Novel energy-saving and environment-friendly diffusion furnace

Abstract

The novel energy-saving and environment-friendly diffusion furnace comprises a furnace body, the top of the furnace body is communicated with an air inlet pipe, the bottom end of the air inlet pipe is connected with a distribution main pipe, the front side and the rear side of the distribution main pipe are both communicated with a plurality of distribution branch pipes, and hollow rotating shafts are rotatably arranged on the upper portions and the lower portions of the distribution branch pipes in a penetrating mode. A plurality of vent holes are formed in the peripheral side of the part, located on the inner sides of the distribution branch pipes, of the hollow rotating shaft, a plurality of injection pipes communicate with the peripheral side of the end, close to the distribution main pipe, of the hollow rotating shaft, and a plurality of nozzles communicate with the sides, close to the distribution main pipe, of the injection pipes; a front air pump, a heat exchanger, a filtering adsorber and a rear air pump are arranged on the outer side of the tail of the furnace body, the exhaust pipe is communicated with an air inlet of the front air pump, an air outlet of the front air pump is communicated with an air inlet of the heat exchanger, an air outlet of the heat exchanger is communicated with an air inlet of the filtering adsorber, and an air outlet of the filtering adsorber is communicated with an air inlet of the rear air pump. The whole device is more energy-saving and environment-friendly, and the overall diffusion efficiency and quality are higher.

Description

Technical Field

[0001] The utility model belongs to the technical field of diffusion furnaces, and in particular relates to a novel energy-saving and environment-friendly diffusion furnace. Background Art

[0002] Diffusion furnaces are a crucial piece of equipment in the pre-processing stages of semiconductor production lines. They are used for diffusion, oxidation, annealing, alloying, and sintering processes in industries such as large-scale integrated circuits, discrete devices, power electronics, optoelectronics, and optical fibers. There are two main types of diffusion furnaces: vertical and horizontal. Horizontal diffusion furnaces offer better inter-wafer process parameters than vertical ones, leading to their widespread use. However, in practice, horizontal diffusion furnaces still suffer from uneven process gas distribution, resulting in less-than-ideal overall diffusion results and low efficiency. This, in turn, results in longer diffusion times and higher energy consumption. Furthermore, the exhaust gases, often high-temperature and toxic, are discharged directly without treatment, causing significant environmental pollution. This overall approach is insufficiently energy-efficient and environmentally friendly, and needs improvement. Utility Model Content

[0003] In view of this, the purpose of the present invention is to provide a new energy-saving and environmentally friendly diffusion furnace to solve the above problems.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: a new energy-saving and environmentally friendly diffusion furnace, including a furnace body, the furnace head of the furnace body is open and can be opened and closed and connected to a furnace door, a guide rail is installed on the ground corresponding to the furnace body, the guide rail is oriented in the direction of the furnace head of the furnace body and extends to the outside of the furnace body, an electric slider is slidingly provided on the guide rail, a carrying boat is fixedly provided on the top of the electric slider, the top of the furnace body is fixedly connected to an air intake pipe, the bottom end of the air intake pipe is fixedly connected to a distribution main pipe, the distribution main pipe is arranged in the left and right directions and a number of distribution branch pipes are fixedly connected on the front and rear sides thereof, a hollow rotating shaft is passed through and rotatably provided on the upper and lower parts of the distribution branch pipe, the hollow rotating shaft is horizontally arranged in the front and rear directions and a number of ventilation holes are provided on the circumference of the part located on the inner side of the distribution branch pipe, and the hollow rotating shaft is away from the distribution main pipe. A driven gear is fixedly sleeved on one end of the tube, and the driven gears on the two hollow rotating shafts on the same distribution branch pipe are meshed and connected with the same driving gear. A motor is fixedly provided on the inner wall of the furnace body corresponding to the driving gear, and the driving gear is fixedly sleeved on the output shaft of the motor. A plurality of injection pipes are fixedly connected on the circumferential side of the end of the hollow rotating shaft close to the distribution main pipe, and a plurality of nozzles are fixedly connected on the side of the injection pipe close to the distribution main pipe. An exhaust pipe is fixedly connected to the tail of the furnace body, and a front air pump, a heat exchanger, a filter adsorber and a rear air pump are provided on the outside of the tail of the furnace body. The exhaust pipe is connected to the air inlet of the front air pump, the air outlet of the front air pump is connected to the air inlet of the heat exchanger, the air outlet of the heat exchanger is connected to the air inlet of the filter adsorber, and the air outlet of the filter adsorber is connected to the air inlet of the rear air pump.

