High-precision focal plane compensation device
Through the cooperation of the focal surface correction mechanism and the mask mounting mechanism, the linear motor and grating components are used to achieve accurate compensation of the focal surface of the photovoltaic lens, solving the problem of focal surface offset, and improving the exposure quality and production efficiency of the photovoltaic cell.
Patent Information
- Application Number
- CN202422155450.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-03
- Publication Date
- 2025-08-15
- Estimated Expiration
- 2034-09-03
AI Technical Summary
The focal surface of existing photovoltaic lenses is affected by the heat effect during long exposure, resulting in the focal surface shift and affecting the exposure quality of photovoltaic cells. The existing focal surface compensation scheme has problems such as long time, high cost or difficulty in precise control.
The focal surface deviation correction mechanism and the mask installation mechanism are adopted to move simultaneously through a linear motor to adjust the horizontal spacing between the mask plate and the projection lens inlet, so as to achieve precise control of the focal surface position, and combine the grating component and angle adjustment driving to ensure accurate alignment of the exposure pattern.
It realizes precise adjustment of the focal surface position under thermal effect, reduces operational complexity and cost, and improves the exposure production yield of photovoltaic cells.
Smart Images
Figure CN223229850U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic product processing, in particular to a high-precision focal plane compensation device. Background Art
[0002] During the long-term exposure of photovoltaic cells, the focal plane of the photovoltaic lens will shift due to the thermal effect, which will affect the exposure quality of the photovoltaic cells. Therefore, the focal plane compensation solution is an important part of the photovoltaic cell exposure system.
[0003] Traditional focal plane compensation solutions fall into three categories: manual adjustment of the exposure station position, active compensation solutions, and overall lens height adjustment. Regarding manual / automatic exposure station adjustment solutions, the photovoltaic industry currently prioritizes production output, and exposure systems all utilize multi-station exposure. Adjustment station solutions require multiple adjustments, which consumes significant time and impacts production output. Active compensation solutions, including technologies like affixing semiconductor heaters, infrared thermal compensation, and deformable mirror compensation, are difficult to implement and expensive, aligning with the current cost reduction efforts of the photovoltaic industry. Regarding lens height adjustment solutions, photovoltaic exposure lenses can weigh up to 350kg, making precise mechanical control of the overall vertical movement of the lens difficult. Furthermore, simultaneous lens movement requires simultaneous movement of the lighting height, making it difficult to ensure the stability of the exposure system. Utility Model Content
[0004] In order to solve the problems existing in the focal plane compensation of photovoltaic lenses in the background art, the present invention provides the following technical solutions:
[0005] A high-precision focal plane compensation device includes a light source, a light shaping unit, a projection lens, and a mask. It also includes a correction assembly disposed between the light shaping unit and the projection lens. The correction assembly includes a focal plane correction mechanism and a mask mounting mechanism. The mask is mounted on the mask mounting mechanism, which is vertically mounted on the focal plane correction mechanism. The focal plane correction mechanism is mounted on a mounting platform on the outer wall of the projection lens and is used to adjust the horizontal distance between the mask and the light inlet end of the projection lens.
[0006] Among them, the focal plane correction mechanism includes two groups of linear motor stators respectively installed on the mounting platform, a linear motor mover arranged on the top of the linear motor stator, and a bending plate fixedly connected to the top of the linear motor mover. The ends of the two groups of bending plates away from the projection lens are fixedly connected to the mask mounting mechanism.
[0007] As a further solution of the present invention: a grating assembly is provided on the outer wall of the bending plate, and the grating assembly includes a connecting plate, a reading head, and a grating scale. The grating scale is arranged on the top of the mounting platform, and the connecting plate is fixedly connected to the outer wall of the bending plate. The reading head is fixedly installed on the outer wall of the connecting plate and scans the grating scale.
