Light absorption type detector based on MEMS structure

Abstract

The utility model discloses a light absorption type detector based on an MEMS structure, and belongs to the technical field of energy storage fire-fighting detectors. Comprising a packaging substrate, a BT tube shell is arranged on the packaging substrate, an MEMS transmitting chip and an MEMS receiving chip are arranged in the BT tube shell, a box dam playing a role in separation is arranged between the MEMS receiving chip and the MEMS transmitting chip, a glass substrate connected in a sealed mode is arranged at the upper end of the BT tube shell, the outer surface of the glass substrate is coated with a chemical film medium, and sealant is poured into the BT tube shell. By arranging the chemical thin film medium on the glass substrate, after the chemical thin film medium reacts with combustible gas or other harmful gases, the light absorption property of the thin film can be changed, the reflectivity is enhanced, and therefore the function of detecting the combustible gas or other harmful gases is achieved; the light absorption type detector is small in overall size, is more suitable for narrow spaces such as a battery pack in an energy storage system, is much lower in cost compared with optical fiber type gas detection, and is long in service life.

Description

Technical Field

[0001] The utility model relates to a light absorption detector based on a MEMS structure, belonging to the technical field of energy storage fire detectors. Background Art

[0002] Energy storage facilities, such as energy storage power stations and storage containers, typically store large amounts of electrical energy. Once a fire occurs, it will spread rapidly, with serious consequences. Therefore, energy storage firefighting systems often employ multiple protective measures, including fire warning, fire extinguishing, and cooling, to ensure timely and effective fire control. Gas detection technology also plays a crucial role in energy storage firefighting. Gas detectors installed within energy storage facilities can monitor the gas composition and concentration within the facility in real time. Once a leak of combustible or other hazardous gases is detected, appropriate safety measures can be promptly initiated to prevent accidents such as fires or explosions.

[0003] Existing gas detection technologies include electrochemical and fiber optic. However, electrochemical gas detection suffers from a limited range and short lifespan, while fiber optic gas detection suffers from bulk, high cost, low sensitivity, and immature gas concentration gradient separation technology, making them unsuitable for energy storage firefighting systems. Therefore, it is imperative to develop a MEMS-based absorption detector suitable for use in energy storage firefighting systems. Utility Model Content

[0004] In view of the above-mentioned deficiencies in the prior art, the present invention provides a light absorption detector based on a MEMS structure.

[0005] The technical solution of the utility model to solve the above technical problems is as follows:

[0006] A light absorption detector based on a MEMS structure includes a packaging substrate, a BT tube shell is provided on the packaging substrate, a MEMS transmitting chip and a MEMS receiving chip are provided in the BT tube shell, a dam is provided between the MEMS receiving chip and the MEMS transmitting chip to serve as a separator, a glass substrate is provided at the upper end of the BT tube shell for sealing connection, the outer surface of the glass substrate is coated with a chemical thin film medium, and a sealing colloid is poured into the interior of the BT tube shell, which respectively covers the MEMS transmitting chip 2 and the MEMS receiving chip 3 to isolate the chips from the gas.

[0007] Furthermore, a first bonding area and a second bonding area are provided on the packaging substrate, and the MEMS transmitting chip and the MEMS receiving chip are respectively provided on the first bonding area and the second bonding area.

[0008] Furthermore, the height of the dam is the same as the height of the BT shell.

[0009] Furthermore, the lower end of the BT tube shell is sealed and connected to the packaging substrate.

[0010] Furthermore, the top of the BT tube shell is open.

[0011] Furthermore, the position and area of the chemical thin film medium can match the MEMS transmitting chip and the MEMS receiving chip.

[0012] Furthermore, the MEMS receiving chip and the MEMS transmitting chip are both provided with gold wires connected to the packaging substrate.

[0013] Furthermore, the upper end surface of the dam is sealed and connected to the glass substrate.

[0014] Furthermore, the dam is made of opaque metal, ceramic or PCB board.

[0015] Furthermore, the sealing colloid is an insulating and light-transmitting colloid.

[0016] Compared with the existing technology, the beneficial effects of the present invention are: by setting a chemical thin film medium on a glass substrate, after reacting with combustible gas or other harmful gas, the light absorption of the film can be changed, and the reflectivity can be enhanced, thereby realizing the detection function of combustible gas or other harmful gas; the overall volume of the light absorption detector is smaller, and it is more suitable for small spaces such as battery packs in energy storage systems, and the cost is much lower than that of optical fiber gas detection, and the service life is longer. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is the main view of the utility model.

[0018] Figure 2 It is a structural diagram of the present utility model.

[0019] Figure 3 This is a disassembled diagram of the optical path structure of the present utility model.

[0020] In the figure, 1. packaging substrate; 2. MEMS transmitting chip; 3. MEMS receiving chip; 4. first bonding area; 5. second bonding area; 6. gold wire; 7. dam; 8. glass substrate; 81. chemical thin film medium; 9. sealing colloid; 10. BT tube shell. DETAILED DESCRIPTION

[0021] The principles and features of the present invention are described below in conjunction with the accompanying drawings. The examples given are only used to explain the present invention and are not used to limit the scope of the present invention.

