Relay control panel test circuit
By setting test branches and indicator lights on the relay control board, the problem of difficult to judge the working status of the relay is solved, ensuring that the relay works normally, and improving the debugging efficiency of the film deposition equipment.
Patent Information
- Application Number
- CN202423299180.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-31
- Publication Date
- 2025-08-26
- Estimated Expiration
- 2034-12-31
AI Technical Summary
In the prior art, the relay control board cannot predict whether the relay is working normally, resulting in low signal output efficiency and cannot effectively determine whether the power supply of the thin film deposition device can be started normally.
A relay control board test circuit is designed. By setting up the test branch of the light emitting diode and the relay, the indicator light is used to display the working status of the relay to ensure that the indicator light comes on after the relay contacts are attracted to each other, indicating that the relay is working normally.
The status detection of the relay control board is realized to ensure the normal operation of the relay and improve the debugging efficiency of the film deposition equipment.
Smart Images
Figure CN223272808U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors and is applied to thin film deposition equipment, in particular to a relay control board test circuit. Background Art
[0002] In semiconductor technology, thin-film sputtering is a primary process for metal interconnects. This process requires a power output source, such as a DC power supply, RF power supply, or bias power supply. In previous designs, the relay control board, used for power enable interlocks, was unable to predict whether the relays were functioning properly and output a signal that provided an enable signal to the subsequent DC power supply, RF power supply, or bias power supply. This inefficient system relied solely on power-up status to determine relay function and output a signal. This design addresses this issue. Utility Model Content
[0003] The utility model aims at solving the problems and deficiencies in the prior art and provides a relay control board test circuit.
[0004] The utility model solves the above technical problems through the following technical solutions:
[0005] The utility model provides a relay control board test circuit, comprising a relay control board body, characterized in that a connecting plug is inserted into the relay control board body, and at least a first test branch for electrically connecting to a first direct current transmitter and a second test branch for electrically connecting to a second direct current transmitter are provided on the relay control board body;
[0006] The first test branch includes a first light-emitting diode, a first resistor, a first relay, a second resistor, and a first indicator light. The anode of the first light-emitting diode is electrically connected to the A1 pin of the connecting plug, which is electrically connected to the C1 pin of the connecting plug. The anode of the first light-emitting diode is also electrically connected to one end of the coil of the first relay, the other end of the coil of the first relay is grounded, and the cathode of the first light-emitting diode is grounded through the first resistor. The static contact of the first relay is electrically connected to the A3 pin of the connecting plug, which is electrically connected to the C3 pin of the connecting plug. The moving contact of the first relay is electrically connected to the A4 pin of the connecting plug, which is electrically connected to the C4 pin of the connecting plug. The A1 pin and the A3 pin of the connecting plug are both connected to a power supply. The A4 pin of the connecting plug is grounded through the second resistor and the first indicator light.
[0007] The second test branch includes a second light-emitting diode, a third resistor, a third light-emitting diode, a second relay, a fourth resistor and a second indicator light. The anode of the second light-emitting diode is electrically connected to the A1 pin of the connecting plug and is also electrically connected to one end of the coil of the second relay. The cathode of the second light-emitting diode is electrically connected to the A2 pin of the connecting plug through the third resistor and the third light-emitting diode. The A2 pin of the connecting plug is electrically connected to the C2 pin. The other end of the coil of the second relay is electrically connected to the A2 pin of the connecting plug through the third light-emitting diode. The static contact of the second relay is electrically connected to the A6 pin of the connecting plug. The A6 pin of the connecting plug is electrically connected to the C6 pin. The moving contact of the second relay is electrically connected to the A5 pin of the connecting plug. The A5 pin of the connecting plug is electrically connected to the C5 pin. The A2 pin of the connecting plug is grounded, the A6 pin is connected to the power supply, and the A5 pin of the connecting plug is grounded through the fourth resistor and the second indicator light.