[0008] As a further solution of the present invention: the focal plane correction mechanism also includes two groups of slide rails fixedly connected to the top of the mounting platform and arranged parallel to the moving direction of the linear motor rotor, and a slide seat fixedly connected to the bottom of the bending plate, and the slide seat is slidably connected to the outer wall of the slide rail.
[0009] As a further solution of the present invention: the mask mounting mechanism includes a back plate, a mask mounting plate, and an angle adjustment drive. The side of the back plate close to the projection lens is fixedly connected to the two ends of the bending plates. The angle adjustment drive is arranged between the back plate and the mask mounting plate. The angle adjustment drive is installed on the side of the back plate away from the bending plate. The mask mounting plate is connected to the driving end of the angle adjustment drive.
[0010] As a further solution of the present invention: a light-transmitting opening is opened in the middle position of the mask mounting plate and the back plate, the mask is fixedly mounted on the outer wall of the mask mounting plate away from the angle adjustment drive, and the light emitted by the light source passes through the light shaping unit and the mask in sequence, and then passes through the light-transmitting openings on the outer walls of the mask mounting plate and the back plate to enter the projection lens.
[0011] As a further solution of the present invention: a fixing frame with a triangular structure is provided between the top of the bent plate and the back plate.
[0012] As a further solution of the present invention: the projection lens is a bi-telecentric projection lens.
[0013] Compared with the prior art, the beneficial effect of the present invention is as follows: according to the focal length change per unit time of the projection lens during hot-up, two sets of linear motor stators and linear motor movers are started, and the linear motor movers move at the top of the linear motor stator toward the light input end of the projection lens by a distance equal to the focal length change, thereby driving the bending plate and the mask mounting mechanism to move synchronously, thereby adjusting the horizontal distance between the mask on the mask mounting mechanism and the light input end of the projection lens to achieve precise control of the focal plane position. Compared with traditional focusing solutions, this thermal compensation solution can better control costs while meeting the requirements of precise focusing, and is simple and convenient to operate. Similarly, when the projection lens is cold, the focal plane of the projection lens will shift toward the direction away from the light output end of the projection lens. At this time, it is only necessary to move the object plane, that is, move the mask the same distance away from the light input end of the projection lens to eliminate the influence of the focal plane offset caused by the thermal effect. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a structural diagram of a high-precision focal plane compensation device.
[0015] Figure 2 This is a schematic diagram of the front structure of the correction component in a high-precision focal plane compensation device.
[0016] Figure 3 This is a schematic diagram of the back structure of the correction component in a high-precision focal plane compensation device.
[0017] In the figure: 1. Light shaping unit; 2. Mask mounting mechanism; 3. Focal plane correction mechanism; 4. Projection lens; 5. Mask plate; 6. Back plate; 7. Mask mounting plate; 8. Linear motor stator; 9. Linear motor mover; 10. Slide rail; 11. Slide seat; 12. Bending plate; 13. Fixing frame; 14. Connecting plate; 15. Reading head; 16. Grating scale; 17. Angle adjustment drive; 18. Mounting table. DETAILED DESCRIPTION
[0018] During the long-term exposure of photovoltaic lenses to solar cells, the image plane (focal plane) on the solar cells will be offset toward the light-emitting end of the lens due to the thermal effect. The following is a further detailed description of the present invention in conjunction with the accompanying drawings and specific embodiments.
[0019] like Figure 1-Figure 3 , a high-precision focal plane compensation device, including a light source, a light shaping unit 1, a projection lens 4, and a mask 5. The projection lens 4 is a bi-telecentric projection lens, and also includes a correction component arranged between the light shaping unit 1 and the projection lens 4, the correction component includes a focal plane correction mechanism 3 and a mask mounting mechanism 2, the mask 5 is mounted on the mask mounting mechanism 2, the mask mounting mechanism 2 is vertically mounted on the focal plane correction mechanism 3, and the focal plane correction mechanism 3 is mounted on the mounting platform 18 on the outer wall of the projection lens 4 for adjusting the horizontal distance between the mask 5 and the light input end of the projection lens 4; wherein, the focal plane correction mechanism 3 includes two groups of linear motor stators 8 respectively mounted on the mounting platform 18, a linear motor mover 9 arranged on the top of the linear motor stator 8, and a bending plate 12 fixedly connected to the top of the linear motor mover 9, and the ends of the two groups of bending plates 12 away from the projection lens 4 are fixedly connected to the mask mounting mechanism 2.
