High-temperature-resistant electromagnetic ultrasonic longitudinal wave probe

Abstract

A high-temperature-resistant electromagnetic ultrasonic longitudinal wave probe relates to the technical field of ultrasonic nondestructive testing, and can reduce the temperature of a probe coil part and prolong the working time of the probe in a high-temperature state. The internal detection coil can be conveniently replaced, so that the repeated utilization rate of the whole probe is effectively improved. In the high-temperature-resistant electromagnetic ultrasonic longitudinal wave probe, a permanent magnet is arranged in a probe shell, an armature is arranged above the permanent magnet, and the permanent magnet and the armature jointly form a magnetic field in the horizontal direction of the surface of a workpiece; a piezoelectric pump is arranged above the armature, the piezoelectric pump is connected with a cooling pipe through a one-way valve, and the cooling pipe is connected with the detection chip; the bottommost layer of the detection chip comprises a first substrate and a detection coil at the upper part of the first substrate; the middle layer comprises a second substrate and a micro-channel formed in the upper surface of the second substrate, and the micro-channel is used for allowing a cooling medium to pass through; the topmost layer comprises a third substrate for sealing the micro-channel; water inlet holes, water outlet holes and lead holes are formed in the two sides of the second substrate and the third substrate.

Description

Technical Field

[0001] The utility model relates to the technical field of ultrasonic non-destructive testing, in particular to a high-temperature resistant electromagnetic ultrasonic longitudinal wave probe. Background Art

[0002] Electromagnetic ultrasound is a recent development in ultrasonic nondestructive testing technology. Due to its advantages such as no need for coupling agents, non-contact, and fast detection speed, electromagnetic ultrasonic testing technology is very suitable for high-temperature testing.

[0003] Electromagnetic ultrasonic testing is highly applicable to the commonly used high-temperature pressure vessel and pressure pipe wall thickness inspection scenarios. Currently commercialized high-temperature electromagnetic ultrasonic probes primarily utilize a thermal insulation layer installed on the probe surface to enhance the probe's high-temperature resistance.

[0004] However, this insulation method has no internal cooling measures and can only perform thickness measurement on the surface of the high-temperature device for a short time. This requires frequent interruptions in the measurement process, resulting in low detection efficiency and failing to meet the technical requirements for long-term online monitoring of wall thickness.

[0005] In addition, existing high-temperature probes usually adopt an integrated packaging method. The detection coil is the weak link inside the high-temperature electromagnetic ultrasonic probe. It cannot be replaced after being damaged, resulting in the scrapping of the entire detection probe, causing great waste. Utility Model Content

[0006] The purpose of the utility model is to provide a high-temperature resistant electromagnetic ultrasonic longitudinal wave probe, which can significantly reduce the temperature of the probe coil part during the continuous operation of the probe and extend the working time of the probe under high temperature conditions; and, during the long-term use of the probe, the internal detection coil can be easily replaced without affecting the use of other parts, thereby effectively improving the reuse rate of the entire probe.

[0007] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0008] A high-temperature resistant electromagnetic ultrasonic longitudinal wave probe comprises: a probe housing, and a probe bottom cover mating with the probe housing; a connector is provided at one end of the probe housing away from the probe bottom cover, and a built-in electrode of the connector is connected to a piezoelectric pump provided with a piezoelectric vibrator in the interior of the probe housing, and is connected to a detection chip located outside the probe bottom cover; the outside of the connector is connected to an electromagnetic ultrasonic detection host via a wire;

[0009] Two permanent magnets are provided inside the probe housing and on the inner side of the probe bottom cover, and an armature is provided above the two permanent magnets. The permanent magnets and the armature together form a magnetic field in a horizontal direction along the surface of the workpiece; the piezoelectric pump is provided above the armature, and the piezoelectric pump is connected to a cooling pipe through a one-way valve, and the cooling pipe is connected to the detection chip;

[0010] The detection chip includes a bottom layer, a middle layer and a top layer; the bottom layer includes a first substrate, and a detection coil located on the upper part of the first substrate, and the detection coil is made of copper and has a broken line shape; the middle layer includes a second substrate, and the upper surface of the second substrate is provided with a microchannel, the microchannel is used to pass the cooling medium, and the two sides of the second substrate are processed with water inlet holes, water outlet holes and lead holes; the top layer includes a third substrate, and the third substrate is used to close the microchannel on the second substrate, and the two sides of the third substrate are processed with water inlet holes, water outlet holes and lead holes.

