Heating mechanism and coating equipment

Abstract

The utility model discloses a heating mechanism and coating equipment. The heating mechanism comprises a heating body and a heating container. A plurality of heating grooves are formed in the heating main body at intervals, one part of the heating grooves form a first heating area, and the other part of the heating grooves form a second heating area; the multiple heating containers are arranged in the multiple heating grooves in a one-to-one correspondence mode. Wherein the temperature of the heating container in the first heating area is T1, the temperature of the heating container in the second heating area is T2, and T1 and T2 meet the relational expression that T1-T2 is larger than or equal to 100 DEG C. The evaporation source can solve the problem that an evaporation source in the prior art cannot heat and evaporate different evaporation materials at the same time.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film processing, in particular to a heating mechanism and a film coating device. Background Art

[0002] Conductive film is a polymer material with a metal plated on its surface. It is widely used in lithium-ion batteries and is mainly used as a current collector in lithium-ion batteries. The coating on the conductive film can be obtained by vacuum evaporation coating process and / or magnetron sputtering process. Among them, vacuum evaporation coating refers to a process in which the film-forming material is heated and evaporated or sublimated in a vacuum environment, and then condensed or deposited on the surface of the conductive film to form a coating. After the film-forming material is heated and evaporated or sublimated inside the evaporation crucible, it rises and is emitted through the evaporation outlet above the evaporation crucible. The evaporated film-forming material gradually cools down after leaving the evaporation crucible, and is finally deposited on the surface of the conductive film to form a film layer.

[0003] Existing vacuum evaporation coating technologies typically utilize doping to deposit the same film layer. This involves simultaneously depositing the conductive film surface using at least two different deposition sources containing different deposition materials. Due to the varying melting points of these materials, the deposition source must provide a higher evaporation temperature for materials with higher melting points, while lower evaporation temperatures are required for materials with lower melting points.

[0004] However, in the prior art, the heating temperature of each location on the evaporation source is the same. For evaporation materials with different melting points, different evaporation sources need to be used for separate heating and evaporation, resulting in high energy consumption of the evaporation source and high coating costs. Utility Model Content

[0005] The main purpose of the utility model is to provide a heating mechanism and a coating device to solve the problem in the prior art that the evaporation source cannot heat and evaporate different evaporation materials at the same time.

[0006] According to one aspect of the present invention, a heating mechanism is provided, comprising:

[0007] A heating body having a plurality of heating slots spaced apart from each other, wherein a portion of the heating slots forms a first heating area and another portion of the heating slots forms a second heating area;

[0008] A heating container, wherein the heating container comprises a plurality of heating containers, and the plurality of heating containers are disposed in a one-to-one correspondence in the plurality of heating tanks;

[0009] The temperature of the heating container in the first heating area is T1, the temperature of the heating container in the second heating area is T2, and T1 and T2 satisfy the relationship: |T1-T2|≥100°C.

[0010] Furthermore, the contact area between the heating grooves in the first heating region and the heating container is smaller than the contact area between the heating grooves in the second heating region and the heating container.

[0011] Furthermore, a cross-sectional area of the heating groove in the first heating region is smaller than a cross-sectional area of the heating groove in the second heating region.

[0012] Furthermore, the cross section of the heating tank includes a circle, a triangle, a square or a trapezoid.

[0013] Furthermore, along the thickness direction of the heating body, the cross-sectional area of the heating groove gradually decreases from top to bottom or remains unchanged.

[0014] Furthermore, along the thickness direction of the heating body, the depth of the heating groove in the first heating area is smaller than the depth of the heating groove in the second heating area.

[0015] Furthermore, a first gap is provided between the bottom of the heating tank of the first heating area and the bottom of the heating container; and / or,

[0016] A second gap is defined between a side wall of the heating tank in the first heating region and a side wall of the heating container.

[0017] Furthermore, a first protrusion is provided at the bottom of the heating groove of the first heating area, so that the first gap is formed between the bottom of the heating groove of the first heating area and the bottom of the heating container; and / or,

[0018] The side wall of the heating groove of the first heating area is provided with a second protrusion, so that the second gap is formed between the side wall of the heating groove of the first heating area and the side wall of the heating container.

[0019] Furthermore, a heat insulating member is provided in the first gap and / or the second gap.

