inlet pipe; 19. Exhaust pipe; 20. Lower connecting pipe; 21. Guide pipe. Detailed Embodiments

[0017] The present invention will be clearly described below in conjunction with the accompanying drawings in the embodiments of the present invention and specific embodiments. The description here is only used to explain the present invention, but not to limit the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts, any modifications, equivalent replacements, improvements, etc., shall be included in the protection scope of the present invention.

[0018] Embodiment

[0019] As Figures 1-3 shown, the present invention provides a trichlorosilane adsorption tower; comprising a tower body 1, an air inlet pipe 2 and an evacuation pipe 4 are provided at the bottom of the tower body 1, a switch valve is provided on the evacuation pipe, and an exhaust pipe 19 is provided at the top of the tower body 1; the interior of the tower body 1 is divided into a spraying area and an adsorption area from bottom to top, a spraying pipe 13 is provided at the top of the spraying area, a spherical gas distribution plate 3 is provided at the bottom of the spraying area, the gas distribution plate 3 is covered with gas distribution holes 11, and the air inlet pipe 2 is located below the gas distribution plate;

[0020] The adsorption area includes a packing layer, the packing layer is an activated carbon layer or a metal packing layer, a heat exchange component is provided in the packing layer, the heat exchange component includes a serpentine pipe 16, and the serpentine pipe 16 is connected with a medium inlet pipe 18 and a medium outlet pipe 15.

[0021] The air outlet end of the air inlet pipe 2 extends into the spraying area and is fixedly connected with the gas distribution plate 3 through a connecting rod one 5, the air inlet end of the air inlet pipe 2 is located outside the tower body 1 and is connected with a guide pipe 21 through a rotary joint, a bevel gear one 6 is fixed on the air inlet pipe 2 located outside the tower body 1, the bevel gear one 6 meshes with a bevel gear two 7, and the bevel gear two 7 is connected with a stepping motor 8; the top of the gas distribution plate 3 is connected with a plurality of stirring blades 10 through a connecting rod two 9, the stirring blades 10 are covered with ventilation holes 12, and the plurality of stirring blades 10 are evenly distributed along the circumferential direction of the gas distribution plate 3. By driving the air inlet pipe 2 to rotate through the stepping motor 8, the gas distribution plate 3 distributes the incoming gas more evenly in the spraying area, and the stirring blades 10 rotate to stir the gas, so that the gas contacts the spraying liquid more fully. The arrangement of the ventilation holes 12 on the stirring blades 10 wets the stirring blades 10 with the spraying liquid, so that the gas contacts the spraying liquid when passing through the ventilation holes 12, further improving the contact sufficiency.

[0022] The stirring blade 10 is rectangular, one long side of the stirring blade 10 is fixedly connected with the connecting rod two 9, and the other long side of the stirring blade 10 faces the central axis of the tower body 1. This arrangement can fully stir the gas in the spraying area, improve the contact sufficiency between the gas and the spraying liquid, and further improve the spraying effect.

[0023] A plurality of the serpentine tubes 16 are provided. The heat exchange assembly further includes an upper ring tube 17 and a lower ring tube 14 fixed to the inner wall of the tower body 1. The upper ring tube 17 is communicated with the medium inlet pipe 18. A plurality of upper connecting pipes are fixedly communicated with the upper ring tube 17. The plurality of upper connecting pipes intersect and communicate at the center of the circle of the upper ring tube 17. The lower ring tube 14 is communicated with the medium outlet pipe 15. A plurality of lower connecting pipes 20 are fixedly communicated with the lower ring tube 14. The plurality of lower connecting pipes 20 intersect and communicate at the center of the circle of the lower ring tube 14. The plurality of serpentine tubes 16 are uniformly distributed along the circumferential direction of the tower body 1. The lower end of the serpentine tube 16 is fixedly communicated with the corresponding lower connecting pipe 20, and the upper end of the serpentine tube 16 is fixedly communicated with the corresponding upper connecting pipe. The arrangement of the plurality of serpentine tubes 16 increases the heat exchange range, improves the heat exchange efficiency, and flexibly adjusts the temperature of the adsorption zone according to the adsorption requirements. A temperature sensor or a thermometer can be arranged in the adsorption zone to timely understand the temperature condition of the adsorption zone.

