Piezoelectric / piezoresistive MEMS gyroscope

Abstract

The utility model relates to a piezoelectric / piezoresistive MEMS gyroscope, which comprises a substrate, a driving mechanism and a detection mechanism, the driving mechanism comprises fixed comb teeth fixedly arranged on the substrate, movable comb teeth positioned between the adjacent fixed comb teeth, and a driving frame connected with the movable comb teeth; the two driving frames are oppositely arranged in the first direction. The detection mechanism comprises two detection frames, a lever beam, a first piezoelectric / piezoresistive beam and a first anchor point, and the two detection frames are respectively connected in the driving frame and can vibrate along the first direction along with the driving frame; the two ends of the lever beam in the first direction are connected to the detection frame. The middle of the lever beam is hinged to the base plate in the second direction. The first piezoelectric / piezoresistive beam extends along a first direction; one end of the first piezoelectric / piezoresistive beam is fixedly arranged on the lever beam, and the other end is fixedly arranged on the first anchor point. The piezoelectric / piezoresistive MEMS gyroscope provided by the utility model can be sensitive to the angular velocity parallel to the substrate, and is high in sensitivity; the size is small and manufacturing is simple.

Description

Technical Field

[0001] The utility model relates to the technical field of micromechanical gyroscopes, in particular to a piezoelectric / piezoresistive MEMS gyroscope. Background Art

[0002] Currently, micro-electromechanical (MEM) gyroscopes are widely used in consumer electronics, automotive, and industrial applications. Most MEMS gyroscopes are based on the Coriolis force principle, driving the motion of a mass and detecting its motion in the opposite direction. The main driving and detection principles include capacitive, piezoresistive, electromagnetic, and piezoelectric. However, devices based on these principles face a trade-off between small size and high performance. Furthermore, existing devices are complex to manufacture at the micro- and nanoscale.

[0003] The existing micro-electromechanical gyroscope generally adopts a four-mass micro-mechanical gyroscope with a diamond coupling structure. Since it uses capacitive drive and detection, it is difficult to reduce the gyroscope area, and the sensitivity and precision of the gyroscope are low. Utility Model Content

[0004] The utility model provides a piezoelectric / piezoresistive MEMS gyroscope, which is used to solve the technical problems of large size, low sensitivity and low precision of the micro-electromechanical gyroscope in the prior art.

[0005] The utility model provides a piezoelectric / piezoresistive MEMS gyroscope, comprising:

[0006] substrate;

[0007] A driving mechanism comprising fixed comb teeth, movable comb teeth and a driving frame, wherein the fixed comb teeth are fixed to the substrate; the movable comb teeth are located between adjacent fixed comb teeth; the driving frame is connected to the movable comb teeth; the driving frame has two and is arranged opposite to each other along a first direction; the driving mechanism is configured such that: under the action of a driving voltage, the fixed comb teeth exert an electrostatic force on the movable comb teeth, and the movable comb teeth drive the driving frame to vibrate along the first direction; and

[0008] A detection mechanism comprises a detection frame, a lever beam, a first piezoelectric / piezoresistive beam and a first anchor point, wherein the detection frame has two, each of which is connected to the driving frame and can vibrate along the first direction following the driving frame; the two ends of the lever beam along the first direction are respectively connected to the detection frame; the middle part of the lever beam is hinged to the substrate along the second direction; the first piezoelectric / piezoresistive beam extends along the first direction; one end of the first piezoelectric / piezoresistive beam is fixed to the lever beam, and the other end is fixed to the first anchor point; the first piezoelectric / piezoresistive beam has at least one group, and each group of the piezoelectric / piezoresistive beams is symmetrically arranged relative to the middle part of the lever beam; the detection mechanism is configured as follows: an angular velocity is input along the second direction, and under the action of the Coriolis force, the detection frame moves along the second direction relative to the driving frame, driving the lever beam to rotate along the second direction, generating tension or pressure on each group of the first piezoelectric / piezoresistive beams, and the angular velocity is obtained through the differential signal of each group of the first piezoelectric / piezoresistive beams;

[0009] The planes where the first direction and the second direction are located are parallel to the plane where the substrate is located.