[0020] On the other hand, the present invention further provides a coating device, which includes the above-mentioned heating mechanism.

[0021] In the present invention, compared with the heating mechanism in the prior art, the present invention makes the temperature of the heating container in the first heating area lower than or higher than the temperature of the heating container in the second heating area, so that the temperature T1 of the heating container in the first heating area and the temperature T2 of the heating container in the second heating area satisfy the relationship: |T1-T2|≥100℃. In this way, it can be ensured that the temperature of the heating container in the first heating area is lower than or higher than the temperature of the heating container in the second heating area, thereby ensuring that there are heating areas with different temperatures on the same heating body, and then the target materials or impurities with different melting points can be heated and evaporated at the same time, saving the energy consumption of the heating mechanism and reducing the coating cost. In addition, the purpose of forming the mixed film layer is to modify the surface of the base film layer to avoid the problem of sticking film due to the surface properties of the metal layers on both sides of the polymer base film layer being close or considered to be the same. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] The drawings described herein are used to provide a further understanding of the present invention and constitute a part of the present invention. The exemplary embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute an improper limitation of the present invention. In the drawings:

[0023] Figure 1 This is a schematic structural diagram of a heating mechanism with a first protrusion disclosed in an embodiment of the present utility model;

[0024] Figure 2 This is a schematic structural diagram of a heating mechanism with a second protrusion disclosed in an embodiment of the present utility model;

[0025] Figure 3 A top view of the heating body disclosed in an embodiment of the present utility model;

[0026] Figure 4 The attached embodiment disclosed in this utility model Figure 3 AA section view in;

[0027] Figure 5 The attached embodiment disclosed in this utility model Figure 3 BB cross-sectional view in;

[0028] Figure 6 This is a schematic structural diagram of a first heating body with different heating areas disclosed in an embodiment of the present utility model;

[0029] Figure 7 This is a schematic structural diagram of a second heating body with different heating areas disclosed in an embodiment of the present utility model;

[0030] Figure 8 This is a schematic structural diagram of a third heating body with different heating areas disclosed in an embodiment of the present utility model;

[0031] Figure 9 This is a cross-sectional view of the first heating body disclosed in an embodiment of the present utility model;

[0032] Figure 10 A cross-sectional view of a second heating body disclosed in an embodiment of the present utility model;

[0033] Figure 11 This is a flow chart of a method for preparing a conductive film disclosed in an embodiment of the present utility model.

[0034] The above drawings include the following reference numerals:

[0035] 10. Heating body; 11. Heating tank; 20. Heating container; 30. First protrusion; 40. Second protrusion; 60. First heating area; 70. Second heating area. DETAILED DESCRIPTION

[0036] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0037] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0038] Unless otherwise specifically stated, the relative arrangement of the parts and steps, the numerical expressions and the numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to the actual proportional relationship. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values should be interpreted as being merely exemplary and not as limiting. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0039] As mentioned in the background, because conventional evaporation sources maintain the same heating temperature at all locations, different evaporation materials with different melting points require separate heating and evaporation from different evaporation sources. This results in high energy consumption and high coating costs. To address this issue, the inventors of the present invention have designed a novel heating mechanism that addresses the conventional evaporation source's inability to simultaneously heat and evaporate different evaporation materials. The following describes the heating mechanism in detail with reference to the accompanying drawings.

[0040] It should be noted that the "thickness direction of the heating body 10" in the present invention is the thickness direction of the heating body 10. Figure 10 The direction indicated by the letter X.

[0041] See also Figures 1 to 10 As shown, the present invention provides a heating mechanism, which includes a heating body 10 and a heating container 20.

[0042] Specifically, the heating body 10 has a plurality of heating slots 11 spaced apart from each other. Some of the heating slots 11 form a first heating region 60, while others form a second heating region 70. The heating vessels 20 are disposed in a one-to-one correspondence within the plurality of heating slots 11. The temperature of the heating vessels 20 in the first heating region 60 is T1, and the temperature of the heating vessels 20 in the second heating region 70 is T2. The relationship between T1 and T2 satisfies the equation: |T1-T2|≥100°C.