[0005] Preferably, the filter adsorber includes a cylinder, the front side of the cylinder is open and connected to a sealing door that can be opened and closed, a tubular folded filter element is detachably provided on the inner top of the cylinder, the air inlet of the filter adsorber is opened on the side of the cylinder below the tubular folded filter element, and the air outlet of the filter adsorber is opened on the top of the cylinder corresponding to the inner side of the tubular folded filter element, and the inner side of the tubular folded filter element is filled with activated carbon.

[0006] Preferably, the bottom of the tubular folded filter element is closed and the top is fixedly connected to a square mounting plate, blind holes are provided on the front, back, left and right sides of the mounting plate, a square mounting groove is provided on the inner top of the cylinder, and electric push rods are built into the top of the cylinder on the front, back, left and right sides of the mounting groove, the telescopic end of the electric push rod faces and can extend into the mounting groove, the mounting plate is inserted into the mounting groove, the telescopic end of the electric push rod corresponds to the blind hole on the same side and is inserted into the corresponding blind hole, a through hole is provided on the part of the mounting plate corresponding to the air outlet of the filter adsorber, and an isolation net is fixed in the through hole.

[0007] Preferably, the mounting plate is matched with the mounting groove, and the telescopic end of the electric push rod is matched with the corresponding blind hole.

[0008] Preferably, a flow regulating valve is provided on the air inlet pipe.

[0009] Preferably, the outer surface of the furnace body is provided with a foamed aluminum coating.

[0010] The beneficial effect of the present invention is as follows: during the diffusion process, the air inlet pipe is connected to the process gas delivery pipeline, so that the process gas can enter through the air inlet pipe, first flow into the entire distribution main pipe, then be divided into each distribution branch pipe, and enter each hollow shaft through the air vents on each hollow shaft, and then continue to be divided into each injection pipe, and finally be sprayed out to the front and back sides of the carrier boat through the multiple nozzles on the injection pipe. At the same time, the motor is running, and the gear transmission can drive each hollow shaft and the multiple injection pipes on the hollow shaft to rotate, so that the process gas spray can be distributed more evenly, and the rotating injection pipe can drive the ejected process gas to swirl to a certain extent. Under the mutual cooperation, it is more conducive to the process gas and the material to fully and evenly contact for diffusion treatment, the overall diffusion effect is better, the diffusion efficiency and quality are higher, the time required for the overall diffusion is shortened, and thus energy consumption is reduced, which is more energy-saving and efficient.

[0011] In addition, during the diffusion process, under the pumping of the front air pump and the rear air pump, the high-temperature toxic gas generated can be first discharged through the exhaust pipe to the heat exchanger for heat exchange and cooling, and then flow through the filter adsorber to be effectively filtered, adsorbed and purified, and finally discharged from the exhaust port of the rear air pump. The high-temperature toxic gas generated can be effectively processed into low-temperature non-toxic gas, which is more environmentally friendly and practical. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the main structure of the utility model;

[0013] Figure 2 It is a left-side structural schematic diagram of the present utility model;

[0014] Figure 3 This is a schematic diagram of the main structure of the filter adsorber of the utility model;

[0015] Figure 4 This is a schematic diagram of the main structure of the cylinder of the utility model;

[0016] Figure 5 This is a schematic diagram of the top structure of the cylinder of the utility model;

[0017] Figure 6 This is a schematic diagram of the main structure of the tubular folded filter element of the utility model;

[0018] Figure 7 It is a schematic diagram of the top structure of the mounting plate of the utility model.