[0010] The present invention provides a piezoelectric / piezoresistive MEMS gyroscope, which, on the one hand, is sensitive to angular velocities parallel to a substrate. By detecting stress changes on a first piezoelectric / piezoresistive beam, the degree of torsion of the lever beam is obtained, thereby calculating the Coriolis force acting on the detection frame, and further obtaining the deflection angle and angular velocity of the gyroscope. On the other hand, the cooperation between the lever beam and the first piezoelectric / piezoresistive beam can significantly improve the sensitivity of the gyroscope, thereby enabling the measurement of highly sensitive angular velocities. In addition, compared with the four-mass micromechanical gyroscope in the prior art, the number of fixed comb teeth and movable comb teeth is reduced, thereby reducing the overall volume of the gyroscope.

[0011] Furthermore, the base plate is provided with a fourth anchor point; the middle portion of the lever beam is hinged to the fourth anchor point;

[0012] And / or, the first piezoelectric / piezoresistive beams have a group, and the first piezoelectric / piezoresistive beams in this group are axially symmetrically arranged along the second direction or centrally symmetrically arranged along the third direction relative to the middle part of the lever beam; or, the first piezoelectric / piezoresistive beams have two groups, and the two groups of first piezoelectric / piezoresistive beams are respectively located on both sides of the lever beam; wherein the third direction is perpendicular to the first direction and the second direction.

[0013] Furthermore, the lever beam has a cross-shaped structure, and a connecting portion is provided in the middle of the lever beam, and at least one end of the connecting portion along the second direction is hinged to the fourth anchor point; one end of the first piezoelectric / piezoresistive beam is fixed to the connecting portion.

[0014] Furthermore, both ends of the connecting portion along the second direction are connected to hinged beams, and the hinged beams are hinged to the fourth anchor point.

[0015] Furthermore, the drive frame is connected to a drive feedback assembly, which is used to detect the displacement of the drive frame along the first direction; the drive feedback assembly is connected to the drive mechanism. In this way, it is used to detect the displacement of the drive frame.

[0016] Furthermore, the drive feedback component includes a second piezoelectric / piezoresistive beam and a second anchor point, the second anchor point is fixed to the substrate, one end of the second piezoelectric / piezoresistive beam is fixed to the second anchor point, and the other end is connected to the drive frame.

[0017] Furthermore, the drive feedback component also includes a second elastic folding beam and a third anchor point, the third anchor point is fixed to the substrate, one end of the second elastic folding beam is fixed to the third anchor point, and the other end is connected to the drive frame; the second elastic folding beam can be deformed along the first direction.

[0018] Furthermore, there are two second piezoelectric / piezoresistive beams and two second anchor points, and the two second piezoelectric / piezoresistive beams are collinear;

[0019] The drive feedback component further includes a first connecting beam, one end of which along the second direction is connected to the second elastic folding beam, and the other end of which is connected between two second piezoelectric / piezoresistive beams.

[0020] Furthermore, a first elastic folding beam is provided between the detection frame and the driving frame, and the first elastic folding beam is capable of deforming along the second direction;

[0021] And / or, a coupling beam and a fourth anchor point are provided between the driving frames, the fourth anchor point is fixed to the substrate, the coupling beam is fixed to the fourth anchor point, and both ends of the coupling beam along the first direction are respectively connected to the driving frames;

[0022] And / or, the detection frame has a groove, and part of the lever beam is located in the groove.

[0023] Furthermore, the fixed comb teeth include a plurality of fixed sub-comb teeth spaced apart along the second direction; the movable comb teeth include a plurality of movable sub-comb teeth spaced apart along the second direction; the movable sub-comb teeth are located between adjacent fixed sub-comb teeth;

[0024] Alternatively, the fixed comb teeth include a plurality of fixed sub-comb teeth spaced apart along the first direction; the movable comb teeth include a plurality of movable sub-comb teeth spaced apart along the first direction; and the movable sub-comb teeth are located between adjacent fixed sub-comb teeth. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 A schematic diagram of the structure of a piezoelectric / piezoresistive MEMS gyroscope provided in an embodiment of the present utility model;

[0026] Figure 2 A schematic diagram of the structure of a piezoelectric / piezoresistive MEMS gyroscope detecting angular velocity provided by an embodiment of the present utility model;

[0027] Figure 3 for Figure 1 A schematic diagram of an alternative second structure at the circled portion B;

[0028] Figure 4 for Figure 1 The circled portion B is a schematic diagram of an alternative third structure;

[0029] Description of reference numerals:

[0030] 101. First anchor point; 102. Second anchor point; 103. Third anchor point; 104. Fourth anchor point; 105. Fifth anchor point; 20. Driving mechanism; 210. Fixed comb teeth; 220. Movable comb teeth; 230. Driving frame; 240. Coupling beam; 30. Detection mechanism; 310. Detection frame; 311. Groove; 320. First elastic folding beam; 330. Lever beam; 331. Connecting part; 332. Articulated beam; 340. First piezoelectric / piezoresistive beam; 40. Driving feedback component; 410. Second piezoelectric / piezoresistive beam; 420. Second elastic folding beam; 430. First connecting beam. DETAILED DESCRIPTION

[0031] In order to make the above-mentioned purpose, features and advantages of the present invention more obvious and easy to understand, the following is a brief description of the present invention in conjunction with the attached Figure 1 —4 A detailed description of the specific embodiments of the present invention is given.

[0032] In the present invention, the terms "connection" and "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated structure.

[0033] In the present invention, the terms "inside", "outside", "upper" and "lower" and so on indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they should not be understood as limiting the present invention.

[0034] The present invention provides a piezoelectric / piezoresistive MEMS gyroscope. Figure 1 and Figure 2 The piezoelectric / piezoresistive MEMS gyroscope includes a substrate, a driving mechanism 20 and a detection mechanism 30. The driving mechanism 20 includes a fixed comb tooth 210, a movable comb tooth 220 and a driving frame 230. The fixed comb tooth 210 is fixed to the substrate; the movable comb tooth 220 is located between adjacent fixed comb teeth 210; the driving frame 230 is connected to the movable comb tooth 220; the driving frame 230 has two and is arranged opposite to each other along a first direction; the driving mechanism 20 is configured as follows: the fixed comb tooth 210 applies electrostatic force to the movable comb tooth 220 under the action of the driving voltage, and the movable comb tooth 220 drives the driving frame 230 to vibrate along the first direction; the detection mechanism 30 includes a detection frame 310, a lever beam 330, a first piezoelectric / piezoresistive beam 340 and a first anchor point 101. The detection frame 310 has two, which are respectively connected to the driving frame 230 and can follow the driving frame 230 to vibrate along the first direction movement; the two ends of the lever beam 330 along the first direction are respectively connected to the detection frame 310; the middle part of the lever beam 330 is hinged to the substrate along the second direction; the first piezoelectric / piezoresistive beam extends along the first direction; one end of the first piezoelectric / piezoresistive beam 340 is fixed to the lever beam 330, and the other end is fixed to the first anchor point 101; the first piezoelectric / piezoresistive beam 340 has at least one group, and each group of piezoelectric / piezoresistive beams is symmetrically arranged relative to the middle part of the lever beam 330; the detection mechanism 30 is configured as follows: the angular velocity is input along the second direction, and under the action of the Coriolis force, the detection frame 310 moves along the second direction relative to the driving frame 230, driving the lever beam 330 to rotate along the second direction, generating tension or pressure on each group of first piezoelectric / piezoresistive beams 340, and the angular velocity is obtained through the differential signal of each group of first piezoelectric / piezoresistive beams 340; wherein, the plane where the first direction and the second direction are located is parallel to the plane where the substrate is located.

[0035] It should be noted that the attached Figure 1 The OX direction refers to the first direction; the OY direction refers to the second direction; the OZ direction refers to the third direction; V d Direction refers to the direction of motion of the drive frame; Ω y Refers to the angular velocity in the second direction.

[0036] It should be noted that the middle portion of the lever beam 330 refers to the center of the lever beam 330 .

[0037] It should be noted that the middle portion of the lever beam 330 is hinged to the substrate along the second direction. This means that the middle portion of the lever beam 330 is hinged to the substrate via a hinge, and the hinge has a certain degree of rigidity and is capable of slight deformation. When the Coriolis force acts on both ends of the lever beam 330, the lever beam 330 rotates about its middle portion, thereby stretching or compressing the first piezoelectric / piezoresistive beam 340, changing its resistance or generating an electric charge. By measuring the resistance / charge, the strain of the first piezoelectric / piezoresistive beam 340 can be calculated, and the rotation angle of the lever beam 330 can be obtained, and the magnitude of the Coriolis force and the angular velocity of the gyroscope can be inferred.