[0043] In this embodiment, when the heating mechanism is actually manufactured, a plurality of heating tanks 11 can be provided on the heating body 10, and the plurality of heating tanks 11 are arranged at intervals, and then the heating containers 20 are installed in each heating tank 11 in a one-to-one correspondence. Since the temperature T1 of the heating container 20 in the first heating area 60 and the temperature T2 of the heating container 20 in the second heating area 70 in this embodiment satisfy the relationship: |T1-T2|≥100°C, during the heating process of the heating mechanism, the temperature of the heating container 20 in the heating tank 11 of the first heating area 60 will be lower or higher than the temperature of the heating container 20 in the heating tank 11 of the second heating area 70. When it is necessary to heat metal targets or impurities with different melting points, it is only necessary to place the metal target or other material with a low melting point in the heating container 20 with a relatively low temperature, and place the metal target or impurity with a high melting point in the heating container 20 with a relatively high temperature. In this way, it is possible to ensure that the same heating body 10 has heating areas with different temperatures, so that metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing coating costs. It can be understood that the value of |T1-T2| in this embodiment can be 100°C, 150°C, 200°C, 250°C, 300°C, 350°C, 400°C, 450°C, 500°C, etc.

[0044] That is to say, compared with the heating mechanism in the prior art, this embodiment makes the temperature of the heating container 20 in the first heating area 60 lower than or higher than the temperature of the heating container 20 in the second heating area 70, so that the temperature T1 of the heating container 20 in the first heating area 60 and the temperature T2 of the heating container 20 in the second heating area 70 satisfy the relationship: |T1-T2|≥100°C. In this way, it can be ensured that the temperature of the heating container 20 in the first heating area 60 is lower than or higher than the temperature of the heating container 20 in the second heating area 70, thereby ensuring that there are heating areas with different temperatures on the same heating body 10, and then the targets or impurities with different melting points can be heated and evaporated at the same time, saving the energy consumption of the heating mechanism and reducing the coating cost. In addition, the purpose of forming the mixed film layer is to modify the surface of the base film layer to avoid the problem of sticking film due to the surface properties of the metal layers on both sides of the polymer base film layer being close or considered to be the same.

[0045] It is understandable that the first heating area 60 and the second heating area 70 in the present invention can be set in any area of the heating body 10, and are not limited to the following areas. Figures 6 to 8 The situation shown.

[0046] Optionally, the “heating tank 11 ” and the “heating container 20 ” in this embodiment may include two, three, four or more than four respectively, and the present invention does not make any specific limitation here.

[0047] It can be understood that the "heating body 10" in this embodiment is an electrode, and the metal target material or impurities in the heating container 20 of the first heating area 60 and the heating container 20 of the second heating area 70 are heated simultaneously by the same electrode to achieve thermal evaporation of the metal target material or impurities; the "heating container 20" in this embodiment includes a graphite crucible or a high-temperature resistant metal crucible, wherein the metal crucible can specifically include one of a tungsten crucible, a molybdenum crucible and an alloy crucible containing one of the elements.

[0048] Furthermore, in this embodiment, the contact area between the heating tank 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating tank 11 of the second heating zone 70 and the heating container 20. Specifically, because the contact area between the heating tank 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating tank 11 of the second heating zone 70 and the heating container 20, during the heating process of the heating mechanism, the temperature of the heating container 20 of the first heating zone 60 will be lower than the temperature of the heating container 20 of the second heating zone 70. When it is necessary to heat metal targets or impurities with different melting points, it is only necessary to place the metal target or other material with a low melting point into the heating container 20 of the first heating zone 60 and the metal target or impurity with a high melting point into the heating container 20 of the second heating zone 70. In this way, it is possible to ensure that the same heating body 10 has heating zones with different temperatures, so that metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing coating costs.

[0049] In some embodiments of the present invention, since the contact area between the heating tank 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating tank 11 of the second heating zone 70 and the heating container 20, after the copper layer is plated on the base film layer of the conductive film, a functional film layer with a lower melting point than that of the copper layer is plated on the surface of the copper layer. The functional film layer includes an anti-sticking layer, such as at least one of a zinc layer and a tin layer, for preventing the copper layers on opposite sides of the conductive film from sticking to each other. During the above-mentioned coating process, the heating container 20 of the first heating zone 60 contains a material with a lower melting point than copper, such as at least one of zinc and tin, while the heating container 20 of the second heating zone 70 contains a copper material.

