Test equipment and test system

Abstract

The utility model provides test equipment and a test system. The test equipment comprises a first exhaust pump, a helium detector and a plurality of test pipelines, each test pipeline comprises a workpiece port, a helium detection valve, a first exhaust valve and a deflation valve; a workpiece opening in each test pipeline is connected with a first exhaust pump and a helium detector through pipelines; the helium detection valve is arranged on a pipeline for connecting the helium detector and the workpiece port; the first exhaust valve is arranged on a pipeline for connecting the first exhaust pump and the workpiece opening; and the deflation valve is arranged on a pipeline for connecting the workpiece opening and the helium release device. According to the test equipment, the plurality of test pipelines are arranged in the test equipment, so that when the workpieces are tested, the plurality of test pipelines can test the corresponding workpieces at the same time or in a time-sharing manner, and the test efficiency of the test equipment can be improved.

Description

Technical Field

[0001] The present application relates to the field of quality inspection, and in particular to a testing device and a testing system. Background Art

[0002] Current testing equipment often relies on a serial processing mechanism to perform testing tasks. This means that test objects or samples are fed into the test environment one by one, undergoing a series of pre-defined testing procedures before receiving test results. This "one-by-one" approach may be sufficient for small-scale or low-frequency testing needs. However, facing the rapid iteration of large-scale production lines, product diversification, and the market's high standards for product quality and time to market, its inefficiency is becoming increasingly prominent. Utility Model Content

[0003] In view of this, an object of the embodiments of the present application is to provide a testing device and a testing system that can improve the testing efficiency of the testing device.

[0004] In a first aspect, an embodiment of the present application provides a testing device, comprising: a first exhaust pump, a helium detector, and a plurality of test pipelines; wherein each test pipeline comprises: a workpiece port, a helium detection valve, a first exhaust valve, and a bleed valve; the workpiece port in each of the test pipelines is connected to the first exhaust pump and the helium detector via a pipeline; the helium detection valve is arranged on the pipeline connecting the helium detector and the workpiece port; the first exhaust valve is arranged on the pipeline connecting the first exhaust pump and the workpiece port; and the bleed valve is arranged on the pipeline connecting the workpiece port and the helium release device.

[0005] In the above implementation process, by setting multiple test pipelines in the test equipment, when testing workpieces, the multiple test pipelines can test the corresponding workpieces simultaneously or in a time-sharing manner, which can improve the test efficiency of the test equipment.

[0006] In one embodiment, it further includes: a second exhaust pump; wherein each test pipeline also includes: a second exhaust valve; the second exhaust valve is arranged on the pipeline connecting the second exhaust pump and the workpiece port; wherein the first exhaust pump and the second exhaust pump are configured to operate under different in-pipe air pressures.

[0007] In the above implementation process, by setting up a second exhaust pump and a second exhaust valve, the second exhaust pump can further exhaust the gas in the test pipeline. Through the cooperation of the first exhaust pump and the second exhaust pump, the gas in the test pipeline can be discharged more cleanly, thereby improving the gas exhaust efficiency and effect.

[0008] In one embodiment, the second exhaust valve is configured to open when the air pressure in the test pipeline reaches a first preset air pressure range to connect the air path between the second exhaust pump and the workpiece port; the second exhaust valve is configured to close when the air pressure in the test pipeline reaches a second preset air pressure range to close the air path between the second exhaust pump and the workpiece port; wherein the first preset air pressure range is greater than the second preset air pressure range.

[0009] In the above implementation process, by setting the second exhaust valve to open when the air pressure in the test pipeline reaches the first preset air pressure range, and closing the second exhaust valve when the air pressure in the test pipeline reaches the second preset air pressure range, the opening and closing of the second exhaust valve can be controlled according to the air pressure in the test pipeline, thereby avoiding ineffective opening and closing of the second exhaust valve and improving the control accuracy of the second exhaust valve.

[0010] In one embodiment, a first interlocking structure is provided between the second exhaust valve and the helium detection valve provided on the same test pipeline; wherein the first interlocking structure is configured to control the helium detection valve to open when the second exhaust valve is closed.

[0011] In the above implementation process, a first interlocking structure is provided between the second exhaust valve and the helium detection valve on the same test pipeline. Through the first interlocking structure, only the first exhaust valve or the second exhaust valve can be controlled to be open at the same time, thereby shortening the ineffective opening time of the first exhaust valve and the second exhaust valve, and improving the control accuracy of the first exhaust valve and the second exhaust valve.

