Tantalum wire positioning device of HFCVD diamond coating equipment

Abstract

The utility model discloses a tantalum wire positioning device of HFCVD (High Frequency Chemical Vapor Deposition) diamond coating equipment, which relates to the technical field of HFCVD coating equipment and comprises a workbench and a box body, the box body is arranged on the workbench, support plates are arranged on the inner walls of the two sides of the inner wall of the box body, a ball screw and a guide rod are arranged between the support plates and an upper box cover of the box body, and the guide rod is arranged on the upper box cover of the box body. Through mutual cooperation of the supporting plate, the ball screw, the guide rod, the frame body, the adjusting hand wheel, the sliding plate and the electrode column, the device can adjust the height and the inclination angle of a tantalum wire according to the size of a drill bit, so that the distance between the tantalum wire and the drill bit is kept within a proper range; the coating on the surface of the drill bit can be more uniform by accurately controlling the position and the angle of the tantalum wire, and the drill bit can be fixed by the annular limiting piece through the base and the annular limiting piece, so that the drill bit is kept stable in the box body, and the machining effect of the drill bit is better.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition coating equipment, in particular to a tantalum wire positioning device for HFCVD diamond coating equipment. Background Art

[0002] Chemical vapor deposition coating equipment uses various energy sources such as heating, plasma excitation or light radiation to react gaseous or vaporous chemicals on a solid interface to form a film within the coating equipment. At present, in the process of preparing nano-diamond coating on drill bits using existing chemical vapor deposition coating equipment, both ends of the tantalum wire are mostly connected to fixed electrode sheets. Since the electrode sheets are fixed, it is inconvenient to adjust the position and angle of the tantalum wire. Different sizes or types of drill bits have different requirements for the distance between the drill bit and the tantalum wire during the diamond coating process. Therefore, the existing equipment has poor adaptability to drill bits of different sizes and types, and the coating on the drill bit surface is less uniform and consistent when coating drill bits of different sizes and types. Utility Model Content

[0003] The purpose of the utility model is to provide a tantalum wire positioning device for HFCVD diamond coating equipment to solve the problems raised in the above background technology.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] The tantalum wire positioning device of HFCVD diamond coating equipment includes a workbench and a box body, the workbench is installed with a box body, support plates are installed on the inner walls on both sides of the inner wall of the box body, a ball screw and a guide rod are installed between the support plate and the upper box cover of the box body, the bottom end of the ball screw is rotatably connected to the support plate through a bearing, the top end of the ball screw is fixedly connected to the adjusting handwheel arranged on the box body, a frame body is installed between the ball screw and the guide rod, a slide is slidably provided on the bottom surface of the frame body, an electrode column is installed on the slide plate, a tantalum wire is installed between the two electrode columns, a connecting wire is connected to the electrode column, and the electrode column is electrically connected to the power supply installed on the workbench through the connecting wire, a base is placed at the bottom of the box body, a placement groove is provided on the base, an annular limiter is provided in the placement groove, and a drill bit is installed on the annular limiter.

[0006] As a further solution of the present invention: a vacuum suction pump is installed on the upper part of the box body, and a vacuum suction pipe is installed on the bottom of the vacuum suction pump.

[0007] As a further solution of the present invention: a reaction gas injection pipe is installed on one side of the box body, and a control valve is installed on the reaction gas injection pipe.

[0008] As a further solution of the present invention: a box door is installed at the front of the box body, and a visual window is installed on the box door.

[0009] As a further solution of the present invention, the electrode columns are installed side by side and at equal intervals on the slide.

[0010] Compared with the prior art, the beneficial effects of the present invention are:

[0011] 1. The utility model cooperates with the support plate, ball screw, guide rod, frame, adjustment handwheel, slide plate and electrode column, so that the height and inclination angle of the tantalum wire can be adjusted according to the size of the drill bit, so that the distance between the tantalum wire and the drill bit is maintained within an appropriate range. By precisely controlling the position and angle of the tantalum wire, the coating on the surface of the drill bit can be made more uniform.

[0012] 2. The utility model provides a base and an annular limiting member, and the annular limiting member can fix the drill bit, so that the drill bit remains stable in the box, and the drill bit processing effect is better. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 Schematic diagram of the internal structure of the tantalum wire positioning device of HFCVD diamond coating equipment.

[0014] Figure 2 This is the overall appearance of the tantalum wire positioning device of the HFCVD diamond coating equipment.

[0015] Figure 3 This is a schematic diagram of the partial structure of the tantalum wire positioning device of the HFCVD diamond coating equipment.

[0016] Figure 4 Tantalum wire positioning device for HFCVD diamond coating equipment Figure 1 Top view of the center base.

