Crucible clamping and rotating device

Abstract

The utility model discloses a crucible clamping and rotating device, which aims to clamp a crucible, automatically rotate, assist in grinding the crucible, reduce the burden of workers and improve the efficiency, and adopts the technical scheme that the crucible clamping and rotating device comprises a base, a chuck and a driving module, the chuck is rotationally arranged on the base and used for clamping the crucible, and the driving module is arranged on the base and used for driving the chuck to rotate. The driving module drives the chuck to rotate; the chuck comprises at least two clamping jaws, a protective layer is arranged on the face, used for making contact with a crucible, of each clamping jaw, and the protective layers are made of elastomer materials.

Description

Technical Field

[0001] The utility model belongs to the technical field of crucible grinding, and more specifically relates to a crucible clamping and rotating device. Background Art

[0002] In the semiconductor materials industry, boron nitride crucibles can be used as carriers or reaction containers, such as for supporting and sintering silicon wafers.

[0003] For the production of boron nitride crucibles, the current process uses high-temperature and high-pressure deposition to form them. After the crucible is cooled and removed, the inner wall of the crucible often has lamination or delamination. At this time, the inner wall of the crucible needs to be repaired and polished. Currently, manual polishing is mostly used on the market. One hand holds the crucible and the other hand rubs the inner wall of the crucible with sandpaper. This method consumes a lot of time and has low efficiency. In addition, the uniformity of the grinding of the inner wall of the crucible is poor and the requirements for manual operation are high. Utility Model Content

[0004] The main purpose of the utility model is to provide a crucible clamping and rotating device, which is designed to clamp the crucible and rotate it autonomously, thereby assisting in the polishing of the crucible, reducing the burden on workers and improving efficiency.

[0005] According to a first aspect of the present invention, a crucible clamping and rotating device is provided, comprising a machine base, a chuck and a driving module, wherein the chuck is rotatably arranged on the machine base for clamping the crucible, and the driving module drives the chuck to rotate;

[0006] The chuck comprises at least two claws, and a side of the claws for contacting the crucible is provided with a protective layer, and the protective layer is made of an elastomer material.

[0007] In the above-mentioned crucible clamping and rotating device, the chuck includes four clamping claws.

[0008] In the above-mentioned crucible clamping and rotating device, the cross section of the clamping claw in a direction perpendicular to the rotation axis of the chuck is arc-shaped.

[0009] In the above-mentioned crucible clamping and rotating device, the clamping claws are provided with weight-reducing holes.

[0010] In the above-mentioned crucible clamping and rotating device, the protective layer is made of PU soft rubber material.

[0011] In the above-mentioned crucible clamping and rotating device, a rotating shaft is rotatably provided on the machine base, one end of the rotating shaft is fixedly connected to the chuck, and the other end of the rotating shaft is transmission-connected to the driving module.

[0012] In the above-mentioned crucible clamping and rotating device, the driving module includes a driving motor, a driving pulley is provided on the output shaft of the driving motor, a driven pulley is provided on the rotating shaft, and the driving pulley and the driven pulley are connected by a synchronous belt transmission.

[0013] In the above-mentioned crucible clamping and rotating device, the machine base includes a vertically arranged vertical plate, two supporting plates are arranged at intervals in the horizontal direction on one side of the vertical plate, and the bottom of the supporting plate is flush with the bottom of the vertical plate.

[0014] In the above-mentioned crucible clamping and rotating device, the rotating shaft passes through the vertical plate and is rotatably connected to the vertical plate. The vertical plate separates the chuck and the driven pulley. The chuck is located on the side of the vertical plate facing away from the support plate.

[0015] In the above-mentioned crucible clamping and rotating device, a clearance gap for evading the driving motor is provided on the vertical plate, and the clearance gap is located below the rotating shaft.

[0016] One of the above technical solutions of the utility model has at least one of the following advantages or beneficial effects:

[0017] In the present invention, a chuck is provided to clamp the crucible. At the same time, the chuck can rotate under the drive of the driving module. Therefore, the chuck can rotate with the crucible, so that the crucible can rotate continuously. The worker only needs to hold the grinding head in contact with the inner wall of the crucible, which is more convenient, has low operation difficulty, and relatively high grinding efficiency. Moreover, a protective layer is provided on the contact surface of the clamping claw, and the protective layer is made of an elastomeric material, which can protect the crucible and prevent the outer wall of the crucible from being damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments;

[0019] Figure 1 It is a structural diagram of the first embodiment of the utility model;

[0020] Figure 2 It is another structural schematic diagram of the first embodiment of the present utility model.

[0021] Among them, the reference numerals of each figure are:

[0022] 1. Machine base; 11. Vertical plate; 12. Support plate; 13. Avoidance gap; 2. Chuck; 21. Clamping claw; 22. Protective layer; 23. Weight reduction hole; 3. Drive module; 31. Drive motor; 32. Driving pulley; 33. Driven pulley; 34. Synchronous belt; 4. Rotating shaft. DETAILED DESCRIPTION

[0023] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be understood as limiting the present invention.

[0024] The following disclosure provides many different embodiments or examples for implementing different solutions of the present invention.

[0025] Reference Figures 1 to 2 As shown, a crucible clamping and rotating device includes a base 1, a chuck 2 and a drive module 3. The chuck 2 is rotatably arranged on the base 1 for clamping the crucible, and the drive module 3 drives the chuck 2 to rotate; the chuck 2 can rotate with the crucible, so that the crucible can rotate continuously. The worker only needs to hold the grinding head to contact the inner wall of the crucible, which is more convenient, has low operation difficulty, and is relatively efficient.