[0012] In one embodiment, a second interlocking structure is provided between the helium detection valve, the first exhaust valve, the second exhaust valve, and the purge valve provided on the same test pipeline; wherein the second interlocking structure is configured to control the time-sharing opening of the helium detection valve, the first exhaust valve, the second exhaust valve, and the purge valve provided on the same test pipeline.

[0013] In the above implementation process, a second interlocking structure is provided between the helium detection valve, the first exhaust valve, the second exhaust valve and the purge valve on the same test pipeline. Through the second interlocking structure, only one of the helium detection valve, the first exhaust valve, the second exhaust valve and the purge valve can be controlled to be open at the same time, thereby avoiding mutual interference between the various components and improving the working efficiency and accuracy of the equipment.

[0014] In one embodiment, a third interlocking structure is provided between the helium detection valves provided on different test pipelines; wherein the third interlocking structure is configured to control the helium detection valves on different test pipelines to be opened in a time-sharing manner.

[0015] In the above implementation process, a third interlocking structure is provided between the helium detection valves on different test pipelines. Through the third interlocking structure, only one of the helium detection valves on different test pipelines can be controlled to be open at the same time, so that the helium detector only detects one component to be tested at a time, thereby improving the detection accuracy.

[0016] In one embodiment, each test pipeline further includes: a vacuum gauge; the vacuum gauge is arranged in a pipeline connected to the workpiece port; the vacuum gauge is configured to obtain an air pressure value in the corresponding test pipeline.

[0017] In the above implementation process, by setting a vacuum gauge in the test pipeline, the vacuum gauge can be used to obtain the air pressure value in the pipeline in real time, and then feedback the gas state in the pipeline. The opening and closing of the first exhaust valve, the second exhaust valve and the helium detection valve can be controlled according to the air pressure value, thereby realizing automatic valve control and improving valve operation efficiency and accuracy.

[0018] In a second aspect, an embodiment of the present application further provides a testing system, comprising: the testing equipment described in the first aspect and any one of the first aspect, and a helium release device; the pipeline connected to the workpiece port in the testing equipment is connected to the helium release device through an air release valve.

[0019] In the above implementation process, by setting up a helium release device and connecting the helium release device to the workpiece opening, before the workpiece to be tested is tested, helium can be sprayed toward the workpiece to be tested through the helium release device, and then the workpiece to be tested is tested through the helium detector, thereby realizing automated testing of the workpiece to be tested and improving detection efficiency and accuracy.

[0020] In one embodiment, the test device further comprises: a controller; the controller is connected to one or more of the helium detection valve, the first exhaust valve, the second exhaust valve, and the purge valve in the test device.

[0021] In the above implementation process, by setting a controller in the test system, the controller can automatically control one or more of the helium detection valve, the first exhaust valve, the second exhaust valve and the air release valve to open or close, thereby realizing automatic control of one or more of the helium detection valve, the first exhaust valve, the second exhaust valve and the air release valve, thereby improving detection efficiency and accuracy.

[0022] In one embodiment, the system further comprises: an indicating device connected to a vacuum gauge in the test equipment; wherein the indicating device is configured to indicate the air pressure condition in the test pipeline.

[0023] In the above implementation process, by setting an indicating device, the air pressure in the test pipeline can be reflected, so that the staff can manually operate one or more of the helium check valve, the first exhaust valve, the second exhaust valve and the air release valve, thereby increasing the operation methods of the helium check valve, the first exhaust valve, the second exhaust valve and the air release valve, thereby increasing the application scenarios of the test system.

[0024] In order to make the above-mentioned objects, features and advantages of the present application more obvious and easy to understand, the following embodiments are given in conjunction with the accompanying drawings for detailed description as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 An expanded view of the test equipment provided in an embodiment of the present application;

[0027] Figure 2 An expanded view of a test device including a molecular pump provided in an embodiment of the present application;

[0028] Figure 3 A side view of a test system provided in an embodiment of the present application;

[0029] Figure 4 This is a front view of the test system provided in an embodiment of the present application.

[0030] Description of the drawings: 100-first exhaust pump, 200-helium detector, 300-test pipeline, 310-workpiece port, 320-helium detection valve, 330-first exhaust valve, 340-air release valve, 350-second exhaust valve, 400-second exhaust pump, 500-molecular pump, 600-vacuum gauge, 700-indicator device, 710-indicator light, 720-display, 800-operating handle, 900-sliding component. DETAILED DESCRIPTION

[0031] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0033] It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and should not be understood as indicating or implying relative importance.