[0011] In practical application, the piezoelectric pump further comprises: a pump chamber, a gasket, and a pump cover connected and fixed by fastening screws;

[0012] The pump chamber is made of brass, and water inlet and water outlet holes are processed on both sides of the pump chamber. The water inlet is connected to the cooling pipe and is fixed and sealed with waterproof glue, and the water outlet is connected to the one-way valve and is fixed and sealed with waterproof glue; the other end of the one-way valve is connected to the second cooling pipe.

[0013] Wherein, a positioning groove is provided above the pump cavity, and the positioning groove is used to place the piezoelectric vibrator;

[0014] The piezoelectric vibrator is composed of a piezoelectric ceramic sheet and a brass metal sheet bonded together, with the lower electrode of the piezoelectric ceramic sheet and the brass metal sheet being in a circuit conductive state; one electrode of the piezoelectric vibrator is welded to the upper end surface of the piezoelectric ceramic sheet, and the other electrode is welded to the brass metal sheet, and a wire is led out from the upper and lower electrodes by brazing;

[0015] O-type sealing rings are respectively placed on the upper and lower surfaces of the piezoelectric vibrator, and the O-type sealing rings are used to play a sealing role when the internal cooling medium circulates.

[0016] Specifically, the gasket is made of stainless steel, and is used to control the downward pressure of the two O-rings on the upper and lower surfaces of the piezoelectric vibrator to ensure the sealing of the cooling system.

[0017] Furthermore, the pump cover is made of aluminum alloy, and a wire outlet hole is provided on one side of the pump cover, and the wire outlet hole is used to lead out the wires at both ends of the upper and lower electrodes of the piezoelectric vibrator.

[0018] In actual application, the first substrate, the second substrate and the third substrate are all made of silicon wafer material, and the first substrate, the second substrate and the third substrate are connected into a whole by bonding.

[0019] Wherein, the material of the permanent magnet is neodymium iron boron, and the material of the armature is soft iron.

[0020] Specifically, the cooling tube and the one-way valve are both made of brass; a cooling medium flows inside the cooling tube, and the one-way valve is used to ensure the one-way flow of the cooling medium.

[0021] Furthermore, the probe bottom cover is fixed with two magnet positioning grooves by welding, and the magnet positioning grooves are used to insert and fix the permanent magnets;

[0022] The probe bottom cover is processed with a lead hole and a threaded hole, and the lead hole is used to connect the detection chip installed on the bottom of the probe bottom cover, and the threaded hole is used to fix the detection chip to the bottom of the probe bottom cover by fastening screws;

[0023] The probe bottom cover is processed with two water inlet holes, and the upper surfaces of the water inlet holes are respectively connected to the two cooling pipes, and the lower surfaces of the water inlet holes are respectively connected to the water inlet and outlet holes of the detection chip.

[0024] Furthermore, the housing of the connector is made of brass, and the connector and the probe housing are bonded together with strong glue;

[0025] The probe housing and the probe bottom cover are both made of brass, and the probe housing and the probe bottom cover are connected via threads.