[0019] Numbers in the figure: 1 is the furnace body, 2 is the furnace door, 3 is the guide rail, 4 is the electric slider, 5 is the carrying boat, 6 is the air inlet pipe, 7 is the distribution main pipe, 8 is the distribution branch pipe, 9 is the hollow shaft, 10 is the vent, 11 is the driven gear, 12 is the driving gear, 13 is the motor, 14 is the injection pipe, 15 is the nozzle, 16 is the exhaust pipe, 17 is the front air pump, 18 is the heat exchanger, 19 is the filter adsorber, 20 is the rear air pump, 21 is the cylinder, 22 is the sealing door, 23 is the tubular folded filter element, 24 is the activated carbon, 25 is the mounting plate, 26 is the blind hole, 27 is the mounting groove, 28 is the electric push rod, 29 is the through hole, 30 is the isolation net, and 31 is the flow regulating valve. DETAILED DESCRIPTION

[0020] The present invention is described in further detail below with reference to the accompanying drawings and specific embodiments:

[0021] like Figures 1 to 7 As shown, a new energy-saving and environmentally friendly diffusion furnace includes a furnace body 1, the furnace head of the furnace body 1 is open and connected to a furnace door 2 that can be opened and closed, and a guide rail 3 is installed underground corresponding to the furnace body 1. The guide rail 3 is oriented in the direction of the furnace head of the furnace body 1 and extends to the outside of the furnace body 1. An electric slider 4 is slidingly provided on the guide rail 3, and a carrying boat 5 is fixed on the top of the electric slider 4. When in use, the carrying boat 5 can carry silicon wafers and other materials that need to be diffused. Through the cooperation of the electric slider 4 and the guide rail 3, the carrying boat 5 can smoothly enter and exit the furnace body 1 before and after diffusion to cooperate with production and processing.

[0022] An air intake pipe 6 is fixedly connected to the top of the furnace body 1. The bottom of the air intake pipe 6 is fixedly connected to a distribution main pipe 7. The distribution main pipe 7 is arranged horizontally, with several distribution branch pipes 8 fixedly connected to its front and rear sides. Hollow shafts 9 are rotatably provided through both the upper and lower portions of the distribution branch pipes 8. The hollow shafts 9 are arranged horizontally in the front-to-back direction, and the portion located inside the distribution branch pipes 8 is provided with several ventilation holes 10. A driven gear 11 is fixedly connected to the end of the hollow shaft 9 away from the distribution main pipe 7. The driven gears 11 on the two hollow shafts 9 on the same distribution branch pipe 8 mesh with the same driving gear 12. A motor 13 is fixedly mounted on the inner wall of the furnace body 1 corresponding to the driving gear 12. The driving gear 12 is fixedly connected to the output shaft of the motor 13. Several injection pipes 14 are fixedly connected to the circumference of the end of the hollow shaft 9 near the distribution main pipe 7. Several nozzles 15 are fixedly connected to the side of the injection pipes 14 near the distribution main pipe 7. The tail of the furnace body 1 is fixedly connected with an exhaust pipe 16. The outside of the tail of the furnace body 1 is provided with a front air pump 17, a heat exchanger 18, a filter adsorber 19 and a rear air pump 20. The exhaust pipe 16 is connected to the air inlet of the front air pump 17, the air outlet of the front air pump 17 is connected to the air inlet of the heat exchanger 18, the air outlet of the heat exchanger 18 is connected to the air inlet of the filter adsorber 19, and the air outlet of the filter adsorber 19 is connected to the air inlet of the rear air pump 20.

[0023] During the diffusion process, the air inlet pipe 6 is connected to the process gas delivery pipeline, so that the process gas can enter through the air inlet pipe 6, first flow into the entire distribution main pipe 7, then be divided into the various distribution branch pipes 8, and enter each hollow shaft 9 through the air vents 10 on each hollow shaft 9, and then continue to be divided into each injection pipe 14, and finally be sprayed to the front and rear sides of the carrier boat 5 through the multiple nozzles 15 on the injection pipe 14. At the same time, the motor 13 is running, which can drive each hollow shaft 9 and the multiple injection pipes 14 on the hollow shaft 9 to rotate through the gear transmission, so that the process gas spray can be distributed more evenly, and the rotating injection pipes 14 can drive the ejected process gas to swirl to a certain extent. The mutual cooperation is more conducive to the full and uniform contact between the process gas and the material for diffusion treatment, and the overall diffusion effect is better, the diffusion efficiency and quality are higher, and the time required for overall diffusion is shortened, thereby reducing energy consumption and being more energy-saving and efficient.