[0034] In the description of this application, it should be noted that the terms "upper", "lower", "inside", "outside", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the application products are usually placed when in use. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be interpreted as a limitation of this application.

[0035] It should also be noted that, in the description of this application, unless otherwise expressly specified or limited, the terms "disposed," "installed," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0036] Testing equipment plays a vital role in every aspect of product development, production, quality control, and subsequent maintenance. Testing products with testing equipment not only ensures product quality and safety, but also promotes scientific research and technological innovation, thereby improving production efficiency and market competitiveness.

[0037] However, after extensive research, the inventors of this application have discovered that traditional test equipment suffers from low test efficiency. Specifically, these limitations are primarily reflected in the following aspects: First, the test cycle is long. As the number of test objects increases, the overall test time increases exponentially, increasing production costs and impacting the product's market responsiveness. Second, resource utilization is low. Test equipment sits idle while waiting for individual test objects to complete testing, failing to fully realize its performance potential. Third, manual intervention is frequent. Frequent loading and unloading and starting test programs increases the risk of human error and limits the level of automation in the test process.

[0038] In view of this, the present application proposes a testing device. By setting multiple test pipelines in the testing device, when performing workpiece testing, multiple test pipelines can test the corresponding workpieces simultaneously or in a time-sharing manner, which can improve the testing efficiency of the testing device.

[0039] like Figure 1 , which is a schematic diagram of a test device provided in an embodiment of the present application, including: a first exhaust pump 100 , a helium detector 200 and a plurality of test pipelines 300 .

[0040] Each test pipeline 300 includes a workpiece port 310 , a helium detection valve 320 , a first exhaust valve 330 , and a purge valve 340 .

[0041] The workpiece port 310 in each test pipeline 300 here is connected to the first exhaust pump 100 and the helium detector 200 through a pipeline; the helium detection valve 320 is set on the pipeline connecting the helium detector 200 and the workpiece port 310; the first exhaust valve 330 is set on the pipeline connecting the first exhaust pump 100 and the workpiece port 310; and the air release valve 340 is set on the pipeline connecting the workpiece port 310 and the helium release device.

[0042] The first exhaust pump 100 is used to provide power for exhausting the gas in the test pipeline 300 , and the first exhaust valve 330 is configured to control the opening and closing of the pipeline connecting the first exhaust pump 100 and the workpiece port 310 .

[0043] The helium detector 200 is used to detect a workpiece to be detected, and the helium detection valve 320 is configured to control the opening and closing of a pipeline connecting the helium detector 200 and the workpiece port 310 .

[0044] In one embodiment, a plurality of test pipes 300 are arranged in parallel, and the workpieces to be tested on the plurality of test pipes 300 can be tested simultaneously or in different time periods.

[0045] The above-mentioned helium release device is used to release helium, and the air release valve 340 is configured to control the opening and closing of the pipeline connecting the helium release device and the workpiece opening 310.

[0046] It should be understood that when a workpiece is being tested, the various components of the testing apparatus operate as follows: The first exhaust valve 330 is opened, the first exhaust pump 100 is connected to the workpiece port 310, and the first exhaust valve 330 is configured to exhaust the gas in the pipe connected to the workpiece port 310 out of the pipe, leaving no gas or only a trace amount of gas in the pipe connected to the workpiece port 310. When the gas pressure in the pipe connected to the workpiece port 310 reaches a second preset pressure range, the exhaust valve 340 is opened, and the helium release device is connected to the workpiece port 310. The helium release device is configured to release helium through the pipe toward the workpiece at the workpiece port 310. After the helium release is complete, the helium detection valve 320 is opened, the helium detector 200 is connected to the workpiece port 310, and the helium detector 200 detects the helium absorption of the workpiece at the workpiece port 310, thereby completing the inspection of the workpiece.

[0047] When there are multiple test lines 300, one or more valves including the helium detection valve 320, the first exhaust valve 330, and the air release valve 340 in each test line 300 can be controlled to open or close, thereby controlling the multiple test lines 300 to perform testing simultaneously or in different time periods.

