Valve path system for analyzing trace or trace impurities in various high-purity gases

Through the valve circuit system of four-valve and six-column system, the problem of the inability to detect trace or trace impurities of multiple high-purity gases simultaneously in the prior art is solved, and efficient and low-cost detection of multiple high-purity gases is achieved.

CN223217451UActive Publication Date: 2025-08-12SHIMADZU (CHINA) CO LTD
0 Cites 0 Cited by

Patent Information

Application Number
CN202422369629.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-26
Publication Date
2025-08-12
Estimated Expiration
2034-09-26

AI Technical Summary

Technical Problem

The existing high-purity gas trace or trace impurity detection methods cannot meet the detection needs of multiple high-purity gases at the same time. They require multiple instruments or complex system flow path changes, resulting in low analysis efficiency and high cost.

Method used

The valve circuit system using a four-valve and six-column system, including a pulse discharge helium ionization detector, separates and detects trace or trace impurities in hydrogen, argon, oxygen, nitrogen and helium through switching of four valves and separation of six columns, simplifies the operation process and reduces the cost of analysis.

Benefits of technology

Simultaneous detection of trace or trace impurities in five high-purity gases is achieved, with peak area reproducibility ≤1%, and the minimum detection limit is less than 20ppb, which simplifies the operation process and reduces the analysis cost.

✦ Generated by Eureka AI based on patent content.
Patent Text Reader

Abstract

The utility model discloses a valve path system for analyzing trace or trace impurities in various high-purity gases. The valve path system is a four-valve six-column system; comprising a pulse discharge helium ionization detector, a detection gas inlet assembly, a first detection branch and a second detection branch. A four-valve six-column system is adopted, and four valves are switched, and six columns are separated; the method comprises the following steps: firstly, dividing trace or trace impurities in single-type high-purity gas into two types for independent detection; and secondly, high-purity gas and impurities which are not detected in the branch are discharged through switching of the states of the valves, and the impurities to be detected are conveyed to a pulse discharge helium ionization detector after being subjected to repeated center cutting for multiple times. Therefore, trace or trace impurities in five high-purity gases, namely hydrogen, argon, oxygen, nitrogen and helium, are simultaneously detected by using the valve path system, the purposes of simplifying the operation process and reducing the analysis cost are achieved, the peak area reproducibility (n is equal to 6) is less than or equal to 1%, and the lowest detection limit of each impurity is less than 20ppb.
Need to check novelty before this filing date? Find Prior Art