[0026] The chuck 2 includes at least two claws 21, which cooperate to clamp the crucible. The side of the claws 21 used to contact the crucible is provided with a protective layer 22, which is made of an elastomer material and can protect the crucible and prevent the outer wall of the crucible from being damaged.

[0027] In this embodiment, the chuck 2 includes four claws 21. The chuck 2 can be manually operated to allow the four claws 21 to gather or spread, thereby clamping or releasing the crucible. The four claws 21 clamp the crucible more stably.

[0028] In this embodiment, the cross section of the clamping claw 21 in the direction perpendicular to the rotation axis of the chuck 2 is arc-shaped, which can increase the contact area between the clamping claw 21 and the outer wall of the crucible and ensure that the crucible will not fall off after being clamped.

[0029] In this embodiment, a weight-reducing hole 23 is provided on the clamping claw 21, which can reduce the weight of the clamping claw 21. When the chuck 2 rotates, the burden is small and it is relatively stable; the weight-reducing hole 23 is rectangular, making the clamping claw 21 as hollow as possible, but does not affect the contact between the clamping claw 21 and the crucible.

[0030] In this embodiment, the protective layer 22 is made of PU soft rubber material and has a certain elasticity. It can rely on the elastic force to press the crucible, thereby protecting the outer wall of the crucible and further preventing the crucible from falling off.

[0031] In some other embodiments, the protective layer 22 may be rubber or sponge.

[0032] In this embodiment, a rotating shaft 4 is rotatably provided on the machine base 1, one end of the rotating shaft 4 is fixedly connected to the chuck 2, and the other end of the rotating shaft 4 is transmission-connected to the driving module 3. The rotating shaft 4 supports the rotation of the chuck 2, which facilitates the connection of the driving module 3.

[0033] In this embodiment, the driving module 3 includes a driving motor 31, a driving pulley 32 is provided on the output shaft of the driving motor 31, and a driven pulley 33 is provided on the rotating shaft 4. The driving pulley 32 and the driven pulley 33 are connected through a synchronous belt 34. The output shaft of the driving motor 31 rotates, driving the driving pulley 32 to rotate, and then the synchronous belt 34 moves. The synchronous belt 34 drives the driven pulley 33 to rotate, which can drive the rotating shaft 4 to rotate, and the rotating shaft 4 then drives the chuck 2 to rotate.

[0034] Specifically, the machine base 1 includes a vertically arranged riser 11, with two support plates 12 arranged horizontally at intervals on one side of the riser 11. The bottom of the support plate 12 is flush with the bottom of the riser 11. Both the support plate 12 and the riser 11 can contact the table surface, thereby allowing the machine base 1 to stand upright.

[0035] The rotating shaft 4 is passed through the vertical plate 11 and is rotatably connected to the vertical plate 11. The vertical plate 11 separates the chuck 2 and the driven pulley 33. The chuck 2 is located on the side of the vertical plate 11 facing away from the support plate 12. In this way, the transmission structures such as the driven pulley 33, the driving pulley 32 and the synchronous belt 34 can be located between the two support plates 12, which can prevent the transmission structure from being hit when the device is running. This side of the chuck 2 is not blocked by the support plate 12, and the crucible can be easily disassembled and assembled.

[0036] In this embodiment, a clearance gap 13 is provided on the vertical plate 11 for accommodating the drive motor 31. The clearance gap 13 is located below the rotating shaft 4. In order to save space, the rotating shaft 4 and the drive motor 31 are arranged up and down. At the same time, due to the clearance gap 13, the drive motor 31 can pass through the vertical plate 11, so that the drive motor 31 can be located directly below the rotating shaft 4, further saving space.

[0037] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A crucible clamping and rotating device, characterized in that: It includes a machine base, a chuck and a driving module, wherein the chuck is rotatably arranged on the machine base for clamping the crucible, and the driving module drives the chuck to rotate; The chuck comprises at least two claws, and a side of the claws for contacting the crucible is provided with a protective layer, and the protective layer is made of an elastomer material.

2. The crucible clamping and rotating device according to claim 1, characterized in that: The chuck includes four jaws.

3. The crucible clamping and rotating device according to claim 1 or 2, characterized in that: The cross section of the clamping claw in a direction perpendicular to the rotation axis of the chuck is arc-shaped.

4. The crucible clamping and rotating device according to claim 1 or 2, characterized in that: The clamping claw is provided with a weight-reducing hole.

5. The crucible clamping and rotating device according to claim 1, characterized in that: The protective layer is made of PU soft rubber material.

6. The crucible clamping and rotating device according to claim 1, characterized in that: A rotating shaft is rotatably provided on the machine base, one end of the rotating shaft is fixedly connected to the chuck, and the other end of the rotating shaft is transmission-connected to the driving module.

7. The crucible clamping and rotating device according to claim 6, characterized in that: The driving module includes a driving motor, an output shaft of the driving motor is provided with a driving pulley, the rotating shaft is provided with a driven pulley, and the driving pulley and the driven pulley are connected through a synchronous belt transmission.

8. The crucible holding and rotating device according to claim 7, characterized in that: The machine base includes a vertically arranged vertical plate, two supporting plates are arranged at intervals in the horizontal direction on one side of the vertical plate, and the bottom of the supporting plate is flush with the bottom of the vertical plate.

9. The crucible holding and rotating device according to claim 8, characterized in that: The rotating shaft passes through the vertical plate and is rotatably connected to the vertical plate. The vertical plate separates the chuck and the driven pulley. The chuck is located on a side of the vertical plate facing away from the support plate.

10. The crucible holding and rotating device according to claim 9, characterized in that: The vertical plate is provided with a clearance gap for circumventing the driving motor, and the clearance gap is located below the rotating shaft.

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