[0024] In addition, during the diffusion process, under the pumping of the front air pump 17 and the rear air pump 20, the high-temperature toxic gas generated can be first discharged through the exhaust pipe 16 to the heat exchanger 18 for heat exchange and cooling, then flow through the filter adsorber 19 to be effectively filtered, adsorbed and purified, and finally discharged from the exhaust port of the rear air pump 20. The high-temperature toxic gas generated can be effectively processed into low-temperature non-toxic gas, which is more environmentally friendly and practical. The furnace body 1, furnace door 2, guide rail 3, electric slider 4, carrying boat 5, driven gear 11, driving gear 12, motor 13, nozzle 15, front air pump 17, heat exchanger 18 and rear air pump 20 can all adopt existing technologies, and other supporting structures such as heating on the furnace body 1 can also adopt existing technologies.

[0025] In this embodiment, the filter-adsorbent 19 comprises a cylindrical body 21, the front of which is open and connected to a sealing door 22. A removable tubular pleated filter element 23 is mounted on the inner top of the cylindrical body 21. The air inlet of the filter-adsorbent 19 is located on the side of the cylindrical body 21 below the tubular pleated filter element 23, and the air outlet of the filter-adsorbent 19 is located on the inner side of the tubular pleated filter element 23, corresponding to the top of the cylindrical body 21. The inner side of the tubular pleated filter element 23 is filled with activated carbon 24. During use, the exhaust gas after heat exchange and cooling can enter the cylindrical body 21 through the air inlet of the filter-adsorbent 19, then flow from the outside to the inside of the tubular pleated filter element 23, continue to flow through the activated carbon 24, and finally be discharged from the air outlet of the filter-adsorbent 19. The interaction between the tubular pleated filter element 23 and the activated carbon 24 effectively removes and purifies the cooled toxic gases, thereby ensuring the cleanliness of the final exhaust gas and being more environmentally friendly and practical.

[0026] In this embodiment, the bottom of the tubular folded filter element 23 is closed and a square mounting plate 25 is fixedly connected to the top. Blind holes 26 are provided on the front, back, left and right sides of the mounting plate 25. A square mounting groove 27 is provided on the inner top of the cylinder 21. Electric push rods 28 are built into the top of the cylinder 21 on the front, back, left and right sides of the mounting groove 27. The telescopic end of the electric push rod 28 faces and can be extended into the mounting groove 27. The mounting plate 25 is inserted into the mounting groove 27. The telescopic end of the electric push rod 28 corresponds to the blind hole 26 on the same side and is inserted into the corresponding blind hole 26. A through hole 29 is formed in the portion of the mounting plate 25 corresponding to the air outlet of the filter-adsorber 19, and an isolation net 30 is fixed in the through hole 29. This allows the sealing door 22 to be opened in the shutdown state after a period of use, and the electric push rod 28 is operated to retract the telescopic end to reset the mounting plate 25, thereby releasing the plug-in fixation of the mounting plate 25. The mounting plate 25 is then pulled out of the mounting slot 27, and the original tubular pleated filter element 23 can be removed and then removed from the cylinder 21. Next, after taking a new tubular pleated filter element 23, it is first inserted into the cylinder 21, and the mounting plate 25 is aligned with the mounting slot 27 and inserted into place. The electric push rod 28 is then operated to extend the telescopic end and insert it into the corresponding blind hole 26, and the mounting plate 25 is inserted and fixed, thus completing the fixed installation of the new tubular pleated filter element 23. The installation is stable and does not affect subsequent use. In this way, the tubular pleated filter element 23 can be flexibly and conveniently disassembled, assembled, and replaced, thereby ensuring a better filtration, adsorption, and purification effect on the exhaust gas, which is more environmentally friendly, convenient, and practical. The specific method and structure of the openable and closable connection between the sealing door 22 and the furnace door 2 can be adopted from existing technologies and are not specifically limited here.

[0027] In this embodiment, the mounting plate 25 is matched with the mounting groove 27 , and the telescopic end of the electric push rod 28 is matched with the corresponding blind hole 26 to ensure smooth fixed installation of the tubular folded filter element 23 .

[0028] In this embodiment, a flow regulating valve 31 is provided on the air inlet pipe 6 to flexibly adjust the flow of the process gas to better cooperate with the actual diffusion treatment operation.