[0038] It should be noted that the movable comb teeth 220 respectively drive the corresponding driving frame 230 to perform relative movement along the first direction, and the driving frame 230 drives the detection frame 310 to perform relative movement along the first direction; when the gyroscope is subjected to an angular velocity in the second direction, the detection frame 310 is subjected to a Coriolis force along the third direction, and the detection frame 310 moves relative to the driving frame 230 along the third direction, and drives the lever beam 330 to rotate around its center, stretching or compressing the first piezoelectric / piezoresistive beam 340, and the angular velocity is obtained through the output and solution of the lever beam 330.

[0039] The piezoelectric / piezoresistive MEMS gyroscope provided by the embodiment of the present invention is sensitive to angular velocities parallel to the substrate. By detecting the stress change on the first piezoelectric / piezoresistive beam 340, the degree of torsion of the lever beam 330 is obtained, thereby calculating the Coriolis force acting on the detection frame 310, and further obtaining the deflection angle and angular velocity of the gyroscope. On the other hand, the cooperation between the lever beam 330 and the first piezoelectric / piezoresistive beam 340 can significantly improve the sensitivity of the gyroscope, thereby realizing the measurement of highly sensitive angular velocities. In addition, compared with the four-mass micromechanical gyroscope in the prior art, the number of fixed comb teeth 210 and movable comb teeth 220 is reduced, thereby reducing the overall volume of the gyroscope.

[0040] See attached Figure 1 In the embodiment of the present invention, the base plate is provided with a fourth anchor point 104 ; the middle portion of the lever beam 330 is hinged to the fourth anchor point 104 .

[0041] See attached Figure 4 In the first embodiment of the present invention, the first piezoelectric / piezoresistive beam 340 has a group, and the group of first piezoelectric / piezoresistive beams 340 is axially symmetrically arranged along the second direction relative to the middle part of the lever beam 330.

[0042] See attached Figure 3 In the second embodiment of the present invention, the first piezoelectric / piezoresistive beam 340 has a group, and the group of first piezoelectric / piezoresistive beams 340 are centrally symmetrically arranged along the third direction relative to the middle of the lever beam 330.

[0043] See attached Figure 1 In a third embodiment of the present invention, there are two groups of first piezoelectric / piezoresistive beams 340, and the two groups of first piezoelectric / piezoresistive beams 340 are centrally symmetrically arranged along a third direction; wherein the third direction is perpendicular to the first direction and the second direction.

[0044] See attached Figure 1 In this embodiment of the utility model, the lever beam 330 has a cross-shaped structure, and a connecting portion 331 is provided in the middle of the lever beam 330 . At least one end of the connecting portion 331 along the second direction is hinged to the fourth anchor point 104 ; one end of the first piezoelectric / piezoresistive beam 340 is fixed to the connecting portion 331 .

[0045] It should be noted that the width of the connecting portion 331 along the second direction is greater than the width of the remaining positions of the lever beam 330 along the second direction.

[0046] See attached Figure 1 In the embodiment of the present invention, both ends of the connecting portion 331 along the second direction are connected to hinged beams 332 , and the hinged beams 332 are hinged to the fourth anchor point 104 .

[0047] See attached Figure 1 In this embodiment of the present invention, the drive frame 230 is connected to a drive feedback assembly 40, which is used to detect the displacement of the drive frame 230 along the first direction; the drive feedback assembly 40 is connected to the drive mechanism 20. This arrangement is used to detect the displacement of the drive frame 230.

[0048] See attached Figure 1 In an embodiment of the present invention, the driving feedback component 40 includes a second piezoelectric / piezoresistive beam 410 and a second anchor point 102 . The second anchor point 102 is fixed to the substrate. One end of the second piezoelectric / piezoresistive beam 410 is fixed to the second anchor point 102 , and the other end is connected to the driving frame 230 .

[0049] See attached Figure 1 In an embodiment of the utility model, the drive feedback component 40 also includes a second elastic folding beam 420 and a third anchor point 103. The third anchor point 103 is fixed to the substrate. One end of the second elastic folding beam 420 is fixed to the third anchor point 103, and the other end is connected to the drive frame 230. The second elastic folding beam 420 can be deformed along the first direction.

