Radio frequency matching system

Abstract

The utility model discloses a radio frequency matching system, comprising a radio frequency source used for sending a signal to a radio frequency matcher; the radio frequency matcher is provided with an input end current and voltage sensor and is used for judging a matching state and feeding back the matching state to a control panel in the matcher; the matcher internal control board is used for receiving feedback information from the input end current and voltage sensor and transmitting the feedback information to the radio frequency source through the matcher communication interface so as to execute frequency scanning; according to the radio frequency matching system, the system cost and the system complexity can be remarkably reduced, meanwhile, the scheme can realize frequency adjustment and adjustable radio frequency matching network adjustment at the same time, and the radio frequency matching stability and the matchable load range are enhanced.

Description

Technical Field

[0001] The utility model relates to a radio frequency matching system. Background Art

[0002] Existing RF sources and matching systems with frequency scanning functions are as follows Figure 1 As shown, a current and voltage sensor at the output end of the RF source is usually used to determine the matching status and feed it back to the control board inside the RF source. The algorithm inside the control board then determines the frequency at which matching can be achieved (US9748076B1). The matcher usually needs to add a current and voltage sensor or directional coupler at the RF input for matching status and matching algorithm implementation and feed it back to the control board inside the matcher. It can only achieve frequency adjustment or adjustable RF matching network adjustment alone.

[0003] Existing technology allows the current and voltage sensors at the output end of the RF source and the matching status sensors at the input end of the matcher to be reused throughout the entire system, which not only wastes hardware resources but also reduces hardware reliability. For software algorithms, the reuse of resources also increases software complexity and reduces software robustness. Utility Model Content

[0004] In response to the deficiencies in the prior art, the purpose of the present invention is to provide a radio frequency matching system that can significantly reduce system cost and system complexity. At the same time, this solution can simultaneously achieve frequency adjustment and adjustable radio frequency matching network adjustment, thereby enhancing the stability of radio frequency matching and the matching load range.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] A radio frequency matching system, comprising:

[0007] A radio frequency source, used for sending a signal to the radio frequency matching device;

[0008] The RF matching device has an input current and voltage sensor for determining the matching status and feeding the matching status back to the internal control board of the matching device;

[0009] The internal control board of the matching device is used to receive feedback information from the current and voltage sensors at the input end, and transmit the feedback information to the RF source through the matching device communication interface to perform frequency scanning.

[0010] Preferably, it also includes a plasma cavity for receiving signals from the radio frequency matching device.

[0011] Preferably, the internal control board of the matcher further includes a data processing module for processing feedback information from the input-end directional coupler.

[0012] Preferably, the matcher communication interface uses a digital communication protocol to exchange data with the radio frequency source.

[0013] Preferably, the radio frequency matcher further comprises an automatic adjustment module for automatically adjusting the matching network of the matcher according to feedback information.

[0014] Preferably, signal transmission is achieved between the RF source and the RF matcher via an adjustable impedance network.

[0015] Another technical problem to be solved by the present invention is to provide a radio frequency matching system, comprising:

[0016] RF source, used to send signals to the RF matching device

[0017] The RF matcher has an input directional coupler for determining the matching status and feeding the matching status back to the internal control board of the matcher;

[0018] The internal control board of the matching device is used to receive feedback information from the directional coupler at the input end and transmit the feedback information to the RF source through the matching device communication interface to perform frequency scanning.

[0019] The beneficial effects of the utility model are:

[0020] The system architecture adopted in this solution can reduce the current and voltage sensors or directional couplers at the output end of the RF source, reducing the hardware units and saving costs in hardware implementation. At the same time, in system implementation, a matcher that is physically closer to the plasma cavity is used in combination with an adjustable RF matching network inside the matcher to realize the swept frequency matching process. In software architecture implementation, the repeated waste of software resources is effectively avoided, which is beneficial to the robustness of the algorithm execution process and higher software performance. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is the implementation block diagram of the existing RF matching system;

[0022] Figure 2 This is a block diagram of an implementation of a radio frequency matching system of the present utility model;

[0023] Figure 3 This is a block diagram of another implementation of a radio frequency matching system of the present invention. DETAILED DESCRIPTION

[0024] The principles and features of the present invention are described below. The examples provided are intended only to illustrate the present invention and are not intended to limit its scope. The following paragraphs provide a more detailed description of the present invention by way of example. The advantages and features of the present invention will become more apparent from the following description and claims.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which this invention pertains. The terms used herein in the specification of this invention are intended only to describe specific embodiments and are not intended to limit the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] Example

[0027] See Figure 2 As shown, a radio frequency matching system includes:

[0028] A radio frequency source, used for sending a signal to the radio frequency matching device;

[0029] The RF matching device has an input current and voltage sensor for determining the matching status and feeding the matching status back to the internal control board of the matching device;

[0030] The internal control board of the matching device is used to receive feedback information from the current and voltage sensors at the input end, and transmit the feedback information to the RF source through the matching device communication interface to perform frequency scanning.