[0026] Compared with the existing technology, the high temperature resistant electromagnetic ultrasonic longitudinal wave probe described in the present invention has the following advantages:

[0027] In the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by the utility model, since the detection chip is a packaged structure and a piezoelectric pump is used to provide power for the circulation of the coolant, the temperature of the probe coil part can be significantly reduced during the continuous operation of the probe, thereby extending the working time of the probe under high-temperature conditions; in addition, during the long-term use of the probe, the internal detection coil can be easily replaced without affecting the use of other parts, thereby effectively improving the reuse rate of the entire probe. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A schematic diagram of the explosion structure of a high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided in an embodiment of the present utility model;

[0029] Figure 2 A schematic diagram of the internal structure of a high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided in an embodiment of the present utility model;

[0030] Figure 3 A schematic diagram of the explosion structure of the piezoelectric pump in the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by an embodiment of the utility model;

[0031] Figure 4 A schematic diagram of the explosion structure of the detection chip in the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by an embodiment of the present utility model.

[0032] Reference numerals:

[0033] 1-probe housing; 2-probe bottom cover; 21-magnet positioning slot; 3-connector; 4-piezoelectric pump; 41-piezoelectric vibrator; 43-cooling tube; 44-pump chamber; 441-water inlet; 442-water outlet; 45-gasket; 46-pump cover; 47-fastening screw; 5-detection chip; 51-bottom layer; 511-first substrate; 512-detection coil; 52-middle layer; 521-second substrate; 522-microchannel; 53-top layer; 531-third substrate; 501-water inlet; 502-water outlet; 503-lead hole; 504-wire outlet; 505-threaded hole; 61-permanent magnet; 62-armature. DETAILED DESCRIPTION

[0034] Depending on the configuration of the permanent magnet and detection coil within the probe, electromagnetic ultrasonic probes can generate different types of ultrasonic waves, including longitudinal, shear, and surface wave probes. Electromagnetic ultrasonic longitudinal wave probes have a wide range of applications, including thickness testing, internal defect detection, and residual stress detection. Currently, commonly used high-temperature electromagnetic ultrasonic probes are typically ultrasonic shear wave probes, and there are no reports of high-temperature-resistant electromagnetic ultrasonic longitudinal wave probes for long-term testing of high-temperature materials.

[0035] For ease of understanding, the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by the embodiment of the present invention is described in detail below in conjunction with the accompanying drawings.

[0036] The present invention provides a high temperature resistant electromagnetic ultrasonic longitudinal wave probe. Figure 1-Figure 4 As shown, it includes: a probe housing 1, and a probe bottom cover 2 that matches and docks with the probe housing 1; a connector 3 is provided at one end of the probe housing 1 away from the probe bottom cover 2, and the built-in electrode of the connector 3 is connected to a piezoelectric pump 4 provided with a piezoelectric vibrator 41 inside the probe housing 1, and is connected to a detection chip 5 located outside the probe bottom cover 2; the outside of the connector 3 is connected to an electromagnetic ultrasonic detection host through a wire;

[0037] Two long permanent magnets 61 are disposed inside the probe housing 1 and on the inner side of the probe bottom cover 2. A long armature 62 is disposed above the two permanent magnets 61. The permanent magnets 61 and the armature 62 together form a magnetic field horizontally along the workpiece surface. A piezoelectric pump 4 is disposed above the armature 62 and is connected to a cooling pipe 43 via a one-way valve. The cooling pipe 43 is connected to the detection chip 5.

[0038] The detection chip 5 includes a bottom layer 51, a middle layer 52 and a top layer 53; the bottom layer 51 includes a first substrate 511 and a detection coil 512 located on the upper part of the first substrate 511, and the detection coil 512 is made of copper and has a broken line shape; the middle layer 52 includes a second substrate 521, and the upper surface of the second substrate 521 is provided with a microchannel 522, which is used to pass the cooling medium, and the two sides of the second substrate 521 are processed with a water inlet hole 501, a water outlet hole 502 and a lead hole 503; the top layer 53 includes a third substrate 531, and the third substrate 531 is used to close the microchannel 522 on the second substrate 521, and the two sides of the third substrate 531 are processed with a water inlet hole 501, a water outlet hole 502 and a lead hole 503.