[0050] See attached Figure 1 In an embodiment of the present invention, the second piezoelectric / piezoresistive beams 410 and the second anchor point 102 respectively have two, and the two second piezoelectric / piezoresistive beams 410 are collinear; the drive feedback component 40 also includes a first connecting beam 430, one end of the first connecting beam 430 along the second direction is connected to the second elastic folding beam 420, and the other end is connected between the two second piezoelectric / piezoresistive beams 410.

[0051] In the embodiment of the present invention, a first elastic folding beam 320 is provided between the detection frame 310 and the driving frame 230 , and the first elastic folding beam 320 can be deformed along the second direction.

[0052] In this embodiment of the utility model, a coupling beam 240 and a fifth anchor point 105 are provided between the driving frame 230. The fifth anchor point 105 is fixed to the substrate. The coupling beam 240 is fixed to the fifth anchor point 105. Both ends of the coupling beam 240 along the first direction are respectively connected to the driving frame 230.

[0053] It should be noted that the coupling beam 240 can be deformed along the first direction.

[0054] See attached Figure 1 In the embodiment of the present utility model, the detection frame 310 has a groove 311 , and part of the lever beam 330 is located in the groove 311 .

[0055] See attached Figure 1 In one embodiment of the present invention, the fixed comb teeth 210 include a plurality of fixed sub-comb teeth spaced apart along the second direction; the movable comb teeth 220 include a plurality of movable sub-comb teeth spaced apart along the second direction; the movable sub-comb teeth are located between adjacent fixed sub-comb teeth.

[0056] It should be noted that when a driving voltage is applied between the movable comb teeth 220 and the fixed comb teeth 210, an uneven electric field will be generated between the comb teeth. Under the action of electrostatic attraction, the movable comb teeth 220 move along the first direction relative to the fixed comb teeth 210, changing the overlapping length between the movable comb teeth 220 and the fixed comb teeth 210.

[0057] In another embodiment of the present invention, the fixed comb teeth 210 include a plurality of fixed sub-comb teeth spaced apart along a first direction; the movable comb teeth 220 include a plurality of movable sub-comb teeth spaced apart along a first direction; the movable sub-comb teeth are located between adjacent fixed sub-comb teeth.

[0058] It should be noted that, under the action of the driving voltage, electrostatic force is applied to the movable comb teeth 220 , causing the movable comb teeth 220 to move relative to the fixed comb teeth 210 along the second direction, thereby changing the gap between the movable comb teeth 220 and the fixed comb teeth 210 .

[0059] Although the present invention is disclosed as above, it is not limited thereto. Any person skilled in the art may make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope defined by the claims.

Claims

1. A piezoelectric / piezoresistive MEMS gyroscope, characterized in that: include: substrate; A driving mechanism (20) comprises fixed comb teeth (210), movable comb teeth (220) and a driving frame (230), wherein the fixed comb teeth (210) are fixed to the substrate; the movable comb teeth (220) are located between adjacent fixed comb teeth (210); the driving frame (230) is connected to the movable comb teeth (220); the driving frame (230) has two and is arranged opposite to each other along a first direction; the driving mechanism (20) is configured such that: under the action of a driving voltage, the fixed comb teeth (210) exert an electrostatic force on the movable comb teeth (220), and the movable comb teeth (220) drive the driving frame (230) to vibrate along the first direction; as well as, A detection mechanism (30) comprises a detection frame (310), a lever beam (330), a first piezoelectric / piezoresistive beam (340) and a first anchor point (101), wherein the detection frame (310) has two members, each of which is connected to the driving frame (230) and can vibrate along the first direction following the driving frame (230); the two ends of the lever beam (330) along the first direction are respectively connected to the detection frame (310); the middle part of the lever beam (330) is hinged to the substrate along the second direction; the first piezoelectric / piezoresistive beam (340) extends along the first direction; one end of the first piezoelectric / piezoresistive beam (340) is fixed to the lever beam (330); 0), the other end of which is fixed to the first anchor point (101); the first piezoelectric / piezoresistive beams (340) have at least one group, and each group of the first piezoelectric / piezoresistive beams (340) is symmetrically arranged relative to the middle of the lever beam (330); the detection mechanism (30) is configured to: input an angular velocity along a second direction, and under the action of the Coriolis force, the detection frame (310) moves relative to the driving frame (230) along the second direction, driving the lever beam (330) to rotate along the second direction, generating tension or pressure on each group of the first piezoelectric / piezoresistive beams (340), and obtaining the angular velocity through the differential signal of each group of the first piezoelectric / piezoresistive beams (340); The planes where the first direction and the second direction are located are parallel to the plane where the substrate is located.