[0017] 1. Workbench; 2. Box; 3. Power supply; 4. Support plate; 5. Ball screw; 6. Guide rod; 7. Frame; 8. Adjustment handwheel; 9. Slide plate; 10. Electrode column; 11. Tantalum wire; 12. Connecting wires; 13. Vacuum suction tube; 14. Vacuum suction pump; 15. Reaction gas injection tube; 16. Base; 17. Placement slot; 18. Ring limiter; 19. Drill bit; 20. Box door; 21. Viewing window. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] See also Figure 1-4 In the embodiment of the present invention, the tantalum wire positioning device of the HFCVD diamond coating equipment includes a workbench 1 and a box body 2. The box body 2 is installed on the workbench 1, and support plates 4 are installed on the inner walls of both sides of the inner wall of the box body 2. A ball screw 5 and a guide rod 6 are installed between the support plate 4 and the upper box cover of the box body 2. The bottom end of the ball screw 5 is rotatably connected to the support plate 4 through a bearing, and the top of the ball screw 5 is fixedly connected to the adjusting handwheel 8 set on the box body 2. A frame body 7 is installed between the ball screw 5 and the guide rod 6. The screw nut of the ball screw 5 is fixedly connected to the frame body 7, and the guide rod 6 is relatively slidably connected to the frame body 7. The guide rod 6 plays a guiding role for the frame body 7. The bottom surface of the frame body 7 is slidably provided with a slide plate 9, and the slide plate 9 is slidably matched with the slide opening opened at the bottom of the frame body 7. When the tantalum wire 11 is tilted, the slide plate 9 will slide, so that the tantalum wire 11 can be tilted and adjusted successfully. The tilt adjustment of the tantalum wire 11 is to adapt to the coating needs of the drill bits 19 arranged from large to small or from small to large. The slide 9 is equipped with an electrode column 10, and the electrode columns 10 are installed on the slide 9 side by side with equal intervals. This can meet the needs of using multiple tantalum wires 11 at the same time. The tantalum wire 11 is installed between the two electrode columns 10. The electrode columns 10 are connected to the connecting wires 12. The electrode columns 10 are electrically connected to the power supply 3 installed on the workbench 1 through the connecting wires 12. A vacuum suction pump 14 is installed on the upper part of the box 2, and a vacuum suction pipe 13 is installed at the bottom of the vacuum suction pump 14. A reaction gas injection pipe 15 is installed on one side of the box 2. A control valve is installed on the reaction gas injection pipe 15. The control valve is used to control the on and off of the reaction gas injection pipe 15;

[0020] A door 20 is installed at the front of the box body 2, and a viewing window 21 is installed on the door 20. The viewing window 21 is a high-temperature resistant tempered glass window. The viewing window 21 is for the convenience of personnel outside the box body 2 to observe the internal situation.

[0021] See also Figure 1 and Figure 4 A base 16 is placed at the bottom of the box body 2, a placement groove 17 is opened on the base 16, an annular limiting member 18 is provided in the placement groove 17, and a drill bit 19 is installed on the annular limiting member 18.

[0022] The working principle of this utility model is:

[0023] When in use, first place the annular limiter 18 that matches the drill bit 19 into the placement groove 17, and then place the drill bit 19 to be processed into the corresponding annular limiter 18, then place the base 16 into the box body 2, and then turn the adjusting handwheel 8, and the ball screw 5 is driven to rotate by the adjusting handwheel 8, and the ball screw 5 drives the frame body 7 to move upward or downward, thereby driving the tantalum wire 11 to rise or fall, and adjusting the distance between the tantalum wire 11 and the drill bit 19. After closing the box door 20, the box body 2 is evacuated by the vacuum suction pump 14, and then the active gas is injected into the box body 2 through the reaction gas injection pipe 15, and the power supply 3 is started to start carburizing the tantalum wire 11. After the carbonization of the tantalum wire 11 is completed, a diamond coating can be formed on the drill bit 19 on the base 16.

[0024] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A tantalum wire positioning device for HFCVD diamond coating equipment, comprising a workbench (1) and a housing (2), characterized in that: A box body (2) is installed on the workbench (1), support plates (4) are installed on the inner walls of both sides of the inner wall of the box body (2), a ball screw (5) and a guide rod (6) are installed between the support plate (4) and the upper box cover of the box body (2), the bottom end of the ball screw (5) is rotatably connected to the support plate (4) through a bearing, the top end of the ball screw (5) is fixedly connected to an adjustment hand wheel (8) provided on the box body (2), a frame body (7) is installed between the ball screw (5) and the guide rod (6), and a slide plate (9) is slidably provided on the bottom surface of the frame body (7) An electrode column (10) is installed on the slide (9), a tantalum wire (11) is installed between the two electrode columns (10), a connecting wire (12) is connected to the electrode column (10), and the electrode column (10) is electrically connected to a power supply (3) installed on the workbench (1) through the connecting wire (12). A base (16) is placed at the bottom of the box (2), a placement groove (17) is provided on the base (16), an annular limiter (18) is provided in the placement groove (17), and a drill bit (19) is installed on the annular limiter (18).

2. The tantalum wire positioning device for HFCVD diamond coating equipment according to claim 1, characterized in that: A vacuum suction pump (14) is installed on the upper part of the box body (2), and a vacuum suction pipe (13) is installed on the bottom of the vacuum suction pump (14).

3. The tantalum wire positioning device for HFCVD diamond coating equipment according to claim 1, characterized in that: A reaction gas injection pipe (15) is installed on one side of the box body (2), and a control valve is installed on the reaction gas injection pipe (15).

4. The tantalum wire positioning device for HFCVD diamond coating equipment according to claim 1, characterized in that: A box door (20) is installed at the front of the box body (2), and a visual window (21) is installed on the box door (20).

5. The tantalum wire positioning device for HFCVD diamond coating equipment according to claim 1, characterized in that: The electrode columns (10) are installed side by side and at equal intervals on the slide plate (9).

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