[0048] For example, Figure 1 As shown, Figure 1 The test equipment shown in FIG. 3 includes three test pipelines 300 , namely a left test pipeline 300 , a middle test pipeline 300 , and a right test pipeline 300 . When the helium detection valve 320 in the left test pipeline 300 is opened and the helium detector 200 is testing the left workpiece, the purge valve 340 in the middle test pipeline 300 can be opened, and the helium release device releases helium to the middle workpiece. The first exhaust valve 330 in the right test pipeline 300 can be opened, and the first exhaust pump 100 exhausts the gas in the pipeline connected to the workpiece port 310 to the outside of the pipeline. When the test of the left workpiece to be tested in the left test pipeline 300 is completed, the first exhaust valve 330 continues to be opened. When the first exhaust pump 100 discharges the gas in the pipeline connected to the workpiece port 310 to the outside of the pipeline, the helium detection valve 320 in the middle test pipeline 300 is opened, and the helium detector 200 tests the middle workpiece to be tested. The air release valve 340 in the right test pipeline 300 can be opened, and the helium release device releases helium to the right workpiece to be tested. Testing is continued according to this rule.

[0049] Continue with Figure 1For example, the specific operating method of multiple test pipelines 300 is illustrated as follows: when the helium detection valve 320 in the left test pipeline 300 is opened and the helium detector 200 is testing the left workpiece, the purge valves 340 in the middle test pipeline 300 and the right test pipeline 300 can be opened, and the helium release device releases helium into the middle workpiece. When the left workpiece in the left test pipeline 300 is tested, the first exhaust valve 330 is opened again. When the first exhaust pump 100 exhausts the gas in the pipeline connected to the workpiece port 310 to the outside of the pipeline, the helium detection valve 320 in the middle test pipeline 300 is opened, and the helium detector 200 is testing the middle workpiece. The helium detection valve 320, the first exhaust valve 330, and the purge valve 340 in the right test pipeline 300 are all closed, waiting for action. The purge valve 340 in the left test pipeline 300 is opened, and the helium release device releases helium to the left workpiece to be tested. The helium detection valve 320, the first exhaust valve 330, and the purge valve 340 in the middle test pipeline 300 are all closed and wait for action. The helium detection valve 320 in the right test pipeline 300 is opened, and the helium detector 200 tests the right workpiece to be tested.

[0050] Continue with Figure 1 For example, the specific working mode of multiple test pipelines 300 is illustrated as follows: when the first exhaust valve 330 of the left test pipeline 300 is opened, the first exhaust pump 100 discharges the gas in the pipeline connected to the workpiece port 310 to the outside of the pipeline, and the first exhaust valve 330 of the middle test pipeline 300 and the right test pipeline 300 are also opened, and the first exhaust pump 100 discharges the gas in the pipeline connected to the workpiece port 310 to the outside of the pipeline; when the exhaust valve 340 of the left test pipeline 300 is opened, the helium release device releases the helium to the left workpiece to be tested. When the helium is released from the middle test pipeline 300 and the right test pipeline 300, the air release valve 340 is also opened, and the helium release device releases helium to the middle test workpiece and the right test workpiece in the middle test pipeline 300 and the right test pipeline 300 at the same time; when the helium detection valve 320 in the left test pipeline 300 is opened and the helium detector 200 tests the left workpiece, the helium detection valve 320, the first exhaust valve 330 and the air release valve 340 in the middle test pipeline 300 and the right test pipeline 300 are all closed and wait for action. After the test of the left workpiece to be tested in the left test pipeline 300 is completed, the helium detection valve 320 in the middle test pipeline 300 is opened, and the helium detector 200 tests the left workpiece to be tested. At this time, the helium detection valve 320, the first exhaust valve 330 and the air release valve 340 in the right test pipeline 300 and the left test pipeline 300 are all closed and waiting for action; after the test of the middle workpiece to be tested in the middle test pipeline 300 is completed, the helium detection valve 320 in the right test pipeline 300 is opened, and the helium detector 200 tests the right workpiece to be tested. At this time, the helium detection valve 320, the first exhaust valve 330 and the air release valve 340 in the middle test pipeline 300 and the left test pipeline 300 are all closed and waiting for action.

[0051] The specific testing method of the above-mentioned testing equipment is only exemplary, and the testing method of the testing equipment can be adjusted according to actual conditions.

[0052] In the above implementation process, by setting multiple test pipelines 300 in the test equipment, when testing workpieces, the multiple test pipelines 300 can test the corresponding workpieces simultaneously or in different time periods, thereby improving the test efficiency of the test equipment.

[0053] In one possible implementation, Figure 1 、 Figure 2 As shown, the test equipment further includes: a second exhaust pump 400 ; and each test pipeline 300 further includes: a second exhaust valve 350 .