2. The piezoelectric / piezoresistive MEMS gyroscope according to claim 1, wherein: The base plate is provided with a fourth anchor point (104); the middle portion of the lever beam (330) is hinged to the fourth anchor point (104); And / or, the first piezoelectric / piezoresistive beams (340) have a group, and the first piezoelectric / piezoresistive beams (340) in this group are axially symmetrically arranged along the second direction or centrally symmetrically arranged along the third direction relative to the middle part of the lever beam (330); or, the first piezoelectric / piezoresistive beams (340) have two groups, and the two groups of the first piezoelectric / piezoresistive beams (340) are respectively located on both sides of the lever beam (330); wherein the third direction is perpendicular to the first direction and the second direction.

3. The piezoelectric / piezoresistive MEMS gyroscope according to claim 2, wherein: The lever beam (330) is a cross-shaped structure, and a connecting portion (331) is provided in the middle of the lever beam (330). At least one end of the connecting portion (331) along the second direction is hinged to the fourth anchor point (104); one end of the first piezoelectric / piezoresistive beam (340) is fixed to the connecting portion (331).

4. The piezoelectric / piezoresistive MEMS gyroscope according to claim 3, wherein: Both ends of the connecting portion (331) along the second direction are connected to hinged beams (332), and the hinged beams (332) are hinged to the fourth anchor point (104).

5. The piezoelectric / piezoresistive MEMS gyroscope according to any one of claims 1 to 4, characterized in that: The driving frame (230) is connected to a driving feedback component (40), and the driving feedback component (40) is used to detect the displacement of the driving frame (230) along the first direction; the driving feedback component (40) is connected to the driving mechanism (20).

6. The piezoelectric / piezoresistive MEMS gyroscope according to claim 5, wherein: The drive feedback component (40) includes a second piezoelectric / piezoresistive beam (410) and a second anchor point (102), wherein the second anchor point (102) is fixed to the substrate, and one end of the second piezoelectric / piezoresistive beam (410) is fixed to the second anchor point (102), and the other end is connected to the drive frame (230).

7. The piezoelectric / piezoresistive MEMS gyroscope according to claim 6, wherein: The drive feedback component (40) further includes a second elastic folding beam (420) and a third anchor point (103), wherein the third anchor point (103) is fixed to the substrate, one end of the second elastic folding beam (420) is fixed to the third anchor point (103), and the other end is connected to the drive frame (230); the second elastic folding beam (420) is capable of deforming along the first direction.

8. The piezoelectric / piezoresistive MEMS gyroscope according to claim 7, wherein: There are two second piezoelectric / piezoresistive beams (410) and two second anchor points (102), and the two second piezoelectric / piezoresistive beams (410) are collinear; The drive feedback component (40) further includes a first connecting beam (430), one end of the first connecting beam (430) along the second direction is connected to the second elastic folding beam (420), and the other end is connected between two second piezoelectric / piezoresistive beams (410).

9. The piezoelectric / piezoresistive MEMS gyroscope according to any one of claims 1 to 4, characterized in that: A first elastic folding beam (320) is provided between the detection frame (310) and the driving frame (230), and the first elastic folding beam (320) is capable of deforming along the second direction; And / or, a coupling beam (240) and a fifth anchor point (105) are provided between the driving frames (230), the fifth anchor point (105) is fixed to the substrate, the coupling beam (240) is fixed to the fifth anchor point (105), and both ends of the coupling beam (240) along the first direction are respectively connected to the driving frames (230); And / or, the detection frame (310) has a groove (311), and part of the lever beam (330) is located in the groove (311).

10. The piezoelectric / piezoresistive MEMS gyroscope according to any one of claims 1 to 4, characterized in that: The fixed comb teeth (210) include a plurality of fixed sub-comb teeth spaced apart along the second direction; the movable comb teeth (220) include a plurality of movable sub-comb teeth spaced apart along the second direction; the movable sub-comb teeth are located between adjacent fixed sub-comb teeth; Alternatively, the fixed comb teeth (210) include a plurality of fixed sub-comb teeth spaced apart along the first direction; the movable comb teeth (220) include a plurality of movable sub-comb teeth spaced apart along the first direction; and the movable sub-comb teeth are located between adjacent fixed sub-comb teeth.

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