[0039] Compared with the prior art, the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe described in the embodiment of the present utility model has the following advantages:

[0040] In the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by the embodiment of the present invention, since the detection chip is a packaged structure and a piezoelectric pump is used to provide power for the circulation of the coolant, the temperature of the probe coil part can be significantly reduced during the continuous operation of the probe, thereby extending the working time of the probe under high-temperature conditions; in addition, during the long-term use of the probe, the internal detection coil can be easily replaced without affecting the use of other parts, thereby effectively improving the reuse rate of the entire probe.

[0041] It's important to note that during the fabrication of the detection chip, photoresist is first used to etch the shape of the detection coil onto a silicon wafer. Copper is then plated on the wafer surface using electron beam evaporation. Laser etching is then used to create the microfluidic channels. The water inlet and outlet holes on the middle and top layers are aligned. The two lead holes on the middle and top layers are aligned with each other and with the two ends of the detection coil on the bottom layer. Copper is then plated in the lead holes, leading the two ends of the detection coil on the bottom layer to the top layer of the detection chip.

[0042] In actual application, such as Figure 3 As shown, the piezoelectric pump 4 may further include: a pump chamber 44, a gasket 45, and a pump cover 46 connected and fixed by fastening screws 47;

[0043] The material of the pump chamber 44 can be brass, and a water inlet hole 441 and a water outlet hole 442 are processed on both sides of the pump chamber 44. The water inlet hole 441 is connected to the cooling pipe 43 and is fixed and sealed with waterproof glue, and the water outlet hole 442 is connected to the one-way valve and is fixed and sealed with waterproof glue; and the other end of the one-way valve is connected to the second cooling pipe 43, thereby forming a good cooling system.

[0044] like Figure 3 As shown, a positioning groove is provided above the pump cavity 44 , and the positioning groove can be used to place the piezoelectric vibrator 41 ;

[0045] The piezoelectric vibrator 41 is composed of a piezoelectric ceramic sheet bonded to a brass metal sheet, with the lower electrode of the piezoelectric ceramic sheet and the brass metal sheet in electrical continuity. One electrode of the piezoelectric vibrator 41 is welded to the upper end surface of the piezoelectric ceramic sheet, and the other electrode is welded to the brass metal sheet. A wire is connected to each of the upper and lower electrodes by soldering.

[0046] O-rings may be placed on the upper and lower surfaces of the piezoelectric vibrator 41 , respectively, and the O-rings may be used to provide a good seal when the internal cooling medium circulates.

[0047] Specifically, if Figure 3 As shown, the gasket 45 may be made of stainless steel, and the gasket 45 can be used to control the downward pressure of the two O-rings on the upper and lower surfaces of the piezoelectric vibrator 41 , thereby effectively ensuring the sealing of the cooling system.

[0048] Further, if Figure 3 As shown, the pump cover 46 may be made of aluminum alloy, and a wire outlet hole 504 is provided on one side of the pump cover 46 . The wire outlet hole 504 can be used to lead out wires at both ends of the upper and lower electrodes of the piezoelectric vibrator 41 .

[0049] In actual application, such as Figure 4 As shown, the first substrate 511 , the second substrate 521 and the third substrate 531 can all be made of silicon wafer material, and the first substrate 511 , the second substrate 521 and the third substrate 531 can be connected into a whole by bonding.

[0050] The permanent magnet 61 may be made of neodymium iron boron, and the armature 62 may be made of soft iron.

[0051] Specifically, the cooling pipe 43 and the one-way valve may both be made of brass; a cooling medium flows through the interior of the cooling pipe 43, and the one-way valve may be used to ensure the one-way flow of the cooling medium.

[0052] Further, if Figure 2As shown, the probe bottom cover 2 can be fixed with two magnet positioning grooves 21 by welding, and the magnet positioning grooves 21 can be used to insert and fix the permanent magnet 61;

[0053] The probe bottom cover 2 is processed with a lead hole 503 and a threaded hole 505. The lead hole 503 can be used to connect the detection chip 5 installed on the bottom of the probe bottom cover 2. The threaded hole 505 can be used to fix the detection chip 5 to the bottom of the probe bottom cover 2 by tightening the screw 47.