[0054] The second exhaust valve 350 is provided on a pipeline connecting the second exhaust pump 400 and the workpiece port 310 .

[0055] Here, the first exhaust pump 100 and the second exhaust pump 400 are configured to operate at different in-pipe gas pressures.

[0056] In one embodiment, the in-line air pressure at which the first exhaust pump 100 operates is higher than the in-line air pressure at which the second exhaust pump 400 operates. For example, if the first exhaust pump 100 operates within a first in-line air pressure range and the second exhaust pump 400 operates within a second in-line air pressure range, the air pressure values within the first in-line air pressure range are greater than the air pressure values within the second in-line air pressure range.

[0057] It should be understood that when testing a workpiece, the first exhaust valve 330 is first opened, connecting to the first exhaust pump 100, and the gas in the test pipeline 300 is discharged outside the test pipeline 300 via the first exhaust pump 100. When the air pressure in the test pipeline 300 drops to a preset pressure range, the first exhaust valve 330 is closed, the second exhaust valve 350 is opened, and the gas in the test pipeline 300 is further discharged outside the test pipeline 300 via the second exhaust pump 400, so that the gas in the test pipeline 300 is completely exhausted or only a trace amount of gas remains.

[0058] In one embodiment, if Figure 2 As shown, each test pipeline 300 further includes a molecular pump 500. The molecular pump 500 is provided on the pipeline between the second exhaust valve 350 and the second exhaust pump 400.

[0059] In the above implementation process, by setting the second exhaust pump 400 and the second exhaust valve 350, the second exhaust pump 400 can further discharge the gas in the test pipeline 300. Through the cooperation of the first exhaust pump 100 and the second exhaust pump 400, the gas in the test pipeline 300 can be discharged more cleanly, thereby improving the gas exhaust efficiency and effect.

[0060] In one possible implementation, the second exhaust valve 350 is configured to open when the air pressure in the test pipeline reaches a first preset air pressure range to connect the air path between the second exhaust pump 400 and the workpiece port 310; the second exhaust valve 350 is configured to close when the air pressure in the test pipeline reaches a second preset air pressure range to close the air path between the second exhaust pump 400 and the workpiece port 310.

[0061] The first preset air pressure range is greater than the second preset air pressure range. For example, the first preset air pressure range is below 5 Pa, and the second preset air pressure range may be below 1 Pa.

[0062] It should be understood that while the first exhaust valve 330 is exhausting the gas in the test line, the air pressure in the test line is constantly changing. Upon detecting that the air pressure in the line has reached a first preset pressure range, the first exhaust valve 330 is closed, and the second exhaust valve 350 is opened, allowing the gas in the test line to be exhausted through the second exhaust valve 350. While the second exhaust valve 350 is exhausting the gas in the test line, the air pressure in the test line is constantly changing. Upon detecting that the air pressure in the line has reached the second preset pressure range, indicating that the gas in the line has been substantially exhausted or only a trace amount of gas remains, the second exhaust valve 350 is closed, halting the exhaust operation.

[0063] In one embodiment, the second exhaust valve 350 can be automatically opened or closed according to the change of air pressure in the test pipeline.

[0064] In the above implementation process, by setting the second exhaust valve 350 to open when the air pressure in the test pipeline reaches the first preset air pressure range, and closing the second exhaust valve 350 when the air pressure in the test pipeline reaches the second preset air pressure range, the opening and closing of the second exhaust valve 350 can be controlled according to the air pressure in the test pipeline, thereby avoiding ineffective opening and closing of the second exhaust valve 350 and improving the control accuracy of the second exhaust valve 350.

[0065] In a possible implementation, a first interlocking structure is provided between the second exhaust valve 350 and the helium detection valve 320 provided on the same test pipeline 300 .

[0066] The first interlocking structure is configured to control the helium detection valve 320 to open when the second exhaust valve 350 is closed.

[0067] The first interlocking structure here can be a double valve interlocking linkage device, a valve limiting ring, etc. The first interlocking structure can be selected according to actual conditions.

[0068] For example, if the first interlocking structure is a dual-valve interlocking linkage, the dual-valve interlocking linkage may include two valve bodies, two valve core control rods, a linkage rod, a transmission device, and a valve body drive device. The two valve core control rods are connected via the linkage rod and the transmission device to achieve interlocked and synchronized operation of the two valves. When the control rod of one valve is operated, the control rod of the other valve is driven to operate synchronously via the linkage rod and the transmission device, thereby achieving interlocking of the two valves.