[0031] By directly feeding back the matching status through the built-in current and voltage sensors in the RF matcher, the frequency of the RF source can be adjusted in real time, thereby optimizing the power transmission efficiency. Integrating the current and voltage sensors in the matcher reduces the need for additional hardware at the output end of the RF source, thereby reducing system complexity and cost.

[0032] Through the precise feedback mechanism, more accurate matching can be achieved, the transmission effect of RF energy can be improved, and the system stability can be enhanced; the interaction between multiple components in the system is reduced, making the overall system debugging and maintenance easier.

[0033] The system uses the RF matcher's current and voltage sensors to monitor the RF signal's status in real time, feeding this information back to the matcher's internal control board. The control board analyzes this feedback and transmits the results to the RF source via a communication interface. The RF source adjusts its output frequency based on this information to achieve optimal matching. This allows the system to dynamically adjust based on the actual matching status, ensuring optimal signal transmission efficiency.

[0034] It also includes a plasma cavity for receiving signals from the RF matcher. The internal control board of the matcher also includes a data processing module for processing feedback information from the input end directional coupler. The communication interface of the matcher uses a digital communication protocol to exchange data with the RF source.

[0035] By adding a plasma cavity to the system, the signal transmitted by the RF matcher can be effectively received, ensuring signal stability and processing efficiency during the plasma processing process; the data processing module equipped on the internal control board of the matcher can perform complex analysis and processing of the feedback information from the directional coupler, thereby improving the system's response accuracy and adjustment speed to the matching status.

[0036] The matcher communication interface using a digital communication protocol improves the reliability and speed of data exchange, reduces data loss and interference during the communication process, and ensures accurate information transmission between the RF source and the matcher; through real-time data processing and precise signal feedback mechanism, the system can better adjust frequency matching, improve the transmission efficiency of RF energy, and enhance the overall performance and stability of the system.

[0037] The radio frequency matcher further comprises an automatic adjustment module for automatically adjusting the matching network of the matcher according to feedback information. Signal transmission is achieved between the radio frequency source and the radio frequency matcher via an adjustable impedance network.

[0038] The automatic adjustment module automatically adjusts the matching network of the matcher based on feedback information, enabling the system to optimize matching status in real time. This automated capability reduces the need for manual adjustments, improving the system's automation level and operational convenience. By precisely adjusting the matching network through the automatic adjustment module, the system ensures optimal impedance matching during RF signal transmission, thereby maximizing RF power transmission efficiency and minimizing reflection loss.

[0039] The automatically adjusted matching network responds to signal changes and feedback in real time, ensuring stable system operation under varying operating conditions. This is crucial for maintaining the stability and consistency of the plasma process. The adjustable impedance network allows for dynamic adjustment of the signal transmission characteristics between the RF source and the matching element based on actual needs, providing greater flexibility to accommodate varying application requirements or process conditions.

[0040] By integrating the automatic adjustment module and adjustable impedance network, the system can optimize the transmission efficiency of RF power, reduce energy loss, and improve overall performance and processing effects. Since the system can automatically adjust and optimize the matching network, the need for frequent manual adjustments is reduced, thereby reducing the complexity of maintenance and operation.

[0041] Example 2

[0042] See Figure 3 As shown, the difference between this embodiment and embodiment 1 is that the current and voltage sensor in the RF matching box is replaced by a directional coupler.

[0043] The above embodiments of the present invention are not intended to limit the scope of protection of the present invention, and the implementation methods of the present invention are not limited thereto. All other modifications, replacements or changes made to the above structure of the present invention based on the above contents of the present invention, in accordance with common technical knowledge and customary means in this field, without departing from the above basic technical ideas of the present invention, should fall within the scope of protection of the present invention.

Claims

1. A radio frequency matching system, characterized in that: Includes: A radio frequency source, used for sending a signal to the radio frequency matching device; The RF matching device has an input current and voltage sensor for determining the matching status and feeding the matching status back to the internal control board of the matching device; The internal control board of the matching device is used to receive feedback information from the current and voltage sensors at the input end, and transmit the feedback information to the RF source through the matching device communication interface to perform frequency scanning.

2. The radio frequency matching system according to claim 1, characterized in that: The invention also includes a plasma cavity for receiving signals from the radio frequency matching device.

3. The radio frequency matching system according to claim 1, wherein: The matching device internal control board also includes a data processing module for processing feedback information from the input end directional coupler.

4. The radio frequency matching system according to claim 1, wherein: The matching device communication interface uses a digital communication protocol to exchange data with the radio frequency source.

5. The radio frequency matching system according to claim 1, wherein: The radio frequency matcher also includes an automatic adjustment module for automatically adjusting the matching network of the matcher according to feedback information.

6. The radio frequency matching system according to claim 1, characterized in that: Signal transmission is achieved between the radio frequency source and the radio frequency matcher via an adjustable impedance network.

7. A radio frequency matching system, characterized in that: Includes: RF source, used to send signals to the RF matching device The RF matching device has an input directional coupler for determining the matching status and feeding the matching status back to the matching device internal control board; The internal control board of the matching device is used to receive feedback information from the directional coupler at the input end and transmit the feedback information to the RF source through the matching device communication interface to perform frequency scanning.

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