[0050] In other embodiments of the present invention, the contact area between the heating tank 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating tank 11 of the second heating zone 70 and the heating container 20. After the copper layer is plated on the base film layer of the conductive film, a functional film layer having a higher melting point than that of the copper layer is plated on the surface of the copper layer. The functional film layer includes an anti-sticking layer, such as a nickel layer, for preventing the copper layers on opposite sides of the conductive film from sticking to each other. During the above-mentioned coating process, the heating container 20 of the first heating zone 60 contains copper material, and the heating container of the second heating zone 70 contains a material having a higher melting point than copper, such as nickel.

[0051] It can be understood that the “cross-sectional area of the heating tank 11 ” in the present invention refers to the area of the cross section obtained by cutting the heating tank 11 along a direction perpendicular to the thickness of the heating body 10 .

[0052] Further, see Figure 9 As shown, the cross-sectional area of the heating tank 11 of the first heating zone 60 in this embodiment is smaller than the cross-sectional area of the heating tank 11 of the second heating zone 70. In other words, the cross-sectional area of a portion of the heating tank 11 in this embodiment is smaller than the cross-sectional area of another portion of the heating tank 11, so that the contact area between the heating tank 11 with a smaller cross-sectional area and the heating container 20 is smaller than the contact area between the heating tank 11 with a larger cross-sectional area and the heating container 20. With this arrangement, when the heating body 10 begins to heat, the temperature of the heating container 20 in the heating tank 11 with a smaller cross-sectional area will be lower than the temperature of the heating container 20 in the heating tank 11 with a larger cross-sectional area, thereby forming heating zones with different temperatures on the same heating body 10, and further, metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing coating costs.

[0053] Specifically, the cross-section of the heating tank 11 in this embodiment includes a circular, triangular, square, or trapezoidal shape, which has a simple structure and is easy to process. Of course, in other embodiments of the present invention, the cross-section of the heating tank 11 may also include other polygonal structures or special-shaped structures. As long as other deformation methods are based on the concept of the present invention, they are within the scope of protection of the present invention. It should be noted that the "cross-section of the heating tank 11" in this embodiment refers to the cross-section obtained by cutting the heating tank 11 along a direction perpendicular to the thickness of the heating body 10.

[0054] Further, see Figures 9 and 10As shown, along the thickness direction of the heating body 10, the cross-sectional area of the heating groove 11 in this embodiment (i.e., the cross-sectional area obtained by cutting the heating groove 11 perpendicular to the thickness direction of the heating body 10) gradually decreases from top to bottom or remains unchanged. Specifically, when it is necessary to make the temperature of the heating container 20 of the first heating zone 60 lower than the temperature of the heating container 20 of the second heating zone 70, it is only necessary to gradually reduce the cross-sectional area of the heating groove 11 of the first heating zone 60 along the thickness direction of the heating body 10, and keep the cross-sectional area of the heating groove 11 of the second heating zone 70 along the thickness direction of the heating body 10 unchanged, so that the contact area between the heating groove 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating groove 11 and the heating container 20 in the second heating zone 70 (i.e., the temperature of the heating container 20 of the first heating zone 60 is lower than the temperature of the heating container 20 of the second heating zone 70). In this way, it is possible to ensure that the same heating body 10 has heating zones with different temperatures, so that targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing the coating cost.

[0055] Further, see Figures 4 and 5 As shown, along the thickness direction of the heating body 10, the depth of the heating groove 11 in the first heating region 60 of this embodiment is less than the depth of the heating groove 11 in the second heating region 70. Specifically, this embodiment can control the contact area between the heating container 20 and the heating groove 11 by controlling the depth of the heating groove 11, so that the temperature of the heating container 20 in the shallower heating groove 11 is low, suitable for evaporating low-melting-point metal targets or impurity materials, while the temperature of the heating container 20 in the deeper heating groove 11 is high, suitable for evaporating high-melting-point metal targets or impurity materials. That is to say, since the depth of the heating groove 11 of the first heating area 60 in this embodiment is smaller than the depth of the heating groove 11 of the second heating area 70, when the heating body 10 starts to heat, the temperature of the heating container 20 in the heating groove 11 of the first heating area 60 is low, which can evaporate metal targets or impurity materials with low melting points, and the temperature of the heating container 20 in the heating groove 11 of the second heating area 70 is high, which can evaporate metal targets or impurity materials with high melting points, ultimately realizing heating areas with different temperatures on the same heating body 10, so that metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing coating costs.