[0069] If the first interlocking structure is a valve stop ring, it can include a first stop ring and a second stop ring, each ring having an arc portion and a relief groove. When the arc portion of one stop ring extends into the relief groove of the other stop ring, a specific locking sequence can be achieved. For example, in the fully open state, the first stop block can be opened and closed, while the second stop block cannot be operated independently; in the fully closed state, the second stop block can be operated, while the first stop block cannot be operated.

[0070] In one embodiment, the first interlocking structure may also be an electronic interlocking structure.

[0071] Specifically, if the first exhaust valve 330 and the second exhaust valve 350 are relay opening and closing points, the first relay coil corresponding to the first exhaust valve 330 and the second relay coil corresponding to the second exhaust valve are interlocked. That is, at any given moment, only one of the first and second relay coils is energized. Only the corresponding opening point of the energized relay coil can be closed.

[0072] The above-mentioned arrangement of the first interlocking structure is only exemplary, and the first interlocking structure can be selected according to actual conditions.

[0073] In the above implementation process, a first interlocking structure is provided between the second exhaust valve 350 and the helium detection valve 320 on the same test pipeline 300. Through the first interlocking structure, only the first exhaust valve 330 or the second exhaust valve 350 can be controlled to be open at the same time, thereby shortening the invalid opening time of the first exhaust valve 330 and the second exhaust valve 350 and improving the control accuracy of the first exhaust valve 330 and the second exhaust valve 350.

[0074] In a possible implementation, a second interlocking structure is provided between the helium detection valve 320 , the first exhaust valve 330 , the second exhaust valve 350 , and the purge valve 340 provided on the same test pipeline 300 .

[0075] The second interlocking structure is configured to control the helium detection valve 320 , the first exhaust valve 330 , the second exhaust valve 350 and the purge valve 340 provided on the same test pipeline 300 to be opened in a time-sharing manner.

[0076] The second interlock structure is configured to control that only one of the helium detection valve 320 , the first exhaust valve 330 , the second exhaust valve 350 and the purge valve 340 on the same test pipeline 300 is in the open state at any time.

[0077] Optionally, the second interlocking structure may be a main controller, a relay, etc. The second interlocking structure may be selected according to actual conditions.

[0078] For example, if the second interlock structure is a master controller, the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350, and the purge valve 340 on the same test line 300 are all connected to the master controller. The master controller is used to control the opening of the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350, and the purge valve 340 on the same test line 300 at different times.

[0079] If the second interlock structure is a relay, the relay can be a time-delay relay, and the delay time of the time-delay relays respectively connected to the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 on the same test pipeline 300 can be set to different time intervals, thereby making the power-on time of each delay relay connected to the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 on the same test pipeline 300 different, thereby controlling the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 on the same test pipeline 300 to open at different times.

[0080] The above-mentioned arrangement of the second interlocking structure is only exemplary, and the second interlocking structure can be selected according to actual conditions.

[0081] In the above implementation process, a second interlocking structure is provided between the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 on the same test pipeline 300. Through this second interlocking structure, only one of the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 can be controlled to be open at the same time, thereby avoiding mutual interference between the various components and improving the working efficiency and accuracy of the equipment.

[0082] In a possible implementation, a third interlocking structure is provided between the helium detection valves 320 provided on different test pipelines 300 .

[0083] The third interlock structure is configured to control the helium detection valves 320 on different test pipelines 300 to be opened in a time-sharing manner.

[0084] It should be understood that each test line 300 is connected to the same helium detector 200, meaning that a single helium detector 200 is used to inspect the workpieces in each test line 300. To prevent interference between the workpieces in each test line 300, only the helium detection valve 320 in one test line 300 is open at any given time. This allows the helium detector 200 to test only one workpiece at a time, improving test accuracy.

[0085] The third interlocking structure here can be a main controller, a relay, etc., and the third interlocking structure can be selected according to actual conditions.

[0086] For example, if the third interlock structure is a main controller, the helium detection valves 320 provided on different test pipelines 300 are all connected to the main controller. The main controller is used to control the helium detection valves 320 provided on different test pipelines 300 to open at different times.

[0087] If the third interlock structure is a relay, the relay can be a time-delay relay. The delay times of the time-delay relays connected to the helium detection valves 320 on different test pipelines 300 can be set to different time intervals, thereby making the power-on times of the delay relays connected to the helium detection valves 320 on different test pipelines 300 different, thereby controlling the helium detection valves 320 on different test pipelines 300 to open at different times.