[0024] The bent portion on one side of the serpentine tube 16 faces the outer wall of the tower body 1, and the bent portion on the other side of the serpentine tube 16 faces the central axis of the tower body 1. The contact area between each serpentine tube 16 and the packing is increased as much as possible at this position, further improving the heat exchange effect.

[0025] Working principle: The trichlorosilane gas to be purified enters the inlet pipe 2 through the air guide pipe, and then enters the spraying area. The spraying pipe 13 sprays the spraying liquid. The spraying liquid contacts the gas to remove some impurities in the gas. During this process, the stepping motor drives the stirring blades to rotate to ensure the effective contact between the gas and the spraying liquid, so that the impurities settle quickly. Subsequently, the gas enters the adsorption area, and the activated carbon in the adsorption area adsorbs and removes other impurities in the gas. During the adsorption process, a heat medium or a cold medium can be circulated into the serpentine tube 16 as needed to heat or cool the packing, so that the adsorption effect reaches the best. The gas after impurity removal is discharged from the exhaust pipe 19. Finally, when the packing layer is an activated carbon layer, the packing can be heated by introducing a heat medium into the serpentine tube 16 to make the packing purification not affect the next use.

[0026] The embodiments of the present invention have been described above. The above description is exemplary and not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those of ordinary skill in the art in the technical field without departing from the scope and spirit of the described embodiments. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A trichlorosilane adsorption tower; comprising a tower body, an air inlet pipe and an evacuation pipe are provided at the bottom of the tower body, and an exhaust pipe is provided at the top of the tower body; characterized in that: The inside of the tower is divided into a spraying area and an adsorption area from bottom to top. A spraying pipe is provided at the top of the spraying area, and a spherical air distribution plate is provided at the bottom of the spraying area. The air distribution plate is covered with air distribution holes, and the air inlet pipe is located below the air distribution plate. The adsorption area includes a packing layer, and a heat exchange component is provided in the packing layer. The heat exchange component includes a serpentine pipe, and the serpentine pipe is connected with a medium inlet pipe and a medium outlet pipe.

2. The trichlorosilane adsorption tower according to claim 1, wherein: The air outlet end of the air inlet pipe extends into the spraying area and is fixedly connected with the air distribution plate through a first connecting rod. The air inlet end of the air inlet pipe is located outside the tower and is connected with a guide pipe through a rotary joint. A first bevel gear is fixed on the air inlet pipe outside the tower. The first bevel gear meshes with a second bevel gear, and the second bevel gear is connected with a stepping motor. The top of the air distribution plate is connected with a plurality of stirring blades through a second connecting rod. The stirring blades are covered with ventilation holes, and the plurality of stirring blades are evenly distributed along the circumferential direction of the air distribution plate.

3. The trichlorosilane adsorption tower according to claim 2, characterized in that: The stirring blades are rectangular. One long side of the stirring blade is fixedly connected with the second connecting rod, and the other long side of the stirring blade faces the central axis of the tower.

4. A trichlorosilane adsorption tower according to claim 1, characterized in that: A plurality of serpentine pipes are provided. The heat exchange component further includes an upper ring pipe and a lower ring pipe fixed on the inner wall of the tower. The upper ring pipe is communicated with the medium inlet pipe. A plurality of upper connecting pipes are fixedly communicated with the upper ring pipe. The plurality of upper connecting pipes intersect and communicate at the center of the circle of the upper ring pipe. The lower ring pipe is communicated with the medium outlet pipe. A plurality of lower connecting pipes are fixedly communicated with the lower ring pipe. The plurality of lower connecting pipes intersect and communicate at the center of the circle of the lower ring pipe. The plurality of serpentine pipes are evenly distributed along the circumferential direction of the tower. The lower end of the serpentine pipe is fixedly communicated with the corresponding lower connecting pipe, and the upper end of the serpentine pipe is fixedly communicated with the corresponding upper connecting pipe.

5. The trichlorosilane adsorption tower according to claim 4, characterized in that: One bent portion of the serpentine pipe faces the outer wall of the tower, and the other bent portion of the serpentine pipe faces the central axis of the tower.

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