Piezoelectric actuator array structure and deformable mirror

Abstract

The utility model relates to the technical field of piezoelectric actuators, and provides a piezoelectric actuator array structure and a deformable mirror, the piezoelectric actuator array structure comprises a piezoelectric actuator array and a base, the piezoelectric actuator array comprises a plurality of piezoelectric actuators, and the ends of the plurality of piezoelectric actuators are fixed on the base; the piezoelectric actuator comprises an actuator body and a leading-out piece connected to the actuator body, and the base is provided with a first penetrating hole for the leading-out piece to penetrate through. A first through hole is formed in a base, so that a lead-out piece is led out from the end part of a piezoelectric driver and penetrates through the first through hole to be connected with other devices; compared with leading-out wires led out from the side portions of the piezoelectric actuators, when the number of the piezoelectric actuators of the piezoelectric actuator array is large, it is guaranteed that the leading-out pieces are clean and tidy when being led out, the distance between the piezoelectric actuators can be reduced, the piezoelectric actuator array is arranged in a limited space in a high-density mode, the space utilization rate is increased, and the service life of the piezoelectric actuator array is prolonged. And miniaturization of the deformable mirror is facilitated.

Description

Technical Field

[0001] This application relates to the technical field of piezoelectric actuators, and particularly to a piezoelectric actuator array structure and a deformable mirror. Background Art

[0002] A piezoelectric actuator is a high-precision component that can perform micro-driving and micro-control. By assembling piezoelectric actuators into an array, a deformable mirror can be fabricated, which is applied to adaptive optics to achieve functions such as precision imaging and focusing in fields such as laser communication. With the trend of precision and miniaturization in the application of deformable mirrors, it is often necessary to assemble a higher-density piezoelectric actuator array within a unit space.

[0003] However, the lead wires of existing piezoelectric actuators are led out from the side of the piezoelectric actuator. When the number of piezoelectric actuators in the piezoelectric actuator array is large, it not only causes chaos when leading out the lead wires, but also results in the inability to closely arrange the piezoelectric actuator array. Summary of the Invention

[0004] In view of this, embodiments of this application provide a piezoelectric actuator array structure and a deformable mirror to solve the problem of chaos when leading out lead wires.

[0005] A first aspect of this application proposes a piezoelectric actuator array structure, including a piezoelectric actuator array and a base. The piezoelectric actuator array includes a plurality of piezoelectric actuators, and the ends of the plurality of piezoelectric actuators are fixed on the base; the piezoelectric actuator includes a driver body and a lead-out member connected to the driver body, and the base has a first through-hole for the lead-out member to pass through.

[0006] The beneficial effects of the piezoelectric actuator array structure provided by the embodiments of this application: By providing a first through-hole on the base, the lead-out member is led out from the end of the piezoelectric actuator and passes through the first through-hole to be connected to other devices; compared with leading out the lead wire from the side of the piezoelectric actuator, when the number of piezoelectric actuators in the piezoelectric actuator array is large, it not only ensures that the lead-out member is led out neatly, but also can reduce the spacing between piezoelectric actuators, enabling the piezoelectric actuator array to be arranged at a high density within a limited space, improving space utilization, and facilitating the miniaturization of the deformable mirror.

[0007] In some embodiments, the base is a metal base, and the piezoelectric actuator array structure further includes an insulating sleeve provided in the first through-hole.

[0008] The beneficial effects of adopting the above technical solution: The metal base has high structural strength and is not easily deformed to ensure the stability of the fixation of each piezoelectric actuator in the piezoelectric actuator array on the base; and by providing an insulating sleeve in the first through-hole, it is avoided that the lead-out member contacts the hole wall of the first through-hole to cause a short circuit.

[0009] In some embodiments, at least one end of the insulating sleeve is provided with an annular flange, and the annular flange covers the edge of the first through hole.

[0010] Beneficial effects of the above technical solution: Avoid short circuits caused by the contact between the piezoelectric actuator and the edge of the first through hole during the assembly process, and further ensure the reliability of the piezoelectric actuator array.

[0011] In some embodiments, the lead-out member is a lead-out sheet, and the first through hole is a strip-shaped hole.

[0012] Beneficial effects of the above technical solution: The lead-out sheet is relatively thin, which can further reduce the distance between piezoelectric actuators, and is more conducive to manufacturing a high-density piezoelectric actuator array.