[0008] The utility model is used to test the contact closure of the relay, so as to ensure that the relay control board is in good condition. After the relay is closed, the corresponding indicator light lights up, indicating that the relay is working normally. The quality of the relay on the relay control board can be tested, which can effectively reduce the debugging time of the thin film deposition equipment and improve efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0009] Figure 1 This is a structural diagram of a relay control board according to a preferred embodiment of the present invention.
[0010] Figure 2 This is a circuit diagram of a relay control board test circuit according to a preferred embodiment of the present invention. DETAILED DESCRIPTION
[0011] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.
[0012] like Figure 1 and Figure 2 As shown, this embodiment provides a relay control board test circuit, including a relay control board body, on which a connecting plug P1 (see Figure 1On the right side, using the HARTING model 09031646921, the relay control panel body is provided with a first test branch for electrically connecting to a first DC current transmitter, a second test branch for electrically connecting to a second DC current transmitter, and further provided with 3-N test branches for electrically connecting to 3-N DC current transmitters, one-to-one, respectively. N is a positive integer and N ≥ 3. Each test branch in the 3-N test branches is identical to the second test branch, such as the third test branch for electrically connecting to the third DC current transmitter, the fourth test branch for electrically connecting to the fourth DC current transmitter, and the fifth test branch for electrically connecting to the fifth DC current transmitter. The circuit structures of the third, fourth, and fifth test branches are identical to the circuit structure of the second test branch. Figure 1 The left side and the middle part of the relay control board are prior art and will not be described in detail.
[0013] like Figure 2 As shown, the first test branch includes a first light-emitting diode DS1, a first resistor R1, a first relay K1, a second resistor and a first indicator light LED_1. The anode of the first light-emitting diode DS1 is electrically connected to the A1 pin of the connecting plug P1, and the A1 pin of the connecting plug P1 is electrically connected to the C1 pin. The anode of the first light-emitting diode DS1 is also electrically connected to one end of the coil of the first relay K1, and the other end of the coil of the first relay K1 is grounded. The cathode of the first light-emitting diode DS1 is grounded through the first resistor R1, the static contact of the first relay K1 is electrically connected to the A3 pin of the connecting plug P1, and the A3 pin of the connecting plug P1 is electrically connected to the C3 pin. The moving contact of the first relay K1 is electrically connected to the A4 pin of the connecting plug P1, and the A4 pin of the connecting plug P1 is electrically connected to the C4 pin. The A1 pin and A3 pin of the connecting plug P1 are both connected to the power supply +24V, and the A4 pin of the connecting plug P1 is grounded through the second resistor and the first indicator light LED_1.
[0014] The second test branch includes a second light-emitting diode DS2, a third resistor R2, a third light-emitting diode CR1, a second relay K2, a fourth resistor and a second indicator LED_2. The anode of the second light-emitting diode DS2 is electrically connected to the A1 pin of the connecting plug P1, and the anode of the second light-emitting diode DS2 is also electrically connected to one end of the coil of the second relay K2. The cathode of the second light-emitting diode DS2 is electrically connected to the A2 pin of the connecting plug P1 through the third resistor R2 and the third light-emitting diode CR1. The A2 pin of the connecting plug P1 is electrically connected to the C2 pin. The other end of the coil of relay K2 is electrically connected to the A2 pin of the connecting plug P1 through the third light-emitting diode CR1, the static contact of the second relay K2 is electrically connected to the A6 pin of the connecting plug P1, the A6 pin of the connecting plug P1 is electrically connected to the C6 pin, the moving contact of the second relay K2 is electrically connected to the A5 pin of the connecting plug P1, the A5 pin of the connecting plug P1 is electrically connected to the C5 pin, the A2 pin of the connecting plug P1 is grounded, the A6 pin is connected to the power supply +24V, and the A5 pin of the connecting plug P1 is grounded through the fourth resistor and the second indicator light LED_2.