[0020] The light source emits light, which is shaped by the light shaping unit 1 and then illuminates the surface of the mask 5. The light then enters the projection lens 4 through the light input end of the projection lens 4 and illuminates the surface of the cell through the light output end of the projection lens 4. During the long-term exposure of the cell, the projection lens 4 is affected by the thermal effect, and the image plane on the cell, that is, the focal plane of the projection lens 4, will shift toward the light output end of the projection lens 4. According to the principle of a bi-telecentric projection lens, at this time, only the object plane needs to be moved, that is, the mask 5 is moved the same distance toward the light input end of the projection lens 4 to eliminate the focal plane shift caused by the thermal effect. The specific operation is as follows: according to the focal length change of the projection lens 4 per unit time, the two sets of linear motor stators 8 and linear motor movers 9 are started. The linear motor mover 9 moves at the top of the linear motor stator 8 toward the light input end of the projection lens 4 by a distance equal to the focal length change, thereby driving the bending plate 12 and the mask mounting mechanism 2 to move synchronously, thereby adjusting the horizontal distance between the mask 5 on the mask mounting mechanism 2 and the light input end of the projection lens 4, thereby achieving precise control of the focal plane position. Compared with traditional focusing solutions, this thermal compensation solution can better control costs while meeting the requirements of precise focusing, and is simple and convenient to operate. Similarly, when the projection lens 4 is cold, the focal plane of the projection lens 4 will shift in the direction away from the light output end of the projection lens 4. At this time, it is only necessary to move the object plane, that is, move the mask 5 the same distance away from the light input end of the projection lens 4, to eliminate the influence of the focal plane offset caused by the thermal effect.
[0021] The focal plane correction mechanism 3 also includes two sets of slide rails 10 fixedly connected to the top of the mounting platform 18 and arranged parallel to the moving direction of the linear motor mover 9, and a slide seat 11 fixedly connected to the bottom of the bending plate 12. The slide seat 11 is slidably connected to the outer wall of the slide rail 10.
[0022] By arranging the slide seat 11 at the bottom of the bending plate 12 to slide on the outer wall of the slide rail 10, the stability of the movement of the bending plate 12 and the mask mounting mechanism 2 can be improved, and precise focusing can be achieved.
[0023] A grating assembly is provided on the outer wall of the bending plate 12, and the grating assembly includes a connecting plate 14, a reading head 15, and a grating scale 16. The grating scale 16 is arranged on the top of the mounting platform 18. The connecting plate 14 is fixedly connected to the outer wall of the bending plate 12, and the reading head 15 is fixedly installed on the outer wall of the connecting plate 14 and scans the grating scale 16.
[0024] By setting the connecting plate 14 and the reading head 15 to move synchronously with the bending plate 12, the reading head 15 scans the grating scale 16, and the reading head 15 sends out a light signal, and the light signal is reflected back from the grating scale 16, and then the light signal is converted into a digital signal to obtain the reading of the grating scale 16, and then the displacement distance of the bending plate 12 and the mask mounting mechanism 2 is obtained, and then the horizontal distance between the mask plate 5 and the light inlet end of the projection lens 4 is accurately adjusted to achieve the function of precise focusing.
[0025] The mask mounting mechanism 2 includes a back plate 6, a mask mounting plate 7, and an angle adjustment drive 17. The side of the back plate 6 close to the projection lens 4 is fixedly connected to the ends of the two bending plates 12. The angle adjustment drive 17 is arranged between the back plate 6 and the mask mounting plate 7. The angle adjustment drive 17 is installed on the side of the back plate 6 away from the bending plate 12. The mask mounting plate 7 is connected to the driving end of the angle adjustment drive 17.