[0013] In some embodiments, the lead-out sheet has a connection hole.

[0014] Beneficial effects of the above technical solution: Such a design not only facilitates the connection of the external wire to the lead-out sheet, but also facilitates the soldering of the lead-out sheet to the circuit board.

[0015] In some embodiments, the piezoelectric actuator array structure further includes a circuit board, the circuit board is located on the side of the base facing away from the piezoelectric actuator array, the circuit board has a second through hole, and the lead-out member sequentially passes through the first through hole and the second through hole and is bent and connected to the circuit on the circuit board.

[0016] Beneficial effects of the above technical solution: Such a design can achieve the overall parallel connection of piezoelectric actuators through the circuit board, reduce the process complexity, and is more conducive to manufacturing a high-density piezoelectric actuator array.

[0017] In some embodiments, the lead-out member is a lead-out wire, and the first through hole is a round hole, an oval hole or a polygonal hole.

[0018] Beneficial effects of the above technical solution: Such a design enables the lead-out wire to be connected to other external devices without connecting an external wire after passing through the first through hole.

[0019] In some embodiments, the piezoelectric actuator includes two such lead-out members, and two such first through holes are provided at the position of the base corresponding to the piezoelectric actuator.

[0020] Beneficial effects of the above technical solution: The two lead-out members are respectively a positive electrode lead-out member and a negative electrode lead-out member. The positive electrode lead-out member and the negative electrode lead-out member respectively pass through the two first through holes, so that all the lead-out members are led out from the end of the piezoelectric actuator and respectively pass through the first through holes to be connected to other devices, further ensuring that the lead-out members are relatively neat when led out.

[0021] In some embodiments, the two lead-out members of the same piezoelectric actuator are located on opposite sides of the actuator body.

[0022] Advantages of the above technical solution: With such a design, the two lead-out members of the same piezoelectric actuator are far apart and are not likely to interfere with each other.

[0023] A second aspect of the present application provides a deformable mirror, which includes the piezoelectric actuator array structure as described in the first aspect.

[0024] This deformable mirror adopts any one or more embodiments of the above piezoelectric actuator array structure, and thus has the beneficial effects of the above embodiments, which will not be elaborated here one by one.

[0025] The above description is only an overview of the technical solution of the present application. In order to understand the technical means of the present application more clearly, it can be implemented according to the content of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and understandable, the following specific embodiments of the present application are given. Description of the Drawings

[0026] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings required for use in the embodiments or the description of conventional technologies. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0027] Figure 1 is a schematic structural diagram of a piezoelectric actuator array structure provided by some embodiments of the present application;

[0028] Figure 2 is Figure 1 a schematic structural diagram of the first perspective of the piezoelectric actuator in ;

[0029] Figure 3 is Figure 1 a schematic structural diagram of the second perspective of the piezoelectric actuator in ;

[0030] Figure 4 is Figure 1 a schematic structural diagram of the base in ;

[0031] Figure 5 is Figure 4 an enlarged view of part A in ;

[0032] Figure 6 is a schematic structural diagram of a piezoelectric actuator array structure provided by some other embodiments of the present application;

[0033] Figure 7 is Figure 6Schematic diagram of the structure of the piezoelectric actuator;

[0034] Figure 8 is a schematic diagram of the structure of the piezoelectric actuator array structure provided in some other embodiments of the present application;

[0035] Figure 9 is Figure 8 Schematic diagram of the structure of the piezoelectric actuator;

[0036] Figure 10 is Figure 8 Schematic diagram of the structure of the middle base and the circuit board.

[0037] The meanings of the marks in the figure are as follows:

[0038] 100. Piezoelectric actuator array structure;

[0039] 10. Piezoelectric actuator array; 11. Piezoelectric actuator; 111. Actuator main body; 1111. Piezoelectric drive unit; 1112. Insulator; 1113. Conductive layer; 1114. Conductive sheet; 11141. Central hole; 11142. Arc hole; 112. Lead-out part; 1121. Connection hole;

[0040] 20. Base; 21. First through hole;

[0041] 30. Insulating sleeve; 31. Annular flange;

[0042] 40. Circuit board; 41. Second through hole; 42. Circuit; 42a. Positive circuit; 42b. Negative circuit;

[0043] 50. External connection wire. Detailed implementation manners

[0044] Hereinafter, embodiments of the technical solutions of the present application will be described in detail with reference to the accompanying drawings. The following embodiments are only used to illustrate the technical solutions of the present application more clearly, so they are only examples and cannot be used to limit the protection scope of the present application.