[0088] The above-mentioned arrangement of the third interlocking structure is only exemplary, and the third interlocking structure can be selected according to actual conditions.

[0089] In one embodiment, one or more of the first interlocking structure, the second interlocking structure, and the third interlocking structure are the same.

[0090] In the above implementation process, a third interlocking structure is provided between the helium detection valves 320 on different test pipelines 300. Through the third interlocking structure, only one of the helium detection valves 320 on different test pipelines 300 can be controlled to be open at the same time, so that the helium detector 200 only detects one component to be tested at a time, thereby improving the detection accuracy.

[0091] In a possible implementation, each test pipeline 300 further includes a vacuum gauge 600 .

[0092] The vacuum gauge 600 is disposed in a pipe connected to the workpiece port 310 .

[0093] Optionally, one or more vacuum gauges 600 may be provided in each test line 300. The number of vacuum gauges 600 in each test line 300 may be selected according to actual conditions.

[0094] The vacuum gauge 600 is an instrument for measuring vacuum or air pressure and is configured to obtain the air pressure value in the corresponding test pipeline 300 .

[0095] It should be understood that during the operation of the test equipment, the vacuum gauge 600 is used to obtain the real-time air pressure in the pipeline in real time, and the real-time air pressure can be used to reflect the real-time gas state in the pipeline.

[0096] In one embodiment, the vacuum gauge 600 is connected to a controller and feeds back the acquired air pressure value to the controller. The controller is configured to control the opening and closing of the first exhaust valve 330, the second exhaust valve 350, and the helium detection valve 320 according to the fed-back air pressure value.

[0097] In the above implementation process, by setting a vacuum gauge 600 in the test pipeline 300, the vacuum gauge 600 can be used to obtain the air pressure value in the pipeline in real time, and then feedback the gas state in the pipeline. The opening and closing of the first exhaust valve 330, the second exhaust valve 350 and the helium detection valve 320 can be controlled according to the air pressure value, thereby realizing automatic valve control and improving valve operation efficiency and accuracy.

[0098] like Figure 3 、 Figure 4 , which is a schematic diagram of a test system provided in an embodiment of the present application, including: the test equipment and the helium release device in the above embodiment.

[0099] The pipeline connected to the workpiece port 310 in the testing equipment is connected to the helium release device through the air release valve 340 .

[0100] The helium release device here is a device or system specifically used to release helium.

[0101] It should be understood that before testing the workpiece, helium needs to be released through the helium release device to spray helium towards the workpiece. The helium detector 200 detects whether the workpiece has quality problems by detecting the absorption of helium by the workpiece.

[0102] In the above implementation process, by setting up a helium release device and connecting the helium release device to the workpiece opening 310, before the workpiece to be tested is tested, helium can be sprayed toward the workpiece to be tested through the helium release device, and then the workpiece to be tested is tested through the helium detector 200, thereby realizing automated testing of the workpiece to be tested and improving detection efficiency and accuracy.

[0103] In a possible implementation, the test system further includes: a controller.

[0104] The controller is connected to one or more of the helium detection valve 320 , the first exhaust valve 330 , the second exhaust valve 350 and the purge valve 340 in the test equipment.

[0105] The controller here can be a single chip microcomputer, a programmable controller, a computer, a terminal device, etc. The controller can be selected according to actual conditions.

[0106] It can be understood that the controller can control one or more of the helium detection valve 320 , the first exhaust valve 330 , the second exhaust valve 350 and the purge valve 340 in each test line 300 to open or close.

[0107] The controller can serve as an interlocking structure to control the second exhaust valve 350 to be closed and the helium detection valve 320 to be opened, and / or control the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 provided on the same test pipeline 300 to be opened in a time-sharing manner, and / or control the helium detection valves 320 on different test pipelines 300 to be opened in a time-sharing manner.

[0108] In the above implementation process, by setting a controller in the test system, the controller can automatically control one or more of the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340 to open or close, thereby realizing automatic control of one or more of the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350 and the purge valve 340, thereby improving detection efficiency and accuracy.

[0109] In a possible implementation, the test system further includes: an indicating device 700 .

[0110] The indicating device 700 is connected to the vacuum gauge 600 in the testing equipment.

[0111] The indicating device 700 is configured to indicate the air pressure in the test pipeline.

[0112] In one embodiment, the test system further includes an operating handle 800. The operating handle 800 can be operated to control the operation of one or more of the helium detection valve 320, the first exhaust valve 330, the second exhaust valve 350, and the purge valve 340.