[0054] The probe bottom cover 2 is processed with two water inlet holes, and the upper surfaces of the water inlet holes are connected to the two cooling pipes 43 respectively, and the lower surfaces of the water inlet holes are connected to the water inlet hole 501 and the water outlet hole 502 of the detection chip 5 respectively.

[0055] Furthermore, the housing of the connector 3 can be made of brass, and the connector 3 and the probe housing 1 can be bonded together with strong glue;

[0056] The probe housing 1 and the probe bottom cover 2 can both be made of brass, and the probe housing 1 and the probe bottom cover 2 can be connected by threads, so that after the probe housing 1 and the probe bottom cover 2 are connected, the entire probe internal structure can be encapsulated.

[0057] The following describes in detail the installation and use of the high-temperature resistant electromagnetic ultrasonic longitudinal wave probe provided by the embodiment of the utility model:

[0058] Insert the connecting wire into the lead hole of the detection chip 5, and connect the connecting wire and the detection chip 5 by soldering;

[0059] Pass the connecting wire through the lead hole of the probe bottom cover 2, and use the fastening screws to connect the detection chip 5 and the probe bottom cover 2. When connecting, ensure that the water inlet and outlet holes of the detection chip 5 are aligned with the water inlet and outlet holes of the probe bottom cover 2. Apply high-temperature resistant and waterproof sealant on the contact surface and inner wall of the water inlet and outlet holes of the detection chip 5 and the probe bottom cover 2 to achieve sealing of the water inlet and outlet holes;

[0060] Place two permanent magnets 61 into the magnet positioning slots 21 of the probe bottom cover 2, and place the armature 62 on the two permanent magnets 61 to close the magnetic circuit.

[0061] To complete the installation of the piezoelectric pump 4, first use sealant to insert the upper end of a cooling tube 43 into the water inlet of the pump chamber 44, insert one end of the one-way valve into the water outlet of the pump chamber 44, and insert the other end of the one-way valve into the second cooling tube 43, and use waterproof sealant to achieve sealing and fixation of the contact surface; then insert the lower ends of the two cooling tubes 43 into the water inlet and outlet holes of the probe bottom cover 2, and use sealant to achieve sealing and fixation; and inject coolant into the pump chamber 44; use brazing to connect the upper and lower electrodes of the piezoelectric vibrator 41 to their respective lead wires; place an O-ring on the upper and lower surfaces of the piezoelectric vibrator 41, and place the piezoelectric vibrator 41, gasket 45, and pump cover 46 on the pump chamber 44 in turn, and fix them with fastening screws; finally, the two wires of the upper and lower electrodes of the piezoelectric vibrator 41 are led out through the outlet holes of the pump cover 46;

[0062] Insert the connector 3 into the mounting hole of the probe housing 1 and glue them together with strong glue. Use soldering to connect the lead wires of the piezoelectric vibrator 41 and the lead wires of the detection chip 5 to the built-in electrodes of the connector 3 respectively. Connect the probe housing 1 and the probe bottom cover 2 with threads.

[0063] When using this probe to measure the thickness and detect internal defects of high-temperature components, a high-frequency pulse voltage is applied to the detection chip 5, with typical parameters of 500V peak-to-peak value and 1-5MHz frequency; a low-frequency sinusoidal voltage is applied to the piezoelectric vibrator 41, with typical parameters of 300V peak-to-peak value and 100Hz frequency.