[0056] Further, see Figure 1As shown, in this embodiment, a first gap is provided between the bottom of the heating groove 11 of the first heating region 60 and the bottom of the heating container 20. Specifically, the provision of the first gap can reduce the contact area between the heating groove 11 of the first heating region 60 and the heating container 20 or prevent the bottom of the heating groove 11 of the first heating region 60 from contacting the bottom of the heating container 20, thereby lowering the temperature of the heating container 20 of the first heating region 60. Furthermore, heating regions with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and ultimately form a mixed metal layer on the surface of the base film layer to be plated.

[0057] Further, see Figure 2 As shown, in this embodiment, a second gap is provided between the sidewall of the heating groove 11 of the first heating region 60 and the sidewall of the heating container 20. Specifically, the provision of the second gap can reduce the contact area between the heating groove 11 of the first heating region 60 and the heating container 20 or prevent the sidewall of the heating groove 11 of the first heating region 60 from contacting the sidewall of the heating container 20, thereby lowering the temperature of the heating container 20 of the first heating region 60. Furthermore, heating regions with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and ultimately form a mixed metal layer on the surface of the base film layer to be plated.

[0058] Further, see Figure 1 As shown, in this embodiment, a first protrusion 30 is provided at the bottom of the heating groove 11 of the first heating region 60, so that a first gap is formed between the bottom of the heating groove 11 of the first heating region 60 and the bottom of the heating container 20. Specifically, in this embodiment, by providing the first protrusion 30 at the bottom of the heating groove 11, the contact area between the bottom of the heating groove 11 of the first heating region 60 and the bottom of the heating container 20 can be reduced, thereby reducing heat conduction between the heating container 20 and the heating body 10, lowering the temperature of the heating container 20 of the first heating region 60, and making the temperature of the heating container 20 of the first heating region 60 lower than the temperature of the heating container 20 of the second heating region 70. In addition, heating regions with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and finally form a mixed metal layer on the surface of the base film layer to be coated, saving energy consumption of the heating mechanism and reducing coating costs.

[0059] Further, see Figure 2As shown, in this embodiment, the sidewalls of the heating groove 11 of the first heating region 60 are provided with second protrusions 40, so that a second gap is formed between the sidewalls of the heating groove 11 of the first heating region 60 and the sidewalls of the heating container 20. Specifically, in this embodiment, by providing the second protrusions 40 at the bottom of the heating groove 11, the contact area between the sidewalls of the heating groove 11 of the first heating region 60 and the sidewalls of the heating container 20 can be reduced, thereby reducing heat conduction between the heating container 20 and the heating body 10, lowering the temperature of the heating container 20 of the first heating region 60, and making the temperature of the heating container 20 of the first heating region 60 lower than the temperature of the heating container 20 of the second heating region 70. In addition, heating regions with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and ultimately form a mixed metal layer on the surface of the base film layer to be coated, saving energy consumption of the heating mechanism and reducing coating costs.

[0060] Specifically, the first protrusion 30 and the second protrusion 40 in this embodiment both include an annular convex hull, an annular convex ridge, or a conical convex ridge.

[0061] Furthermore, in the present embodiment, a heat insulating member is provided in the first gap and / or the second gap (not shown in the drawings). That is to say, in the present embodiment, a heat insulating member may be provided only in the first gap, or only in the second gap, or both in the first gap and the second gap. With such a configuration, when the heating body 10 starts to heat, the configuration of the heat insulating member can effectively block the heat of the heating body 10 from being transferred from the heating tank 11 toward the heating container 20, further reducing the temperature of the heating container 20 in the first heating area 60, so that the temperature of the heating container 20 in the first heating area 60 is lower than the temperature of the heating container 20 in the second heating area 70, and thus heating areas with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and finally a mixed metal layer can be formed on the surface of the base film layer to be plated, saving energy consumption of the heating mechanism and reducing the coating cost.

[0062] Optionally, the thermal insulation member in this embodiment includes one or more of graphite felt, ceramic fiber blanket, silicate board, aerogel felt and silicon carbide fiber board.