[0015] Pins A1, A3, and A6 of the connection plug P1 are all electrically connected to a power plug that provides a +24V power supply.
[0016] The circuit operates as follows: A +24V power supply is provided by the power plug. When the circuit is powered on, the first light-emitting diode DS1 conducts, energizing the coil of the first relay K1. The first indicator LED_1 is observed. If it illuminates, the normally open contacts of the first relay K1 are closed, indicating that the first relay K1 is functioning properly and can output an enable signal to the first DC current emitter. This allows the first DC current emitter to supply DC power to the target material of the thin-film deposition equipment, thereby enabling the wafer coating function. The second light-emitting diode DS2 and the third light-emitting diode CR1 conduct, energizing the coil of the second relay K2. The second indicator LED_2 is observed. If it illuminates, the normally open contacts of the second relay K2 are closed, indicating that the second relay K2 is functioning properly and can output an enable signal to the second DC current emitter. This allows the second DC current emitter to supply DC power to the target material of the thin-film deposition equipment, thereby enabling the wafer coating function. The operating principles of the third, fourth, and fifth test branches are similar to those of the second test branch.
Claims
1. A relay control board test circuit, comprising a relay control board body, characterized in that: The relay control board body is provided with a connection plug, and the relay control board body is provided with at least a first test branch for electrically connecting to the first DC current transmitter and a second test branch for electrically connecting to the second DC current transmitter; The first test branch includes a first light-emitting diode, a first resistor, a first relay, a second resistor, and a first indicator light. The anode of the first light-emitting diode is electrically connected to the A1 pin of the connecting plug, which is electrically connected to the C1 pin of the connecting plug. The anode of the first light-emitting diode is also electrically connected to one end of the coil of the first relay, the other end of the coil of the first relay is grounded, and the cathode of the first light-emitting diode is grounded through the first resistor. The static contact of the first relay is electrically connected to the A3 pin of the connecting plug, which is electrically connected to the C3 pin of the connecting plug. The moving contact of the first relay is electrically connected to the A4 pin of the connecting plug, which is electrically connected to the C4 pin of the connecting plug. The A1 pin and the A3 pin of the connecting plug are both connected to a power supply. The A4 pin of the connecting plug is grounded through the second resistor and the first indicator light. The second test branch includes a second light-emitting diode, a third resistor, a third light-emitting diode, a second relay, a fourth resistor and a second indicator light. The anode of the second light-emitting diode is electrically connected to the A1 pin of the connecting plug and is also electrically connected to one end of the coil of the second relay. The cathode of the second light-emitting diode is electrically connected to the A2 pin of the connecting plug through the third resistor and the third light-emitting diode. The A2 pin of the connecting plug is electrically connected to the C2 pin. The other end of the coil of the second relay is electrically connected to the A2 pin of the connecting plug through the third light-emitting diode. The static contact of the second relay is electrically connected to the A6 pin of the connecting plug. The A6 pin of the connecting plug is electrically connected to the C6 pin. The moving contact of the second relay is electrically connected to the A5 pin of the connecting plug. The A5 pin of the connecting plug is electrically connected to the C5 pin. The A2 pin of the connecting plug is grounded, the A6 pin is connected to the power supply, and the A5 pin of the connecting plug is grounded through the fourth resistor and the second indicator light.
2. The relay control board test circuit according to claim 1, wherein: The relay control board body is also provided with 3-N test branches for being electrically connected to the 3-N DC current transmitters respectively and correspondingly, N is a positive integer and N≥3, and each test branch in the 3-N test branches is the same as the second test branch.
3. The relay control board test circuit according to claim 1, wherein: The A1 pin, the A3 pin and the A6 pin of the connection plug are all electrically connected to a power plug that provides a +24V power supply.
4. The relay control board test circuit according to claim 1, wherein: The connecting plug is a HARTING brand connecting plug of model 09031646921.