[0045] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which the present application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit the present application; the terms "including" and "having" and any variations thereof in the specification and claims of the present application and the above accompanying drawings are intended to cover non-exclusive inclusion.

[0046] In the description of the embodiments of the present application, technical terms such as "first" and "second" are only used to distinguish different objects, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of the present application, the meaning of "a plurality of" is more than two, unless otherwise specifically defined.

[0047] Reference to "embodiments" in this document means that the specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appearing in various positions in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0048] In the description of the embodiments of the present application, the term "and / or" is merely a description of the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can represent three situations: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this document generally represents an "or" relationship between the associated objects before and after.

[0049] In the description of the embodiments of the present application, the term "a plurality of" refers to more than two (including two). Similarly, "a plurality of groups" refers to more than two groups (including two groups), and "a plurality of pieces" refers to more than two pieces (including two pieces).

[0050] In the description of the embodiments of the present application, the orientation or positional relationship indicated by technical terms such as "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the indicated device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present application.

[0051] In the description of the embodiments of the present application, unless otherwise clearly specified and limited, technical terms such as "installation", "connection", "connection", "fixation", etc. should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can also be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and can be the communication inside two elements or the interaction relationship between two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0052] An embodiment of the first aspect of the present application provides a piezoelectric driver array structure, which can be used in precision optical components such as deformable mirrors / adaptive optics that require a large capacity density, and is mainly applied in fields such as laser communication and laser weapons. Please refer to Figure 1 , Figure 2 , Figure 4 and Figure 5 , the piezoelectric driver array structure 100 includes a piezoelectric driver array 10 and a base 20. The piezoelectric driver array 10 includes a plurality of piezoelectric drivers 11, and the ends of the plurality of piezoelectric drivers 11 are fixed on the base 20; the piezoelectric driver 11 includes a driver body 111 and a lead-out member 112 connected to the driver body 111, and the base 20 has a first through-hole 21 for the lead-out member 112 to pass through.

[0053] Wherein, the piezoelectric driver 11 is arranged along the first direction X, and the end of the piezoelectric driver 11 is fixed on the base 20, that is, one end of the piezoelectric driver 11 in the first direction X is fixed on the base 20. It can be understood that one end of the piezoelectric driver 11 can be fixed on the base 20 by means such as bonding, welding, and fastener connection.

[0054] Optionally, the driver body 111 includes a plurality of piezoelectric driving units 1111 arranged in a stacked manner along the first direction X, and a conductive layer 1113 on one side of the plurality of piezoelectric driving units 1111 in a direction perpendicular to the first direction X. Among them, according to the deformation amount requirement of the driver body 111, the piezoelectric driving units 1111 can be stacked two, three, four or more along the first direction X; for example, eight piezoelectric driving units 1111 are stacked along the first direction X.

[0055] The shape of the piezoelectric driving unit 1111 is not limited in the present application. For example, the piezoelectric driving unit 1111 can be a rectangular block structure, a circular block structure, etc.

[0056] There are two conductive layers 1113, which are a positive conductive layer and a negative conductive layer respectively, and both the positive conductive layer and the negative conductive layer extend along the first direction X. Among them, the positive conductive layer includes a plurality of positive conductive segments arranged along the first direction X, and the plurality of positive conductive segments are respectively arranged corresponding to the plurality of piezoelectric driving units 1111; the negative conductive layer includes a plurality of negative conductive segments arranged along the first direction X, and the plurality of negative conductive segments are respectively arranged corresponding to the plurality of piezoelectric driving units 1111.

[0057] Optionally, the conductive layer 1113 is a silver layer. The conductive layer 1113 made of silver material has excellent conductivity, which can effectively improve the current transmission efficiency and stability between the piezoelectric driving units 1111. Of course, the conductive layer 1113 can also be made of other conductive materials, such as copper, aluminum, etc.