[0063] Furthermore, in this embodiment, the maximum width of the heating groove 11 of the first heating region 60 is greater than the maximum width of the heating container 20. That is to say, when the heating container 20 is installed in the heating groove 11 of the first heating region 60, the side wall of the heating groove 11 does not come into contact with the side wall of the heating container 20, thereby reducing heat conduction between the heating container 20 and the heating body 10, lowering the temperature of the heating container 20 in the first heating region 60, and making the temperature of the heating container 20 in the first heating region 60 lower than the temperature of the heating container 20 in the second heating region 70. In addition, heating regions with different temperatures can be formed on the same heating body 10, so that the same heating body 10 can simultaneously heat and evaporate metal targets or impurities with different melting points, and finally form a mixed metal layer on the surface of the base film layer to be coated, saving energy consumption of the heating mechanism and reducing coating costs.

[0064] Furthermore, in this embodiment, the thermal conductivity of the heating container 20 of the first heating zone 60 is lower than the thermal conductivity of the heating container 20 of the second heating zone 70. This arrangement ensures that the temperature of the heating container 20 of the first heating zone 60 is lower than the temperature of the heating container 20 of the second heating zone 70, thereby forming heating zones with different temperatures on the same heating body 10. This allows the same heating body 10 to simultaneously heat and evaporate metal targets or impurities with different melting points, thereby forming a mixed metal layer on the surface of the base film layer to be deposited, saving energy consumption of the heating mechanism and reducing the cost of film deposition.

[0065] Optionally, the heating container 20 of the second heating zone 70 in this embodiment includes an aluminum nitride crucible, a tungsten crucible, a molybdenum crucible, or an alloy crucible containing at least one of tungsten and molybdenum.

[0066] In combination with the above embodiments, it can be known that the utility model is provided with a plurality of spaced heating grooves 11 on the heating body 10. By making the contact area between a part of the heating grooves 11 and the heating container 20 smaller than the contact area between the other part of the heating grooves 11 and the heating container 20, the temperature of the heating container 20 with a small contact area can be reduced, thereby ensuring that there are heating areas with different temperatures on the same heating body 10, and then metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing the coating cost.

[0067] On the other hand, the embodiment of the present invention further provides a coating device, which includes the above-mentioned heating mechanism, and thus the coating device includes all the technical effects of the above-mentioned heating mechanism. Since the technical effects of the heating mechanism have been described in detail above, they will not be repeated here.

[0068] On the other hand, see Figure 11As shown, the present invention also provides a method for preparing a conductive film. This method is performed using the aforementioned coating apparatus. Therefore, this method includes all the technical effects of the aforementioned coating apparatus. Since the technical effects of hot standby coating have been described in detail above, they will not be repeated here.

[0069] Further, see Figure 11 As shown, the method for preparing the conductive film in this embodiment includes:

[0070] Step S1: transferring the base film layer to the heating body 10 of the heating mechanism;

[0071] Step S2: The first metal target material in the heating container 20 in the first heating area 60 and the second metal target material in the heating container 20 in the second heating area 70 are simultaneously heated and evaporated by the heating main body 10, so that the first metal target material and the second metal target material are deposited on the surface of the base film layer to form a mixed metal layer.

[0072] In one embodiment of the present invention, since the contact area between the heating groove 11 in the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating groove 11 in the second heating zone 70 and the heating container 20, during the heating process of the heating mechanism, the temperature of the heating container 20 in the heating groove 11 of the first heating zone 60 will be lower than the temperature of the heating container 20 in the heating groove 11 of the second heating zone 70. When it is necessary to heat metal targets or impurities with different melting points, it is only necessary to place the metal target or other material with a low melting point in the heating container 20 of the first heating zone 60, and place the metal target or impurity with a high melting point in the heating container 20 of the second heating zone 70. In this way, it is possible to ensure that there are heating zones with different temperatures on the same heating body 10, so that metal targets or impurities with different melting points can be heated and evaporated at the same time, saving energy consumption of the heating mechanism and reducing coating costs.