[0026] A light-transmitting opening is provided in the middle of the mask mounting plate 7 and the back plate 6. The mask 5 is fixedly mounted on the outer wall of the mask mounting plate 7 away from the angle adjustment drive 17. The light emitted by the light source passes through the light shaping unit 1 and the mask 5 in turn, and then passes through the light-transmitting openings on the outer walls of the mask mounting plate 7 and the back plate 6 to enter the projection lens 4.
[0027] The mask 5 is mounted on the outer wall of the mask mounting plate 7. By setting the angle adjustment drive 17, the mask mounting plate 7 and the mask 5 can be driven to move up and down, left and right, and rotate in the horizontal plane. By adjusting the position of the mask 5, the exposure pattern on the mask 5 is ensured to be centered, thereby improving the exposure production yield of the battery cell.
[0028] A triangular-structured fixing frame 13 is provided between the top of the bent plate 12 and the back plate 6 to improve the stability of the connection between the bent plate 12 and the back plate 6 .
[0029] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. A high-precision focal plane compensation device, comprising a light source, a light shaping unit, a projection lens, and a mask, characterized in that: The optical system further includes a correction component disposed between the light shaping unit and the projection lens, the correction component including a focal plane correction mechanism and a mask mounting mechanism, the mask being mounted on the mask mounting mechanism, the mask mounting mechanism being vertically mounted on the focal plane correction mechanism, and the focal plane correction mechanism being mounted on a mounting platform on the outer wall of the projection lens for adjusting the horizontal distance between the mask and the light inlet end of the projection lens; Among them, the focal plane correction mechanism includes two groups of linear motor stators respectively installed on the mounting platform, a linear motor mover arranged on the top of the linear motor stator, and a bending plate fixedly connected to the top of the linear motor mover. The ends of the two groups of bending plates away from the projection lens are fixedly connected to the mask mounting mechanism.
2. The high-precision focal plane compensation device according to claim 1, characterized in that: The outer wall of the bending plate is provided with a grating assembly, and the grating assembly includes a connecting plate, a reading head, and a grating scale. The grating scale is arranged on the top of the mounting platform, the connecting plate is fixedly connected to the outer wall of the bending plate, and the reading head is fixedly installed on the outer wall of the connecting plate and scans the grating scale.
3. The high-precision focal plane compensation device according to claim 1, characterized in that: The focal plane correction mechanism also includes two sets of slide rails fixedly connected to the top of the mounting platform and arranged parallel to the moving direction of the linear motor mover, and a slide seat fixedly connected to the bottom of the bending plate, and the slide seat is slidably connected to the outer wall of the slide rail.
4. The high-precision focal plane compensation device according to claim 1, characterized in that: The mask mounting mechanism includes a back plate, a mask mounting plate, and an angle adjustment drive. The side of the back plate close to the projection lens is fixedly connected to the two ends of the bending plates. The angle adjustment drive is arranged between the back plate and the mask mounting plate. The angle adjustment drive is installed on the side of the back plate away from the bending plate. The mask mounting plate is connected to the driving end of the angle adjustment drive.
5. The high-precision focal plane compensation device according to claim 4, characterized in that: A light-transmitting opening is provided in the middle of the mask mounting plate and the back plate. The mask is fixedly mounted on the outer wall of the mask mounting plate away from the angle adjustment drive. The light emitted by the light source passes through the light shaping unit and the mask in sequence, and then passes through the light-transmitting openings on the outer walls of the mask mounting plate and the back plate to enter the projection lens.
6. The high-precision focal plane compensation device according to claim 4, characterized in that: A fixing frame with a triangular structure is provided between the top of the bending plate and the back plate.
7. The high-precision focal plane compensation device according to claim 1, characterized in that: The projection lens is a bi-telecentric projection lens.