[0064] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any modifications or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A high temperature resistant electromagnetic ultrasonic longitudinal wave probe, characterized in that: The invention comprises a probe housing and a probe bottom cover that matches and docks with the probe housing; a connector is provided at one end of the probe housing away from the probe bottom cover, and a built-in electrode of the connector is connected to a piezoelectric pump provided with a piezoelectric vibrator inside the probe housing, and is connected to a detection chip located outside the probe bottom cover; the outside of the connector is connected to an electromagnetic ultrasonic detection host through a wire; Two permanent magnets are provided inside the probe housing and on the inner side of the probe bottom cover, and an armature is provided above the two permanent magnets. The permanent magnets and the armature together form a magnetic field in a horizontal direction along the surface of the workpiece; the piezoelectric pump is provided above the armature, and the piezoelectric pump is connected to a cooling pipe through a one-way valve, and the cooling pipe is connected to the detection chip; The detection chip includes a bottom layer, a middle layer and a top layer; the bottom layer includes a first substrate, and a detection coil located on the upper part of the first substrate, and the detection coil is made of copper and has a broken line shape; the middle layer includes a second substrate, and the upper surface of the second substrate is provided with a microchannel, the microchannel is used to pass the cooling medium, and the two sides of the second substrate are processed with water inlet holes, water outlet holes and lead holes; the top layer includes a third substrate, and the third substrate is used to close the microchannel on the second substrate, and the two sides of the third substrate are processed with water inlet holes, water outlet holes and lead holes.

2. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The piezoelectric pump further comprises: a pump chamber, a gasket, and a pump cover connected and fixed by fastening screws; The pump chamber is made of brass, and water inlet and water outlet holes are processed on both sides of the pump chamber. The water inlet is connected to the cooling pipe and is fixed and sealed with waterproof glue, and the water outlet is connected to the one-way valve and is fixed and sealed with waterproof glue; the other end of the one-way valve is connected to the second cooling pipe.

3. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 2, characterized in that: A positioning groove is provided above the pump cavity, and the positioning groove is used to place the piezoelectric vibrator; The piezoelectric vibrator is composed of a piezoelectric ceramic sheet and a brass metal sheet bonded together, with the lower electrode of the piezoelectric ceramic sheet and the brass metal sheet being in a circuit conductive state; one electrode of the piezoelectric vibrator is welded to the upper end surface of the piezoelectric ceramic sheet, and the other electrode is welded to the brass metal sheet, and a wire is led out from the upper and lower electrodes by brazing; O-type sealing rings are respectively placed on the upper and lower surfaces of the piezoelectric vibrator, and the O-type sealing rings are used to play a sealing role when the internal cooling medium circulates.

4. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 3, characterized in that: The gasket is made of stainless steel and is used to control the downward pressure of the two O-rings on the upper and lower surfaces of the piezoelectric vibrator to ensure the sealing of the cooling system.

5. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 4, characterized in that: The pump cover is made of aluminum alloy, and a wire outlet hole is provided on one side of the pump cover. The wire outlet hole is used to lead out wires at both ends of the upper and lower electrodes of the piezoelectric vibrator.

6. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The first substrate, the second substrate and the third substrate are all made of silicon wafer material, and the first substrate, the second substrate and the third substrate are connected into a whole by bonding.

7. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The material of the permanent magnet is neodymium iron boron, and the material of the armature is soft iron.

8. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The cooling tube and the one-way valve are both made of brass; a cooling medium flows through the interior of the cooling tube, and the one-way valve is used to ensure the one-way flow of the cooling medium.

9. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The probe bottom cover is fixed with two magnet positioning grooves by welding, and the magnet positioning grooves are used to insert and fix the permanent magnets; The probe bottom cover is processed with a lead hole and a threaded hole, and the lead hole is used to connect the detection chip installed on the bottom of the probe bottom cover, and the threaded hole is used to fix the detection chip to the bottom of the probe bottom cover by fastening screws; The probe bottom cover is processed with two water inlet holes, and the upper surfaces of the water inlet holes are respectively connected to the two cooling pipes, and the lower surfaces of the water inlet holes are respectively connected to the water inlet and outlet holes of the detection chip.

10. The high temperature resistant electromagnetic ultrasonic longitudinal wave probe according to claim 1, characterized in that: The housing of the connector is made of brass, and the connector and the probe housing are bonded with strong glue; The probe housing and the probe bottom cover are both made of brass, and the probe housing and the probe bottom cover are connected via threads.

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