[0022] like Figure 1-Figure 3As shown, a light absorption detector based on a MEMS structure includes a packaging substrate 1, a BT tube shell 10 is provided on the packaging substrate 1, a MEMS transmitting chip 2 and a MEMS receiving chip 3 are provided in the BT tube shell 10, a dam 7 is provided between the MEMS receiving chip 3 and the MEMS transmitting chip 2 for separation, a glass substrate 8 is provided at the upper end of the BT tube shell 10 for sealing connection, the outer surface of the glass substrate 8 is coated with a chemical thin film medium 81, and a sealing colloid 9 is poured into the inside of the BT tube shell 10, which respectively covers the MEMS transmitting chip 2 and the MEMS receiving chip 3 to isolate the chips from the gas.

[0023] The packaging substrate 1 is provided with a first bonding area 4 and a second bonding area 5 , and the MEMS transmitting chip 2 and the MEMS receiving chip 3 are respectively provided on the first bonding area 4 and the second bonding area 5 .

[0024] The height of the dam 7 is the same as that of the BT tube shell 10 .

[0025] The lower end of the BT tube shell 10 is sealed and connected to the packaging substrate 1 .

[0026] The top of the BT tube shell 10 is open.

[0027] The position and area of the chemical thin film medium 81 can match the MEMS transmitting chip 2 and the MEMS receiving chip 3 .

[0028] The MEMS receiving chip 3 and the MEMS transmitting chip 2 are both provided with gold wires 6 connected to the packaging substrate 1 .

[0029] The upper end surface of the dam 7 is sealed to the glass substrate 8 .

[0030] The dam 7 is made of opaque metal, ceramic or PCB board.

[0031] The sealing colloid 9 is an insulating and light-transmitting colloid.

[0032] During operation, the surface of glass substrate 8 is coated with a chemical film medium 81. In a normal air environment, this medium does not chemically react and strongly absorbs light emitted by MEMS transmitter chip 2, weakening the refracted light received by MEMS receiver chip 3. However, when air contains flammable or other harmful gases, it reacts with the chemical film medium 81, producing a new substance that absorbs less light from MEMS transmitter chip 2 and intensifies the refracted light received by MEMS receiver chip 3. This change in light intensity detected by MEMS receiver chip 3 enables detection of flammable or other harmful gases.

[0033] By setting a chemical thin film medium 81 on the glass substrate 8, after reacting with combustible gas or other harmful gas, the light absorption of the film can be changed, and the reflectivity can be enhanced, thereby realizing the detection function of combustible gas or other harmful gas; the overall volume of the light absorption detector is smaller, and it is more suitable for small spaces such as battery packs in energy storage systems. The cost is much lower than that of optical fiber gas detection, and the service life is longer.

[0034] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A light absorption detector based on a MEMS structure, comprising a packaging substrate (1), characterized in that: A BT shell (10) is provided on the packaging substrate (1), a MEMS transmitting chip (2) and a MEMS receiving chip (3) are provided in the BT shell (10), a dam (7) is provided between the MEMS receiving chip (3) and the MEMS transmitting chip (2) to serve as a separator, a sealed glass substrate (8) is provided at the upper end of the BT shell (10), the outer surface of the glass substrate (8) is coated with a chemical film medium (81), a sealing colloid (9) is poured into the interior of the BT shell (10), and the sealing colloid (9) respectively covers the MEMS transmitting chip 2 and the MEMS receiving chip 3 to isolate the chips from the gas.

2. The MEMS-based absorption detector according to claim 1, characterized in that: A first adhesive region (4) and a second adhesive region (5) are provided on the packaging substrate (1); the MEMS transmitting chip (2) and the MEMS receiving chip (3) are respectively provided on the first adhesive region (4) and the second adhesive region (5).

3. The MEMS-based absorption detector according to claim 1, wherein: The height of the dam (7) is the same as that of the BT tube shell (10).

4. The MEMS-based absorption detector according to claim 1, wherein: The lower end of the BT tube shell (10) is sealed and connected to the packaging substrate (1).

5. The MEMS-based absorption detector according to claim 1, characterized in that: The top of the BT tube shell (10) is in an open state.

6. The MEMS-based absorption detector according to claim 1, wherein: The position and area of the chemical film medium (81) can match the MEMS transmitting chip (2) and the MEMS receiving chip (3).

7. The MEMS-based absorption detector according to claim 1, characterized in that: The MEMS receiving chip (3) and the MEMS transmitting chip (2) are both provided with gold wires (6) connected to the packaging substrate (1).

8. The MEMS-based absorption detector according to claim 1, characterized in that: The upper end surface of the dam (7) is sealed and connected to the glass substrate (8).

9. The MEMS-based absorption detector according to claim 1, characterized in that: The dam (7) is made of opaque metal, ceramic or PCB board.

10. The MEMS-based absorption detector according to claim 1, characterized in that: The sealing colloid (9) is an insulating and light-transmitting colloid.

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