[0058] It should be noted that a positive electrode layer and a negative electrode layer are respectively provided on both sides of each piezoelectric drive unit 1111 in the first direction X. Optionally, a plurality of positive electrode layers and a plurality of negative electrode layers are alternately arranged in the first direction X, wherein all the positive electrode layers are connected to the positive conductive layer, and all the negative electrode layers are connected to the negative conductive layer.

[0059] The lead-out member 112 is connected to the driver body 111. It can be understood that the lead-out member 112 can be fixedly connected to the driver body 111 by means such as welding and bonding.

[0060] It can be understood that the lead-out member 112 can be directly connected to the conductive layer 1113; alternatively, the driver body 111 further includes a conductive sheet 1114 connected to the conductive layer 1113, and the lead-out member 112 is connected to the conductive sheet 1114 to be connected to the conductive layer 1113 through the conductive sheet 1114; wherein, the conductive sheet 1114 can correspond to one or more piezoelectric drive units 1111.

[0061] Optionally, the base 20 has a disk structure. For example, the base 20 can be a disk, an elliptical disk, a polygonal disk, etc.; when the base 20 is a polygonal disk, the base 20 can be a triangular disk, a quadrilateral disk, a pentagonal disk, etc.

[0062] Among them, the first through hole 21 extends through the base 20 in the first direction X.

[0063] The beneficial effect of the piezoelectric driver array structure 100 provided by the embodiment of the present application: By providing the first through hole 21 on the base 20, the lead-out member 112 is led out from the end of the piezoelectric driver 11 and passes through the first through hole 21 to be connected to other devices; compared with the lead wire being led out from the side of the piezoelectric driver 11, when the number of piezoelectric drivers 11 in the piezoelectric driver array 10 is relatively large, it not only ensures that the lead-out member 112 is neater when being led out, but also can reduce the distance between the piezoelectric drivers 11, so that the piezoelectric driver array 10 is densely arranged in a limited space, improving the space utilization rate and being beneficial to the miniaturization of the deformable mirror.

[0064] Please refer to Figure 2 , in some embodiments, the piezoelectric driver 11 further includes two insulating members 1112. The two insulating members 1112 are located at both ends of the piezoelectric driver 11 in the first direction X, that is, a plurality of piezoelectric drive units 1111 are located between the two insulating members 1112. Among them, the insulating member 1112 can be an insulating plate or an insulating block.

[0065] Please also refer to Figure 4 and Figure 5 , in some embodiments, the base 20 is a metal base, and the piezoelectric driver array structure 100 further includes an insulating sleeve 30 provided in the first through hole 21.

[0066] It can be understood that the metal base can be made of materials such as iron, steel, and aluminum.

[0067] Among them, the shape of the insulating sleeve 30 is adapted to the shape of the first through-hole 21; it can be understood that the insulating sleeve 30 can be made of materials such as plastic and silica gel.

[0068] Since the metal base has high structural strength and is not easily deformed, it can ensure the stability of the fixing of each piezoelectric actuator 11 of the piezoelectric actuator array 10 on the base 20; and by providing the insulating sleeve 30 in the first through-hole 21, it is avoided that the lead-out member 112 contacts the hole wall of the first through-hole 21 to cause a short circuit.

[0069] In other embodiments, the base 20 can be an insulating base with a structural strength meeting the requirements. In this case, there is no need to provide the insulating sleeve 30 in the first through-hole 21; or, when the base 20 is a metal base, the insulating sleeve 30 can be not provided, but an insulating material can be coated on the hole wall of the first through-hole 21 to form an insulating layer.

[0070] Please refer to Figure 5 , in some embodiments, annular flanges 31 are respectively provided at both ends of the insulating sleeve 30, and the two annular flanges 31 respectively cover the hole edges at both ends of the first through-hole 21.

[0071] Among them, both ends of the insulating sleeve 30 refer to both ends of the insulating sleeve 30 in the first direction X.

[0072] By adopting the above technical solution, it is avoided that the piezoelectric actuator 11 contacts the hole edge of the first through-hole 21 during the assembly process to cause a short circuit, and the reliability of the piezoelectric actuator array 10 is further ensured.

[0073] In other embodiments, annular flanges 31 can be provided only at one end of the insulating sleeve 30, or annular flanges 31 can be not provided at both ends of the insulating sleeve 30.