[0029] In this embodiment, the outer surface of the furnace body 1 is provided with a foam aluminum coating (not shown in the figure). Foam aluminum is an existing material, and has the characteristics of both metal and bubbles. It has the characteristics of low density, high impact absorption capacity, high temperature resistance, strong fire resistance, corrosion resistance, sound insulation and noise reduction, low thermal conductivity, high electromagnetic shielding, strong weather resistance, filtering ability, easy processing, easy installation, high forming accuracy, and surface coating. When used on the outer surface of the furnace body 1, it is more conducive to the smooth progress of the diffusion operation, and can play an effective heat insulation effect, reduce heat loss during the diffusion operation, thereby reducing energy consumption, and is more energy-saving and practical.

[0030] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A novel energy-saving and environmentally friendly diffusion furnace, comprising a furnace body, wherein the furnace head of the furnace body is open and connected to a furnace door that can be opened and closed, a guide rail is installed on the ground corresponding to the furnace body, the guide rail extends toward the direction of the furnace head of the furnace body and to the outside of the furnace body, an electric slider is slidably provided on the guide rail, and a carrying boat is fixed on the top of the electric slider, characterized in that: The top of the furnace body is fixedly connected with an air intake pipe, and the bottom end of the air intake pipe is fixedly connected with a distribution main pipe. The distribution main pipe is arranged in the left and right directions and is fixedly connected with a number of distribution branch pipes on both the front and rear sides. A hollow rotating shaft is passed through and rotated on the upper and lower parts of the distribution branch pipe. The hollow rotating shaft is horizontally arranged in the front and rear directions and a number of air vents are opened on the circumference of the part located on the inner side of the distribution branch pipe. A driven gear is fixedly sleeved on the end of the hollow rotating shaft away from the distribution main pipe. The driven gears on the two hollow rotating shafts on the same distribution branch pipe are meshed and connected with the same driving gear. A fixed gear is provided on the inner wall of the furnace body corresponding to the driving gear. There is a motor, the driving gear is fixedly sleeved on the output shaft of the motor, a plurality of injection pipes are fixedly connected on the circumferential side of the hollow rotating shaft close to the distribution main pipe, a plurality of nozzles are fixedly connected on the side of the injection pipe close to the distribution main pipe, an exhaust pipe is fixedly connected to the tail of the furnace body, a front air pump, a heat exchanger, a filter adsorber and a rear air pump are arranged on the outside of the tail of the furnace body, the exhaust pipe is connected to the air inlet of the front air pump, the air outlet of the front air pump is connected to the air inlet of the heat exchanger, the air outlet of the heat exchanger is connected to the air inlet of the filter adsorber, and the air outlet of the filter adsorber is connected to the air inlet of the rear air pump.

2. The new energy-saving and environmentally friendly diffusion furnace according to claim 1 is characterized in that: The filter adsorber includes a cylinder, the front side of which is open and connected to a sealing door that can be opened and closed, a tubular folded filter element is detachably provided on the inner top of the cylinder, the air inlet of the filter adsorber is opened on one side of the cylinder below the tubular folded filter element, and the air outlet of the filter adsorber is opened on the top of the cylinder corresponding to the inner side of the tubular folded filter element, and the inner side of the tubular folded filter element is filled with activated carbon.

3. The new energy-saving and environmentally friendly diffusion furnace according to claim 2 is characterized in that: The bottom of the tubular folded filter element is closed and a square mounting plate is fixedly connected to the top. Blind holes are provided on the front, back, left and right sides of the mounting plate. A square mounting groove is provided on the inner top of the cylinder. Electric push rods are built into the top of the cylinder on the front, back, left and right sides of the mounting groove. The telescopic ends of the electric push rods face and can extend into the mounting groove. The mounting plate is inserted into the mounting groove. The telescopic ends of the electric push rods correspond to the blind holes on the same side and are inserted into the corresponding blind holes. A through hole is provided on the part of the mounting plate corresponding to the air outlet of the filter adsorber, and an isolation net is fixed in the through hole.

4. The new energy-saving and environmentally friendly diffusion furnace according to claim 3 is characterized in that: The mounting plate is matched with the mounting groove, and the telescopic end of the electric push rod is matched with the corresponding blind hole.

5. The new energy-saving and environmentally friendly diffusion furnace according to claim 1 is characterized in that: A flow regulating valve is provided on the air inlet pipe.

6. The new energy-saving and environmentally friendly diffusion furnace according to claim 1 is characterized in that: The outer surface of the furnace body is provided with a foam aluminum coating.

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