[0073] Furthermore, in step S2, the melting point of the first metal target is Q1, and the melting point of the second metal target is Q2, wherein Q1 and Q2 satisfy the relationship: |Q1-Q2|≥250°C, for example, 250°C, 350°C, 450°C, 550°C, 650°C, 750°C, 850°C, 950°C, etc. In other words, in this embodiment, the melting point of the first metal target can be lower than the melting point of the second metal target, or higher than the melting point of the second metal target.

[0074] Specifically, in one embodiment of the present invention, when the contact area between the heating groove 11 and the heating container 20 in the first heating zone 60 is smaller than the contact area between the heating groove 11 and the heating container 20 in the second heating zone 70, the temperature of the heating container 20 in the first heating zone 60 will be lower than the temperature of the heating container 20 in the second heating zone 70, so that the melting point Q1 of the first metal target material will be lower than the melting point Q2 of the second metal target material. At this time, the relationship between Q1 and Q2 satisfies the relationship: Q2-Q1≥250℃, for example, 250℃, 350℃, 450℃, 550℃, 650℃, 750℃, 850℃, 950℃, etc.

[0075] Further, in step S2, when the contact area between the heating tank 11 of the first heating zone 60 and the heating container 20 is smaller than the contact area between the heating tank 11 of the second heating zone 70 and the heating container 20, the temperature T1 of the heating container 20 of the first heating zone 60 and the temperature T2 of the heating container 20 of the second heating zone 70 satisfy the relationship: |T1-T2|≥100℃, for example, 100℃, 200℃, 300℃, 400℃, 500℃, etc.

[0076] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0077] In addition, it should be noted that the use of words such as "first" and "second" to limit components is only for the convenience of distinguishing the corresponding components. Unless otherwise stated, the above words have no special meaning and therefore cannot be understood as limiting the scope of protection of this utility model.

[0078] The above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A heating mechanism, characterized in that: include: A heating body (10), wherein the heating body (10) has a plurality of heating grooves (11) arranged at intervals, a portion of the heating grooves (11) forming a first heating area (60), and another portion of the heating grooves (11) forming a second heating area (70); A heating container (20), wherein the heating container (20) comprises a plurality of heating containers (20), and the plurality of heating containers (20) are disposed in a one-to-one correspondence within the plurality of heating tanks (11); The temperature of the heating container (20) of the first heating area (60) is T1, the temperature of the heating container (20) of the second heating area (70) is T2, and the relationship between T1 and T2 satisfies the following equation: |T1-T2|≥100°C.

2. The heating mechanism according to claim 1, characterized in that The contact area between the heating groove (11) and the heating container (20) of the first heating region (60) is smaller than the contact area between the heating groove (11) and the heating container (20) of the second heating region (70).

3. The heating mechanism according to claim 2, characterized in that: The cross-sectional area of the heating groove (11) of the first heating region (60) is smaller than the cross-sectional area of the heating groove (11) of the second heating region (70).

4. The heating mechanism according to claim 2, characterized in that The cross section of the heating tank (11) includes a circle, a triangle, a square or a trapezoid.

5. The heating mechanism according to claim 2, characterized in that: Along the thickness direction of the heating body (10), the cross-sectional area of the heating groove (11) gradually decreases from top to bottom or remains unchanged.

6. The heating mechanism according to claim 2, characterized in that: Along the thickness direction of the heating body (10), the depth of the heating groove (11) of the first heating area (60) is smaller than the depth of the heating groove (11) of the second heating area (70).

7. The heating mechanism according to claim 2, characterized in that: There is a first gap between the bottom of the heating tank (11) of the first heating area (60) and the bottom of the heating container (20); and / or, A second gap is provided between the side wall of the heating tank (11) of the first heating area (60) and the side wall of the heating container (20).

8. The heating mechanism according to claim 7, characterized in that: The bottom of the heating groove (11) of the first heating area (60) is provided with a first protrusion (30), so that the first gap exists between the bottom of the heating groove (11) of the first heating area (60) and the bottom of the heating container (20); and / or, The side wall of the heating groove (11) of the first heating area (60) is provided with a second protrusion (40) so that the second gap is provided between the side wall of the heating groove (11) of the first heating area (60) and the side wall of the heating container (20).

9. The heating mechanism according to claim 7, characterized in that: A heat insulating element is provided in the first gap and / or the second gap.

10. A coating device, characterized in that: The coating equipment includes the heating mechanism according to any one of claims 1 to 9.

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