[0074] Please also refer to Figure 2 and Figure 5 , in some embodiments, the lead-out member 112 is a lead-out sheet, and the first through-hole 21 is a strip-shaped hole.

[0075] Among them, the thickness direction of the lead-out sheet is perpendicular to the conductive layer 1113.

[0076] Optionally, the length of the strip-shaped hole is greater than the maximum width of the lead-out sheet to ensure that the lead-out sheet can pass through the strip-shaped hole smoothly.

[0077] Optionally, the lead-out sheet is connected to the conductive layer 1113 through a conductive sheet 1114. Among them, the lead-out sheet can be integrally formed with the conductive sheet 1114, or the lead-out sheet can be fixed (can but is not limited to welding) on the conductive sheet 1114.

[0078] Optionally, the conductive sheet 1114 extends along the first direction X and corresponds to a plurality of piezoelectric driving units 1111 of the same piezoelectric actuator 11. With such a design, even if the conductive layer 1113 between two adjacent piezoelectric driving units 1111 cracks, the electrode layers between two adjacent piezoelectric driving units 1111 can be connected through the conductive sheet 1114, thus avoiding an open circuit, ensuring that the piezoelectric actuator 11 can be used normally, and increasing the service life of the piezoelectric actuator 11. At the same time, the conductive sheet 1114 can also increase the overall structural strength of the piezoelectric actuator 11.

[0079] The conductive sheet 1114 is provided with a central hole 11141 and an arc hole 11142 at a position corresponding to the piezoelectric driving unit 1111, and the arc hole 11142 is arranged around the central hole 11141; wherein, the arc hole 11142 can be one or more. When there are multiple arc holes 11142, the multiple arc holes 11142 are arranged at intervals along the circumferential direction of the central hole 11141. In this way, the central hole 11141 and the arc hole 11142 can be used for welding, increasing the welding area, and at the same time, the welding area is relatively evenly distributed, which is beneficial to improving the welding stability between the conductive sheet 1114 and the conductive layer 1113. Optionally, the central hole 11141 is a round hole.

[0080] By adopting the above technical solution, the lead-out sheet is thinner, which can further reduce the distance between the piezoelectric actuators 11, and is more conducive to manufacturing a high-density piezoelectric actuator array 10.

[0081] In other embodiments, the lead-out member 112 is a lead-out wire, and the first through-hole 21 is a round hole, an oval hole or a polygonal hole; optionally, the lead-out wire is connected to the conductive layer 1113 through the conductive sheet 1114.

[0082] Please also refer to Figure 2 、 Figure 7 and Figure 8 , in some embodiments, the lead-out sheet has a connection hole 1121.

[0083] In this application, the shape of the connection hole 1121 is not limited. For example, the shape of the connection hole 1121 can be a round hole, an oval hole, a polygonal hole, etc.

[0084] It can be understood that one or more connection holes 1121 can be provided on the same lead-out sheet.

[0085] When there are multiple connection holes 1121 on the same lead-out sheet, the multiple connection holes 1121 on the same lead-out sheet can be arranged along the first direction X; or, the multiple connection holes 1121 on the same lead-out sheet are arranged in a direction perpendicular to the first direction X; or, when there are three connection holes 1121 on the same lead-out sheet, the three connection holes 1121 can be arranged in a triangular pattern.

[0086] By providing connection holes 1121 on the lead-out piece, it is not only convenient for the external wire 50 to be connected to the lead-out piece, but also convenient for the lead-out piece to be soldered to the circuit board 40.

[0087] In other embodiments, the connection holes 1121 may not be provided on the lead-out piece.

[0088] Please refer to Figures 8 to 10 , in some embodiments, the piezoelectric actuator array structure 100 further includes a circuit board 40. The circuit board 40 is located on the side of the base 20 facing away from the piezoelectric actuator array 10. The circuit board 40 has a second through hole 41. The lead-out member 112 sequentially passes through the first through hole 21 and the second through hole 41 and is bent and connected to the circuit 42 of the circuit board 40.

[0089] Among them, the circuit board 40 is fixed (which can be but is not limited to bonding) to the base 20.

[0090] It can be understood that the shape of the circuit board 40 is adapted to the shape of the base 20. For example, if the shape of the base 20 is circular, correspondingly, the shape of the circuit board 40 is circular; or, if the shape of the base 20 is oval, correspondingly, the shape of the circuit board 40 is oval; or, if the shape of the base 20 is polygonal, correspondingly, the shape of the circuit board 40 is polygonal.