[0113] It should be understood that in some cases, one or more of the helium check valve 320, the first exhaust valve 330, the second exhaust valve 350, and the purge valve 340 may need to be opened or closed manually. In such cases, an indicator device 700 may be provided to indicate the air pressure in the test line 300, allowing personnel to manually operate one or more of the helium check valve 320, the first exhaust valve 330, the second exhaust valve 350, and the purge valve 340 based on the air pressure.

[0114] Optionally, the indicating device 700 may be an indicator light 710, a display 720, a dashboard, etc. The indicating device 700 may be selected according to actual conditions.

[0115] In one embodiment, the test system further includes a sliding component 900. The sliding component 900 is configured to drive the test system to move on the ground. The sliding component 900 can be a Forma wheel, a pulley, a universal wheel, etc. The sliding component 900 can be selected according to actual conditions.

[0116] In the above implementation process, by setting up the indicating device 700, the air pressure in the test pipeline 300 can be reflected, so that the staff can manually operate one or more of the helium check valve 320, the first exhaust valve 330, the second exhaust valve 350 and the air release valve 340, thereby increasing the operation methods of the helium check valve 320, the first exhaust valve 330, the second exhaust valve 350 and the air release valve 340, thereby increasing the application scenarios of the test system.

[0117] The foregoing description is merely a preferred embodiment of the present application and is not intended to limit the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined or explained in subsequent figures.

[0118] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.

Claims

1. A testing device, characterized in that: include: a first exhaust pump, a helium detector, and a plurality of test pipelines; Each test pipeline includes: a workpiece port, a helium detection valve, a first exhaust valve and a bleed valve; The workpiece port in each of the test pipelines is connected to the first exhaust pump and the helium detector through a pipeline; The helium detection valve is arranged on the pipeline connecting the helium detector and the workpiece port; The first exhaust valve is provided on a pipe connecting the first exhaust pump and the workpiece port; The air release valve is arranged on a pipeline connecting the workpiece port and the helium release device.

2. The test device according to claim 1, characterized in that Also includes: a second exhaust pump; Wherein, each test pipeline further includes: a second exhaust valve; The second exhaust valve is provided on a pipe connecting the second exhaust pump and the workpiece port; Wherein, the first exhaust pump and the second exhaust pump are configured to operate at different in-pipe air pressures.

3. The testing device according to claim 2, characterized in that The second exhaust valve is configured to open when the air pressure in the test pipeline reaches a first preset air pressure range to connect the air path between the second exhaust pump and the workpiece port; The second exhaust valve is configured to close when the air pressure in the test pipeline reaches a second preset air pressure range, so as to close the air path between the second exhaust pump and the workpiece port; Wherein, the first preset air pressure range is greater than the second preset air pressure range.

4. The testing device according to claim 3, characterized in that A first interlocking structure is provided between the second exhaust valve and the helium detection valve provided on the same test pipeline; Wherein, the first interlock structure is configured to control the helium detection valve to open when the second exhaust valve is closed.

5. The testing device according to claim 3, characterized in that A second interlocking structure is provided between the helium detection valve, the first exhaust valve, the second exhaust valve and the purge valve provided on the same test pipeline; The second interlocking structure is configured to control the helium detection valve, the first exhaust valve, the second exhaust valve and the purge valve provided on the same test pipeline to open in a time-sharing manner.

6. The testing device according to claim 1, wherein: A third interlocking structure is provided between the helium detection valves provided on different test pipelines; The third interlocking structure is configured to control the helium detection valves on different test pipelines to be opened in a time-sharing manner.

7. The testing device according to claim 1, characterized in that Each test line also includes: a vacuum gauge; The vacuum gauge is arranged in a pipe connected to the workpiece port; The vacuum gauge is configured to obtain a gas pressure value in a corresponding test pipeline.

8. A testing system, characterized in that: include: The testing device and helium release device according to any one of claims 1 to 7; The pipeline connected to the workpiece port in the testing equipment is connected to the helium release device through a vent valve.

9. The test system according to claim 8, characterized in that: Also includes: Controller; The controller is connected to one or more of a helium detection valve, a first exhaust valve, a second exhaust valve, and a purge valve in the testing device.

10. The test system according to claim 8, wherein: Also includes: indicating device; The indicating device is connected to the vacuum gauge in the testing equipment; Wherein, the indicating device is configured to indicate the air pressure condition in the test pipeline.

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