[0091] Optionally, the number of the second through holes 41 is the same as the number of the first through holes 21 and they are arranged in one-to-one correspondence. It can be understood that each second through hole 41 is aligned with each first through hole 21 in the first direction X.

[0092] Optionally, each piezoelectric actuator 11 includes two lead-out members 112, which are respectively a positive lead-out member and a negative lead-out member. Correspondingly, there are two sets of circuits 42, one set is the positive circuit 42a and the other set is the negative circuit 42b. The positive circuit 42a is connected to all the positive lead-out members, and the negative circuit 42b is connected to all the negative lead-out members.

[0093] The lead-out member 112 sequentially passes through the first through hole 21 and the second through hole 41 and is bent and connected to the circuit 42 of the circuit board 40. It can be understood that the lead-out member 112 first sequentially passes through the first through hole 21 and the second through hole 41, then bends on the surface of the circuit board 40, and finally is soldered to the circuit 42.

[0094] By adopting the above technical solution, the overall parallel connection of the piezoelectric actuators 11 can be realized through the circuit board 40, reducing the process complexity and being more conducive to manufacturing a high-density piezoelectric actuator array 10.

[0095] In other embodiments, such as Figure 6 and Figure 7As shown, the circuit board 40 may not be provided, and the lead-out piece is connected to an external device through an external wire 50 to achieve independent power supply of the piezoelectric actuator 11.

[0096] Please refer to Figure 2 and Figure 3 In some embodiments, the piezoelectric actuator 11 includes two lead-out members 112, and the base 20 is provided with two first through-holes 21 at positions corresponding to the piezoelectric actuator 11.

[0097] The two lead-out members 112 are a positive lead-out member and a negative lead-out member respectively. Since the base 20 is provided with two first through-holes 21 at positions corresponding to the piezoelectric actuator 11, the positive lead-out member and the negative lead-out member respectively pass through the two first through-holes 21.

[0098] By adopting the above technical solution, the positive lead-out member and the negative lead-out member respectively pass through the two first through-holes 21, so that all the lead-out members 112 are led out from the end of the piezoelectric actuator 11 and respectively pass through the first through-holes 21 to be connected to other devices, further ensuring that the lead-out members 112 are tidier when led out.

[0099] In other embodiments, the piezoelectric actuator 11 includes two lead-out members 112, the base 20 is provided with one first through-hole 21 at a position corresponding to the piezoelectric actuator 11, one of the lead-out members 112 passes through the first through-hole 21, and the other lead-out member 112 is still led out from the side of the piezoelectric actuator 11.

[0100] Please also refer to Figure 2 and Figure 3 In some embodiments, the two lead-out members 112 of the same piezoelectric actuator 11 are on opposite sides of the actuator body 111.

[0101] By adopting the above technical solution, the two lead-out members 112 of the same piezoelectric actuator 11 are far apart and are not likely to interfere with each other.

[0102] In other embodiments, the two lead-out members 112 of the same piezoelectric actuator 11 may be on adjacent sides of the actuator body 111; or, the two lead-out members 112 of the same piezoelectric actuator 11 may be on the same side of the actuator body 111. At this time, the positive conductive layer and the negative conductive layer on the same side of the actuator body 111 are isolated.

[0103] The manufacturing method of the piezoelectric actuator array structure 100 provided in some embodiments of the present application is as follows:

[0104] Embodiment 1

[0105] (1) Twelve piezoelectric actuators 11 with dimensions of 5*5*18 mm are used to fabricate the piezoelectric actuator array 10. A base 20 with a diameter of 26 mm is selected as the bottom support of the product. A first through-hole 21 is designed with a 1-mm gap reserved between two adjacent piezoelectric actuators 11 on the base 20, and an insulating sleeve 30 is designed with a hole size of 2*0.1 mm. The structures of the base 20 and the insulating sleeve 30 are as shown in Figure 4 shown.

[0106] (2) The twelve piezoelectric actuators 11 are mounted on the base 20, and the lead-out parts 112 of the piezoelectric actuators 11 pass through the first through-holes 21 of the base 20.

[0107] (3) After the twelve piezoelectric actuators 11 are installed, the external connection wires 50 can be independently welded to each single piezoelectric actuator 11; alternatively, the twelve piezoelectric actuators 11 can be first connected in parallel through wires and then the external connection wires 50 are welded to each single piezoelectric actuator 11, as shown in Figure 6 shown.

[0108] Embodiment 2

[0109] (1) Twelve piezoelectric actuators 11 with dimensions of 5*5*18 mm are used to fabricate the piezoelectric actuator array 10. A base 20 with a diameter of 26 mm is selected as the bottom support of the product. A first through-hole 21 is designed with a 1-mm gap reserved between two adjacent piezoelectric actuators 11 on the base 20, and an insulating sleeve 30 is designed with a hole size of 2*0.1 mm. A circuit board 40 is fixed to the bottom of the base 20, and the circuit board 40 realizes the parallel connection of products at different positions through circuit design. The structures of the base 20 and the circuit board 40 are as shown in Figure 10 shown.

[0110] (2) The twelve piezoelectric actuators 11 are mounted on the base 20, and the lead-out parts 112 of the piezoelectric actuators 11 pass through the first through-holes 21 of the base 20, and then the lead-out parts 112 are bent on the surface of the circuit board 40.

[0111] (3) After the twelve piezoelectric actuators 11 are installed, the piezoelectric actuators 11 and the circuit board 40 at the bottom of the base 20 are welded into a whole through reflow soldering or soldering with a soldering iron, as shown in Figure 8 shown.

[0112] In a second aspect of the present application, a deformable mirror is proposed. The deformable mirror includes a mirror surface and a piezoelectric actuator array structure 100 as in the first aspect. A plurality of piezoelectric actuator array structures 100 are connected to the mirror surface and are used to drive the mirror surface to deform.

[0113] It can be understood that the mirror surface can be a continuous mirror surface, that is, the mirror surface is a whole thin sheet; or, the mirror surface can also be a spliced mirror surface, that is, the mirror surface is composed of multiple small sub-mirrors spliced together, and each piezoelectric actuator 11 is connected to and drives one sub-mirror.

[0114] The deformable mirror adopts any one or more embodiments of the above piezoelectric actuator array structure 100, and thus has the beneficial effects of the above embodiments, which will not be elaborated here one by one.

[0115] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be included in the protection scope of the present application.

Claims

1. A piezoelectric actuator array structure, characterized in that: It includes a piezoelectric actuator array and a base. The piezoelectric actuator array includes a plurality of piezoelectric actuators, and the ends of the plurality of piezoelectric actuators are fixed on the base. The piezoelectric actuator includes a driver body and a lead-out member connected to the driver body, and the base has a first through-hole for the lead-out member to pass through.

2. The piezoelectric actuator array structure according to claim 1, characterized in that: The base is a metal base, and the piezoelectric actuator array structure further includes an insulating sleeve disposed in the first through-hole.

3. The piezoelectric actuator array structure according to claim 2, wherein: At least one end of the insulating sleeve is provided with an annular flange, and the annular flange covers the edge of the first through-hole.

4. The piezoelectric actuator array structure according to claim 1, characterized in that: The lead-out member is a lead-out sheet, and the first through-hole is a strip-shaped hole.

5. The piezoelectric actuator array structure according to claim 4, characterized in that: The lead-out sheet has a connection hole.

6. The piezoelectric actuator array structure according to claim 4, characterized in that: The piezoelectric actuator array structure further includes a circuit board. The circuit board is on the side of the base facing away from the piezoelectric actuator array. The circuit board has a second through-hole, and the lead-out member sequentially passes through the first through-hole and the second through-hole and is bent and connected to the circuit on the circuit board.

7. The piezoelectric actuator array structure according to claim 1, wherein: The lead-out member is a lead-out wire, and the first through-hole is a round hole, an oval hole or a polygonal hole.

8. The piezoelectric actuator array structure according to any one of claims 1-7, characterized in that: The piezoelectric actuator includes two lead-out members, and two first through-holes are provided at the position of the base corresponding to the piezoelectric actuator.

9. The piezoelectric actuator array structure according to claim 8, characterized in that: The two lead-out members of the same piezoelectric actuator are on opposite sides of the driver body.

10. A deformable mirror, characterized in that: It includes the piezoelectric actuator array structure according to any one of claims 1-9.

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